JPH02175894A - Method and device for tin or tin alloy electroplating - Google Patents
Method and device for tin or tin alloy electroplatingInfo
- Publication number
- JPH02175894A JPH02175894A JP32920788A JP32920788A JPH02175894A JP H02175894 A JPH02175894 A JP H02175894A JP 32920788 A JP32920788 A JP 32920788A JP 32920788 A JP32920788 A JP 32920788A JP H02175894 A JPH02175894 A JP H02175894A
- Authority
- JP
- Japan
- Prior art keywords
- tin
- anode
- plating
- alloy
- bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009713 electroplating Methods 0.000 title claims abstract description 36
- 229910001128 Sn alloy Inorganic materials 0.000 title claims abstract description 22
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 title claims description 51
- 238000000034 method Methods 0.000 title claims description 21
- 150000002500 ions Chemical class 0.000 claims abstract description 16
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 230000001590 oxidative effect Effects 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000007747 plating Methods 0.000 abstract description 56
- 239000000463 material Substances 0.000 abstract description 7
- 239000012528 membrane Substances 0.000 abstract description 4
- 238000005341 cation exchange Methods 0.000 abstract description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 2
- 229920002978 Vinylon Polymers 0.000 abstract description 2
- 229910052799 carbon Inorganic materials 0.000 abstract description 2
- 239000004745 nonwoven fabric Substances 0.000 abstract description 2
- IUTCEZPPWBHGIX-UHFFFAOYSA-N tin(2+) Chemical compound [Sn+2] IUTCEZPPWBHGIX-UHFFFAOYSA-N 0.000 abstract 1
- 235000002639 sodium chloride Nutrition 0.000 description 12
- 229910002056 binary alloy Inorganic materials 0.000 description 11
- 150000003839 salts Chemical class 0.000 description 11
- 239000000203 mixture Substances 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- WDHWFGNRFMPTQS-UHFFFAOYSA-N cobalt tin Chemical compound [Co].[Sn] WDHWFGNRFMPTQS-UHFFFAOYSA-N 0.000 description 5
- XQRLCLUYWUNEEH-UHFFFAOYSA-N diphosphonic acid Chemical compound OP(=O)OP(O)=O XQRLCLUYWUNEEH-UHFFFAOYSA-N 0.000 description 5
- CLDVQCMGOSGNIW-UHFFFAOYSA-N nickel tin Chemical compound [Ni].[Sn] CLDVQCMGOSGNIW-UHFFFAOYSA-N 0.000 description 5
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000011133 lead Chemical class 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 3
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 3
- 159000000000 sodium salts Chemical class 0.000 description 3
- GZCWPZJOEIAXRU-UHFFFAOYSA-N tin zinc Chemical compound [Zn].[Sn] GZCWPZJOEIAXRU-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical group N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910000967 As alloy Inorganic materials 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 150000001447 alkali salts Chemical class 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229940098779 methanesulfonic acid Drugs 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- QHGNHLZPVBIIPX-UHFFFAOYSA-N tin(ii) oxide Chemical compound [Sn]=O QHGNHLZPVBIIPX-UHFFFAOYSA-N 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical group [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical group C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical group [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical group [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910002065 alloy metal Inorganic materials 0.000 description 1
- 229910021529 ammonia Chemical group 0.000 description 1
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 1
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 1
- 235000011130 ammonium sulphate Nutrition 0.000 description 1
- 239000011575 calcium Chemical group 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001868 cobalt Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- IOUCSUBTZWXKTA-UHFFFAOYSA-N dipotassium;dioxido(oxo)tin Chemical compound [K+].[K+].[O-][Sn]([O-])=O IOUCSUBTZWXKTA-UHFFFAOYSA-N 0.000 description 1
- TVQLLNFANZSCGY-UHFFFAOYSA-N disodium;dioxido(oxo)tin Chemical compound [Na+].[Na+].[O-][Sn]([O-])=O TVQLLNFANZSCGY-UHFFFAOYSA-N 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- MYRTYDVEIRVNKP-UHFFFAOYSA-N divinylbenzene Substances C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011777 magnesium Chemical group 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000011591 potassium Chemical group 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 1
- 229910052939 potassium sulfate Inorganic materials 0.000 description 1
- 235000011151 potassium sulphates Nutrition 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Chemical group 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 229940079864 sodium stannate Drugs 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 229940071182 stannate Drugs 0.000 description 1
- 125000005402 stannate group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 229910001432 tin ion Inorganic materials 0.000 description 1
- -1 unglazed boards Substances 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Electroplating And Plating Baths Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野)
この発明はスズまたはスズ合金を容易にかつ高能率で実
施するための電気めっき方法および同方法を実施するた
めのめっき装置に関する。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a method for electroplating tin or a tin alloy easily and with high efficiency, and a plating apparatus for carrying out the method.
