JPH0220154U - - Google Patents
Info
- Publication number
- JPH0220154U JPH0220154U JP9806488U JP9806488U JPH0220154U JP H0220154 U JPH0220154 U JP H0220154U JP 9806488 U JP9806488 U JP 9806488U JP 9806488 U JP9806488 U JP 9806488U JP H0220154 U JPH0220154 U JP H0220154U
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- inspection
- lighting
- etched
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図はこの考案の一実施例を示す構成図、第
２図はその装置部の変形を示す図である。
１……シート状エツチング部品（ワーク）、２
……透過照明、３……反射照明、４……フアイバ
照明、５……ガラス台、６……ハーフミラー、７
……接眼顕微鏡、８……ズームレンズ、９……Ｔ
Ｖモニター、１０……カメラ、１１……接眼レン
ズ、１２……カメラ制御器、１３……平面鏡。
FIG. 1 is a block diagram showing an embodiment of this invention, and FIG. 2 is a diagram showing a modification of the device section. 1...Sheet-like etching parts (work), 2
...Transmitted lighting, 3...Reflected lighting, 4...Fiber lighting, 5...Glass stand, 6...Half mirror, 7
...Ocular microscope, 8...Zoom lens, 9...T
V monitor, 10...camera, 11...eyepiece, 12...camera controller, 13...plane mirror.
Claims (1)
け、この照明部の設置及び光量調整により、エツ
チング法で加工されたシート状エツチング部品の
観察視野を均一な照度分布となるように設定して
検査するようにしたことを特徴とするシート状エ
ツチング部品の検査装置。 ２ 照明部を落射式反射照明で構成すると共に、
前記照明部から照射された光を反射する平面鏡を
設け、この平面鏡にエツチング法で加工されたシ
ート状エツチング部品を載置して観察視野を均一
な照度分布となるように設定して検査するように
したことを特徴とするシート状エツチング部品の
検査装置。[Scope of Claim for Utility Model Registration] 1. A lighting section that can adjust the amount of irradiation light is provided three-dimensionally, and by installing this lighting section and adjusting the amount of light, the observation field of sheet-like etched parts processed by the etching method can be made uniform. An inspection device for sheet-like etched parts, characterized in that the inspection is performed by setting the illuminance distribution. 2 The lighting section is configured with epi-reflection lighting, and
A plane mirror is provided to reflect the light emitted from the illumination section, and a sheet-like etched part processed by an etching method is placed on this plane mirror, and the observation field is set to have a uniform illuminance distribution for inspection. An inspection device for sheet-like etched parts, which is characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9806488U JPH0220154U (en) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9806488U JPH0220154U (en) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220154U true JPH0220154U (en) | 1990-02-09 |
Family
ID=31323996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9806488U Pending JPH0220154U (en) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220154U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005337725A (en) * | 2004-05-24 | 2005-12-08 | Yamaha Motor Co Ltd | Illumination device for imaging device, surface mounter and component inspection device |
-
1988
- 1988-07-25 JP JP9806488U patent/JPH0220154U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005337725A (en) * | 2004-05-24 | 2005-12-08 | Yamaha Motor Co Ltd | Illumination device for imaging device, surface mounter and component inspection device |
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