JPH0215228A - Optical fiber type fabry-perot resonator - Google Patents
Optical fiber type fabry-perot resonatorInfo
- Publication number
- JPH0215228A JPH0215228A JP16622888A JP16622888A JPH0215228A JP H0215228 A JPH0215228 A JP H0215228A JP 16622888 A JP16622888 A JP 16622888A JP 16622888 A JP16622888 A JP 16622888A JP H0215228 A JPH0215228 A JP H0215228A
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- piezoelectric element
- perot resonator
- fiber
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2252—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure in optical fibres
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0128—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-mechanical, magneto-mechanical, elasto-optic effects
- G02F1/0131—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-mechanical, magneto-mechanical, elasto-optic effects based on photo-elastic effects, e.g. mechanically induced birefringence
- G02F1/0134—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-mechanical, magneto-mechanical, elasto-optic effects based on photo-elastic effects, e.g. mechanically induced birefringence in optical waveguides
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Filters (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、印加電圧によって共振器長が変化し、透過光
の波長を可変とする掃引型の光ファイバ型ファブリペロ
−共振器の構造に関するものである。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to the structure of a swept type optical fiber type Fabry-Perot resonator whose resonator length changes depending on an applied voltage and which makes the wavelength of transmitted light variable. It is.
(従来の技術)
従来の光ファイバ型ファブリペロ−共振器の設計は、以
下のように行なわれている。まず、ファブリペロ−共振
器の性能を示すフィネスfは、反射鏡の反射率をRとす
ると、次式で表される。(Prior Art) A conventional optical fiber type Fabry-Perot resonator is designed as follows. First, the finesse f indicating the performance of the Fabry-Perot resonator is expressed by the following equation, where R is the reflectance of the reflecting mirror.
f−πF/2 ・・・(1)F
=4R/ (1−R) 2 ・・・(2)
ファブリペロ−共振器の周波数間隔Δfは、Δf=V/
2L ・・・(3)で表される。f-πF/2...(1)F
=4R/ (1-R) 2...(2)
The frequency interval Δf of the Fabry-Perot resonator is Δf=V/
2L...Represented by (3).
ここで、■は光ファイバ中の光の速度、Lは光ファイバ
長である。Here, ■ is the speed of light in the optical fiber, and L is the length of the optical fiber.
上記において、例えばフィネスfを100とするには反
射率Rを96.7%としなければならない。In the above, for example, in order to set the finesse f to 100, the reflectance R must be set to 96.7%.
また、波長1.30μmにおける光ファイバ中の光速V
は2.0078 X 101−m/ seeであるから
、周波数間隔Δfが10GHzの場合、光ファイバ長し
は10.039+nmとなる。従って、周波数間隔Δf
を10GHzオーダーで制御するためには、ファブリペ
ロ−共振器の長さをミクロン精度で構成する必要がある
。Also, the speed of light in an optical fiber at a wavelength of 1.30 μm V
is 2.0078 x 101-m/see, so when the frequency interval Δf is 10 GHz, the optical fiber length is 10.039+nm. Therefore, the frequency interval Δf
In order to control the frequency on the order of 10 GHz, it is necessary to configure the length of the Fabry-Perot resonator with micron precision.
しかし、光ファイバ型ファブリペロ−共振器の長さをミ
クロン精度で構成することは極めて困難である。However, it is extremely difficult to configure the length of an optical fiber type Fabry-Perot resonator with micron precision.
従来、この問題点を解決するため、第2図に示すように
、光ファイバ1の両端に、多層膜反射鏡2a、 2b
を蒸着したガラス板3a、3bを接着剤EAで接着、固
定し、かつ板状圧電素子4を接着剤EAで光ファイバ1
に固定した構成として、信号発生器5により、板状圧電
素子4に電圧を印加して曲げ変位を付与し、光ファイバ
1の長さを変化させて、所望の周波数間隔Δfを得てい
た。Conventionally, in order to solve this problem, as shown in FIG.
The glass plates 3a and 3b on which evaporated glass is bonded and fixed with adhesive EA, and the plate-shaped piezoelectric element 4 is attached to optical fiber 1 with adhesive EA.
In this configuration, the signal generator 5 applies a voltage to the plate-shaped piezoelectric element 4 to apply bending displacement, and the length of the optical fiber 1 is changed to obtain a desired frequency interval Δf.
(発明が解決しようとする課題)
しかしながら、上記構成による光ファイバ型ファブリペ
ロ−共振器によれば、変位量が小さいため、掃引周波数
を大きくすることができず、また、接着位置が2箇所あ
るので、長期的安定性に欠け、長期間の動作を保証でき
ないという問題点があった。(Problems to be Solved by the Invention) However, according to the optical fiber type Fabry-Perot resonator having the above configuration, the amount of displacement is small, so the sweep frequency cannot be increased, and there are two bonding positions. However, there were problems in that it lacked long-term stability and long-term operation could not be guaranteed.
