JPH02154129A - Strain detector - Google Patents

Strain detector

Info

Publication number
JPH02154129A
JPH02154129A JP63309218A JP30921888A JPH02154129A JP H02154129 A JPH02154129 A JP H02154129A JP 63309218 A JP63309218 A JP 63309218A JP 30921888 A JP30921888 A JP 30921888A JP H02154129 A JPH02154129 A JP H02154129A
Authority
JP
Japan
Prior art keywords
magnetic
permalloy
magnetostrictive element
magnetic permeability
element piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63309218A
Other languages
Japanese (ja)
Inventor
Hiroshi Sato
博 佐藤
Yoshihiko Utsui
良彦 宇津井
Hideo Ikeda
英男 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP63309218A priority Critical patent/JPH02154129A/en
Priority to KR1019890016818A priority patent/KR920010310B1/en
Priority to US07/444,808 priority patent/US4986137A/en
Priority to DE3940220A priority patent/DE3940220A1/en
Publication of JPH02154129A publication Critical patent/JPH02154129A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To facilitate a handling, to increase sensitivity, and to prevent a noise sound from being generated by providing magnetostrictive element piece groups fixed on a driven shaft made of PE 'permalloy(R)' and yokes on the outer periphery of a detection coil. CONSTITUTION:When torque is applied to the driven shaft 1, stress is generated and the magnetostrictive element piece groups 7 and 8 made of PE 'permalloy(R)' vary in magnetic permeability owing to the strain. Detection coils 12 and 13 detect the magnetic permeability variation as variation in magnetic impedance and a detecting circuit 18 generates an output V corresponding to the applied torque. The magnetostrictive element piece groups 7 and 8, yokes 14 and 15, and a shield 17 are made of 'permalloy(R)' and easy to handle. Further, the magnetostrictive element piece groups 7 and 8 are high in magnetic permeability and have large magneto-strictive constants, and the detection sensitivity is improved. Then the yokes 14 and 15 pass pieces of magnetic flux produced by the detection coils 12 and 13 concentrically to prevent the leak of magnetic flux and increase the sensitivity several times, and a resonance phenomenon due to magnetic strain in not caused to prevent a noise sound from being generated.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、例えば回転軸などの受動軸の軸トルク等に
よる歪を検出する歪検出器に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a strain detector that detects distortion caused by shaft torque of a passive shaft such as a rotating shaft.

(従来の技術〕 第2図は例えば特開昭57−211030号公報に示さ
れた従来の歪検出器であり、lはトルクを受ける受動軸
、2,3は受動軸1にシェブロン形状に固着され、受動
軸lに印加されたトルクによって発生する歪量に応じて
透磁率が変化する磁歪素片群であり、それぞれ+45°
、−45’に配置されている。4.5は磁歪素片群2.
3の周囲に巻回され、それぞれの透磁率変化を検出する
検出コイルである。
(Prior art) Fig. 2 shows a conventional strain detector shown in, for example, Japanese Unexamined Patent Publication No. 57-211030, where l is a passive shaft that receives torque, and 2 and 3 are fixed to the passive shaft 1 in a chevron shape. It is a group of magnetostrictive elements whose magnetic permeability changes according to the amount of strain generated by the torque applied to the passive shaft l, and each has an angle of +45°.
, -45'. 4.5 is magnetostrictive piece group 2.
This is a detection coil that is wound around 3 and detects the change in magnetic permeability of each.

