JPH02181124A - Light beam scanning device - Google Patents

Light beam scanning device

Info

Publication number
JPH02181124A
JPH02181124A JP15689A JP15689A JPH02181124A JP H02181124 A JPH02181124 A JP H02181124A JP 15689 A JP15689 A JP 15689A JP 15689 A JP15689 A JP 15689A JP H02181124 A JPH02181124 A JP H02181124A
Authority
JP
Japan
Prior art keywords
light beam
scanning device
diffraction grating
grooves
beam scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15689A
Other languages
Japanese (ja)
Inventor
Takaya Watanabe
隆彌 渡邊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP15689A priority Critical patent/JPH02181124A/en
Publication of JPH02181124A publication Critical patent/JPH02181124A/en
Pending legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

PURPOSE:To obtain an inexpensive and compact light beam scanning device by using a diffraction grating where the pitch of many grooves increases from one outermost groove to the other. CONSTITUTION:This light beam scanning device has the diffraction grating 11 which has many mutually parallel grooves 14 on the main surface so that the pitch of the grooves 14 increases from one outermost groove 141 to the other 142. Then the light beam 12 is scanned from the outermost groove 141 of the diffraction grating 11 to the other 142 and the resulting reflected beam 13 is scanned on the surface of a target 24 in a specific direction. Therefore, the light beam is deflected by a small angle to obtain a large scan angle. Consequently, the inexpensive and compact light beam scanning device is obtained.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は光ビームを目的物の表面上を所定方向にスキャ
ンさせる光ビームスキャン装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a light beam scanning device that scans a surface of an object with a light beam in a predetermined direction.

[従来の技術] この種の光ビームスキャン装置は、例えば、レザプリン
タに用いられる。レーザプリンタは、半導体レーザを使
用して文字、図形等を高速で紙面に記録する情報記録装
置である。
[Prior Art] This type of light beam scanning device is used, for example, in a laser printer. A laser printer is an information recording device that uses a semiconductor laser to record characters, graphics, etc. on paper at high speed.

近年、ファックス、コピー機などの高速情報記録装置と
してのレーザ・プリンタか実用化され、OA機器として
広く使用されるようになってきている。
In recent years, laser printers have been put into practical use as high-speed information recording devices for fax machines, copy machines, and the like, and have come to be widely used as office automation equipment.

[発明が解決しようとする課題] このようなレーザ・プリンタにおける従来の光ビームス
キャン装置では、半導体レーザやHeNeレーザなどの
光ビームをポリゴンミラーなどを用いて水平走査すると
ともに、記録紙の駆動による垂直走査による文字、図形
等を印字記録している。
[Problems to be Solved by the Invention] Conventional light beam scanning devices for such laser printers horizontally scan a light beam of a semiconductor laser or a HeNe laser using a polygon mirror, etc., and scan the light beam by driving a recording paper. Characters, figures, etc. are printed and recorded by vertical scanning.

しかしながら、このような光ビームスキャン装置におい
ては、光偏向用の光学系として、ポリコン・ミラーを機
械的に高速回転させ使用している為、高価でかつ空間的
占有面積か大きくなる。
However, in such a light beam scanning device, a polycon mirror mechanically rotated at high speed is used as an optical system for deflecting light, which is expensive and takes up a large space.

本発明の課題は、」二連の欠点を除去し、安価でコンパ
クトな光ビームスキャン装置を提供することにある。
An object of the present invention is to eliminate the two disadvantages and provide an inexpensive and compact optical beam scanning device.

[課題を解決するための手段] 本発明によれば、光ビームを目的物の表面上を所定方向
にスキャンさせる装置において、主表面に互いに平行な
多数の溝を有し、該多数の溝間のピッチが、該多数の溝
のうちの最も外側に位置する二つの最外側溝に一方から
他方に向かうにつれ、広くなっている回折格子を備え、
前記光ビームを前記回折格子の前記最外側溝の前記一方
から前記他方にスキャンさせ、その結果得られる反射ビ
ムを前記目的物の前記表面上を前記所定方向にスキャン
させることを特徴とする光ビームスキャン装置が得られ
る。
[Means for Solving the Problems] According to the present invention, in an apparatus for scanning a light beam in a predetermined direction on the surface of an object, the main surface has a large number of mutually parallel grooves; comprising a diffraction grating whose pitch becomes wider as it goes from one side to the other in two outermost grooves located at the outermost side of the plurality of grooves,
A light beam characterized in that the light beam is scanned from the one to the other of the outermost grooves of the diffraction grating, and the resulting reflected beam is scanned over the surface of the object in the predetermined direction. A scanning device is obtained.