〈従来の技術)
従来、スズ及びその合金の電気めっき方法於いてはめっ
き浴のスズイオンは第一スズイオンであった。第一スズ
イオンは容易に酸化されて第二スズイオンに変化する。<Prior Art> Conventionally, in electroplating methods for tin and its alloys, the tin ions in the plating bath were stannous ions. Stannous ions are easily oxidized to stannic ions.
このため浴組成が変化し、第一、第二スズイオン混在等
の現象を生じるため、めっきに悪影響を及ぼし、ときに
はめつき不能となることもある。This changes the bath composition and causes phenomena such as mixing of stannous and stannous ions, which adversely affects plating and sometimes makes plating impossible.
又フレデリック ニー、ローエンハイム(Freder
ick A、 Lowenheiml著 モダン エレ
クトロブレーティング(Modern Electr。Also, Frederic Knee, Lohenheim (Freder
ick A, Modern Electroblating by Lowenheiml.
plating)第3版 394頁(1974)ジョン
ウィリー アンド サムス インク、1JohnWi
ley & Soms IncJ社発行には、第二スズ
塩であるアルカリ性スズ酸塩浴[KaSn fOH−1
又はNatSn (O旧、]を電気浴とし、陽極として
スズを用いてスズ電気めっきを行なう方法が記載されて
いる。この方法においては適正な電流密度の維持が厳し
く要求される。即ち特定範囲の電流密度においては、陽
極から酸素が発生して黄緑色の皮膜が生成し、四価のス
ズとして溶ける。然し電流密度が低い場合はスズ陽極の
表面に白い皮膜(Sn*21が生じ、これが溶出して電
析皮膜は不良となり、又電流密度が高過ぎると過剰の酸
素が発生し、スズ陽極の表面に黒色の酸化皮膜が生じ、
スズ陽極が全く溶けなくる。従ってこの方法の実施に当
たっては、あらかじめスズ陽極を数枚めっき槽から取出
しておき、陽極電流密度を高め、次にあらかじめ取出し
ておいたスズ陽極を一枚宛順次めっき槽に戻して適正密
度を保つということが必要である。このような手段は非
能率であって実用化は困難である。plating) 3rd edition 394 pages (1974) John Wiley and Sams Inc., 1JohnWi
Published by Ley & Soms Inc., the alkaline stannate bath [KaSn fOH-1
A method is described in which tin electroplating is carried out using NatSn (O old, ) as an electric bath and tin as an anode. In this method, it is strictly required to maintain an appropriate current density. At current density, oxygen is generated from the anode and a yellow-green film is formed, which dissolves as tetravalent tin.However, at low current density, a white film (Sn*21) is formed on the surface of the tin anode, which is eluted. If the current density is too high, excess oxygen will be generated, forming a black oxide film on the surface of the tin anode.
The tin anode will not melt at all. Therefore, when implementing this method, several tin anodes are taken out from the plating tank in advance to increase the anode current density, and then the tin anodes that were taken out in advance are returned to the plating tank one by one to maintain the appropriate density. That is necessary. Such means are inefficient and difficult to put into practical use.
本発明は先に特に光沢があり、装飾的な効果のあるスズ
−コバルト、スズ−ニッケル、及びスズー鉛の二元合金
めっき皮膜生成用の合金皮膜形成剤として、スズ塩類と
、コバルト塩類、ニッケル塩類、鉛塩類のいずれか一種
;1−ヒドロキシエクンl、lジホスホン酸又はその塩
;メクンスルホン酸又はそのアルカリ塩及び電導性塩と
を混合して得られためっき浴組成物に関する特願昭62
−30681号を出願した。同明細中にはスズ塩として
第2スズ塩を用いた浴は更に安定しためっき操作を容易
に行ないうること、更に陽イオン交換膜な用いれば浴組
成の管理が極めて容易に行ないつる可能性を示唆してい
る。The present invention first discloses the use of tin salts, cobalt salts, nickel, etc. as alloy film forming agents for producing binary alloy plating films of tin-cobalt, tin-nickel, and tin-lead which have a particularly bright and decorative effect. Patent application 1982 concerning a plating bath composition obtained by mixing any one of salts and lead salts; 1-hydroxyecune l,l diphosphonic acid or its salt; mechunsulfonic acid or its alkali salt and conductive salt.
