JPH021855U - - Google Patents
Info
- Publication number
- JPH021855U JPH021855U JP7995588U JP7995588U JPH021855U JP H021855 U JPH021855 U JP H021855U JP 7995588 U JP7995588 U JP 7995588U JP 7995588 U JP7995588 U JP 7995588U JP H021855 U JPH021855 U JP H021855U
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- sample surface
- sample
- respect
- scanning beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本考案の一実施例の構成を示すブロツ
ク図、第２図は他の実施例のブロツク図、第３図
は傾斜面における走査歪の説明図である。
１……試料面走査装置、２……試料面画像表示
用ＣＲＴ、Ｇ……電子銃、Ｃ……コンデンサレン
ズ、Ｌ……対物レンズ、Ｄｆ１……ｘ，ｙ方向偏
向コイル、Ｓ……試料、ｅ……電子光学系光軸、
Ｄ……電子検出器、Ｆ……蛍光面、Ｄｆ２……ｘ
，ｙ方向偏向コイル、Ｋ……カメラ、３……試料
走査信号発生器、５１，５２……ドライバ回路、
４……可変減衰器、６……直流バイアス信号発生
器、７……加算回路。
FIG. 1 is a block diagram showing the configuration of one embodiment of the present invention, FIG. 2 is a block diagram of another embodiment, and FIG. 3 is an explanatory diagram of scanning distortion on an inclined surface. 1... Sample surface scanning device, 2... CRT for sample surface image display, G... Electron gun, C... Condenser lens, L... Objective lens, Df1... x and y direction deflection coil, S... Sample , e...electron optical system optical axis,
D...electron detector, F...fluorescent screen, Df2...x
, y-direction deflection coil, K...camera, 3...sample scanning signal generator, 51, 52...driver circuit,
4...variable attenuator, 6...DC bias signal generator, 7...addition circuit.
Claims (1)
出される２次放射線を検出する構成で、無偏向時
の上記走査ビームに対して被走査面を傾斜させて
試料を設置し得るようにした試料面走査装置と、
上記２次放射線検出出力を上記走査ビームの走査
と同期して画像表示するＣＲＴとよりなり、同Ｃ
ＲＴの走査ビームの偏向角範囲の中心位置におけ
るビーム方向に対する蛍光面の傾斜角を上記試料
面走査装置における無偏向時の走査ビームに対す
る試料面の傾斜角と同じにしてなる試料面走査型
分析装置。 A sample surface that scans the sample surface with a scanning beam and detects secondary radiation emitted from the sample, and allows the sample to be placed by tilting the scanned surface with respect to the scanning beam when it is not deflected. a scanning device;
It consists of a CRT that displays the secondary radiation detection output as an image in synchronization with the scanning of the scanning beam.
A sample surface scanning analyzer in which the inclination angle of the phosphor screen with respect to the beam direction at the center position of the deflection angle range of the RT scanning beam is the same as the inclination angle of the sample surface with respect to the scanning beam when not deflected in the sample surface scanning device. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7995588U JPH021855U (en) | 1988-06-16 | 1988-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7995588U JPH021855U (en) | 1988-06-16 | 1988-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH021855U true JPH021855U (en) | 1990-01-09 |
Family
ID=31304802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7995588U Pending JPH021855U (en) | 1988-06-16 | 1988-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH021855U (en) |
-
1988
- 1988-06-16 JP JP7995588U patent/JPH021855U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4983832A (en) | Scanning electron microscope | |
| US4460827A (en) | Scanning electron microscope or similar equipment with tiltable microscope column | |
| US3585382A (en) | Stereo-scanning electron microscope | |
| JPH036615B2 (en) | ||
| US6573502B2 (en) | Combined electron microscope | |
| US10020162B2 (en) | Beam alignment method and electron microscope | |
| JPH07264611A (en) | Convergence correction device for projection type display | |
| JP2000123774A (en) | Scanning transmission electron microscope | |
| JPH09223478A (en) | Transmission electron microscope | |
| JPS594298Y2 (en) | Sample equipment such as scanning electron microscopes | |
| JPH0243089Y2 (en) | ||
| JPH07312195A (en) | Scanning electron microscope | |
| JPS60138252U (en) | Sample image display device in particle beam equipment | |
| JPH05325860A (en) | Method for photographing image in scanning electron microscope | |
| JPS5834679Y2 (en) | Scanning electron microscope | |
| JPS6391946A (en) | Television observing device for electron microscope | |
| JPH0352179B2 (en) | ||
| JPH01149354A (en) | electronic microscope | |
| JPH05258700A (en) | Scanning image observing method and scanning electron microscope | |
| JPS58920Y2 (en) | scanning electron microscope | |
| JPH0139393Y2 (en) | ||
| JPH06231716A (en) | Ion micro beam device | |
| JPS6314374Y2 (en) | ||
| JPS63118643A (en) | Scanning electron microscope or similar device for attaining crystal azimuth distribution image | |
| JPS6125043A (en) | Crystal-orientation determining method by scanning electron microscope and scanning electron microscope employed |