JPH0214802A - Production of oxide superconducting material - Google Patents
Production of oxide superconducting materialInfo
- Publication number
- JPH0214802A JPH0214802A JP63163685A JP16368588A JPH0214802A JP H0214802 A JPH0214802 A JP H0214802A JP 63163685 A JP63163685 A JP 63163685A JP 16368588 A JP16368588 A JP 16368588A JP H0214802 A JPH0214802 A JP H0214802A
- Authority
- JP
- Japan
- Prior art keywords
- hollow member
- electrodeposition
- powder
- layer
- superconducting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は、超電導マグネットの巻線用、あるいは電力輸
送線用などとして応用開発が進められている酸化物超電
導材の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a method for producing an oxide superconducting material, which is currently being developed for use in windings of superconducting magnets, power transmission lines, and the like.
「従来の゛技術J
近年相欠いで発見されている酸化物超電導体は、常電導
状態から超電導状態に遷移する臨界温度が極めて高いこ
とで知られている。この種の酸化物超電導体は、従来の
合金系超電導体あるいは金属間化合物系超電導体に比較
して臨界温度が極めて高く、一般式Y −B a−Cu
−0、B1−5 t−Ca−CuOlT I−Ca−B
a−Cu−0などで示される酸化物超電導体にあって
は、液体窒素温度を超える臨界温度を示すものとして注
目され、その応用開発が進められている。``Conventional Technology J'' Oxide superconductors, which have been discovered in recent years, are known to have an extremely high critical temperature at which they transition from a normal conducting state to a superconducting state.This type of oxide superconductor is The critical temperature is extremely high compared to conventional alloy-based superconductors or intermetallic compound-based superconductors, and the general formula Y -B a-Cu
-0, B1-5 t-Ca-CuOlT I-Ca-B
Oxide superconductors represented by a-Cu-0 and the like have attracted attention as having a critical temperature exceeding the liquid nitrogen temperature, and their application development is progressing.
ところで従来、金属あるいはセラミックスの基材上に酸
化物超電導膜を形成する方法上して、酸化物超電導体の
粉末にパインオイルなどの溶剤や有機バインダーを加え
て印刷用材料を作成し、この印刷用材料を基材上にスク
リーン印刷した後に焼成する方法が知られている。By the way, in the conventional method of forming an oxide superconducting film on a metal or ceramic substrate, a printing material is created by adding a solvent such as pine oil or an organic binder to oxide superconductor powder. A method is known in which a material for printing is screen printed on a substrate and then fired.
また、前記印刷用材料を製造する場合と同様な方法で塗
布液を作成し、この塗布液を基材表面にスプレー塗布す
る方法、あるいは、この塗布液に基材を浸漬して引き」
二げ、その表面に塗布液を形成した後に焼成する方法が
知られている。Alternatively, a coating solution may be prepared in the same manner as in the production of the printing material, and the coating solution may be sprayed onto the surface of the substrate, or the substrate may be immersed in this coating solution and then pulled.
A method is known in which a coating liquid is formed on the surface and then fired.
「発明が解決しようとする課題」
しかしながら前記スクリーン印刷法は、平板の表面や円
筒の外面などの単純な形状部分に適用することは可能で
あっても、線材の外周面やパイプの内周面などの曲率の
大きな部分を含む形状の基材、および、凹凸部分を有す
る複雑な形状の基材には適用できない問題があった。ま
た、スクリーン印刷法によって・形成できろ膜の厚さは
、200μm程度が限界であり、膜厚が200μm以上
の超電導厚膜の形成が困難な問題があった。"Problems to be Solved by the Invention" However, although the screen printing method can be applied to parts with simple shapes such as the surface of a flat plate or the outer surface of a cylinder, it cannot be applied to the outer peripheral surface of a wire rod or the inner peripheral surface of a pipe. There is a problem in that it cannot be applied to substrates with shapes that include portions with large curvature, such as, and substrates with complex shapes that have uneven portions. Further, the thickness of a film that can be formed by screen printing is limited to about 200 μm, and there is a problem in that it is difficult to form a thick superconducting film with a thickness of 200 μm or more.
更に、前述の塗布法および浸漬法において、複雑な形状
の基材を用いようとする場合、塗布液の粘性を高くする
と、基材の隅々まで塗布液を均一に塗布することが困難
であり、塗布液の粘性を低くすると、基材を塗布液から
引き出した際に塗布液が流れ落ちて基材表面に均一な塗
布ができないために、複雑な形状の基材には適用できな
い問題があった。更に、基材がパイプ状などであって、
特に、径が小さいか、あるいは、長尺の基材の場合、パ
イプの内面に均一に超電導層を形成することは困難であ
った。また、基材表面に塗布層を形成し、次いで熱処理
を施して塗布層に含まれる物質を焼成して酸化物超電導
層を生成する場合、塗布層に含まれるバインダーなどの
樹脂成分か燃焼するために、酸化物超電導層に亀裂を生
じたり、基材から剥離する問題があった。Furthermore, in the above-mentioned coating method and dipping method, when using a substrate with a complicated shape, if the viscosity of the coating liquid is increased, it becomes difficult to uniformly apply the coating liquid to every corner of the substrate. However, if the viscosity of the coating liquid was lowered, the coating liquid would run off when the substrate was pulled out of the coating liquid, making it impossible to apply the coating uniformly to the surface of the substrate, which caused the problem that it could not be applied to substrates with complex shapes. . Furthermore, the base material is pipe-shaped, etc.
In particular, in the case of a small diameter or long base material, it is difficult to uniformly form a superconducting layer on the inner surface of the pipe. In addition, when forming a coating layer on the surface of a base material and then performing heat treatment to bake the substances contained in the coating layer to generate an oxide superconducting layer, resin components such as binders contained in the coating layer may be burned. Another problem was that the oxide superconducting layer cracked or peeled off from the base material.
本発明は、前記課題を解決するためになされたもので、
パイプなどの中空部材の少なくとも内面に緻密で均一な
厚さの酸化物超電導層を短時間で形成することができ、
厚さの制御も容易であって、1mm程度の極めて厚い超
電導層を形成できる方法を提供することを目的とする。The present invention has been made to solve the above problems,
A dense and uniformly thick oxide superconducting layer can be formed in a short time on at least the inner surface of a hollow member such as a pipe,
It is an object of the present invention to provide a method that can easily control the thickness and form an extremely thick superconducting layer of about 1 mm.