さらに、光ファイバ型ファブリペロ−共振器の両端に光
ファイバを接続する場合、その両端面が反射面であるの
ため、ファブリペロ−共振器の光ファイバのコアの位置
を見い出すことが困難で、光ファイバ間の位置合わせと
、両者の光ファイバの固定が極めて困難であるという間
通点を有していた。Furthermore, when connecting optical fibers to both ends of an optical fiber type Fabry-Perot resonator, since both end surfaces are reflective surfaces, it is difficult to find the position of the core of the optical fiber of the Fabry-Perot resonator. However, it is extremely difficult to align the optical fibers between the two and to fix the optical fibers between the two.
上記問題点に鑑み、請求項(1)の目的は、掃引周波数
を大きくでき、しかも低い電力により高効率に長期間安
定して動作することのできる掃引型の光ファイバ型ファ
ブリペロ−共振器を提供することにある。In view of the above problems, the object of claim (1) is to provide a swept type optical fiber type Fabry-Perot resonator that can increase the sweep frequency and operate stably for a long period of time with high efficiency with low power consumption. It's about doing.
また、請求項(2)の目的は、請求項(1)の目的に加
えて、光ファイバ間の接続処理を行なうことなく長期間
安定に、かつ低損失に動作することのできる掃引型の光
ファイバ型ファブリペロ−共振器を提供することにある
。In addition to the object of claim (1), the object of claim (2) is to provide a sweep type optical fiber that can operate stably for a long period of time and with low loss without performing connection processing between optical fibers. An object of the present invention is to provide a fiber type Fabry-Perot resonator.
(課題を解決するための手段)
上記目的を達成するため、請求項(1)では、圧電素子
と、該圧電素子の電界印加方向とファイバ軸方向とが平
行となる如く前記圧電素子に固定された光ファイバと、
該光ファイバの両端面に配設、固定した多層膜反射鏡と
を備えた。(Means for Solving the Problems) In order to achieve the above object, in claim (1), a piezoelectric element is fixed to the piezoelectric element such that an electric field application direction of the piezoelectric element and a fiber axis direction are parallel to each other. optical fiber,
Multilayer film reflecting mirrors were arranged and fixed on both end faces of the optical fiber.
また、請求項(2)では、圧電素子と、該圧電素子の電
界印加方向とファイバ軸方向とが平行となる如く前記圧
電素子に固定された光ファイバと、該光ファイバに所定
間隔をおいてファイバ軸と直角に形成された二つの溝と
、各々の溝に挿入、固定された2個の多層膜反射鏡とを
備えた。Further, in claim (2), a piezoelectric element, an optical fiber fixed to the piezoelectric element such that the electric field application direction of the piezoelectric element and the fiber axis direction are parallel to each other, and a predetermined interval between the optical fibers. It has two grooves formed perpendicular to the fiber axis and two multilayer film reflectors inserted and fixed in each groove.
(作 用)
請求項(1)によれば、圧電素子に対して所定の電圧が
印加されると光ファイバのファイバ軸方向と平行に電界
が印加されてひずみが生じ、光ファイバ長が長く、即ち
、光ファイバ型ファブリペロ−共振器が長くなる。従っ
て、印加電圧の大きさが種々選定されて、光ファイバ型
ファブリペロ−共振器長が変化し、所望の周波数間隔が
得られることになる。(Function) According to claim (1), when a predetermined voltage is applied to the piezoelectric element, an electric field is applied in parallel to the fiber axis direction of the optical fiber, causing strain, and the length of the optical fiber is increased. That is, the optical fiber type Fabry-Perot resonator becomes longer. Therefore, by selecting various magnitudes of the applied voltage, the length of the optical fiber type Fabry-Perot resonator can be changed, and a desired frequency interval can be obtained.
また請求項(2)によれば、請求項(1)の作用に加え
、当該ファブリペロ−共振器の光ファイバと外部の光フ
ァイバとの光学的接続が自動的に完了する。According to claim (2), in addition to the effect of claim (1), the optical connection between the optical fiber of the Fabry-Perot resonator and the external optical fiber is automatically completed.
(実施例)
第1図は本発明による掃引型の光ファイバ型ファブリペ
ロ−共振器の第1の実施例を示すもので、第1図(a)
はその縦断側面図、第1図(b)は光ファイバの軸と直
角方向における断面図である。図中、10は圧電素子1
0aが10個積層された積層型圧電素子で、各圧電素子
10a間には後述する光ファイバ13の軸方向に電界が
印加されるように電極Tが配設しである。lla、ll
bは無電極のダミイの圧電磁器で、積層型圧電素子10
の両端にそれぞれ接着されている。12は積層型圧電素
子10と圧電磁器11a及びllbに亘って直線状に形
成された溝で、後述する光ファイバ13の直径とほぼ同
程度の幅を有する。13はカットオフ波長1,12μm
の単一モード光ファイバ(以下、単に光ファイバと称す
)、13aは光ファイバ13のコア、13bは光ファイ
バ]3のクラッドで、光ファイバ13は前記溝12に挿
入され、この溝12にエポキシ系接着剤EAにより固定
されている。14a、14bは波長1.307zmにお
ける透過率0.5%の多層膜反射鏡で、光ファイバ]3
の両端面から圧電磁器11a、llbのそれぞれの両端
面に亘って、蒸着により形成されている。15は電極T
に電圧を印加する信号発生器である。(Embodiment) FIG. 1 shows a first embodiment of a swept type optical fiber type Fabry-Perot resonator according to the present invention.
