JPH02199800A - Radiated light absorber - Google Patents

Radiated light absorber

Info

Publication number
JPH02199800A
JPH02199800A JP2019389A JP2019389A JPH02199800A JP H02199800 A JPH02199800 A JP H02199800A JP 2019389 A JP2019389 A JP 2019389A JP 2019389 A JP2019389 A JP 2019389A JP H02199800 A JPH02199800 A JP H02199800A
Authority
JP
Japan
Prior art keywords
synchrotron radiation
duct
absorber
concave parts
emitted light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2019389A
Other languages
Japanese (ja)
Inventor
Toru Okazaki
徹 岡崎
Yoshihiro Hirata
嘉裕 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Sumitomo Electric Industries Ltd
Original Assignee
Research Development Corp of Japan
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Development Corp of Japan, Sumitomo Electric Industries Ltd filed Critical Research Development Corp of Japan
Priority to JP2019389A priority Critical patent/JPH02199800A/en
Publication of JPH02199800A publication Critical patent/JPH02199800A/en
Pending legal-status Critical Current

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  • Particle Accelerators (AREA)

Abstract

PURPOSE:To prevent the temperature increase of a beam duct by providing two emitted light absorbers in such a manner that the respective concave parts face to each other with a beam orbit between them, and reflecting and attenuating an emitted light by the both concave parts. CONSTITUTION:Radiated light absorbers 2, 3, are curved so that they can be provided along the deflection of a beam duct 1, and concave parts 2s, 3s having a semi-circular sectional form are formed on one surface of each absorber in such a manner that the both concave parts 2s, 3s face to each other with a beam orbit Q between them and the focus of the concave parts 2s, 3s accords with the beam orbit Q. A cooling channel 4 having a cooling liquid nitrogen passed through its inner part is provided on a determined part of the opposite surface of each concave part 2s, 3s of the emitted light absorbers 2, 3. Thus, an emitted light is absorbed and attenuated while it is reflected between the both concave parts 2s, 3s. In this case, although the temperature of the emitted light absorbers 2, 3 is increased, the heat is released to the duct outside by the cooling channel 4, and the heating of the beam duct 1 is prevented.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、放射光の照射に伴う発熱を防止するために
、粒子加速器のダクト内に設けられる放射光アブソーバ
に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a synchrotron radiation absorber provided in a duct of a particle accelerator in order to prevent heat generation due to radiation of synchrotron radiation.

[従来の技術] 粒子加速器の真空ダクト内を周回する粒子ビームに対し
偏向電磁石の磁場でもって偏向させるとき、ビーム軌道
より接線方向に、赤外線からX線の領域にわたる放射光
が放出される。この放射光は、極めて強力でかつ指向性
が良いことから、集積回路における微細パターンの焼き
付は等の産業用途での利用価値が高い。生じた放射光の
一部は、前記の目的のために、放射光取り出し管を介し
てダクト外部に導かれるが、その他の放射光は、ビーム
ダクトの壁面に照射してダクトの温度を上界させる。
[Prior Art] When a particle beam circulating in a vacuum duct of a particle accelerator is deflected by a magnetic field of a deflecting electromagnet, synchrotron radiation ranging from infrared to X-ray is emitted in a tangential direction from the beam trajectory. Since this synchrotron radiation is extremely powerful and has good directivity, it has high utility value in industrial applications such as printing fine patterns on integrated circuits. A part of the generated synchrotron radiation is guided to the outside of the duct via the synchrotron radiation extraction tube for the above-mentioned purpose, while the other radiation is irradiated onto the wall of the beam duct to raise the temperature of the duct. let