-No. 30681 was filed. The same specification states that a bath using a stannic salt as the tin salt allows for a more stable plating operation and that the use of a cation exchange membrane makes it possible to control the bath composition extremely easily. Suggests.
〈発明が解決しようとする課題)
本発明は前記モダンエレクトロブレーティング記載の方
法の持つ問題点を解決し、かつ特願昭62−30685
1号に示唆されている方法を更に具体化してスズ又はス
ズ合金めっきが容易かつ高能率で実施しつる電気めっき
方法及び同方法を実施するための装置を開発する目的で
研究の結果本発明を完成した。(Problems to be Solved by the Invention) The present invention solves the problems of the method described in modern electroblating, and is
As a result of research, we have developed the present invention for the purpose of further embodying the method suggested in No. 1 and developing an electroplating method that can easily and efficiently perform tin or tin alloy plating, and an apparatus for implementing the method. completed.
く課題を解決するための手段〉
前記目的を達成するための本発明は隔膜により電気めっ
き浴tlを陽極室と陰極室とに区分し、陽極室には金属
スズ陽極及び酸化性気体発明用の不溶性陽極を、陰極室
にはスズ又はスズ合金電気めっきを行なうべき物体を、
電気めっき浴槽にはスズ又はスズ合金電気めっき浴を配
置し、電極間に電圧を印加することはより、金属スズ陽
極から溶出した第一スズイオンは不溶性陽極から発生す
る酸化性気体により酸化されて第二スズイオンとなり、
隔膜を通過して陰極室に入り、陰極室内の被電気めっき
物体にスズ又はスズ合金電気めっき被覆を形成せしめる
ことを特徴とするスズ、スズ合金電気めっき方法及び該
方法を実施するための隔膜により電気めっき浴槽が陽極
室と陰極室とに区分され、陽極室には金属スズ陽極及び
不溶性陽極が、陰極室にはスズ又はスズ合金めっきを行
なうべき物体が配置されていることを特徴とするスズ、
スズ合金電気めっき装置に関する。Means for Solving the Problems> The present invention to achieve the above object divides the electroplating bath TL into an anode chamber and a cathode chamber by a diaphragm, and the anode chamber contains a metal tin anode and an oxidizing gas. An insoluble anode is placed in the cathode chamber, and the object to be electroplated with tin or tin alloy is placed in the cathode chamber.
By placing a tin or tin alloy electroplating bath in the electroplating bath and applying a voltage between the electrodes, the stannous ions eluted from the metal tin anode are oxidized by the oxidizing gas generated from the insoluble anode. becomes ditin ion,
A tin or tin alloy electroplating method characterized by passing through a diaphragm into a cathode chamber and forming a tin or tin alloy electroplating coating on an object to be electroplated in the cathode chamber, and a diaphragm for carrying out the method. A tin electroplating bath characterized in that the electroplating bath is divided into an anode chamber and a cathode chamber, a metal tin anode and an insoluble anode are placed in the anode chamber, and an object to be plated with tin or tin alloy is placed in the cathode chamber. ,
This invention relates to tin alloy electroplating equipment.
即ち本発明は、隔膜により、電気めっき浴室を陽極室と
被めっき物質が陰極となる陰極室とに区分し、陽極室に
可溶性陽極即ち金属スズ陽極と不溶性陽極とを併せ配設
したことに特徴がある。That is, the present invention is characterized in that the electroplating bath is divided by a diaphragm into an anode chamber and a cathode chamber in which the material to be plated serves as the cathode, and a soluble anode, that is, a metal tin anode, and an insoluble anode are both disposed in the anode chamber. There is.
本発明のスズ、スズ合金電気めっき方法を具体的に実施
するに際しては、先ずめっき浴槽に所要の組成の電気め
っき浴を注入し、陰極室に被めっき物体を陰極として働
くよう取り付け、電圧を印加する。電気めっきの進行に
つれ、めっき浴中のめつき源は減少するが、陽極におい
てはスズ金属陽極が逐時めつき液中に第一スズイオンと
して溶出する。又は不溶性陽極から酸化性気体、具体的
には酸素又は塩素が発生し、前記第一スズイオンは極め
て安定な第二スズイオンとなり、隔膜を通過して陰極室
に移行する。When specifically carrying out the tin and tin alloy electroplating method of the present invention, first, an electroplating bath having a desired composition is poured into a plating bath, an object to be plated is attached to the cathode chamber so as to act as a cathode, and a voltage is applied. do. As electroplating progresses, the plating source in the plating bath decreases, but at the anode, the tin metal anode is gradually eluted into the plating solution as stannous ions. Alternatively, an oxidizing gas, specifically oxygen or chlorine, is generated from the insoluble anode, and the stannous ions become extremely stable stannous ions, which pass through the diaphragm and migrate to the cathode chamber.