「課題を解決するための手段」
本発明は前記課題を解決するために、少なくとも中空部
の内面に導電性を付与した中空部材を用い、前記中空部
に、絶縁材料からなるスペーサを1つ以上設置し、前記
スペーサに支持させて中空部の中心部を通過するように
電極を配するとともに、超電導粉末または超電導体の萌
駆体粉末を分散させた電着液を前記中空部材の内部に充
満させた状態で中空部材の導電部分と電極に通電して電
気泳動電着を行い、中空部材の内面に電着層を形成する
ととしに、この後に熱処理を施して中空部材の内面に、
焼結した酸化物超電導層を形成することを課題解決の手
段とした。"Means for Solving the Problems" In order to solve the problems described above, the present invention uses a hollow member in which at least the inner surface of the hollow part is made conductive, and in the hollow part, one or more spacers made of an insulating material are provided. The hollow member is filled with an electrodeposition liquid in which superconducting powder or superconductor precursor powder is dispersed. In this state, electricity is applied to the conductive part of the hollow member and the electrode to perform electrophoretic electrodeposition to form an electrodeposited layer on the inner surface of the hollow member, and then heat treatment is performed on the inner surface of the hollow member.
The solution was to form a sintered oxide superconducting layer.
「作用」
中空部材の導電部分に、電気泳動電着により電着層が形
成され、これを熱処理することにより酸化物超電導層が
生成する。泳動電着法によれば中空部材の内面などであ
っても厚さが均一で緻密な電着層が得られるので、均一
かつ緻密な酸化物超電導層が形成される。また、電着条
件を制御することで電着層を所望の厚さに調整できるの
で、使用目的に適合した厚さの酸化物超電導層が容易に
得られる。なお、中空部材の内部に電着液を満たし、中
空部の中心部を通過するように電極を配して電気泳動電
着を行うので中空部材の導電部分と電極との極間距離が
一定になり、均一な厚さの電着層が生成する。従ってこ
の電着層を焼成するならば、長尺のパイプなどの中空部
材であっても内面全体に緻密で均一な厚さの酸化物超電
導層が形成される。"Operation" An electrodeposited layer is formed on the conductive portion of the hollow member by electrophoretic electrodeposition, and an oxide superconducting layer is generated by heat-treating this. According to the electrophoretic electrodeposition method, a dense electrodeposited layer with a uniform thickness can be obtained even on the inner surface of a hollow member, so that a uniform and dense oxide superconducting layer is formed. Further, since the electrodeposition layer can be adjusted to a desired thickness by controlling the electrodeposition conditions, an oxide superconducting layer having a thickness suitable for the intended use can be easily obtained. Note that electrophoretic electrodeposition is performed by filling the interior of the hollow member with an electrodeposition liquid and arranging the electrode so as to pass through the center of the hollow part, so the distance between the conductive part of the hollow member and the electrode is constant. This results in an electrodeposited layer of uniform thickness. Therefore, if this electrodeposited layer is fired, a dense and uniformly thick oxide superconducting layer will be formed on the entire inner surface of a hollow member such as a long pipe.
以下に本発明を更に詳細に説明する。The present invention will be explained in more detail below.
第1図ないし第5図は、本発明方法により超電導材を製
造する例について説明するための図である。この例によ
る超電導材の製造方法では、まず、パイプ状の中空部材
lを電着槽2に満たした電着液3に浸し、電気泳動電着
を行ってその内周面と外周面に第3図に示すように電着
F?f!4.5を形成し、第3図に断面構造を示す超電
導素材6を作成する。1 to 5 are diagrams for explaining an example of manufacturing a superconducting material by the method of the present invention. In the method for producing a superconducting material according to this example, first, a pipe-shaped hollow member l is immersed in an electrodeposition liquid 3 filled in an electrodeposition tank 2, and electrophoretic electrodeposition is performed to coat the inner and outer peripheral surfaces with a third layer. As shown in the figure, electrodeposited F? f! 4.5 to create a superconducting material 6 whose cross-sectional structure is shown in FIG.
この何において使用される中空部材1の構成材料として
好ましくは、融点800℃以上で耐酸化性の良好な貴金
属あるいはT is T a−、Z r) Hf’sV
、Nb1W、Cu等の単体金属やCu−N i合金、C
u−A I系合金、N i−A I系合金、T i−V
系合金、モネルメタル、ステンレス、クロメル、アロメ
ル、カンタルなどからなるものが用いられ、更には、石
英ガラス、ジルコニア、YSZ、アルミナ、サファイア
、チタン酸ストロンチウムなどのチタン酸化合物、マグ
ネシア、酸化チタン等のセラミックス基材の少なくとも
内周面に、無電解メツキ法、スパッタリング法、イオン
ブレーティング法、真空蒸着法などの薄膜形成手段を用
いてA FCs N i、Cuなどの導電被覆を施した
バイブなどの中空部材が使用される。なお、中空部材l
の形状はパイプ状に限るものではなく、キャップなどの
有底円筒状の部材、あるいは、ブロック状の本体の内部
に複数の通路を形成した中空部材などを用いても良い。Preferably, the constituent material of the hollow member 1 used in any of the above is a noble metal having a melting point of 800° C. or higher and good oxidation resistance, or a noble metal having a melting point of 800° C. or higher and good oxidation resistance.
, Nb1W, single metals such as Cu, Cu-Ni alloy, C
u-A I alloy, N i-A I alloy, T i-V
metal alloys, monel metals, stainless steel, chromel, allomel, kanthal, etc. are used, as well as quartz glass, zirconia, YSZ, alumina, sapphire, titanate compounds such as strontium titanate, and ceramics such as magnesia and titanium oxide. A hollow space such as a vibrator in which a conductive coating such as AFCsNi or Cu is applied to at least the inner peripheral surface of the base material using a thin film forming method such as electroless plating method, sputtering method, ion blating method, or vacuum evaporation method. member is used. In addition, the hollow member l
The shape is not limited to a pipe shape, and a cylindrical member with a bottom such as a cap, or a hollow member having a plurality of passages formed inside a block-shaped main body may be used.
