JPH02148482U - - Google Patents
Info
- Publication number
- JPH02148482U JPH02148482U JP5836589U JP5836589U JPH02148482U JP H02148482 U JPH02148482 U JP H02148482U JP 5836589 U JP5836589 U JP 5836589U JP 5836589 U JP5836589 U JP 5836589U JP H02148482 U JPH02148482 U JP H02148482U
- Authority
- JP
- Japan
- Prior art keywords
- thermostatic chamber
- testing device
- state detector
- test
- semiconductor testing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000015556 catabolic process Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の実施例を示す半導体試験装置
ブロツク図、第２図は同外観図、第３図ａ，ｂは
同温度・湿度制御フローチヤート図である。
１……恒温槽、３……試料治具、４……ホスト
コンピユータ、５……試験装置本体、６……温度
検出器、７……湿度検出器、８……加熱器、９…
…冷却器、１０……除・加湿器。
FIG. 1 is a block diagram of a semiconductor testing apparatus showing an embodiment of the present invention, FIG. 2 is an external view of the same, and FIGS. 3a and 3b are temperature and humidity control flowcharts. 1... Constant temperature chamber, 3... Sample jig, 4... Host computer, 5... Test device main body, 6... Temperature detector, 7... Humidity detector, 8... Heater, 9...
...Cooler, 10...Dehumidifier/humidifier.
Claims (1)
壊試験を行う半導体試験装置において、 デバイスセツト部を有する恒温槽を備え、該恒
温槽に内部雰囲気状態検出器を設け、 上記内部雰囲気状態検出器の検出に伴い上記恒
温槽内部雰囲気状態を調節する制御手段を具備し
たことを特徴とする半導体試験装置。[Scope of Claim for Utility Model Registration] A semiconductor testing device that performs a latch-up test or an electrostatic breakdown test of semiconductor devices, which is equipped with a thermostatic chamber having a device setting section, and an internal atmosphere state detector provided in the thermostatic chamber, A semiconductor testing device characterized by comprising a control means for adjusting the internal atmospheric state of the thermostatic chamber in response to detection by a state detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5836589U JPH02148482U (en) | 1989-05-19 | 1989-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5836589U JPH02148482U (en) | 1989-05-19 | 1989-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02148482U true JPH02148482U (en) | 1990-12-17 |
Family
ID=31583908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5836589U Pending JPH02148482U (en) | 1989-05-19 | 1989-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02148482U (en) |
-
1989
- 1989-05-19 JP JP5836589U patent/JPH02148482U/ja active Pending
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