1 is a longitudinal side view thereof, and FIG. 1(b) is a sectional view taken in a direction perpendicular to the axis of the optical fiber. In the figure, 10 is a piezoelectric element 1
The piezoelectric element 10a is a laminated piezoelectric element in which ten 0a are stacked, and an electrode T is disposed between each piezoelectric element 10a so that an electric field is applied in the axial direction of an optical fiber 13, which will be described later. lla, ll
b is a dummy piezoelectric ceramic with no electrode, and a laminated piezoelectric element 10
are glued to both ends. Reference numeral 12 denotes a groove formed in a straight line across the laminated piezoelectric element 10 and the piezoelectric ceramics 11a and llb, and has a width approximately equal to the diameter of an optical fiber 13, which will be described later. 13 is the cutoff wavelength 1.12μm
A single mode optical fiber (hereinafter simply referred to as an optical fiber), 13a is the core of the optical fiber 13, 13b is the cladding of the optical fiber]3, the optical fiber 13 is inserted into the groove 12, and the groove 12 is filled with epoxy. It is fixed with adhesive EA. 14a and 14b are multilayer reflective mirrors with a transmittance of 0.5% at a wavelength of 1.307 zm, and are optical fibers] 3
It is formed by vapor deposition from both end faces of the piezoelectric ceramics 11a and llb to both end faces of each of the piezoelectric ceramics 11a and llb. 15 is electrode T
It is a signal generator that applies voltage to the
次に、上記構成を有する光ファイバ型ファブリペロ−共
振器の作製方法及びその動作を説明する。Next, a method for manufacturing an optical fiber type Fabry-Perot resonator having the above configuration and its operation will be explained.
まず、ダミイの圧電磁器11 a、 (1l b)の
端部から積層型圧電素子10を介してダミイの圧電磁器
11b(lla)の端部に至る、光ファイバ13の直径
とほぼ同程度の直径の溝12をダイシングにより形成し
、この溝12に光ファイバ13を挿入し、エポキシ系接
着剤EAで固定する。First, a diameter that is approximately the same as the diameter of the optical fiber 13 is connected from the end of the dummy piezoelectric ceramic 11a, (1lb) to the end of the dummy piezoelectric ceramic 11b (lla) via the laminated piezoelectric element 10. A groove 12 is formed by dicing, and an optical fiber 13 is inserted into this groove 12 and fixed with an epoxy adhesive EA.
続いて、光ファイバ13の長さが10 、03 mmと
なるように光ファイバ13の両端をダミイの圧電磁器1
1a、llbと共に研磨後、波長1..30μmにおけ
る透過率0.5%の多層膜反射鏡14a、:l−4bを
、蒸着により形成して、作製か完了する。Next, both ends of the optical fiber 13 were connected to dummy piezoelectric ceramics 1 so that the length of the optical fiber 13 was 10.03 mm.
After polishing with 1a and llb, wavelength 1. .. Multilayer film reflecting mirrors 14a, :l-4b having a transmittance of 0.5% at 30 μm are formed by vapor deposition to complete the fabrication.
このようにして作製された光ファイバ型ファブリペロ−
共振器の各電極Tに信号発生器]5により電圧を印加す
ると、光ファイバ千3の軸方向と平行に電界が印加され
て圧電効果によってひずみが生じ、これにより、光ファ
イバ13の長さか長く、即ち、ファブリペロ−共振器長
が長くなる。Optical fiber type Fabry-Perot fabricated in this way
When a voltage is applied to each electrode T of the resonator by the signal generator] 5, an electric field is applied parallel to the axial direction of the optical fiber 13, causing distortion due to the piezoelectric effect, which causes the length of the optical fiber 13 to increase. , that is, the Fabry-Perot cavity length becomes longer.
従って、水弟1の実施例によれば、信号発生器15によ
る印加電圧の大きさを変化させることにより、光ファイ
バ型ファブリペロ−共振器長を種々選定でき、所望の周
波数間隔を容易かつ安定して、しかも低電力で得ること
かできる。また、光ファイバ]3は積層型圧電素子10
及び圧電磁器11a、llbに亘って形成された溝12
内に固定されているので、長期的に安定した動作が可能
である。Therefore, according to the embodiment of Mizui 1, by changing the magnitude of the voltage applied by the signal generator 15, various lengths of the optical fiber type Fabry-Perot resonator can be selected, and the desired frequency interval can be easily and stably set. Moreover, it can be obtained with low power consumption. In addition, the optical fiber] 3 is a laminated piezoelectric element 10
and a groove 12 formed across the piezoelectric ceramics 11a and llb.
Since it is fixed inside, stable operation is possible over a long period of time.
実際、水弟1の実施例によるファブリペロ−共振器の両
端に、光ファイバ13と同一構造パラメータを有する光
ファイバを、He−Neレーサで軸合わせを行なって接
続し、波長1.30μmのDFB半導体レーザて711
11定した結果、信号発生器15による電極Tへの印加
電圧が零の場合には、周波数間隔Δfが10GHzでフ
ィネスfは300を得ることができ、摘入損失は0.2
dBであった。また、信号発生器15により電極Tに±
100■の電圧を印加した結果、±2 M Hzの周波
数変位を得ることができた。In fact, an optical fiber having the same structural parameters as the optical fiber 13 was connected to both ends of the Fabry-Perot resonator according to the embodiment of Mizui 1, with the axes aligned using a He-Ne laser, and a DFB semiconductor with a wavelength of 1.30 μm was connected. Laser 711
11, when the voltage applied to the electrode T by the signal generator 15 is zero, a finesse f of 300 can be obtained with a frequency interval Δf of 10 GHz, and a pruning loss of 0.2.