前記電着液3は、酸化物超電導粉末を分散媒に分散させ
たものが使用される。ここで用いる超電導粉末は、A
−B −Cu−0(ただしAはY、La、Ce。The electrodeposition liquid 3 used is one in which oxide superconducting powder is dispersed in a dispersion medium. The superconducting powder used here is A
-B -Cu-0 (A is Y, La, Ce.
Yb、Sc、Erなどの周期律表111a族元素の1種
以上またはBiを示し、BはBa、Sr、Caなどの周
期律表IIa族元素を示す)なる組成で代表される酸化
物超電導体の粉末、その前駆体粉末、あるいは、これら
の混合粉末などが用いられる。An oxide superconductor represented by the following composition: one or more elements of group 111a of the periodic table, such as Yb, Sc, and Er, or Bi, and B represents an element of group IIa of the periodic table, such as Ba, Sr, and Ca. powder, its precursor powder, or a mixed powder thereof is used.
この超電導粉末を作成する方法として、例えば、Y −
B a−Cu−0系の酸化物超電導体を用いる場合は、
Y x O3粉末とBaCO3粉末とCuO粉末をY:
Ba:Cu= I :2 :3 (モル比)となるよう
に均一に混合して混合粉末とし、次いでこの混合粉末を
大気中あるいは酸素雰囲気中において500〜1000
℃で仮焼して仮焼粉末とし、次にこの仮焼粉末に圧粉成
形→加熱−粉砕の一連の操作を1回以上繰り返し行って
超電導粉末を作成する粉末混合法が好適である。前記仮
焼粉末の焼成後に行う加熱は、酸素雰囲気中において、
800〜1000℃で1〜数十時間とすることが好まし
い。なお、B i−9r−Ca−Cu−0系の超電導体
を用いろ場合、例えばBiの酸化物粉末とCuの酸化物
粉末とCaの炭酸塩粉末とStの炭酸塩粉末をB it
s r:c a:Cu−1:1 :1 :2 (モル比
)となるように均一に混合して混合粉末とし、次いでこ
の混合粉末を大気中あるいは酸素雰囲気中において、7
50〜850℃で数分〜数十時間仮焼して仮焼粉末とし
、次いでこの仮焼粉末に、圧粉成形−加熱−粉砕の一連
の操作を1回あるいは2回以上繰り返し行う粉末混合法
が好適である。As a method for creating this superconducting powder, for example, Y-
When using B a-Cu-0 based oxide superconductor,
Y x O3 powder, BaCO3 powder and CuO powder:
Ba:Cu=I:2:3 (molar ratio) is uniformly mixed to form a mixed powder, and then this mixed powder is heated to a concentration of 500 to 1000 in the air or oxygen atmosphere.
Preferably, a powder mixing method is used in which a superconducting powder is produced by calcining the powder at a temperature of 0.degree. The heating performed after firing the calcined powder is performed in an oxygen atmosphere,
It is preferable to set it as 1 to several tens of hours at 800-1000 degreeC. In addition, when using a Bi-9r-Ca-Cu-0 system superconductor, for example, Bi oxide powder, Cu oxide powder, Ca carbonate powder, and St carbonate powder are used as Bi-9r-Ca-Cu-0 superconductors.
s r:ca:Cu-1:1:1:2 (molar ratio) is uniformly mixed to form a mixed powder, and then this mixed powder is placed in air or oxygen atmosphere,
A powder mixing method in which a calcined powder is obtained by calcining at 50 to 850°C for several minutes to several tens of hours, and then the calcined powder is subjected to a series of operations of compaction, heating, and pulverization once or twice or more. is suitable.
ところで、前記超電導粉末の作成方法は前記粉末混合法
に限定されることなく、共沈法やゾルゲル法を用いても
良い。また、電着液3中の超電導粉末の代わりに、上述
の仮焼粉末(前駆体粉末)を用いても良い。更に、ここ
で用いる超電導粉末は、粒径50μm以下のものが使用
され、特に粉末粒子の沈降を防止し、均一に分散させる
ために粒径30μm以下の粉末が好適に使用される。By the way, the method for producing the superconducting powder is not limited to the powder mixing method, and a coprecipitation method or a sol-gel method may be used. Further, instead of the superconducting powder in the electrodeposition liquid 3, the above-mentioned calcined powder (precursor powder) may be used. Furthermore, the superconducting powder used here has a particle size of 50 μm or less, and in particular, powder with a particle size of 30 μm or less is preferably used in order to prevent the powder particles from settling and to disperse them uniformly.
ところで、分散媒としては、アセトン、メチルエチルケ
トン、ホルムアミド、N−Nジメチルホルムアミド、イ
ソプロピルアルコール、ノルマルブチルアルコール、あ
るいは、ジエチルケトン、ジプロピルケトンなどを用い
ることが好ましい。By the way, as the dispersion medium, it is preferable to use acetone, methyl ethyl ketone, formamide, N--N dimethyl formamide, isopropyl alcohol, n-butyl alcohol, diethyl ketone, dipropyl ketone, or the like.
そして、この分散媒IQ中の酸化物超電導粉末の蛍は1
〜500gの範囲とすることが望ましい。The fireflies of the oxide superconducting powder in this dispersion medium IQ are 1
It is desirable to set it as the range of ~500g.
超電導粉末の量を5009/(以上とすると、基材表面
に超電導粉末が緻密かつ均一な状態で電着されなくなり
、また超電導粉末の量をIg/f!以下とすると電着効
率が悪くなる。また分散媒中に超電導粉末を分散させる
には、超音波攪拌を行うことが望ましく、更に分散媒中
に少量の水、ゼラチン、デンプン、電解質などを添加し
て攪拌操作を行っても良い。この際、分散媒に含まれる
水分量は5vo1.%以下、より好ましくは1 vol
、%以下に設定することが好ましい。前記分散媒中の水
分量か5vo1.%以下であると、水の電解によるガス
の発生が起こらず、また超電導粉末の分散状@し良好と
なる。水分量が5vo1.%以上であると、超電導粉末
の凝集が起こり、分散媒中に超電導粉末を均一に分散さ
せることができなくなる。なお、電着液3には、必要に
応じて酸化チタン等の酸化物超電導体の焼結助剤となる
材料が添加される。If the amount of superconducting powder is more than 5009/(), the superconducting powder will not be electrodeposited on the surface of the substrate in a dense and uniform state, and if the amount of superconducting powder is less than Ig/f!, the electrodeposition efficiency will deteriorate. Further, in order to disperse the superconducting powder in the dispersion medium, it is desirable to perform ultrasonic stirring, and it is also possible to add a small amount of water, gelatin, starch, electrolyte, etc. to the dispersion medium and perform the stirring operation. In this case, the amount of water contained in the dispersion medium is 5 vol.% or less, more preferably 1 vol.
