JPH02140973U - - Google Patents
Info
- Publication number
- JPH02140973U JPH02140973U JP1989047059U JP4705989U JPH02140973U JP H02140973 U JPH02140973 U JP H02140973U JP 1989047059 U JP1989047059 U JP 1989047059U JP 4705989 U JP4705989 U JP 4705989U JP H02140973 U JPH02140973 U JP H02140973U
- Authority
- JP
- Japan
- Prior art keywords
- processing apparatus
- plasma processing
- sample holder
- sample
- heat pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989047059U JPH02140973U (lt) | 1989-04-21 | 1989-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989047059U JPH02140973U (lt) | 1989-04-21 | 1989-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140973U true JPH02140973U (lt) | 1990-11-26 |
Family
ID=31562662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989047059U Pending JPH02140973U (lt) | 1989-04-21 | 1989-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140973U (lt) |
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1989
- 1989-04-21 JP JP1989047059U patent/JPH02140973U/ja active Pending