次に、動作について説明する。受動軸1に外部からトル
クが印加されると磁歪素片群2,3の長軸方向を主軸と
する主応力が発生し、この主応力は磁歪素片群2.3の
一方に引張力として作用し、他方に圧縮力として作用す
る。一般に、磁性材料に応力が加わるとその磁気的性質
が変化し、結果として透磁率の変化をもたらす、この現
象は機械エネルギを電気エネルギに変換する磁歪変換器
で使われ、磁性体を変形させると変形量に応じて透磁率
が変化するVillari効果に該当する。又、磁歪の
大きさを定量的に表す磁歪定数が正の場合、引張力によ
り透磁率が増大し、圧縮力により透磁率が減少すること
、及び磁歪定数が負の場合は逆の結果となることも知ら
れている。従って、外部から印加されたトルク量に応じ
た変形により磁歪素片群2.3の透磁率が変化し、検出
コイル4゜5はこの透磁率変化を磁気的インピーダンス
の変化として検出する。
Next, the operation will be explained. When torque is applied to the passive shaft 1 from the outside, a principal stress is generated whose main axis is the long axis direction of the magnetostrictive element groups 2 and 3, and this principal stress is applied as a tensile force to one of the magnetostrictive element groups 2 and 3. and acts as a compressive force on the other. In general, when stress is applied to a magnetic material, its magnetic properties change, resulting in a change in magnetic permeability. This phenomenon is used in magnetostrictive transducers to convert mechanical energy into electrical energy, and when the magnetic material is deformed, This corresponds to the Villari effect in which magnetic permeability changes depending on the amount of deformation. Additionally, when the magnetostriction constant, which quantitatively represents the magnitude of magnetostriction, is positive, the magnetic permeability increases due to tensile force and decreases due to compressive force, and the opposite result occurs when the magnetostrictive constant is negative. It is also known that Therefore, the magnetic permeability of the magnetostrictive element group 2.3 changes due to deformation according to the amount of torque applied from the outside, and the detection coil 4.5 detects this change in magnetic permeability as a change in magnetic impedance.

又、特開昭59−180338号公報には、受動軸の周
囲に非晶質合金からなる磁心を固着したトルクセンサが
示されており、又特開昭60−260821号公報では
検出コイルの外側に磁束漏れを防止するためにGo−N
i系非晶1を磁性合金からなるヨークを配設したトルク
センサが示されている。
Further, JP-A-59-180338 discloses a torque sensor in which a magnetic core made of an amorphous alloy is fixed around a passive shaft, and JP-A-60-260821 discloses a torque sensor in which a magnetic core made of an amorphous alloy is fixed around a passive shaft. Go-N to prevent magnetic flux leakage
A torque sensor is shown in which a yoke made of an i-based amorphous 1 magnetic alloy is disposed.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、非晶質磁性合金はキュリー温度が低いた
めに磁気的性質が経時的に安定せず、又製法上長手方向
の異方性を有しており、ヨークとして軸周囲に多層に巻
回して用いる場合に磁束に直交する異方性を強いられ、
磁場中熱処理により改善するにしてももろく取扱いが困
難な上、充分な接着性が得られなかった。又、非晶′1
を磁性合金は磁歪定数が充分大きくなく充分な感度が得
られず、またヨークとして使用した場合には磁歪による
共振現象によりノイズ音を発生するという課題があった
However, the magnetic properties of amorphous magnetic alloys are not stable over time due to their low Curie temperatures, and due to the manufacturing process, they have anisotropy in the longitudinal direction. When used, anisotropy perpendicular to the magnetic flux is forced,
Even if it could be improved by heat treatment in a magnetic field, it was brittle and difficult to handle, and sufficient adhesiveness could not be obtained. Also, amorphous '1
The magnetic alloy does not have a sufficiently large magnetostriction constant, making it difficult to obtain sufficient sensitivity, and when used as a yoke, there is a problem in that it generates noise due to the resonance phenomenon caused by magnetostriction.

この発明は上記のような課題を解決するために成された
ものであり、取扱いが容易であるとともに、感度増大と
ノイズ音発生防止を達成することができる歪検出器を得
ることを目的とする。
This invention was made to solve the above-mentioned problems, and aims to provide a distortion detector that is easy to handle, increases sensitivity, and prevents the generation of noise. .

〔課題を解決するための手段] この発明に係る歪検出器は、l’Eパーマロイから形成
されるとともに受動軸上に固着された磁歪素片群と、P
Cパーマロイから形成されるとともに検出コイルの外周
に設けられたヨークを備えたものである。
[Means for Solving the Problems] A strain detector according to the present invention includes a group of magnetostrictive elements formed of l'E permalloy and fixed on a passive shaft, and a P
It is made of C permalloy and includes a yoke provided around the outer periphery of the detection coil.

〔作 用〕[For production]

この発明における磁歪素片群はPEパーマロイから形成
され、磁気的に安定するとともに、透磁率及び磁歪定数
が大きい、又、この発明におけるヨークはPCパーマロ
イから形成され、磁気的に安定するとともに磁束零で共
振現象が生じない。
The magnetostrictive element group in this invention is formed from PE permalloy, and is magnetically stable, and has a large magnetic permeability and magnetostriction constant.The yoke in this invention is formed from PC permalloy, and is magnetically stable and has zero magnetic flux. No resonance phenomenon occurs.