, % or less. The amount of water in the dispersion medium is 5vol. % or less, no gas is generated due to electrolysis of water, and the superconducting powder becomes well dispersed. Water content is 5vol. % or more, agglomeration of the superconducting powder occurs and it becomes impossible to uniformly disperse the superconducting powder in the dispersion medium. Note that, if necessary, a material such as titanium oxide, which serves as a sintering aid for the oxide superconductor, is added to the electrodeposition liquid 3.
第1図に示す電気泳動装置によってパイプ状の中空部材
lの内外表面に電着層4を形成するには、まず、中空部
材lを電着液3に浸すとともに、この中空部材1に線状
の電極7を挿通する。また、中空部材Iの内部には複数
のスペーサ8を挿入しておく。これらのスペーサ8は、
第5図に示すように、中空部材1の内径より若干長い板
状体からなり、その長さ方向中央部には電極7を挿通可
能な大きさの支持孔8aが形成されている。このスペー
サ8は、樹脂、セラミックなどの絶縁材料、゛あるいは
金属板の表面を絶縁コーティングしたものなどから構成
されている。なお、スペーサ8の構成材料として具体的
なものを例示すると、ポリエチレン、塩化ビニル、アク
リル、ポリエステルなどの絶縁樹脂、あるいは、アルミ
ナ、石英、ジルコニア、マグネシア、ガラスなどのセラ
ミックなどである。また、スペーサ8の厚さは0.1〜
5mm程度が好ましい。これは、電極7と中空部材lの
接触による短絡を防止するスペーサとしての機能を安定
して発揮させるには0 、1 mm以上の厚さが必要で
あり、スペーサ8が中空部甘夏の内面と接触する部分に
は電着層が生成されないことを考慮すると5mm程度以
下の厚さが好ましいためである。In order to form an electrodeposited layer 4 on the inner and outer surfaces of a pipe-shaped hollow member l using the electrophoresis apparatus shown in FIG. Insert the electrode 7 of. Further, a plurality of spacers 8 are inserted into the hollow member I in advance. These spacers 8 are
As shown in FIG. 5, the hollow member 1 is made of a plate-shaped body slightly longer than the inner diameter thereof, and a support hole 8a having a size through which the electrode 7 can be inserted is formed in the central portion in the longitudinal direction. The spacer 8 is made of an insulating material such as resin or ceramic, or a metal plate whose surface is insulatingly coated. Note that specific examples of the constituent materials of the spacer 8 include insulating resins such as polyethylene, vinyl chloride, acrylic, and polyester, and ceramics such as alumina, quartz, zirconia, magnesia, and glass. Moreover, the thickness of the spacer 8 is 0.1~
Approximately 5 mm is preferable. This is because the spacer 8 needs to have a thickness of 0.1 mm or more in order to stably function as a spacer to prevent short circuits caused by contact between the electrode 7 and the hollow member l. This is because the thickness is preferably about 5 mm or less, considering that no electrodeposited layer is formed on the portion that comes into contact with the electrode.
前記各スペーサ8は、中空部材Iの長さ方向に沿って適
宜の間隔をあけ、各々の支持孔8aを中空部材lの中心
軸上に配置して中空部材1の内部の中空部に若干弾性変
形された状態で挿入固定されている。また、各中空部材
Iの支持孔8aを挿通して線状の電極7が中空部材lに
挿通されている。The spacers 8 are arranged at appropriate intervals along the length direction of the hollow member I, and each support hole 8a is arranged on the central axis of the hollow member l, so that the hollow part inside the hollow member 1 has some elasticity. It is inserted and fixed in a deformed state. Further, a linear electrode 7 is inserted through the support hole 8a of each hollow member I and inserted into the hollow member I.
この状態で中空部材lと電極7に電圧を印加する。この
電圧印加の際に、Y −B a−Cu−0系の超電導体
を生成させる場合であって、分散媒としてアセトン、メ
ヂルエチルケトン、ポルムアミド、N−Nジメチルホル
ムアミド、イソプロピルアルコール、ノルマルブチルア
ルコールを用いた場合は、中空部材1を陰極とし、電極
7を陽極にする一方、分散媒としてジエチルケトン、ジ
プロピルケトンを用いた場合は、中空部材1を陽極とし
、電極7を陰極として電気泳動電着を行うことにする。In this state, a voltage is applied to the hollow member 1 and the electrode 7. When applying this voltage, a Y-B a-Cu-0 type superconductor is generated, and the dispersion medium is acetone, methyl ethyl ketone, porumamide, N-N dimethylformamide, isopropyl alcohol, n-butyl When alcohol is used, the hollow member 1 is used as the cathode and the electrode 7 is used as the anode, while when diethyl ketone or dipropyl ketone is used as the dispersion medium, the hollow member 1 is used as the anode and the electrode 7 is used as the cathode. We will perform electrophoretic electrodeposition.
また、B i−S r−Ca−Cu−0系の超電導体を
生成させる場合であって、分散媒としてジメチルケトン
、N−Nジメチルホルムアミド、イソプロピルアルコー
ルなどを用いる場合は、中空部材1を陰極とし、電極7
を陽極にして電気泳動電着を行う。In addition, when producing a B i-S r-Ca-Cu-0 system superconductor and using dimethyl ketone, N-N dimethylformamide, isopropyl alcohol, etc. as a dispersion medium, the hollow member 1 is used as a cathode. and electrode 7
Perform electrophoretic electrodeposition using as an anode.
以上のような電気泳動電着では定電圧法、定電流法のい
ずれら可能であり、さらに電流波形は直流の他、中空部
材1が一時的にせよ陰極あるいば陽極となるようなパル
ス、交直重畳、断続などの電流波形とすることが可能で
ある。定電圧法を用いる場合にはIV以上の電圧を印加
すれば良く、また定電流密度法を用いる場合には電流密
度を1〜500μA/cm’の範囲とするのが望ましい
。なお、電極7としては、白金板、ステンレス板、炭素
電極など通常の電極材料を使用することができる。In the electrophoretic electrodeposition described above, either a constant voltage method or a constant current method is possible, and the current waveform can be a direct current, a pulse, or a pulse in which the hollow member 1 temporarily becomes a cathode or an anode. Current waveforms such as AC/DC superimposed and intermittent current waveforms are possible. When using the constant voltage method, it is sufficient to apply a voltage of IV or more, and when using the constant current density method, it is desirable that the current density is in the range of 1 to 500 μA/cm'. Note that as the electrode 7, ordinary electrode materials such as a platinum plate, a stainless steel plate, and a carbon electrode can be used.