前記の陽極室における反応は次の式で示される。The reaction in the anode chamber is expressed by the following equation.
(イ)スズ陽極の溶解
Sn” −4Sn”+2e−
(ロ)陽極反応
HJ ” 2H” +l/20i + 2e−又は2
C1−= C1g + 2e−(ハ)陽極室内におけ
る第一スズの酸化Sn” + 1/20* −’
Sn”十〇−”又はSn” + C1a −I S
n”+ 2CI−本発明方法において、陰極液めっき物
質に生成するめっき被膜はスズ被膜の外に電気めっき浴
の組成によりスズ−コバルト、スズニッケル、スズー鉛
、スズ−亜鉛等各種のスズ合金被膜を形成しつる。なお
これらコバルト、ニッケル、鉛、亜鉛等は洛中の濃度が
減少した場合、公知の手段で浴に補給すればよい。(a) Dissolution of tin anode Sn"-4Sn"+2e- (b) Anodic reaction HJ "2H" +l/20i + 2e- or 2
C1-= C1g + 2e-(c) Stannous oxide Sn" + 1/20*-' in the anode chamber
Sn"10-" or Sn" + C1a-I S
n”+ 2CI- In the method of the present invention, the plating film formed on the catholyte plating material may include various tin alloy films such as tin-cobalt, tin-nickel, tin-lead, tin-zinc, etc., depending on the composition of the electroplating bath, in addition to the tin film. When the concentration of these cobalt, nickel, lead, zinc, etc. in the bath decreases, they can be replenished into the bath by known means.
本発明においてはめっき浴の調整は公知の手段を適宜採
用できる。In the present invention, well-known means can be suitably employed for adjusting the plating bath.
その−例を示す。Here is an example.
合金被膜形成剤としてはそれぞれの金属の塩類が用いら
れる。これらは一般的にめっき洛中でそれぞれ金属とし
てスズ5g/ 9.〜5[1g/氾、コバルト3g/2
〜12g/ 12、ニッケル3g/12〜13g/ f
i、鉛3g/12〜25g/I2の範囲が用いられる。Salts of the respective metals are used as alloy film forming agents. These are generally plated with 5 g of tin/9. ~5 [1g/flood, cobalt 3g/2
~12g/12, nickel 3g/12~13g/f
i, a range of 3 g/12 to 25 g/I2 of lead is used.
OX OH0X
(Xは水素、ナトリウム、カリウム、カルシウムム、マ
グネシウム、アンモニアのいずれかを示す、)
で示される1−ヒドロキシエタン1.1ジホスホン酸(
)IEDPA)はその塩の添加量は80g/I〜140
g/lである。このものはめつき被膜の光沢の増大に寄
与するものである。1-Hydroxyethane 1.1 diphosphonic acid (where X represents hydrogen, sodium, potassium, calcium, magnesium, or ammonia)
)IEDPA), the amount of salt added is 80g/I~140
g/l. This contributes to increasing the gloss of the plating film.
更にメタンスルホン酸又はそのアルカリ塩を1−ヒドロ
キシエタン1.1ジホスホン酸又はその塩1モルに対し
て1〜4モルの範囲で添加することにより装飾的な外見
の効果は更に増大する。そして前記2成分は合計40〜
180g/!とすることが望ましい。Furthermore, the decorative appearance effect is further increased by adding methanesulfonic acid or an alkali salt thereof in an amount of 1 to 4 moles per mole of 1-hydroxyethane-1.1 diphosphonic acid or its salt. And the above two components total 40~
180g/! It is desirable to do so.
そして合金被膜形成剤であるスズ塩としては原子価4価
の化合物であるスズ酸ナトリウム、スズ酸カリ、塩化物
が好ましく、又、コバルト、ニッケル塩類としてはそれ
ぞれ塩化物、硫酸塩、過塩素酸塩、鉛塩類としては、水
溶性である酢酸塩、過塩素酸塩等が好ましい。As tin salts that are alloy film forming agents, tetravalent compounds such as sodium stannate, potassium stannate, and chloride are preferable, and as cobalt and nickel salts, chloride, sulfate, and perchloric acid are preferable. As the salts and lead salts, water-soluble acetates, perchlorates, etc. are preferable.