It was dB. In addition, the signal generator 15 applies ± to the electrode T.
As a result of applying a voltage of 100 μ, it was possible to obtain a frequency shift of ±2 MHz.
第3図は、本発明による光ファイバ型ファブリペロ−共
振器の第2の実施例を示す縦断側面図である。水弟2の
実施例と前記第1の実施例の異なる点は、光ファイバ1
3の両端面及び圧電磁器11、a 1.1bの端面に
多層膜反射膜を蒸着して形成する代わりに、波長1.3
0μmにおける透過率0.5%、厚さ100μmの薄片
ガラス多層膜反射鏡16a、16bをエポキシ系接着剤
EAにより、接着、固定したことにある。FIG. 3 is a longitudinal sectional side view showing a second embodiment of the optical fiber type Fabry-Perot resonator according to the present invention. The difference between the second embodiment and the first embodiment is that the optical fiber 1
3 and the end surfaces of the piezoelectric ceramics 11, a 1.1b, a multilayer reflective film is formed by vapor deposition.
Thin glass multilayer mirrors 16a and 16b having a transmittance of 0.5% at 0 μm and a thickness of 100 μm are bonded and fixed using an epoxy adhesive EA.
このような構成を有する水弟2の実施例の光ファイバ型
ファブリペロ−共振器の両端に、光ファイバ13と同一
構造パラメータを有する光ファイバを軸合わせを行なっ
て接続し、波長1,30μmのDFB半導体レーザでf
f1ll定した結果、信号発生器]5による電極Tへの
印加電圧か零の場合には、周波数間隔Δfが10GHz
でフィネスfは100を得ることができ、挿入損失は1
、1dBであった。Optical fibers having the same structural parameters as the optical fiber 13 are connected to both ends of the optical fiber type Fabry-Perot resonator of the example of Sui-Tei 2 having such a configuration, with their axes aligned, and a DFB with a wavelength of 1.30 μm is connected. f with semiconductor laser
As a result of determining f1ll, if the voltage applied to the electrode T by the signal generator]5 is zero, the frequency interval Δf is 10 GHz.
The finesse f can be obtained as 100, and the insertion loss is 1.
, 1 dB.
また、信号発生器15により電極Tに±100vの電圧
を印加した結果、前記第1の実施例と同様に、±2MH
zの周波数変位を得ることかできた。Further, as a result of applying a voltage of ±100 V to the electrode T by the signal generator 15, as in the first embodiment, ±2 MH
We were able to obtain the frequency displacement of z.
第4図は、本発明による光ファイバ型ファブリペロ−共
振器の第3の実施例を示す縦断側面図である。図中、2
0は圧電素子20aか6個積層された積層型圧電素子で
、各圧電素子2Oa間には、後述する光ファイバ23の
軸方向に平行に電界か印加されるように電極Tを配設し
ている。2]a。FIG. 4 is a longitudinal sectional side view showing a third embodiment of the optical fiber type Fabry-Perot resonator according to the present invention. In the figure, 2
0 is a piezoelectric element 20a or a laminated piezoelectric element in which six piezoelectric elements 20a are laminated, and an electrode T is arranged between each piezoelectric element 2Oa so that an electric field is applied parallel to the axial direction of an optical fiber 23, which will be described later. There is. 2] a.
21bは無電極のダミイの圧電磁器で、積層型圧電素子
20の両端に接着されている。22は積層型圧電素子2
0と圧電磁器21a及び21bに亘って直線状に形成さ
れた溝で、後述する光ファイバ13の直径とほぼ同程度
の幅を有する。23はカットオフ波長1.12μmの単
一モード光ファイバ(以下、単に光ファイバと称す)、
23aは光ファイバ23のコア、23bは光ファイバ2
3のクラッド、23cは光ファイバ23の被覆である。Reference numeral 21b denotes a dummy piezoelectric ceramic without an electrode, which is bonded to both ends of the laminated piezoelectric element 20. 22 is a laminated piezoelectric element 2
0 and piezoelectric ceramics 21a and 21b, and has a width approximately equal to the diameter of an optical fiber 13, which will be described later. 23 is a single mode optical fiber with a cutoff wavelength of 1.12 μm (hereinafter simply referred to as optical fiber);
23a is the core of the optical fiber 23, 23b is the optical fiber 2
The clad 23c of No. 3 is a coating for the optical fiber 23.