[実施例] 以下、この発明の実施例を図面とともに説明する。第1
図はこの実施例による歪検出器の構成を示し、6は受動
軸1の中心軸、7.8は従来の磁歪素片群2.3と同様
に形成された磁歪素片群であり、ただ材質のみ異なり、
PEパーマロイにより形成されている。9.10は受動
軸1の軸受、11は軸受9,10に支持されて受動軸の
周囲に配設された筒状のコイルボビン、12.13はコ
イルボビン11に磁歪素片群7.8と対応して巻回され
た検出コイル、14.15は検出コイル12゜13の周
囲に間隔をおいて設けられたNi約80%のPCパーマ
ロイからなるヨーク、16はヨーク14.15の外周に
共通に設けられた第1のシールドで、Cu、 AIなど
の高導電率金属材料から形成されている。17は第1の
シールド16の外周に設けられた第2のシールドで、P
Cパーマロイから形成されている。18は検出コイル1
2.13の出力側に接続された検出回路である。
[Example] Hereinafter, an example of the present invention will be described with reference to the drawings. 1st
The figure shows the configuration of the strain detector according to this embodiment, where 6 is the central axis of the passive shaft 1, 7.8 is a magnetostrictive element group formed in the same manner as the conventional magnetostrictive element group 2.3, and Only the material is different,
It is made of PE permalloy. 9.10 corresponds to the bearing of the passive shaft 1, 11 a cylindrical coil bobbin supported by the bearings 9 and 10 and arranged around the passive shaft, 12.13 corresponds to the coil bobbin 11 and the magnetostrictive element group 7.8. 14.15 is a yoke made of PC permalloy of approximately 80% Ni, which is provided at intervals around the detection coil 12. A first shield is provided and is formed from a high conductivity metal material such as Cu or AI. 17 is a second shield provided on the outer periphery of the first shield 16, and P
Made from C permalloy. 18 is detection coil 1
This is a detection circuit connected to the output side of 2.13.

上記構成において、受動軸1にトルクが印加されると応
力が生じ、磁歪素片群7.8は歪により透磁率が変化す
る。検出コイル12.13はこの透磁率変化を磁気的イ
ンピーダンスの変化として検出し、検出回路18は印加
トルクに応じた出力■を発生する。
In the above configuration, when torque is applied to the passive shaft 1, stress is generated, and the magnetic permeability of the magnetostrictive element group 7.8 changes due to the strain. The detection coils 12, 13 detect this change in magnetic permeability as a change in magnetic impedance, and the detection circuit 18 generates an output (2) according to the applied torque.

上記実施例において、(n歪素片群7,8、ヨーク14
.15及びシールド17はパーマロイにより形成されて
おり、磁気的に安定で取扱いが容易である。又、磁歪素
片群7.8はPEパーマロイにより形成されており、透
磁率が高く磁歪定数が大きなものとなり、検出感度が向
上し、大きなダイナミックレンジが得られる。又、ヨー
ク1415は検出コイル12.13から発生された磁束
を集中して通流させて磁束漏れを防ぎ、感度を数倍増大
させる動きを有するが、同時に磁束零のPCパーマロイ
により形成したので磁歪による共振現象が発生せず、ノ
イズ音の発生を防止することができる。又、第1のシー
ルド16はやはり磁束漏れの防止と外乱磁場からの出力
保護のために設けたものであるが、Cu、 A4などの
高導電率の金属材料により形成されており、磁束の表皮
深さは第3図に示すようになり、検出コイル12.13
に印加する電源周波数が5にHz以上では磁束は完全に
遮断される。又、第2のシールド17はPCパーマロイ
により形成されており、やはり磁気シールドを行うが、
−go等の絶縁コーティングを施して多層構造とするこ
とにより高周波でのシールド効果を高めることができる
In the above embodiment, (n strain element groups 7, 8, yoke 14
.. 15 and the shield 17 are made of permalloy, which is magnetically stable and easy to handle. Furthermore, the magnetostrictive element group 7.8 is made of PE permalloy, and has high magnetic permeability and a large magnetostriction constant, improving detection sensitivity and providing a large dynamic range. In addition, the yoke 1415 has a movement that concentrates the magnetic flux generated from the detection coils 12 and 13, prevents magnetic flux leakage, and increases sensitivity several times, but at the same time, since it is formed of PC permalloy with zero magnetic flux, it does not have magnetostriction. Therefore, the resonance phenomenon caused by the noise does not occur, and the generation of noise can be prevented. The first shield 16 is also provided to prevent magnetic flux leakage and protect the output from disturbance magnetic fields, but it is made of a highly conductive metal material such as Cu or A4, and is made of a metal material with high conductivity such as Cu or A4. The depth is as shown in Figure 3, and the detection coil 12.13
When the power frequency applied to the magnetic flux is 5Hz or more, the magnetic flux is completely cut off. The second shield 17 is made of PC permalloy, and also provides magnetic shielding.
By applying an insulating coating such as -go to form a multilayer structure, the shielding effect at high frequencies can be enhanced.