[実施例] 次に、本発明の実施例について、図面を参照して説明す
る。
[Example] Next, an example of the present invention will be described with reference to the drawings.

第1図を参照すると、本発明の一実施例による光ビーム
スキャン装置は、光ビーム12を目的物24に表面上を
所定方向DIにスキャンさせる装置である。前記光ビー
ムスキャン装置は、主表向に互いに平行な多数の溝14
を有し、多数の溝14間のピッチが、多数の溝14のう
ちの最も外側に位置する二つの最外側溝の一方141か
ら他方]42に向かうにつれ、広くなっている回折格子
]1を備えている。前記光ビームスキャン装置は、前記
光ビーム12を回折格子1]の前記最外側溝の前記一方
141から前記他方142にスキャンさせ、その結果得
られる反射ビーム]3を目的物24の前記表面上を前記
所定方向にスキャンさせるものである。
Referring to FIG. 1, a light beam scanning device according to an embodiment of the present invention is a device that causes a light beam 12 to scan a surface of an object 24 in a predetermined direction DI. The light beam scanning device has a large number of grooves 14 parallel to each other on the main surface.
A diffraction grating] 1, in which the pitch between the plurality of grooves 14 becomes wider as it goes from one of the two outermost grooves 141 to the other [42]. We are prepared. The optical beam scanning device scans the optical beam 12 from the one 141 to the other 142 of the outermost groove of the diffraction grating 1, and scans the resulting reflected beam 3 onto the surface of the object 24. It scans in the predetermined direction.

次に第2図を参照して、回折格子]]の作用を説明する
。
Next, the action of the diffraction grating will be explained with reference to FIG.

入射光12と回折光]3とのなす角θは回折格子のピッ
チをdとすると 可視光半導体レーザを光源として使い、光分散特性を有
する回折格子の溝ピッチをm=1で形成した時、d =
 0.67μmで偏向角θは90°となり、また、d=
[i、7μmのとき、θ−5.7°となり、約84°の
光偏向角が得られる。この回折格子の作り方は、ホトリ
ソグラフィ技術、またはプラスチック金型成形で量産化
可能である。
The angle θ formed by the incident light 12 and the diffracted light 3 is, when the pitch of the diffraction grating is d, when a visible light semiconductor laser is used as a light source and the groove pitch of the diffraction grating having light dispersion characteristics is formed with m=1. d=
At 0.67 μm, the deflection angle θ is 90°, and d=
[When i is 7 μm, θ is −5.7°, and a light deflection angle of about 84° is obtained. This diffraction grating can be mass-produced using photolithography technology or plastic molding.

再び、第1図を参照して、この光ビームスキャン装置は
、レーザプリンタ用のものである。このため、可視光子
導体レーザ21と、超音波光変調器22とを、さらに、
有している。可視光半導体レーザ21からのレーザ光2
5か超音波光変調器22に入射すると、超音波光変調器
22の結晶内に超音波により形成される位相格子により
、約数度の光偏向を発生ずる。このビーム角を上に述べ
た回折格子23で偏向拡大することにより感光ドラム上
に光ビームを形成できる。
Referring again to FIG. 1, this optical beam scanning device is for a laser printer. For this reason, the visible photon conductor laser 21 and the ultrasonic light modulator 22 are further
have. Laser light 2 from visible light semiconductor laser 21
When the light beam enters the ultrasonic light modulator 22, a phase grating formed by the ultrasonic waves in the crystal of the ultrasonic light modulator 22 generates a light deflection of about several degrees. A light beam can be formed on the photosensitive drum by deflecting and expanding this beam angle using the above-mentioned diffraction grating 23.

なお、第1図において、D2は感光ドラム24を移動さ
せる副走査方向を示している。
In FIG. 1, D2 indicates the sub-scanning direction in which the photosensitive drum 24 is moved.

以」二のように、本実施例によれば、偏向ビームを制御
する系として、超音波光変調器22と、光分散特性を何
する回折格子1]を有し、かつ回折格子]1をプラステ
ィク金型成形等で量産化できるため、非常に安価で、コ
ンパクトなレーザ・プリンタを提供できる効果がある。
As described in Section 2 below, according to this embodiment, the system for controlling the deflected beam includes the ultrasonic optical modulator 22 and the diffraction grating 1 which has a certain light dispersion characteristic. Since it can be mass-produced using plastic mold molding, etc., it has the effect of providing a very inexpensive and compact laser printer.

