JPH02146830U - - Google Patents
Info
- Publication number
- JPH02146830U JPH02146830U JP5463789U JP5463789U JPH02146830U JP H02146830 U JPH02146830 U JP H02146830U JP 5463789 U JP5463789 U JP 5463789U JP 5463789 U JP5463789 U JP 5463789U JP H02146830 U JPH02146830 U JP H02146830U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- hole
- light transmission
- transmission means
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は本考案に係る試料台の模式的断面図、
第２図は静電チヤツクを備えた従来の試料台の模
式的断面図である、
３……絶縁体、４……電極、９……試料、１３
……光伝達手段、１３ａ……開口部分、１３ｂ…
…貫通孔。
FIG. 1 is a schematic cross-sectional view of the sample stage according to the present invention,
FIG. 2 is a schematic cross-sectional view of a conventional sample stage equipped with an electrostatic chuck, 3...insulator, 4...electrode, 9...sample, 13
...Light transmission means, 13a...Opening portion, 13b...
...Through hole.
Claims (1)
孔が設けられていることを特徴とする試料台。[Claims for Utility Model Registration] A sample stand for holding a sample on its surface, characterized in that a through hole is provided in the surface and for mounting a light transmission means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5463789U JPH02146830U (en) | 1989-05-11 | 1989-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5463789U JPH02146830U (en) | 1989-05-11 | 1989-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146830U true JPH02146830U (en) | 1990-12-13 |
Family
ID=31576875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5463789U Pending JPH02146830U (en) | 1989-05-11 | 1989-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146830U (en) |
-
1989
- 1989-05-11 JP JP5463789U patent/JPH02146830U/ja active Pending