[発明が解決しようとする課題] このような放射光の照射によるビームダクトの温度上昇
を防止するために、例えば特開昭63124400号公
報のシンクロトロン装置においては、第3図に示すよう
な放射光アブソーバ20が設けられている。このアブソ
ーバ2()は、ビームダクト(不図示)の偏向部におけ
る外径側の壁面内に沿って設けられており、21は、ビ
ームダクト内を周回する粒子ビームの軌道(以下ビーム
軌道Qという)より切線方向に放射される放射光Xをダ
クト外部に取り出すための放射光取り出し管である。又
、アブソーバ20の内部には液体窒素等が満たされてお
り、放射光がアブソーバ20の吸収面20bで吸収され
ることにより、温度上昇するアブソーバ20が前記液体
窒素により冷却されるようになっている。
[Problem to be Solved by the Invention] In order to prevent the temperature rise of the beam duct due to the irradiation of such synchrotron radiation, for example, in the synchrotron device disclosed in Japanese Patent Application Laid-Open No. 63124400, the radiation A light absorber 20 is provided. This absorber 2 () is provided along the wall surface on the outer diameter side of the deflection part of a beam duct (not shown), and 21 indicates the trajectory (hereinafter referred to as beam trajectory Q) of the particle beam orbiting inside the beam duct. ) is a synchrotron radiation extraction tube for extracting synchrotron radiation X emitted in the tangential direction to the outside of the duct. Further, the interior of the absorber 20 is filled with liquid nitrogen or the like, and as the synchrotron radiation is absorbed by the absorption surface 20b of the absorber 20, the absorber 20, whose temperature increases, is cooled by the liquid nitrogen. There is.

しかるに、アブソーバ20の吸収面20bは、ビーム軌
道Qの軌道面に対し垂直な面に形成され“ているため、
この吸収面20bに照射した放射光の一部は、反射し、
その反射光がビームダクトの壁面に当たると、ダクトの
温度が上昇することがあり、ビームダクトを液体ヘリウ
ム温度に保っている場合には(ヘリウムの消費量の増加
を招くといった問題があった。
However, since the absorption surface 20b of the absorber 20 is formed in a plane perpendicular to the orbital plane of the beam trajectory Q,
A part of the radiation light irradiated to this absorption surface 20b is reflected,
When the reflected light hits the wall of the beam duct, the temperature of the duct may rise, and if the beam duct is kept at the temperature of liquid helium, this poses a problem (increasing helium consumption).

この発明は、上述した問題点をなくすためになされたも
のであり、放射光アブソーバで反射した放射光によるビ
ームダクトの加熱を防止できる放射光アブソーバを提供
することを目的とする。
The present invention has been made to eliminate the above-mentioned problems, and an object of the present invention is to provide a synchrotron radiation absorber that can prevent heating of a beam duct due to radiation light reflected by the synchrotron radiation absorber.

[課題を解決するための手段] この発明の放射光アブソーバは、シンクロトロン放射光
装置のビームダクト内部に設けられる放射光アブソーバ
であって、断面が凹面形状をなす2個の放射光アブソー
バよりなり、該放射光アブソーバを、ビーム軌道がなす
面上でかつ、ビーム軌道を挟むようにしてそれぞれの凹
面部を対向させたことを特徴とする。
[Means for Solving the Problems] A synchrotron radiation absorber of the present invention is a synchrotron radiation absorber provided inside a beam duct of a synchrotron radiation device, and is composed of two synchrotron radiation absorbers each having a concave cross section. The synchrotron radiation absorber is characterized in that the concave portions of the synchrotron radiation absorbers are opposed to each other on the plane defined by the beam trajectory, with the beam trajectory sandwiched therebetween.

[作用] 上記構成によれば、粒子ビームの偏向により生じた放射
光の一部は、一方の放射光アブソーバの凹面部に吸収さ
れるが、その他の放射光はその凹面部にて反射して他方
の放射光アブソーバの凹面部に向かう。このように、両
凹面部で相互反射する間に放射光は減衰するので、ビー
ムダクトへは放射光が照射しないので温度上昇は生じな
い。
[Function] According to the above configuration, a part of the synchrotron radiation generated by the deflection of the particle beam is absorbed by the concave surface of one of the synchrotron radiation absorbers, but the other synchrotron radiation is reflected by the concave surface. toward the concave portion of the other synchrotron radiation absorber. In this way, the emitted light is attenuated while being mutually reflected by both concave surfaces, so that the beam duct is not irradiated with the emitted light, so no temperature rise occurs.