[発明の効果] 以上説明したように、本発明によれば、多数の溝間ピッ
チが最外側溝の一方から他方に向かうにつれ、広くなっ
ている回折格子を用いることによって、光ビームを小さ
い角度たけふらせることによって大きなスキャン角度を
得ることができ、安価でコンパクトな光ビームスキャン
装置か得られる。
[Effects of the Invention] As explained above, according to the present invention, by using a diffraction grating in which the pitch between a number of grooves becomes wider as it goes from one side of the outermost groove to the other, a light beam is focused at a small angle. By increasing the height, a large scanning angle can be obtained, and an inexpensive and compact optical beam scanning device can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例による光ビームスキャン装置
の構成図、第2図は第1図の回折格子の作用を説明する
ための図である。 ]]・・・回折格子、]2・・・入射光(光ビーム)、
]3・・回折光(反射ビーム)、]4・・・溝、21・
・・半導体レーザ、 2・・・超音波光変調器、 24 ・ 感 光ドラム (目的物) ・・レ サ光。 第1図 第2図
FIG. 1 is a block diagram of an optical beam scanning device according to an embodiment of the present invention, and FIG. 2 is a diagram for explaining the action of the diffraction grating shown in FIG. 1. ] ]... Diffraction grating, ]2... Incident light (light beam),
]3... Diffracted light (reflected beam), ]4... Groove, 21...
...Semiconductor laser, 2..Ultrasonic optical modulator, 24. Photosensitive drum (object) ...Resa light. Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 1.光ビームを目的物の表面上を所定方向にスキャンさ
せる装置において、主表面に互いに平行な多数の溝を有
し、該多数の溝間のピッチが、該多数の溝のうちの最も
外側に位置する二つの最外側溝の一方から他方に向かう
につれ、広くなっている回折格子を備え、前記光ビーム
を前記回折格子の前記最外側溝の前記一方から前記他方
にスキャンさせ、その結果得られる反射ビームを前記目
的物の前記表面上を前記所定方向にスキャンさせること
を特徴とする光ビームスキャン装置。
1. A device that scans a light beam in a predetermined direction on the surface of an object, the main surface of which has a large number of mutually parallel grooves, and the pitch between the large number of grooves is located at the outermost side of the large number of grooves. a diffraction grating that becomes wider from one of the two outermost grooves toward the other, the light beam being scanned from the one to the other of the outermost grooves of the diffraction grating, and the resulting reflection An optical beam scanning device characterized in that a beam scans the surface of the object in the predetermined direction.
JP15689A 1989-01-05 1989-01-05 Light beam scanning device Pending JPH02181124A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15689A JPH02181124A (en) 1989-01-05 1989-01-05 Light beam scanning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15689A JPH02181124A (en) 1989-01-05 1989-01-05 Light beam scanning device

Publications (1)

Publication Number Publication Date
JPH02181124A true JPH02181124A (en) 1990-07-13

Family

ID=11466180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15689A Pending JPH02181124A (en) 1989-01-05 1989-01-05 Light beam scanning device

Country Status (1)

Country Link
JP (1) JPH02181124A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019189675A1 (en) * 2018-03-29 2019-10-03 富士フイルム株式会社 Light deflection device and optical device
WO2019187777A1 (en) * 2018-03-27 2019-10-03 パナソニックIpマネジメント株式会社 Optical device and optical detection system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62250410A (en) * 1986-04-23 1987-10-31 Matsushita Electric Ind Co Ltd optical scanning device
JPS63314525A (en) * 1987-06-17 1988-12-22 Victor Co Of Japan Ltd Laser beam sweeping method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62250410A (en) * 1986-04-23 1987-10-31 Matsushita Electric Ind Co Ltd optical scanning device
JPS63314525A (en) * 1987-06-17 1988-12-22 Victor Co Of Japan Ltd Laser beam sweeping method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019187777A1 (en) * 2018-03-27 2019-10-03 パナソニックIpマネジメント株式会社 Optical device and optical detection system
CN110537143A (en) * 2018-03-27 2019-12-03 松下知识产权经营株式会社 Optical equipment and optical detection system
WO2019189675A1 (en) * 2018-03-29 2019-10-03 富士フイルム株式会社 Light deflection device and optical device
JPWO2019189675A1 (en) * 2018-03-29 2021-02-25 富士フイルム株式会社 Light deflector and optics
US11609476B2 (en) 2018-03-29 2023-03-21 Fujifilm Corporation Light deflection device and optical device
US12117711B2 (en) 2018-03-29 2024-10-15 Fujifilm Corporation Light deflection device and optical device

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