JPH02150185U - - Google Patents
Info
- Publication number
- JPH02150185U JPH02150185U JP5719289U JP5719289U JPH02150185U JP H02150185 U JPH02150185 U JP H02150185U JP 5719289 U JP5719289 U JP 5719289U JP 5719289 U JP5719289 U JP 5719289U JP H02150185 U JPH02150185 U JP H02150185U
- Authority
- JP
- Japan
- Prior art keywords
- article
- clamping
- clamps
- bringing
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5719289U JPH02150185U (2) | 1989-05-18 | 1989-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5719289U JPH02150185U (2) | 1989-05-18 | 1989-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02150185U true JPH02150185U (2) | 1990-12-25 |
Family
ID=31581684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5719289U Pending JPH02150185U (2) | 1989-05-18 | 1989-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02150185U (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020072105A (ja) * | 2018-10-29 | 2020-05-07 | キヤノントッキ株式会社 | 搬送装置、成膜装置、有機ｅｌ素子の製造システム、および有機ｅｌ素子の製造方法 |
-
1989
- 1989-05-18 JP JP5719289U patent/JPH02150185U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020072105A (ja) * | 2018-10-29 | 2020-05-07 | キヤノントッキ株式会社 | 搬送装置、成膜装置、有機ｅｌ素子の製造システム、および有機ｅｌ素子の製造方法 |
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