[実施例] 第1図にこの発明の放射光アブソーバの一実施例を示し
ている。
[Embodiment] FIG. 1 shows an embodiment of the synchrotron radiation absorber of the present invention.

lは、ビームダクトの断面を示している。2及び3は、
ビーム軌道Qがなす一つの面上(図中ビーム軌道Qの左
右方向)に位置する、熱伝導の良い金属板にてなる放射
光アブソーバであり、第2図の斜視図に示すように、ビ
ームダクト1の偏向部に沿って設けられるよう湾曲して
おり、かつ、該放射光アブソーバ2.,3の各々の一方
の面には、その断面形状が半円弧状の凹面部2s、3s
が形成され、また、双方の凹面部2s、3sが、ビーム
軌道Qを挟んで対向し、かつ、凹面部2 s、 3 s
の焦点がビーム軌道Qに合致するようになっている。
l indicates the cross section of the beam duct. 2 and 3 are
This is a synchrotron radiation absorber made of a metal plate with good thermal conductivity, located on one plane formed by the beam trajectory Q (in the horizontal direction of the beam trajectory Q in the figure). The radiation light absorber 2. is curved so as to be provided along the deflection section of the duct 1, and , 3 have concave portions 2s, 3s each having a semicircular cross-sectional shape.
are formed, and both concave parts 2s and 3s face each other across the beam trajectory Q, and concave parts 2s and 3s
The focal point of the beam coincides with the beam trajectory Q.

更に、それぞれの放射光アブソーバ2.3の各凹面部2
 s、 3 sと反対の面の所定部には、内部に冷却用
の液体窒素が通される冷却チャンネル4か設けられる。
Furthermore, each concave portion 2 of each radiation absorber 2.3
A cooling channel 4 through which liquid nitrogen for cooling is passed is provided in a predetermined portion of the surface opposite to s and 3 s.

尚、放射光アブソーバ2.3は、適宜な支柱(不図示)
によってビームダクトlの内周面に固定される。
In addition, the synchrotron radiation absorber 2.3 is attached to an appropriate support (not shown).
is fixed to the inner circumferential surface of the beam duct l.

上記構成の放射光アブソーバにおいて、一方の放射光ア
ブソーバ3が、ビームダクト!の外径側に位置するとす
れば、ビーム粒子が偏向電磁石(不図示)による磁場で
偏向したとき、ビーム軌道Qより接線方向に向けて放射
光が生じ、その放射光は放射光アブソーバ3に照射する
。このとき、照射した放射光の大部分は放射光アブソー
バ3の凹面部3sで吸収されるが、その他はこの放射光
アブソーバ3の凹面部3sにて反射する。ビーム軌道Q
は、双方の放射光アブソーバ2.3の凹面部2s、3s
の焦点となっているので、放射光アブソーバ3の凹面部
3sで反射した放射光は、ビーム軌道Qを通り他方の放
射光アブソーバ2の凹面部2sに向かい、この凹面部2
sで反射した放射光は再びビーム軌道Qを通って他方の
凹面部3sに入射する。このように、両凹面部2s、3
s間を反射する間に放射光は吸収され減衰する。放射光
の吸収により放射光アブソーバ2.3は温度上昇するが
、冷却チャンネル3によってダクト外部に熱放出される
In the synchrotron radiation absorber having the above configuration, one of the synchrotron radiation absorbers 3 is a beam duct! If the particle is located on the outer diameter side of do. At this time, most of the emitted radiation light is absorbed by the concave surface 3s of the synchrotron radiation absorber 3, but the rest is reflected by the concave surface 3s of the synchrotron radiation absorber 3. Beam trajectory Q
are the concave portions 2s and 3s of both synchrotron radiation absorbers 2.3.
Therefore, the synchrotron radiation reflected by the concave portion 3s of the synchrotron radiation absorber 3 passes through the beam trajectory Q and heads toward the concave portion 2s of the other synchrotron radiation absorber 2, and this concave portion 2
The synchrotron radiation reflected by s passes through the beam trajectory Q again and enters the other concave portion 3s. In this way, both concave portions 2s, 3
The emitted light is absorbed and attenuated while being reflected between s. The temperature of the radiation absorber 2.3 increases due to the absorption of the radiation, but the heat is released to the outside of the duct by the cooling channel 3.