本発明によるめっき浴は前記の如くスズ塩として第2ス
ズ(4価のスズ)を使用することにより酸化による洛中
のスズ濃度の変化をな(し、かつ、二元合金被膜を形成
させる場合めっき浴中で目的とするめっき用合金金属即
ち、スズ−コバルト、スズ−ニッケル、スズー鉛のいず
れも同時にキレート化されて、めっき洛中の金属濃度比
が目的とするめっきによる生成被膜の合金組成と一致す
るという特徴を有する。As mentioned above, the plating bath according to the present invention uses stannic (tetravalent tin) as the tin salt to change the tin concentration in the liquid by oxidation (and when forming a binary alloy film, it is possible to change the tin concentration in the plating bath). In the bath, all of the target alloy metals for plating, namely tin-cobalt, tin-nickel, and tin-lead, are chelated at the same time, so that the metal concentration ratio in the plating layer matches the alloy composition of the target plating film. It has the characteristic of
従って洛中の金属濃度の比率を目的とする一定範囲に保
持することにより、電着合金組成の管理を容易に行なう
ことができる。Therefore, by keeping the ratio of metal concentrations in the metal within a desired range, the composition of the electrodeposited alloy can be easily controlled.
更に本発明の浴には電着操作上必要な公知の電導性塩例
えば塩化ナトリウム、塩化カリウム、硫酸カリウム、硫
酸ナトリウム、硫酸アンモニウム等が当然含まれる。こ
の添加量は通常用いられる範囲、15〜80g/l程度
であり、あまり多いと被膜に条痕を生ずる等の不良めっ
きの原因となり、又少ないと浴の抵抗が大となる。Furthermore, the bath of the present invention naturally contains known conductive salts necessary for electrodeposition operations, such as sodium chloride, potassium chloride, potassium sulfate, sodium sulfate, ammonium sulfate, and the like. The amount added is within the usual range of about 15 to 80 g/l; if it is too large, it will cause poor plating such as streaks on the coating, and if it is too small, the resistance of the bath will increase.
本発明の方法に用いられる電気めっき浴は、必要により
、浴組成物に悪影響を与えない限り、他の成分を添加し
てもよい。If necessary, other components may be added to the electroplating bath used in the method of the present invention as long as they do not adversely affect the bath composition.
本発明の電気めっき方法をするための条件は浴温50℃
〜65℃、陰極電流密度0.5A/dm”〜5A/dm
”、陽極電流密度0.5A/dm”〜IOA/dm”の
範囲が好ましく、かつpHの範囲も1.0〜13.5と
極めて広範囲である。The conditions for carrying out the electroplating method of the present invention are a bath temperature of 50°C.
~65℃, cathode current density 0.5A/dm"~5A/dm
The anode current density is preferably in the range of 0.5 A/dm to IOA/dm, and the pH range is also extremely wide, 1.0 to 13.5.
酸化性気体を発生させための不溶性陽極としては、炭素
、フェライト等公知のものが使用される。As the insoluble anode for generating oxidizing gas, known ones such as carbon and ferrite are used.
また陰極室と陽極室とを区分するための隔膜としては、
スチレン、デイビニルベンゼン共重合体にスルフォン酸
を導入し合成繊維芯材補強したもの等の陽イオン交換膜
、素焼板、ビニロン、ナイロン等の織布、および不繊布
等が用いられる。Also, as a diaphragm to separate the cathode chamber and anode chamber,
Cation exchange membranes made of styrene and divinylbenzene copolymers introduced with sulfonic acid and reinforced with a synthetic fiber core material, unglazed boards, woven fabrics such as vinylon and nylon, and nonwoven fabrics are used.
次に本発明の電気めっき装置について説明する0図面は
本発明の電気めっき装置の一例の構成の概略を示す側面
図である0図においてlは陽極室、2は陰極室である0
図面では陰極室の両側に陽極室が配置されている。Next, the electroplating apparatus of the present invention will be explained. Figure 0 is a side view schematically showing the configuration of an example of the electroplating apparatus of the present invention. In the figure, 1 is an anode chamber, and 2 is a cathode chamber.
In the drawing, the anode chamber is placed on both sides of the cathode chamber.
3は陰極室と陽極室との境界に設けられた隔膜である。3 is a diaphragm provided at the boundary between the cathode chamber and the anode chamber.
陽極室1には不溶性陽極4と、金属スズ陽極4が配置さ
れ、又陰極室には?*[気めっき物質5が配置されてい
る。陰極、陽極には夫々ブスバー8.9.10が取付け
られ、整流器7と接続している。An insoluble anode 4 and a metal tin anode 4 are placed in the anode chamber 1, and in the cathode chamber? *[Plating substance 5 is placed. Bus bars 8, 9, and 10 are attached to the cathode and anode, respectively, and are connected to the rectifier 7.