光ファイバ23の被覆23cを除去した部分が前記溝2
2に挿入され、この溝22にエポキシ系接着剤EAによ
り固定されている。24a、24bは圧電磁器21a、
21bに光ファイバ23の軸方向と直角に所定間隔、例
えば10ynmをおいて形成された溝で、幅は43μm
1深さは1龍に設定されている。25a、25bは波長
1.30μmにおける透過率0.5%、厚さ40μmの
薄片ガラスからなる多層膜反射鏡で、前記溝24a、2
4bの各々に反射面が対向するように挿入され、エポキ
シ系接着剤EAにより溝24 a、24bに固定されて
いる。26は電極Tに電圧を印加する信号発生器である
。The portion of the optical fiber 23 from which the coating 23c is removed is the groove 2.
2, and is fixed in this groove 22 with an epoxy adhesive EA. 24a and 24b are piezoelectric ceramics 21a,
Grooves are formed in the optical fiber 21b at predetermined intervals, for example, 10 ynm, perpendicular to the axial direction of the optical fiber 23, and the width is 43 μm.
1 depth is set to 1 dragon. 25a and 25b are multilayer film reflecting mirrors made of thin glass having a transmittance of 0.5% at a wavelength of 1.30 μm and a thickness of 40 μm;
The reflecting surfaces are inserted into each of the grooves 24a and 24b so as to face each other, and fixed to the grooves 24a and 24b with an epoxy adhesive EA. 26 is a signal generator that applies a voltage to the electrode T.
次に、上記構成を有する光ファイバ型ファブリペロー共
振器の作製方法について説明する。Next, a method for manufacturing an optical fiber type Fabry-Perot resonator having the above configuration will be described.
まず、ダミイの圧電磁器21a(21b)の端部から積
層型圧電素子20を介してダミイの圧電電磁器21b
(21a)の端部に至る、光ファイバ23の直径とほぼ
同程度の幅の溝22を形成し、光ファイバ23の被覆2
3cを除去した部分(溝22の長さとほぼ同一)を、溝
22に挿入してエポキシ系接着剤EAで固定する。この
時、ダミイの圧電磁器21a、21bの両端には被覆
23Cの付いた光ファイバ23が固定されるように段部
を形成しておく。First, the dummy piezoelectric ceramic 21b is passed from the end of the dummy piezoelectric ceramic 21a (21b) through the laminated piezoelectric element 20.
A groove 22 having a width approximately the same as the diameter of the optical fiber 23 is formed to reach the end of the optical fiber 23, and the coating 2 of the optical fiber 23 is formed.
The portion from which 3c has been removed (approximately the same length as the groove 22) is inserted into the groove 22 and fixed with an epoxy adhesive EA. At this time, both ends of the dummy piezoelectric ceramics 21a and 21b are coated.
A stepped portion is formed so that the optical fiber 23 with 23C attached thereto is fixed.
次に、第5図に示すような特殊なダイシング装置(斉藤
忠夫、渡辺純二二 “マイクロ形状加工“59年精密工
学学会、前刷り集、208 (59年10月)参照)を
用い、薄いサファイアブレード30をエアスピンドル3
1により風速1300rn/mjnの高速で回転し、粒
径0.24.cz mのSiO2砥粒32を圧電磁器2
1a、21bに吹き付けながら、前述した数値並びに位
置関係の溝24a。Next, using a special dicing device as shown in Figure 5 (see Tadao Saito, Junji Watanabe, “Micro Shape Processing,” 1959 Japan Society for Precision Engineering, preprint collection, 208 (October 1959)), a thin Sapphire blade 30 to air spindle 3
1 rotates at a high wind speed of 1300 rn/mjn, and the particle size is 0.24. cz m SiO2 abrasive grains 32
1a, 21b while spraying the grooves 24a with the numerical values and positional relationship described above.
24bを形成する。これにより、溝24a、24bの側
面は鏡面に近いものになる。次いで、多層膜反射鏡25
a、25bを互いの反射面が対向するように、溝24a
、24bにそれぞれ挿入し、エポキシ系接着剤EAで固
定することにより作製が完了する。これと同時に、外部
の光ファイバと当該光ファイバ型ファブリペロ−共振器
の光ファイバとの光学的接続が高精度に行なわれたこと
になる。24b. This makes the side surfaces of the grooves 24a and 24b nearly mirror-like. Next, the multilayer film reflecting mirror 25
grooves 24a and 25b so that their reflective surfaces face each other.
, 24b and fixed with epoxy adhesive EA to complete the fabrication. At the same time, the optical connection between the external optical fiber and the optical fiber of the optical fiber type Fabry-Perot resonator is achieved with high precision.
このように作製された光ファイバ型ファブリペロ−共振
器の各電極Tに、信号発生器26により電圧を印加する
と、前記第1及び第2の実施例と同様に光ファイバ23
の軸方向と平行に電界が印加されて圧電効果によってひ
ずみが生じ、これにより光ファイバ23の長さが長く、
即ち、ファブリペロ−共振器長が長くなる。When a voltage is applied by the signal generator 26 to each electrode T of the optical fiber type Fabry-Perot resonator manufactured in this way, the optical fiber 23 is applied as in the first and second embodiments.
An electric field is applied parallel to the axial direction of the optical fiber 23, causing distortion due to the piezoelectric effect, which increases the length of the optical fiber 23.
That is, the Fabry-Perot resonator length becomes longer.