前記のように、陽極あるいは陰極となる中空部材lと電
極7間に電圧を印加することにより、電着液3中に分散
している超電導粉末は帯電し、異なる極に帯電している
中空部材1の表面に電着される。そして中空部材lの内
周面と外周面には超電導粉末からなる緻密な電着層4.
5が形成され、第2図に示す超電導素材6が得られる。As mentioned above, by applying a voltage between the hollow member l, which becomes an anode or a cathode, and the electrode 7, the superconducting powder dispersed in the electrodeposition liquid 3 is charged, and the hollow members charged at different poles are charged. Electrodeposited on the surface of 1. Then, on the inner and outer peripheral surfaces of the hollow member l, a dense electrodeposited layer 4 made of superconducting powder is formed.
5 is formed, and a superconducting material 6 shown in FIG. 2 is obtained.
電着WI2内で所定の厚さの電着層4.5が形成された
ならば超電導素材6を電着槽2から引き上げ、次いで熱
風による乾燥処理を行って表面部分に残留する分散媒を
除去する。Once the electrodeposition layer 4.5 of a predetermined thickness is formed in the electrodeposition WI 2, the superconducting material 6 is pulled up from the electrodeposition tank 2 and then dried with hot air to remove the dispersion medium remaining on the surface. do.
次に、この超電導素材6に熱処理を施す。この熱処理は
、超電導素材6を大気中あるいは酸素雰囲気中において
、800〜1000℃で数分〜数IO時間加熱した後、
室温まで冷却することによって行われる。なお、Y −
B a−Cu−0系の酸化物超電導体を用いる場合は、
熱処理時に超電導素材6の内部に空気あるいはO,ガス
を送りながら熱処理することが好ましい。Next, this superconducting material 6 is subjected to heat treatment. In this heat treatment, the superconducting material 6 is heated at 800 to 1000°C for several minutes to several IO hours in the air or oxygen atmosphere, and then
This is done by cooling to room temperature. In addition, Y −
When using B a-Cu-0 based oxide superconductor,
During the heat treatment, it is preferable to perform the heat treatment while sending air, O, or gas into the inside of the superconducting material 6.
この熱処理により、中空部材Iの内外表面の電着層4,
5は焼結され、この部分に酸化物超電導層9.■0が形
成される。以上の各操作により、第4図に示すように内
周面と外周面に酸化物超電導層9.10が形成されたパ
イプ状の超電導材Aを得ることができる。この超電導材
Aは液体窒素あるいは液体ヘリウムなどの冷媒を用いて
臨界温度以下に冷却して使用することができる。そして
この冷却時に中空部材1の内部空間を冷媒の流通空間と
して利用することができるとともに、中空部材Iの内部
空間を水分を除去した雰囲気とするか、あるいは、内部
空間に0.ガスを送って酸化物超電導体の特性が劣化し
ないようにすること6できる。By this heat treatment, the electrodeposition layer 4 on the inner and outer surfaces of the hollow member I,
5 is sintered, and an oxide superconducting layer 9. ■0 is formed. Through the above operations, it is possible to obtain a pipe-shaped superconducting material A having oxide superconducting layers 9 and 10 formed on its inner and outer circumferential surfaces, as shown in FIG. 4. This superconducting material A can be used after being cooled to below a critical temperature using a coolant such as liquid nitrogen or liquid helium. During this cooling, the internal space of the hollow member 1 can be used as a refrigerant circulation space, and the internal space of the hollow member I can be made into an atmosphere free of moisture, or the internal space can be filled with zero water. It is possible to prevent the properties of the oxide superconductor from deteriorating by sending a gas.
以上のような方法で超電導材Aを製造するならば、電着
層4,5を焼結して酸化物超電導層9.10を生成した
ので、クラックや剥離部分などの欠陥部分を生じること
なく均一で緻密な酸化物超電導層9.10を有する超電
導材Aを得ることができる。また、中空部材lの内周面
と外周面に形成する電着層4.5は印加電圧と電着時間
を調節することで所望の値にすることができるので、所
望の厚さの酸化物超電導層9.10を生成することがで
きる。更に、電気泳動電着によれば、200μm以上の
厚さの電着層を容易に生成させることができるので厚い
超電導層を容易に得ることができる効果がある。ところ
で、酸化物超電導体の熱膨張率よりも大きな熱膨張率を
有する材料から中空基材lを形成した場合は、熱処理後
の冷却時に中空部材lが収縮する関係から、中空部材l
の内周面に生成された超電導層9には、圧縮応力が作用
し、超電導層9の密度が向上するために、より緻密な超
電導層9が生成される。If superconducting material A is manufactured using the method described above, since the electrodeposited layers 4 and 5 are sintered to form the oxide superconducting layer 9 and 10, defects such as cracks and peeled parts will not occur. A superconducting material A having a uniform and dense oxide superconducting layer 9.10 can be obtained. Furthermore, the electrodeposited layer 4.5 formed on the inner peripheral surface and the outer peripheral surface of the hollow member l can be set to a desired value by adjusting the applied voltage and electrodeposition time, so that the oxide layer 4.5 can be formed with a desired thickness. A superconducting layer 9.10 can be produced. Further, according to electrophoretic electrodeposition, an electrodeposited layer having a thickness of 200 μm or more can be easily produced, so that a thick superconducting layer can be easily obtained. By the way, if the hollow base material l is formed from a material having a coefficient of thermal expansion larger than that of the oxide superconductor, the hollow member l will shrink when cooled after heat treatment.
Compressive stress acts on the superconducting layer 9 generated on the inner circumferential surface of the superconducting layer 9, and the density of the superconducting layer 9 is improved, so that a denser superconducting layer 9 is generated.
