JPH0219831A - Production of color filter substrate to be used for liquid crystal display - Google Patents

Abstract

PURPOSE:To efficiently remove fine glass pieces, etc. on the surface of a protective resin film for a base material for a color filter substrate and to reduce the opportunity for generating projections by washing the surface of the protective resin film by the ultrasonic wave washing and forming a transparent electroconductive film on the protective resin film. CONSTITUTION:A shower member 2 for spraying a soln. of a nonionic surface active agent is installed to above a final stage side of plural transporting rolls 1, and a brush 3 revolving counterclockwise is disposed to a forestage side of the shower member 2. After completing the washing of a protective resin film of a base material 8 for a color filer substrate by allowing the surface of the protective resin film to contact with the brush 3 in the presence of the soln. of the nonionic surface active agent, the surface is washed further by the hypersonic wave generated by the operation of an ultrasonic wave generator 7, and the film is rinsed by transporting it through pure water 5 contained in a washing tank 6. Further, a transparent electroconductive film is formed on the protective resin film. Thus, fine glass pieces, etc. on the surface of the resin film are removed efficiently, and the opportunity for generating projections are reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a method for manufacturing and cleaning a color filter substrate for a liquid crystal display, and particularly to a method for manufacturing a color filter substrate with an improved cleaning process.

(Prior Art) A color filter substrate for a liquid crystal display is arranged opposite to a driving substrate provided with a thin film transistor array, etc.
It is used to assemble a liquid crystal cell by accommodating liquid crystal between these substrates. Such color filter substrates are usually
Red, blue, and green filter layers are provided on the glass plate surface, and a resin protective film is coated on the glass plate surface including each filter layer,
Further, a transparent conductive film (for example, an ITO film) is sputter-deposited on the protective film.

By the way, the above-mentioned color filter substrate has conventionally been manufactured by the following steps. First, red, blue, and green filter layers are formed on the surface of a large glass plate from which multiple substrates can be taken out, and then a resin solution is applied to the surface of the glass plate containing each filter layer, and then dried. Cover with resin protective film. Subsequently, this glass plate is scribed and further chamfered to produce a plurality of color filter substrate materials. Subsequently, this substrate material is subjected to ultrasonic cleaning using Triclean as a cleaning liquid, and then a transparent conductive film (for example, ITO) is deposited on the resin protective film on the surface of the substrate material by sputter deposition.
A color filter substrate is manufactured by forming a film).

However, in the above-mentioned conventional manufacturing method, it is not possible to sufficiently remove minute glass pieces, resin pieces, etc. that are attached to or partially embedded in the resin protective film of the color filter substrate material during ultrasonic cleaning after scribing and chamfering. ITO as is
Since the glass particles are carried into the sputter deposition process, protrusions caused by the glass pieces and the like are generated on the transparent conductive film side of the manufactured color filter substrate. In fact, when the surface condition of the manufactured color filter substrate is visually inspected while being irradiated with oblique light, 20 to 30% of the manufactured color filter substrates are
A protrusion was detected on the board. The occurrence of such protrusions on the surface of the color filter substrate causes serious problems such as point defects and gap defects when incorporated as a liquid crystal cell.

(Issue 8 to be solved by the invention) The present invention has been made to solve the above-mentioned conventional problems, and it is possible to efficiently remove fine glass pieces and other resin pieces on the surface of the resin protective film. The present invention aims to provide a method for manufacturing a color filter substrate for a liquid crystal display in which the occurrence of protrusions due to glass pieces or the like is reduced.

[Structure of the Invention (Means for Solving the Problems)] The present invention provides a color filter substrate material using a rotating brush having a plurality of synthetic fibers implanted on its circumferential surface in the presence of a nonionic surfactant solution. A step of cleaning the resin protective film by contacting it with the surface of the resin protective film, and then performing a cleaning treatment by at least ultrasonic cleaning, and a step of forming a transparent conductive film on the resin protective film of the color filter substrate material. A method for manufacturing a color filter substrate for a liquid crystal display, characterized by:

Examples of the synthetic fibers used in the brush include nylon 6 and nylon 6.6, which are trade names manufactured by DuPont.