従って、本箱3の実施例によれば、信号発生器26によ
る印加電圧の大きさを変化させることにより、ファブリ
ペロ−共振器長を種々選定でき、所望の周波数間隔を容
易かつ安定して、しかも低電力で得ることが可能である
と共に、ファブリペ0−共振器の両端に他の光ファイバ
との接続作業を行なう必要がなくなり、煩雑な手間を要
することはない。Therefore, according to the embodiment in bookcase 3, by changing the magnitude of the voltage applied by the signal generator 26, various Fabry-Perot resonator lengths can be selected, and the desired frequency interval can be easily and stably set. It can be obtained with low power, and there is no need to connect other optical fibers to both ends of the Fabry resonator, so there is no need for complicated labor.
実際、第3の実施例による光ファイバ型ファブリペロ−
共振器を、前記第1及び第2の実施例と同様に1.30
μmのDFBの半導体レーザで測定した結果、信号発生
器26による電極Tへの印加電圧が零の場合には、周波
数間隔Δfが10GHzでフィネスfは85を得ること
ができた。また、挿入損失は0.6 dBであった。ま
た、信号発生器26により電極Tに±100Vの電圧を
印加した結果、±2MHzの周波数変位を得ることがで
きた。In fact, the optical fiber type Fabry-Perot according to the third embodiment
The resonator has a diameter of 1.30 as in the first and second embodiments.
As a result of measurement using a μm DFB semiconductor laser, when the voltage applied to the electrode T by the signal generator 26 was zero, a finesse f of 85 could be obtained with a frequency interval Δf of 10 GHz. Moreover, the insertion loss was 0.6 dB. Further, as a result of applying a voltage of ±100 V to the electrode T by the signal generator 26, a frequency shift of ±2 MHz could be obtained.
第6図は、本発明による光ファイバ型ファブリペロ−共
振器の第4の実施例を示す斜視図である。FIG. 6 is a perspective view showing a fourth embodiment of an optical fiber type Fabry-Perot resonator according to the present invention.
本箱4の実施例では、4本の光ファイバを用いて前記第
3の実施例による光ファイバ型ファブリペロ−共振器の
アレイ化を図ったものである。図中、40は積層型圧電
素子、41a、41bはダミイの圧電磁器、42a〜4
2dは光ファイバ固定用溝、43a 〜43dは光ファ
イバ、44a、44bは溝、4.5a、45bは波長1
.30μmにおいて透過率0.5%、厚さ40μmの薄
片ガラスからなる多層膜反射鏡、46は信号発生器、T
は電極で、谷溝42a−42d、44a、44b、光フ
ァイバ43a〜43dの構造パラメータは、前記第3の
実施例と同一である。また、作製方法についても、溝4
2a 〜42d、光ファイバ43a−43dの数か異な
るのみで前記第3の実施例と同様の方法によって行なわ
れるため、ここでは省略する。In the embodiment of the bookcase 4, four optical fibers are used to form an array of the optical fiber type Fabry-Perot resonators according to the third embodiment. In the figure, 40 is a laminated piezoelectric element, 41a and 41b are dummy piezoelectric ceramics, and 42a to 4
2d is a groove for fixing an optical fiber, 43a to 43d are optical fibers, 44a and 44b are grooves, 4.5a and 45b are wavelength 1
.. A multilayer reflector made of thin glass having a transmittance of 0.5% at 30 μm and a thickness of 40 μm; 46 is a signal generator; T
are electrodes, and the structural parameters of the grooves 42a to 42d, 44a, 44b, and the optical fibers 43a to 43d are the same as in the third embodiment. Also, regarding the manufacturing method, the groove 4
The method is the same as that of the third embodiment except that the number of optical fibers 2a to 42d and the number of optical fibers 43a to 43d is different, so the description thereof will be omitted here.
本節4の実施例による各光ファイバ43a〜43dを用
いた各光ファイバ型ファブリペロー共振器を1.30μ
mのDFB半導体レーザでfllll定した結果、信号
発生器46による電極Tへの印加電圧が零の場合には、
それぞれ周波数間隔Δfが10GHz±5 M Hzに
あり、フィネスfはそれぞれ75.48. コ27.
95、挿入損失はそれぞれ0.5dB 、 0.8dB
、 0.3dB 、 0.6dBであった。Each optical fiber type Fabry-Perot resonator using each optical fiber 43a to 43d according to the embodiment of Section 4 has a diameter of 1.30 μm.
As a result of full determination using a DFB semiconductor laser of m, when the voltage applied to the electrode T by the signal generator 46 is zero,
The frequency interval Δf is 10 GHz±5 MHz, and the finesse f is 75.48. ko27.
95, insertion loss is 0.5dB and 0.8dB respectively
, 0.3dB, and 0.6dB.
なお、本節4の実施例においては、4本の光ファイバを
用いたアレイ構成について説明したが、これに限定され
るものではな(、さらに多い本数、例えば1−0水量」
二でも可能であり、8心のテープ型光ファイバでも同時
に掃引型の光ファイバ型ファブリペロ−共振器を構成で
きることは勿論である。Although the example in Section 4 describes an array configuration using four optical fibers, it is not limited to this.
Of course, it is also possible to construct a swept optical fiber type Fabry-Perot resonator using eight-core tape type optical fibers.