尚、上記実施例では、各放射光アブソーバ2゜3におけ
る凹面部2 s、 3 sの焦点をビーム軌道Qにほぼ
合致するよう凹面部2s、3sを形成したが、各放射光
アブソーバ2.3を適当に凹面形状に形成するだけであ
っても上述した放射光の反射/減衰の効果を十分に得る
ことができる。
In the above embodiment, the concave portions 2s, 3s in each synchrotron radiation absorber 2.3 are formed so that the focal point of the concave surface portions 2s, 3s approximately coincides with the beam trajectory Q. The above-mentioned effect of reflecting/attenuating the emitted light can be sufficiently obtained by simply forming the concave surface appropriately.

又、放射光アブソーバ2,3は、1枚の金属板にて形成
したが、この形状に限定されるものではなく、例えば第
3図に示したダクト状の放射光アブソーバ20であって
も、吸収面20bが、半円弧状の凹面部を有していれば
よい。
Furthermore, although the synchrotron radiation absorbers 2 and 3 are formed of a single metal plate, they are not limited to this shape; for example, even a duct-shaped synchrotron radiation absorber 20 shown in FIG. It is sufficient that the absorption surface 20b has a semicircular concave portion.

[発明の効果] 以上説明したように、この発明は、2個の放射光アブソ
ーバを、各々の凹面部がビーム軌道を挟み対向するよう
に設け、放射光を、両凹面部で反射させ減衰させるよう
にしたので、ビームダクトへの放射光の照射がなくなり
、ビームダクトの温度上昇を防止できる。
[Effects of the Invention] As explained above, the present invention provides two synchrotron radiation absorbers such that their respective concave portions face each other across the beam trajectory, and reflects and attenuates the synchrotron radiation on both concave portions. As a result, the beam duct is not irradiated with synchrotron radiation, and the temperature of the beam duct can be prevented from rising.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の放射光アブソーバの一実施例を示す
断面図、第2図は、第1図における放射光アブソーバの
斜視図、第3図は従来の放射光アブソーバの斜視図であ
る。 l・・・ビームダクト、2.3・・・放射光アブソーバ
、2s、3s・・・凹面部、4・・・冷却チャンネル。 第1図 第3図
FIG. 1 is a sectional view showing an embodiment of the synchrotron radiation absorber of the present invention, FIG. 2 is a perspective view of the synchrotron radiation absorber shown in FIG. 1, and FIG. 3 is a perspective view of a conventional synchrotron radiation absorber. l... Beam duct, 2.3... Synchrotron radiation absorber, 2s, 3s... Concave portion, 4... Cooling channel. Figure 1 Figure 3

Claims (2)

【特許請求の範囲】[Claims] (1)シンクロトロン放射光装置のビームダクト内部に
設けられる放射光アブソーバであって、断面が凹面形状
をなす2個の放射光アブソーバよりなり、該放射光アブ
ソーバを、ビーム軌道がなす面上でかつ、ビーム軌道を
挟むようにしてそれぞれの凹面部を対向させたことを特
徴とする放射光アブソーバ。
(1) A synchrotron radiation absorber installed inside the beam duct of a synchrotron radiation device, which is composed of two synchrotron radiation absorbers each having a concave cross section, and the synchrotron radiation absorber is arranged on a plane defined by the beam trajectory. A synchrotron radiation absorber characterized in that the respective concave portions are opposed to each other so as to sandwich the beam trajectory.
(2)上記放射光アブソーバの凹面部における焦点をビ
ーム軌道に合致させた請求項1記載の放射光アブソーバ
(2) The synchrotron radiation absorber according to claim 1, wherein a focal point of the concave portion of the synchrotron radiation absorber is aligned with the beam trajectory.
JP2019389A 1989-01-30 1989-01-30 Radiated light absorber Pending JPH02199800A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2019389A JPH02199800A (en) 1989-01-30 1989-01-30 Radiated light absorber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019389A JPH02199800A (en) 1989-01-30 1989-01-30 Radiated light absorber

Publications (1)

Publication Number Publication Date
JPH02199800A true JPH02199800A (en) 1990-08-08

Family

ID=12020341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019389A Pending JPH02199800A (en) 1989-01-30 1989-01-30 Radiated light absorber

Country Status (1)

Country Link
JP (1) JPH02199800A (en)

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