なお、萌述の例においては板状のスペーサ8を用いたが
、スペーサの形状は中空体1に挿入可能で電極6を支持
できる形状であれば、板状に限るものではなく、例えば
、第5図に符号1!て示4゛ように十字状などに形成し
てム差し支えない。Although the plate-shaped spacer 8 was used in the example described in Moe, the shape of the spacer is not limited to a plate-shaped one as long as it can be inserted into the hollow body 1 and can support the electrode 6. Code 1 in figure 5! It may be formed into a cross shape or the like as shown in Figure 4.
ところで、第1図に示す装置を用い、コイル状の中空部
材の内周面に酸化物超電導層を形成することができる。Incidentally, an oxide superconducting layer can be formed on the inner peripheral surface of a coil-shaped hollow member using the apparatus shown in FIG.
この場合、パイプ状の中空部材の内部にスペーサと電極
を配した後に中空部材をコイル状に加工してコイルを作
成し、このコイルの外周面に絶縁樹脂をコーティングし
て内周面のみに導電性を付与し、内周面と電極7に電圧
を印加することによりコイルの内周面に電着層を形成し
、これを焼結することにより内周面に酸化物超電導層を
形成した中空コイルを製造することができる。In this case, spacers and electrodes are arranged inside a pipe-shaped hollow member, and then the hollow member is processed into a coil shape to create a coil.The outer circumferential surface of this coil is coated with insulating resin, and only the inner circumferential surface is conductive. By applying a voltage to the inner circumferential surface and the electrode 7, an electrodeposited layer is formed on the inner circumferential surface of the coil, and by sintering this, an oxide superconducting layer is formed on the inner circumferential surface. Coils can be manufactured.
第7図に示す装置は、本発明の実施に用いる装置の別の
例を示すものである。The apparatus shown in FIG. 7 shows another example of the apparatus used to implement the present invention.
この例の装置は、導電性を有するパイプ状の中空部材2
0の両端にゴムなどの樹脂からなる栓体21.21を着
脱自在に嵌め込み、各栓体21,21にT字状の流通管
22を取り付(」、各流通管22に開閉弁23を組み込
み、流通管22.22を液体循環ポンプPと補助タンク
Tに接続するとともに、流通管22.22と中空部材2
0を貫通させてワイヤ状の電極24を設け、中空部材2
0と電極24に電源26を接続した構造となっている。The device of this example includes a pipe-shaped hollow member 2 having electrical conductivity.
Plugs 21 and 21 made of resin such as rubber are removably fitted into both ends of the 0, and a T-shaped flow pipe 22 is attached to each of the plugs 21 and 21, and an on-off valve 23 is attached to each flow pipe 22. Assemble and connect the flow pipe 22.22 to the liquid circulation pump P and the auxiliary tank T, and also connect the flow pipe 22.22 and the hollow member 2.
A wire-shaped electrode 24 is provided by penetrating the hollow member 2.
0 and the electrode 24 are connected to a power source 26.
なお、第7図に符号27で示すものは、流通管22の一
端を閉じる樹脂製の栓体であり、この栓体27を貫通し
て中空部材20を挿通するように電極24が設けられて
いる。7 is a plug made of resin that closes one end of the flow pipe 22, and the electrode 24 is provided so as to pass through the plug 27 and into the hollow member 20. There is.
第7図に示す装置では、先の実施例で用いた電着液3を
中空部材20と流通管22.22と補助タンクTを介し
て循環ポンプPで循環させるとともに、電極24と中空
部材20に通電して電気泳動電着を行う。この電気泳動
電着により、中空部材20の内周面に電着層を形成する
ことができろ。In the apparatus shown in FIG. 7, the electrodeposition liquid 3 used in the previous embodiment is circulated by a circulation pump P via the hollow member 20, the flow pipe 22, 22, and the auxiliary tank T, and the electrode 24 and the hollow member Electrification is applied to perform electrophoretic electrodeposition. By this electrophoretic electrodeposition, an electrodeposition layer can be formed on the inner peripheral surface of the hollow member 20.
そしてこの電着層を先の実施例と同様に熱処理するなら
ば、第8図に示すように内周面に酸化物超電導層29を
有するパイプ状の酸化物超電導材Bを形成することがで
きる。If this electrodeposited layer is heat-treated in the same manner as in the previous example, a pipe-shaped oxide superconducting material B having an oxide superconducting layer 29 on the inner peripheral surface can be formed as shown in FIG. .
この例の装置を用いることで先に説明した例と同等の効
果が得られる。更に、中空部材20の中心軸に沿って電
極24を配置して電極24と中空部材20の内周面との
距離を同一にして電極間距離を一定にして電着している
ので、中空部材20が極めて長いものであってもその内
周面全体に緻密で均一な厚さの超電導層29を形成する
ことができる。また、補助タンクTに超電導粉末を逐次
補充しなから泳動電着を行うことにより、電着むらなど
を生じさせることなく長時間の処理ができるとともに、
パイプ状の中空部材20の内部に電着液3を流しながら
電着するので、中空部材20の内部の隅々に確実に電着
液を供給して電着できる効果がある。By using the device of this example, effects equivalent to those of the previously described example can be obtained. Furthermore, since the electrodes 24 are arranged along the central axis of the hollow member 20 so that the distance between the electrodes 24 and the inner circumferential surface of the hollow member 20 is the same, and the distance between the electrodes is constant, the electrodes are electrodeposited. Even if the superconducting layer 20 is extremely long, a dense superconducting layer 29 having a uniform thickness can be formed over the entire inner circumferential surface of the superconducting layer 20. In addition, by sequentially replenishing the auxiliary tank T with superconducting powder before electrophoretic electrodeposition, it is possible to perform the process for a long time without causing uneven electrodeposition.
Since electrodeposition is carried out while flowing the electrodeposition liquid 3 inside the pipe-shaped hollow member 20, there is an effect that the electrodeposition liquid can be reliably supplied to every corner of the inside of the hollow member 20 for electrodeposition.
なおまた、面記中空部材20に酸化物超電導層29を生
成した後に、ポリイミド樹脂などを溶剤に溶解した液を
中空部材■を介して循環し、酸化物超電導層29の表面
をポリイミド樹脂のコーティング層で覆うようにするこ
ともできる。Furthermore, after forming the oxide superconducting layer 29 in the hollow member 20, a solution containing polyimide resin or the like dissolved in a solvent is circulated through the hollow member (2) to coat the surface of the oxide superconducting layer 29 with the polyimide resin. It can also be covered with a layer.