また、前記第1〜第4の実施例において、波長1.30
μmにおける動作結果について説明したが、波長J、5
5μmの場合でも、あるいは他の波長においても同様の
結果を得ることができる。Further, in the first to fourth embodiments, the wavelength is 1.30.
Although we have explained the operation results at μm, the wavelength J, 5
Similar results can be obtained at 5 μm or at other wavelengths.
さらに、前記第1〜第4の実施例においては、積層型圧
電素子10,20.40の両端にダミイの圧電磁器]1
a、コ、 1 b、 21 a、 2 l b。Furthermore, in the first to fourth embodiments, dummy piezoelectric ceramics] 1 are placed at both ends of the laminated piezoelectric elements 10 and 20.
a, ko, 1 b, 21 a, 2 l b.
41a、41bを接着した構成としたが、これは補強部
祠としての役目をはだすものであり、圧電磁器に限定さ
れるものではなく、例えばガラス基板を用いても勿論よ
い。また、これら補強部材を用いることなく、各実施例
における効果と同等の効果か得られることはいうまでも
ない。41a and 41b are bonded together, but this serves as a reinforcing portion shrine, and is not limited to piezoelectric ceramics; for example, a glass substrate may of course be used. Furthermore, it goes without saying that the same effects as in each of the embodiments can be obtained without using these reinforcing members.
また、前記第1〜第4の実施例において、光ファイバ1
3.23a 〜23cl、43a 〜43dを積層型圧
電素子10,20.40に接着、固定する際、側圧の影
響により複屈折を生じ、透過光にメインピークの他にサ
イドピークが現われる場合がある。これを解決するため
に、光ファイバ内部に予め大きな複屈折を有する偏波保
持光ファイバを用いた。これにより、入射光に直線偏光
を用い、この直線偏光を偏波保持光ファイバの偏波の主
軸に平行に入射した結果、光ファイバ型ファブリペロ−
共振器からの出力光にはメインピークのみでサイドピー
クは見られなかった。Further, in the first to fourth embodiments, the optical fiber 1
3. When bonding and fixing 23a to 23cl, 43a to 43d to the laminated piezoelectric element 10, 20.40, birefringence may occur due to the influence of lateral pressure, and side peaks may appear in the transmitted light in addition to the main peak. . To solve this problem, we used a polarization-maintaining optical fiber that already has large birefringence inside the optical fiber. As a result of using linearly polarized light as the incident light and injecting this linearly polarized light parallel to the main axis of polarization of the polarization-maintaining optical fiber, the optical fiber type Fabry-Perot
Only the main peak and no side peaks were observed in the output light from the resonator.
(発明の効果)
以上説明したように、請求項(1)によれば、圧電素子
と、該圧電素子の電界印加方向とファイバ軸方向とが平
行となる如く前記圧電素子に固定された光ファイバと、
該光ファイバの両端面に配設、固定した多層膜反射鏡と
を備えたので、高いフィネスを容易に得ることができ、
圧電素子に光ファイバが固定されているので、周波数掃
引も低い電力で長期安定に動作させることのできる掃引
型の光ファイバ型ファブリペロ−共振器を提供できる利
点がある。(Effects of the Invention) As explained above, according to claim (1), a piezoelectric element and an optical fiber fixed to the piezoelectric element such that the electric field application direction of the piezoelectric element and the fiber axis direction are parallel to each other. and,
Since the optical fiber is equipped with multilayer reflective mirrors arranged and fixed on both end faces, high finesse can be easily obtained.
Since the optical fiber is fixed to the piezoelectric element, there is an advantage that it is possible to provide a swept-type optical fiber-type Fabry-Perot resonator that can operate stably over a long period of time with low power for frequency sweeping.
] 7
また、請求項(2)によれば、圧電素子と、該圧電素子
の電界印加方向とファイバ軸方向とが平行となる如く前
記圧電素子に固定された光ファイバと、該光ファイバに
所定間隔をおいてファイバ軸と直角に形成された二つの
溝と、各々の溝に挿入、固定された2個の多層膜反射鏡
とを備えたので、請求項(1)の効果に加えて、その両
端に外部の光ファイバの接続処理を行なう必要がなくな
り、極めて低損失を実現できると共に、アレイ化も極め
て容易にしかも超小型に構成できる。] 7 According to claim (2), a piezoelectric element, an optical fiber fixed to the piezoelectric element such that the electric field application direction of the piezoelectric element is parallel to the fiber axis direction, and a predetermined In addition to the effect of claim (1), the present invention includes two grooves formed at right angles to the fiber axis at intervals and two multilayer film reflectors inserted and fixed in each groove. There is no need to connect external optical fibers to both ends, and extremely low loss can be achieved, and arrays can be constructed extremely easily and ultra-compact.