そして本発明方法により被電気めっき物質をめっきする
場合は、先ず装置に電気めっき浴を注入し、電極に電圧
を印加すればよい。When a material to be electroplated is plated by the method of the present invention, an electroplating bath is first injected into the apparatus and a voltage is applied to the electrodes.
電気めっきの進行にともない、消耗せるスズ成分は逐次
金属スズ電極の溶出により補給される。スズ以外の成分
は公知の手段により補給すればよい。As electroplating progresses, the consumed tin component is gradually replenished by elution from the metal tin electrode. Components other than tin may be replenished by known means.
尚、本発明の電気めっき装置は必要により、複数個、併
列して用いることができる。Incidentally, a plurality of electroplating apparatuses of the present invention can be used in parallel, if necessary.
この場合は陽極室と陰極室とを交互に設ければよい。In this case, an anode chamber and a cathode chamber may be provided alternately.
〈実施例、比較例〉
次に実施例、比較例により本発明を説明する0図面に示
す装置を用いて、実施例、比較例を行なった。<Examples and Comparative Examples> Next, Examples and Comparative Examples were carried out using the apparatus shown in the drawings to explain the present invention using Examples and Comparative Examples.
実施例1〜10、比較例1〜4
〈スズめっき被膜の形成)
第1表に夫々のめっき浴生成のために混合すべき成分を
、第2表には第1表に示す成分を混合して製造されため
っき浴を用いてめっきを行なうための条件、めっきによ
り生成した被膜の性質を示す。Examples 1 to 10, Comparative Examples 1 to 4 (Formation of tin plating film) Table 1 shows the components to be mixed to form each plating bath, and Table 2 shows the components shown in Table 1 mixed together. The conditions for plating using the plating bath manufactured by the method and the properties of the film produced by plating are shown below.
尚、めっき液の組成を示す第1表(第
3表、第5表、第7表、第9表も同様)において有機化
合物種類中
Pは1−ヒドロキシエタン1.1ジホスホン酸、PNは
そのナトリウム塩、PKはそのカリウム塩、Hはメタン
スルホン酸、HNはそのナトリウム塩、HKはそのカリ
ウム塩、Cはクエン酸、CNはそのナトリウム塩、CK
はそのカリウム塩、そして有機化合物が二種類存在する
場合は夫々に付された数字はモル比を示す、又、N、K
に数字が付されている場合はその置換基の数を示す。In addition, in Table 1 (the same applies to Tables 3, 5, 7, and 9) showing the composition of the plating solution, among the types of organic compounds, P is 1-hydroxyethane 1.1 diphosphonic acid, and PN is 1-hydroxyethane 1.1 diphosphonic acid. Sodium salt, PK is its potassium salt, H is methanesulfonic acid, HN is its sodium salt, HK is its potassium salt, C is citric acid, CN is its sodium salt, CK
is its potassium salt, and if two types of organic compounds are present, the numbers attached to each indicate the molar ratio, and N, K
If a number is attached, it indicates the number of substituents.
実施例1)〜24、比較例5〜9
〈スズー鉛二元合金めっき被膜の形成)第3表に夫々の
スズー鉛二元合金めっき浴生成のために混合すべき成分
を、第4表には第3表に示す成分を混合して製造された
めつき浴を用いて行なっためっき条件、めっきにより生
成した被膜の性質を示す。Examples 1) to 24, Comparative Examples 5 to 9 (Formation of tin-lead binary alloy plating film) Table 3 shows the components to be mixed to form each tin-lead binary alloy plating bath, and Table 4 shows the components to be mixed to form each tin-lead binary alloy plating bath. Table 3 shows the plating conditions and the properties of the films produced by plating using a tempering bath prepared by mixing the components shown in Table 3.
実施例25〜28、比較例1O〜1)
〈スズ−コバルト二元合金めっき被膜の形成〉
第5表に夫々のスズ−コバルト二元合金めっき浴生成の
ために混合すべき成分を、又第6表には第5表に示す成
分を混合して製造されためっき浴を用いて行なっためっ
き条件、めっきにより生成した被膜の性質を示す。Examples 25 to 28, Comparative Examples 1O to 1) <Formation of tin-cobalt binary alloy plating film> Table 5 lists the components to be mixed to form each tin-cobalt binary alloy plating bath. Table 6 shows the plating conditions performed using a plating bath prepared by mixing the components shown in Table 5, and the properties of the films formed by plating.