このように酸化物超電導層29をコーティング層で覆う
ようにすると、Y −B a−Cu−0系の超電導層2
9では水分による超電導特性の劣化を阻止ずろことがで
き、初期特性を長期間維持することができるとともに、
超電導層29の剥離現象やクラックの発生を抑制するこ
とができる。By covering the oxide superconducting layer 29 with the coating layer in this way, the Y-B a-Cu-0 based superconducting layer 2
9 can prevent deterioration of superconducting properties due to moisture, maintain initial properties for a long period of time, and
It is possible to suppress the peeling phenomenon and the occurrence of cracks in the superconducting layer 29.
「実施例!」
Y +B atc LI30 Xなる組成の超電導酸化
物粉末をN−NジメチルホルムアミドIQに対して50
gの割合で分散させた電着液を用意するとともに、内径
5 mm、肉厚0 、5 m1l1%長さ1mのNi製
パイプを用意し、このパイプ中にアクリル製の棒状のス
ペーサを約3am間隔で配置し、スペーサ中心部の支持
孔に直径0.2mmのNi線電極を挿通した。"Example!" Superconducting oxide powder with the composition Y + B atc LI30
Prepare an electrodeposition liquid dispersed at a ratio of 1.5 g, and prepare a Ni pipe with an inner diameter of 5 mm, a wall thickness of 0.5 ml, 1%, and a length of 1 m. Inside this pipe, an acrylic rod-shaped spacer is placed about 3 am. Ni wire electrodes with a diameter of 0.2 mm were inserted into the support hole at the center of the spacer.
次いでこのパイプを第7図に示す中空部材20の代わり
に電着装置にセットして循環ポンプによってパイプの内
部に電着液を流しながら、パイプを陰極として300V
の電圧を2分間印加する直流定電圧電解を行ってパイプ
内面に電着層を形成した。Next, this pipe was set in an electrodeposition apparatus instead of the hollow member 20 shown in FIG. 7, and while the electrodeposition liquid was flowing inside the pipe with a circulation pump, a voltage of 300V was applied using the pipe as a cathode.
An electrodeposited layer was formed on the inner surface of the pipe by performing DC constant voltage electrolysis by applying a voltage of 2 minutes for 2 minutes.
電着終了後、パイプを乾燥させた後に、酸素ガス中にお
いて950℃で2時間加熱し、その後に400℃/時間
の割合で室温まで徐冷して酸化物超電導材を得た。After the electrodeposition was completed, the pipe was dried, heated at 950° C. for 2 hours in oxygen gas, and then slowly cooled to room temperature at a rate of 400° C./hour to obtain an oxide superconducting material.
このパイプ内面に形成された酸化物超電導層について、
パイプの長さ方向に沿って10カ所の部分を抽出して断
面の顕微鏡観察を行い、膜厚の測定を行うとともに臨界
温度(T c)の測定を行ったところ、膜厚は240±
30μmの均一な値を示し、Tcは91Kを示し、優秀
な酸化物超電導層であることを確認できた。Regarding the oxide superconducting layer formed on the inner surface of this pipe,
We extracted 10 parts along the length of the pipe, observed the cross section with a microscope, measured the film thickness, and measured the critical temperature (Tc), and found that the film thickness was 240±
It showed a uniform value of 30 μm and Tc of 91 K, confirming that it was an excellent oxide superconducting layer.
「実施例2」
実施例Iにおいて用いたNi製のパイプと同一形状で同
一材料からなるパイプにスペーサと電極を配置し、この
パイプを巻径5 cm、ピッチ1cmでコイル加工した
後に実施例Iと同等の条件で電着と焼成を行ってコイル
状の酸化物超電導材を得た。"Example 2" A spacer and an electrode were arranged on a pipe made of the same material and having the same shape as the Ni pipe used in Example I, and this pipe was processed into a coil with a winding diameter of 5 cm and a pitch of 1 cm. A coiled oxide superconducting material was obtained by electrodeposition and firing under the same conditions as above.
この酸化物超電導材の超電導層について実施例Iと同様
に膜厚を測定したところ、膜厚は230±35μmを示
し、均一な厚さの酸化物超電導層を生成できたことが明
らかになり、Tcは91Kを示し、優秀な酸化物超電導
層であることを確認できた。When the film thickness of the superconducting layer of this oxide superconducting material was measured in the same manner as in Example I, the film thickness was 230 ± 35 μm, indicating that an oxide superconducting layer with a uniform thickness could be produced. Tc was 91K, confirming that it was an excellent oxide superconducting layer.
「実施例3」
実施例1で用いたY −B a−Cu−0系の超電導粉
末の代わりにI3i:Sr:Ca:Cu= I :I
:I :2の組成を有する平均粒径6,3μmのBi系
の酸化物超電導粉末を用い、電解電圧を100Vに設定
し、焼結処理を大気中において860℃で12時間行う
とともに、その他の条件は実施例1と同等の条件でパイ
プ状の酸化物超電導材を製造した。"Example 3" I3i:Sr:Ca:Cu=I:I instead of the Y-Ba-Cu-0-based superconducting powder used in Example 1
Using Bi-based oxide superconducting powder with an average particle size of 6.3 μm and having a composition of :I:2, the electrolytic voltage was set at 100 V, and the sintering process was performed at 860°C in the atmosphere for 12 hours. A pipe-shaped oxide superconducting material was manufactured under the same conditions as in Example 1.
得られた酸化物超電導材の超電導層の厚さを測定したと
ころ、250±20μmを示し、均一な厚さに生成でき
ていることが判明するとともに、Tcは72Kを示した
。When the thickness of the superconducting layer of the obtained oxide superconducting material was measured, it was found to be 250±20 μm, indicating that it was formed to a uniform thickness, and the Tc was 72K.
「実施例4」
実施例2で用いたコイル状のパイプを用い、実施例3に
おいて用いたBi系の超電導粉末を用い、実施例3で行
った処理条件でコイル状の酸化物超電導材を製造した。"Example 4" A coiled oxide superconducting material was produced using the coiled pipe used in Example 2, the Bi-based superconducting powder used in Example 3, and the processing conditions performed in Example 3. did.