第1図は本発明による光ファイバ型ファブリペロ−共振
器の第1の実施例を示すもので、第1図(a)は縦断側
面図、第1図(b)は光ファイバ軸と直角方向の断面図
、第2図は従来の光ファイバ型ファブリペロ−共振器の
構成図、第3図は本発明による光ファイバ型ファブリペ
ロ−共振器の第2の実施例を示す縦断側面図、第4図は
本発明による光ファイバ型ファブリペロ−共振器の第3
の実施例を示す縦断側面図、第5図はダイシング装置の
説明図、第6図は本発明による光ファイバ型ファブリペ
ロ−共振器の第4の実施例を示す斜視図である。
図中、10,20.40・・・積層型圧電素子、11a
、llb、21a、21b、41a、41b・・・ダミ
イの圧電磁器、12,22.42a〜42 d−・・溝
、13.23.43 a 〜43 d−・−単一モード
光ファイバ、14a、14b、24a。
24 b 、 44 a 、 44 b−−・溝、15
a、15b。
45a、45b・・・多層膜反射鏡、EA・・・エポキ
シ系接着剤。
特許出願人 日本電信電話株式会社
代理人 弁理士 吉 1)精 孝
従来の光ファイバ型ファブリペロ
共振器の構成図
名聞
本発明の第2の実施例を示す断面図FIG. 1 shows a first embodiment of an optical fiber type Fabry-Perot resonator according to the present invention. FIG. 1(a) is a longitudinal side view, and FIG. 1(b) is a vertical side view of the optical fiber 2 is a configuration diagram of a conventional optical fiber type Fabry-Perot resonator, FIG. 3 is a vertical side view showing a second embodiment of the optical fiber type Fabry-Perot resonator according to the present invention, and FIG. 4 is a cross-sectional view. The third optical fiber type Fabry-Perot resonator according to the present invention
FIG. 5 is an explanatory diagram of a dicing apparatus, and FIG. 6 is a perspective view showing a fourth embodiment of an optical fiber type Fabry-Perot resonator according to the present invention. In the figure, 10, 20.40... laminated piezoelectric element, 11a
, llb, 21a, 21b, 41a, 41b...Dummy piezoelectric ceramic, 12, 22.42a-42d-...groove, 13.23.43a-43d--single mode optical fiber, 14a , 14b, 24a. 24 b, 44 a, 44 b---groove, 15
a, 15b. 45a, 45b...Multilayer film reflecting mirror, EA...Epoxy adhesive. Patent Applicant: Nippon Telegraph and Telephone Corporation Agent Patent Attorney: Yoshi Yoshi 1) Takashi Takashi Configuration diagram of a conventional optical fiber type Fabry-Perot resonator Cross-sectional view showing a second embodiment of the present invention
Claims (2)
なる如く前記圧電素子に固定された光ファイバと、 該光ファイバの両端面に配設、固定した多層膜反射鏡と
を備えた ことを特徴とする光ファイバ型ファブリペロー共振器。(1) A piezoelectric element, an optical fiber fixed to the piezoelectric element so that the electric field application direction of the piezoelectric element is parallel to the fiber axis direction, and a multilayer reflective film arranged and fixed on both end surfaces of the optical fiber. An optical fiber type Fabry-Perot resonator characterized by being equipped with a mirror.
なる如く前記圧電素子に固定された光ファイバと、 該光ファイバに所定間隔をおいてファイバ軸と直角に形
成された二つの溝と、 各々の溝に挿入、固定された2個の多層膜反射鏡とを備
えた ことを特徴とする光ファイバ型ファブリペロー共振器。(2) a piezoelectric element, an optical fiber fixed to the piezoelectric element such that the electric field application direction of the piezoelectric element is parallel to the fiber axis direction, and an optical fiber formed at a predetermined interval at a right angle to the fiber axis. What is claimed is: 1. An optical fiber type Fabry-Perot resonator comprising: two grooves, and two multilayer reflectors inserted and fixed in each groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63166228A JPH0786591B2 (en) | 1988-07-04 | 1988-07-04 | Optical fiber type Fabry-Perot resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63166228A JPH0786591B2 (en) | 1988-07-04 | 1988-07-04 | Optical fiber type Fabry-Perot resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0215228A true JPH0215228A (en) | 1990-01-18 |
| JPH0786591B2 JPH0786591B2 (en) | 1995-09-20 |
Family
ID=15827487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63166228A Expired - Lifetime JPH0786591B2 (en) | 1988-07-04 | 1988-07-04 | Optical fiber type Fabry-Perot resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0786591B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002029455A3 (en) * | 2000-09-29 | 2003-05-08 | Corning Inc | A tunable optical component |
| CN113281579A (en) * | 2021-04-28 | 2021-08-20 | 西安理工大学 | Chip packaging electrostatic measurement sensor based on F-P interference principle |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102914864B (en) * | 2012-10-22 | 2014-10-15 | 中国科学院上海技术物理研究所 | Fabry-Perot interferometer with closed-loop control structure and control method of Fabry-Perot interferometer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5855911A (en) * | 1981-09-30 | 1983-04-02 | Toshihiko Yoshino | Optical modulator |
-
1988
- 1988-07-04 JP JP63166228A patent/JPH0786591B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5855911A (en) * | 1981-09-30 | 1983-04-02 | Toshihiko Yoshino | Optical modulator |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002029455A3 (en) * | 2000-09-29 | 2003-05-08 | Corning Inc | A tunable optical component |
| CN113281579A (en) * | 2021-04-28 | 2021-08-20 | 西安理工大学 | Chip packaging electrostatic measurement sensor based on F-P interference principle |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0786591B2 (en) | 1995-09-20 |
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