コ1−−塁一−j−(g /ρ)
実施例29〜32、比較例12〜13
〈スズ−ニッケル二元合金めっき被膜の形成〉
第7表に夫々のスズ−ニッケル二元合金めっき浴生成の
ために混合すべき成分を、又第8表には第7表に示す成
分を混合して製造されためっき浴を用いて行なっためっ
き条件、めっきにより生成した被膜の性質を示す。Example 29 to 32, Comparative Examples 12 to 13 <Formation of tin-nickel binary alloy plating film> Table 7 shows each tin-nickel binary alloy plating Table 8 shows the plating conditions that were carried out using a plating bath prepared by mixing the components shown in Table 7, and the properties of the film formed by plating.
コ1−一Ω−−1!
お1−−ヱーji(g/”)
実施例33〜38、比較例14〜16
くスズ−亜鉛二元合金めっき波膜の形成)第9表に夫々
のスズ−亜鉛二元合金めっき浴生成のために混合すべき
成分を、又第1O表には第9表に示す成分を混合して製
造されためっき浴を用いて行なっためっき条件、めっき
より生成した被膜の性質を示す。Ko1-1Ω--1! Example 33 to 38, Comparative Examples 14 to 16 Formation of tin-zinc binary alloy plating wave film) Table 9 shows the respective tin-zinc binary alloy plating baths. Table 1O shows the plating conditions that were carried out using a plating bath prepared by mixing the components shown in Table 9, and the properties of the film produced by plating.
ヨ1−−旦一−jま
[−二ジーーー=I艶ξ (g/ε)
〈発明の効果〉
従来に比し、スズ、スズ合金被膜の電気めっきが極めて
容易に実施することが可能になり、実用的価値は非常に
大きい。YO1--Dan-jma [-2J--=I gloss ξ (g/ε) <Effects of the invention> Compared to the past, electroplating of tin and tin alloy films can be carried out extremely easily. Therefore, the practical value is extremely large.
図面は本発明の電気めっき装置を示す。
図中、l・・・陽極室、2・・・陰極室、3・・・緊膜
、4・・・金属スズ陽極、5・・・被電気めっきO質、
6・・・不陽性陽極を示す。
出願人 株式会社 コ サ り急1−二10
?鵠
手続補正書
(自発)
平成
2月IO日The drawing shows an electroplating apparatus according to the invention. In the figure, l: anode chamber, 2: cathode chamber, 3: membrane, 4: metal tin anode, 5: electroplated O material,
6... Indicates a non-positive anode. Applicant Kosa Co., Ltd. Rikyu 1-210
? Amendment to Moe Procedures (Voluntary) February 1990 IO date
Claims (2)
に区分し、陽極室には金属スズ陽極及び酸化性気体発生
用の不溶性陽極を、陰極室にはスズ、またはスズ合金電
気めっきを行なうべき物体を、電気めっき浴槽にはスズ
又はスズ電気めっき浴を配置し、電極間に電圧を印加す
ることにより、金属スズ陽極から溶出した第一スズイオ
ンは不溶性陽極から発生する酸化性気体により酸化され
て第二スズイオンとなり、隔膜を通過して陰極室に入り
、陰極室内の被電気めっき物体にスズ又はスズ合金電気
めっき被覆を形成せしめることを特徴とするスズ、スズ
合金電気めっき方法。(1) The electroplating bath is divided into an anode chamber and a cathode chamber by a diaphragm, and the anode chamber is equipped with a metal tin anode and an insoluble anode for generating oxidizing gas, and the cathode chamber is equipped with tin or tin alloy electroplating. By placing a tin or tin electroplating bath in an electroplating bath and applying a voltage between the electrodes, the stannous ions eluted from the metal tin anode are oxidized by the oxidizing gas generated from the insoluble anode. A method for electroplating tin and tin alloys, characterized in that the stannic ions are converted into stannic ions, pass through a diaphragm, enter a cathode chamber, and form a tin or tin alloy electroplating coating on an object to be electroplated in the cathode chamber.