〔発明の効果〕〔Effect of the invention〕

以上のようにこの発明によれば、磁歪素片群及びヨーク
にパーマロイを用いており、磁気的に安定して取扱いが
容易となる。又、磁歪素片群として磁歪定数が大きなP
Eパーマロイを用いており、大きな透磁率変化が得られ
て感度が向上し、応力の測定範囲が拡大する。さらに、
ヨークは磁歪零のPCパーマロイにより形成されており
、磁歪によるノイズ音の発生を防止することができ、熱
応力などの外乱にも強くなる。
As described above, according to the present invention, permalloy is used for the magnetostrictive element group and the yoke, making it magnetically stable and easy to handle. In addition, P with a large magnetostriction constant is used as the magnetostrictive element group.
E-permalloy is used to obtain a large change in magnetic permeability, improving sensitivity and expanding the stress measurement range. moreover,
The yoke is made of PC permalloy with zero magnetostriction, which can prevent the generation of noise due to magnetostriction and is resistant to external disturbances such as thermal stress.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明による歪検出器の断面図、第2図は従
来の歪検出器の断面図、第3図は各材質の表皮深さの特
性図である。 1・・・受動軸、7.8・・・磁歪素片群、1213・
・・検出コイル、14.15・・・ヨーク。 なお、図中同一符号は同−又は相当部分を示す。
FIG. 1 is a sectional view of a strain detector according to the present invention, FIG. 2 is a sectional view of a conventional strain detector, and FIG. 3 is a characteristic diagram of the skin depth of each material. 1... Passive shaft, 7.8... Magnetostrictive element group, 1213.
...Detection coil, 14.15...Yoke. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims]  応力を印加される受動軸と、PEパーマロイから形成
されるとともに受動軸上に固着され、歪に応じた透磁率
変化を生じる磁歪素片群と、磁歪素片群の周囲に巻回さ
れ、磁歪素片群の透磁率変化を検出する検出コイルと、
PCパーマロイから形成されるとともに検出コイルの外
周に設けられたヨークを備えたことを特徴とする歪検出
器。
A passive shaft to which stress is applied, a group of magnetostrictive elements made of PE permalloy and fixed on the passive shaft and whose magnetic permeability changes according to strain, and a group of magnetostrictive elements wound around the group of magnetostrictive elements, a detection coil that detects a change in magnetic permeability of a group of elementary pieces;
A strain detector characterized in that it is made of PC permalloy and includes a yoke provided around the outer periphery of a detection coil.
JP63309218A 1988-12-06 1988-12-06 Strain detector Pending JPH02154129A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP63309218A JPH02154129A (en) 1988-12-06 1988-12-06 Strain detector
KR1019890016818A KR920010310B1 (en) 1988-12-06 1989-11-20 Distortion detector
US07/444,808 US4986137A (en) 1988-12-06 1989-12-01 Strain detector with magnetostrictive elements
DE3940220A DE3940220A1 (en) 1988-12-06 1989-12-05 LOAD DETECTOR

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63309218A JPH02154129A (en) 1988-12-06 1988-12-06 Strain detector

Publications (1)

Publication Number Publication Date
JPH02154129A true JPH02154129A (en) 1990-06-13

Family

ID=17990353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63309218A Pending JPH02154129A (en) 1988-12-06 1988-12-06 Strain detector

Country Status (1)

Country Link
JP (1) JPH02154129A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4121507A1 (en) * 1990-06-29 1992-01-09 Mitsubishi Electric Corp LOAD DETECTOR

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4121507A1 (en) * 1990-06-29 1992-01-09 Mitsubishi Electric Corp LOAD DETECTOR

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