The length of contact when the synthetic fibers of the brush are brought into contact with the surface of the resin protective film of the color filter substrate material cannot be absolutely determined due to variations in the type and diameter of the synthetic fibers, the rotational speed of the brush, etc., but if it is too short, It becomes impossible to efficiently remove fine glass fragments etc. on the surface of the protective film, and if it is too long, scratches etc. will occur on the surface of the resin protective film, so it is necessary to take these into consideration and select the contact length appropriately. desirable.

As a means for bringing the rotating brush into contact with the surface of the resin protective film of the color filter substrate material in the presence of a nonionic surfactant solution, for example, Spread the
A method of bringing a rotating brush into contact with the surface of the resin protective film of the substrate material; ■ A method of bringing the rotating brush into contact with the surface of the resin protective film of the color filter substrate material while spraying a nonionic surfactant solution; ■ A method of bringing the brush into contact with the resin protective film surface of the color filter substrate material; A method of spraying a nonionic surfactant solution on the surface of the resin protective film of the filter substrate material and bringing the brush into contact with the surface of the resin protective film of the substrate material while spraying the nonionic surfactant solution with a rotating brush. Can be adopted.

The above-mentioned ultrasonic cleaning means uses several tens of kilometres, if there is a large amount of dust remaining on the surface of the color filter substrate material.
It is desirable to use an ultrasonic cleaning method with a vibration frequency of 100 kHz), and if the remaining dust is fine (2 μm or less), an extreme ultrasonic cleaning method with a vibration frequency of 600 kHz or more. Further, a pure water cleaning step and a pure water rinsing step may be added before and after this ultrasonic cleaning, respectively.

Further, the present invention is a method for manufacturing a color filter substrate for a liquid crystal display, which comprises forming a transparent conductive film on a protective film of a color filter substrate material that has been cleaned, and then performing the cleaning treatment again.

(Function) According to the present invention, a rotating brush having a plurality of synthetic fibers planted on the circumferential surface is brought into contact with the resin protective film surface of the color filter substrate material in the presence of a nonionic surfactant solution. By cleaning, fine glass pieces, resin pieces, and dirt attached to the surface of the resin protective film of the substrate material can be effectively removed, and the nonionic surfactant that is present prevents scratches on the protective film caused by brushing. can be suppressed. Furthermore, the re-adhesion of detached glass pieces and the like can be suppressed by the nonionic surfactant sprayed onto the protective film.

Therefore, fine glass pieces, resin pieces, dirt, etc. on the surface of the resin protective film can be effectively removed by the subsequent ultrasonic cleaning and the nonionic surfactant on the surface of the resin protective film. By forming a transparent conductive film such as an ITO film on the resin protective film of the substrate material after such cleaning treatment by sputter deposition, it is possible to reduce the occurrence of protrusions that cause point defects and gap defects when incorporated as a liquid crystal cell. , color filter substrates can be manufactured with high yield.

In addition, by performing the same cleaning treatment again after forming the transparent conductive film, fine glass pieces and dirt that have adhered to the surface of the transparent conductive film during transportation etc. can be effectively removed.
When incorporated as a liquid crystal cell, the occurrence of protrusions that cause point defects and gap defects can be significantly reduced, making it possible to manufacture high-quality color filter substrates at higher yields.

(Example) Embodiments of the present invention will be described below with reference to FIG.

Example 1 FIG. 1 is a schematic diagram showing a cleaning device used in the manufacturing method of the present invention. 1 in the figure is a plurality of conveyance rollers, and above the last stage side of these conveyance rollers 1, 2.5
% concentration of nonionic surfactant solution (NCW-601A,
A shower member 2 for spraying a product (trade name, manufactured by Wako Pure Chemical Industries, Ltd.) is provided. A brush 3 that rotates counterclockwise is disposed on the front side of the shower member 2. This brush 3 has a diameter of 0.0 mm on the outer peripheral surface of a cylindrical body with a diameter of 72.5 mm. 3 nylon 6.6 fibers of IUφx18.3+u
．． It has a structure in which it is planted in a staggered manner as a two-frame φ area.

