JPH02140971U - - Google Patents

Info

Publication number
JPH02140971U
JPH02140971U JP4677689U JP4677689U JPH02140971U JP H02140971 U JPH02140971 U JP H02140971U JP 4677689 U JP4677689 U JP 4677689U JP 4677689 U JP4677689 U JP 4677689U JP H02140971 U JPH02140971 U JP H02140971U
Authority
JP
Japan
Prior art keywords
exhaust
pump
air
exhaust pump
decompression
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4677689U
Other languages
Japanese (ja)
Other versions
JP2520592Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989046776U priority Critical patent/JP2520592Y2/en
Publication of JPH02140971U publication Critical patent/JPH02140971U/ja
Application granted granted Critical
Publication of JP2520592Y2 publication Critical patent/JP2520592Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図及び第２図は本考案減圧排気装置の一つ
の実施例を説明するためのもので、第１図は構成
図、第２図は動作を示すタイムチヤート、第３図
は減圧排気装置の従来例を示す構成図である。 符号の説明、７……排気ポンプ、１５……空気
遮断バルブ。 Figures 1 and 2 are for explaining one embodiment of the decompression exhaust system of the present invention. Figure 1 is a configuration diagram, Figure 2 is a time chart showing the operation, and Figure 3 is a decompression exhaust system. FIG. 2 is a configuration diagram showing a conventional example. Explanation of symbols, 7... Exhaust pump, 15... Air cutoff valve.

Claims (1)

【実用新案登録請求の範囲】 排気ポンプの排気側に、停止時に排気側から排
気ポンプへの空気の逆流を防止する空気遮断バル
ブを、設けてなる ことを特徴とする減圧排気装置。[Scope of Claim for Utility Model Registration] A decompression exhaust device characterized in that an air cutoff valve is provided on the exhaust side of an exhaust pump to prevent backflow of air from the exhaust side to the exhaust pump when the exhaust pump is stopped.
JP1989046776U 1989-04-20 1989-04-20 Decompression exhaust device Expired - Lifetime JP2520592Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989046776U JP2520592Y2 (en) 1989-04-20 1989-04-20 Decompression exhaust device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989046776U JP2520592Y2 (en) 1989-04-20 1989-04-20 Decompression exhaust device

Publications (2)

Publication Number Publication Date
JPH02140971U true JPH02140971U (en) 1990-11-26
JP2520592Y2 JP2520592Y2 (en) 1996-12-18

Family

ID=31562144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989046776U Expired - Lifetime JP2520592Y2 (en) 1989-04-20 1989-04-20 Decompression exhaust device

Country Status (1)

Country Link
JP (1) JP2520592Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004183096A (en) * 2002-12-05 2004-07-02 Samsung Electronics Co Ltd Atomic layer deposition system that can prevent powder generation in exhaust path
JP2012057192A (en) * 2010-09-06 2012-03-22 Edwards Kk Backflow prevention system, and vacuum pump provided with the backflow prevention system
JP2018031570A (en) * 2016-08-26 2018-03-01 東京エレクトロン株式会社 SAFETY DEVICE, SAFETY SYSTEM, AND COMBUSTION AIDING DEVICE SAFETY METHOD

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024057U (en) * 1983-07-27 1985-02-19 日本電子株式会社 Exhaust equipment for electron microscopes, etc.
JPS63141893U (en) * 1987-03-10 1988-09-19
JPH01134782U (en) * 1988-03-07 1989-09-14

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024057U (en) * 1983-07-27 1985-02-19 日本電子株式会社 Exhaust equipment for electron microscopes, etc.
JPS63141893U (en) * 1987-03-10 1988-09-19
JPH01134782U (en) * 1988-03-07 1989-09-14

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004183096A (en) * 2002-12-05 2004-07-02 Samsung Electronics Co Ltd Atomic layer deposition system that can prevent powder generation in exhaust path
JP2012057192A (en) * 2010-09-06 2012-03-22 Edwards Kk Backflow prevention system, and vacuum pump provided with the backflow prevention system
JP2018031570A (en) * 2016-08-26 2018-03-01 東京エレクトロン株式会社 SAFETY DEVICE, SAFETY SYSTEM, AND COMBUSTION AIDING DEVICE SAFETY METHOD

Also Published As

Publication number Publication date
JP2520592Y2 (en) 1996-12-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term