得られた酸化物超電導材の超電導層の厚さを測定したと
ころ、240±30μmを示し、T cは72Kを示し
た。When the thickness of the superconducting layer of the obtained oxide superconducting material was measured, it was found to be 240±30 μm, and T c was 72K.
「発明の効果」
以上説明したように本発明は、電気泳動電着により中空
部材の少なくとも内面に緻密な電着層を形成し、これに
熱処理を施して焼結した酸化物超電導層を形成させるの
で、焼結時の収縮などによるクラッタなどの欠陥部分の
ない緻密で均質な酸化物超電導層を有する超電導材を得
ることができる。更に、電気泳動電着により中空部材と
の密着力の高い電着層を形成し、これを焼結させるので
、電着条件を制御することによって超電導層の厚さを正
確に制御することができる。また、電着泳動電着によれ
ば2001t m以上の厚さの超電導層を短時間で形成
させることができ、製造効率も向上する効果がある。"Effects of the Invention" As explained above, the present invention forms a dense electrodeposited layer on at least the inner surface of a hollow member by electrophoretic electrodeposition, and heat-treats this to form a sintered oxide superconducting layer. Therefore, a superconducting material having a dense and homogeneous oxide superconducting layer free of defects such as clutter due to shrinkage during sintering can be obtained. Furthermore, since an electrodeposited layer with high adhesion to the hollow member is formed by electrophoretic electrodeposition and then sintered, the thickness of the superconducting layer can be precisely controlled by controlling the electrodeposition conditions. . Further, electrophoretic electrodeposition allows a superconducting layer with a thickness of 2001 tm or more to be formed in a short time, and has the effect of improving manufacturing efficiency.
更に、中空部材内に電着液を満たし、中空部の中心部に
配した電極との間で電着するので、電極間距離が均一に
なり、長尺で捕い中空部材でも内面全体に緻密で均一な
厚さの酸化物超電導層を生成させることができる効果を
奏する。Furthermore, since the hollow member is filled with electrodeposition liquid and electrodeposition is performed between the electrodes placed in the center of the hollow part, the distance between the electrodes becomes uniform, and even if the hollow member is caught in a long length, the entire inner surface of the hollow member is densely coated. It is possible to produce an oxide superconducting layer with a uniform thickness.
なお、得られた酸化物超電導材は、中空部材内に冷媒を
流通させて臨界温度以下に冷却して使用することができ
るとともに、中空部材内に酸化物超電導体の特性の劣化
を防止するガスなどを送りながら使用することもできる
。The obtained oxide superconducting material can be used by cooling it below the critical temperature by flowing a refrigerant inside the hollow member, and at the same time, it can be used by cooling it below the critical temperature by flowing a refrigerant inside the hollow member. It can also be used while sending etc.
第1図は本発明方法を実施するために使用4°る装置の
一例を示す構成図、第2図はスペーサの装ご状態を示す
断面図、第3図はiXX着合示す断面図、第4図は酸化
物超電導材を示す断面図、第5図はスペーサの装着状態
を示す側面図、第6図はスペーサの他の例を示す側面図
、第7図は本発明を実施するために用いる装置の他の例
を示す構成図、第8図は第7図に示す装置で製造した酸
化物超電導材を示す断面図である。
A、B・・・酸化物超電導材、
1.20・・・中空部材(パイプ)、
3・・・電着液、 4.5・・・電着層、7.
24・・・電極、 8.11・・・スペーサ、9.
10.29・・・超電導層。Fig. 1 is a configuration diagram showing an example of a 4° device used to carry out the method of the present invention, Fig. 2 is a sectional view showing the spacer mounting state, Fig. 3 is a sectional view showing iXX attachment, Figure 4 is a cross-sectional view showing the oxide superconducting material, Figure 5 is a side view showing how the spacer is attached, Figure 6 is a side view showing another example of the spacer, and Figure 7 is a diagram for carrying out the present invention. FIG. 8 is a block diagram showing another example of the apparatus used. FIG. 8 is a sectional view showing an oxide superconducting material manufactured with the apparatus shown in FIG. A, B... Oxide superconducting material, 1.20... Hollow member (pipe), 3... Electrodeposition liquid, 4.5... Electrodeposition layer, 7.
24... Electrode, 8.11... Spacer, 9.
10.29...Superconducting layer.
Claims (1)
用い、前記中空部に、絶縁材料からなるスペーサを1つ
以上設置し、前記スペーサに支持させて中空部の中心部
を通過するように電極を配置するとともに、超電導粉末
または超電導体の前駆体粉末を分散させた電着液を前記
中空部材の内部に充満させた状態で中空部材の導電部分
と電極に通電して電気泳動電着を行い、中空部材の内面
に電着層を形成するとともに、この後に熱処理を施して
中空部材の内面に、焼結した酸化物超電導層を形成する
ことを特徴とする酸化物超電導材の製造方法。A hollow member having conductivity imparted to at least the inner surface of the hollow part is used, one or more spacers made of an insulating material are installed in the hollow part, and an electrode is supported by the spacer and passes through the center of the hollow part. At the same time, the hollow member is filled with an electrodeposition liquid in which superconducting powder or superconductor precursor powder is dispersed, and electricity is applied to the conductive portion of the hollow member and the electrode to perform electrophoretic electrodeposition. A method for producing an oxide superconducting material, comprising forming an electrodeposited layer on the inner surface of the hollow member, and then performing heat treatment to form a sintered oxide superconducting layer on the inner surface of the hollow member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63163685A JP2583576B2 (en) | 1988-06-30 | 1988-06-30 | Manufacturing method of oxide superconducting material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63163685A JP2583576B2 (en) | 1988-06-30 | 1988-06-30 | Manufacturing method of oxide superconducting material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0214802A true JPH0214802A (en) | 1990-01-18 |
| JP2583576B2 JP2583576B2 (en) | 1997-02-19 |
Family
ID=15778652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63163685A Expired - Lifetime JP2583576B2 (en) | 1988-06-30 | 1988-06-30 | Manufacturing method of oxide superconducting material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2583576B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009275907A (en) * | 2008-05-16 | 2009-11-26 | Pubot Giken:Kk | Linear motion brake device |
-
1988
- 1988-06-30 JP JP63163685A patent/JP2583576B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009275907A (en) * | 2008-05-16 | 2009-11-26 | Pubot Giken:Kk | Linear motion brake device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2583576B2 (en) | 1997-02-19 |
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