A nozzle 4 for spraying pure water is provided on the front side of the brush 3. A cleaning tank 6 containing pure water 5 and in which the transport rollers 1 are immersed and arranged is disposed in front of the nozzle 4. An ultrasonic oscillator 7 that oscillates at a frequency of, for example, 800 kl'lz is attached to the bottom of the rear side of the cleaning tank 6. Note that the cleaning tank 6
The tip side of the unit functions as a pure water rinsing tank.

Next, a method for manufacturing a color filter substrate for a liquid crystal display will be explained.

First, red, blue, and green filter layers are formed on the surface of a large glass plate from which multiple substrates can be taken out, and then a resin solution is applied to the surface of the glass plate containing each filter layer, and then dried. Covered with a resin protective film.

Subsequently, this glass plate was scribed and further chamfered to produce a plurality of color filter substrate materials.

Next, the color filter substrate material 8 is placed on the transport roller 1 in the cleaning device shown in FIG. While doing so, the nonionic surfactant solution was uniformly spread from the shirt member 2 onto the resin protective film of the substrate material 8. Subsequently, this substrate material 8 was transferred to the brush 3 which was rotated at 150 to 180 rpm by the conveyance roller 1, and the brush was cleaned. In addition, the board material 8 at this time
The contact length of the nylon 6.6 fibers of the brush 3 with the surface of the protective film was set to 0.5. Subsequently, after cleaning the protective film surface of the brush-cleaned substrate material 8 by spraying pure water from the nozzle 4, the substrate material 8 is transferred to the cleaning tank 6, and on the rear side thereof, ultrasonic oscillator 7 is driven to clean the surface of the protective film. Perform sonic cleaning and further cleaning! A rinsing process was performed by transporting the sample in pure water 5 in 6. Thereafter, the substrate material 8 was taken out from the cleaning tank 6 and spin-dried using a spinner (not shown).

Next, an ITO film was formed by sputter deposition on the resin protective film of the substrate material subjected to the cleaning treatment, thereby manufacturing a color filter substrate.

The surface condition of 100 color filter substrates manufactured according to Example 1 was visually inspected while being irradiated with oblique light to determine the number of substrates in which protrusions causing defects were generated. As a result, only 10 sheets were found to have protrusions, and it was confirmed that the defect rate was extremely low at 10%.

Example 2 Similar to Example 1, a color filter substrate material was produced, and the first
After the protective film on the surface of the substrate material is cleaned by the cleaning device shown in the figure and the ITO film is sputter-deposited, the ITO film is cleaned by the cleaning device shown in FIG. 1 again to produce a color filter substrate. did.

The surface condition of 100 color filter substrates manufactured according to Example 2 was visually inspected while being irradiated with oblique light to determine the number of substrates in which protrusions that could cause defects were generated. As a result, only 7 pieces were found to have protrusions, and the defective rate was 7%, which was confirmed to be a further improvement compared to Example 1.

[Effects of the Invention] As detailed above, according to the present invention, fine glass pieces and other resin pieces on the surface of the resin protective film can be efficiently removed without causing scratches on the surface of the protective film. It is possible to reduce the occurrence of protrusions caused by glass pieces, etc., and furthermore, when incorporated into a liquid crystal cell, it is possible to provide a method for manufacturing a high-quality color filter substrate without point defects or gap defects at a high yield.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing one form of a cleaning device used in an example of the present invention. l...conveyance roller, 2...shower part, 3...
Brush, 4... Nozzle, 6... Cleaning tank, 7... Ultrasonic oscillator. Applicant's representative Patent attorney Takehiko Suzue￥, Figure 1

Claims (2)

[Claims] (1) After cleaning a rotating brush having a plurality of synthetic fibers implanted on its circumferential surface in contact with the resin protective film surface of the color filter substrate material in the presence of a nonionic surfactant solution, at least A method for manufacturing a color filter substrate for a liquid crystal display, comprising the steps of performing a cleaning treatment by ultrasonic cleaning, and forming a transparent conductive film on a resin protective film of the color filter substrate material. (2) After forming a transparent conductive film on the protective film of the cleaned color filter substrate material, the above cleaning process is performed again.
2. The method of manufacturing a color filter substrate for a liquid crystal display according to claim 1.