区分され、陽極室には金属スズ陽極および不溶性陽極が
、陰極室にはスズまたはスズ合金電気めっきを行なうべ
き物体が配置されていることを特徴とするスズ、スズ合
金電気めっき装置。(2) The electroplating bath is divided into an anode chamber and a cathode chamber by a diaphragm, the metal tin anode and the insoluble anode are placed in the anode chamber, and the object to be electroplated with tin or tin alloy is placed in the cathode chamber. A tin and tin alloy electroplating device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32920788A JPH02175894A (en) | 1988-12-28 | 1988-12-28 | Method and device for tin or tin alloy electroplating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32920788A JPH02175894A (en) | 1988-12-28 | 1988-12-28 | Method and device for tin or tin alloy electroplating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02175894A true JPH02175894A (en) | 1990-07-09 |
| JPH0424440B2 JPH0424440B2 (en) | 1992-04-27 |
Family
ID=18218854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32920788A Granted JPH02175894A (en) | 1988-12-28 | 1988-12-28 | Method and device for tin or tin alloy electroplating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02175894A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04284691A (en) * | 1991-03-13 | 1992-10-09 | Arumetsukusu:Kk | Electrically plating method for printed circuit board |
| JPH06146087A (en) * | 1992-11-12 | 1994-05-27 | Nobuyasu Doi | Electroplating method |
| JP2002146599A (en) * | 2000-07-07 | 2002-05-22 | Applied Materials Inc | Coated anode device and related methods |
| JP2002521572A (en) * | 1998-07-30 | 2002-07-16 | ヴァルター ヒレブラント ゲーエムベーハー ウント コー. ガルヴァノテヒニーク | Alkaline plating bath for zinc-nickel bath |
| JP2005139474A (en) * | 2003-11-04 | 2005-06-02 | Ishihara Chem Co Ltd | Electric tin alloy plating method |
| WO2006016603A1 (en) * | 2004-08-10 | 2006-02-16 | Dipsol Chemicals Co., Ltd. | Tin-zinc alloy electroplating method |
| US20100147696A1 (en) * | 2007-02-14 | 2010-06-17 | Klaus Bronder | Copper-tin electrolyte and method for depositing bronze layers |
| US20110089043A1 (en) * | 2008-05-08 | 2011-04-21 | Umicore Galvanotechnik Gmbh | Modified copper-tin electrolyte and process for the deposition of bronze layers |
| KR101146740B1 (en) * | 2009-11-03 | 2012-05-17 | 주식회사 익스톨 | A TIN plating device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004011698A1 (en) * | 2002-07-25 | 2004-02-05 | Shinryo Electronics Co., Ltd. | Tin-silver-copper plating solution, plating film containing the same, and method for forming the plating film |
| WO2019089282A1 (en) | 2017-11-01 | 2019-05-09 | Lam Research Corporation | Controlling plating electrolyte concentration on an electrochemical plating apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56112500A (en) * | 1980-02-09 | 1981-09-04 | Ebara Yuujiraito Kk | Method for electroplating |
-
1988
- 1988-12-28 JP JP32920788A patent/JPH02175894A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56112500A (en) * | 1980-02-09 | 1981-09-04 | Ebara Yuujiraito Kk | Method for electroplating |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04284691A (en) * | 1991-03-13 | 1992-10-09 | Arumetsukusu:Kk | Electrically plating method for printed circuit board |
| JPH06146087A (en) * | 1992-11-12 | 1994-05-27 | Nobuyasu Doi | Electroplating method |
| JP2002521572A (en) * | 1998-07-30 | 2002-07-16 | ヴァルター ヒレブラント ゲーエムベーハー ウント コー. ガルヴァノテヒニーク | Alkaline plating bath for zinc-nickel bath |
| US8486235B2 (en) | 1998-07-30 | 2013-07-16 | Ewh Industrieanlagen Gmbh & Co. Kg | Alkaline zinc-nickel bath |
| JP2002146599A (en) * | 2000-07-07 | 2002-05-22 | Applied Materials Inc | Coated anode device and related methods |
| JP2005139474A (en) * | 2003-11-04 | 2005-06-02 | Ishihara Chem Co Ltd | Electric tin alloy plating method |
| WO2006016603A1 (en) * | 2004-08-10 | 2006-02-16 | Dipsol Chemicals Co., Ltd. | Tin-zinc alloy electroplating method |
| JP2006052431A (en) * | 2004-08-10 | 2006-02-23 | Dipsol Chem Co Ltd | Tin-zinc alloy electroplating method |
| US20100147696A1 (en) * | 2007-02-14 | 2010-06-17 | Klaus Bronder | Copper-tin electrolyte and method for depositing bronze layers |
| US8211285B2 (en) * | 2007-02-14 | 2012-07-03 | Umicore Galvanotechnik Gmbh | Copper-tin electrolyte and method for depositing bronze layers |
| US20110089043A1 (en) * | 2008-05-08 | 2011-04-21 | Umicore Galvanotechnik Gmbh | Modified copper-tin electrolyte and process for the deposition of bronze layers |
| KR101146740B1 (en) * | 2009-11-03 | 2012-05-17 | 주식회사 익스톨 | A TIN plating device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0424440B2 (en) | 1992-04-27 |
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