JPH02204309A - Production of film of precursor of oxide superconductor - Google Patents

Production of film of precursor of oxide superconductor

Info

Publication number
JPH02204309A
JPH02204309A JP1024701A JP2470189A JPH02204309A JP H02204309 A JPH02204309 A JP H02204309A JP 1024701 A JP1024701 A JP 1024701A JP 2470189 A JP2470189 A JP 2470189A JP H02204309 A JPH02204309 A JP H02204309A
Authority
JP
Japan
Prior art keywords
raw material
oxide superconductor
flame
material solution
carrier gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1024701A
Other languages
Japanese (ja)
Inventor
Makoto Furuguchi
古口 誠
Yoshikazu Matsuda
松田 美一
Kunio Ogura
邦男 小倉
Eiji Kinoshita
栄司 木下
Kazuto Hirabayashi
平林 和人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP1024701A priority Critical patent/JPH02204309A/en
Publication of JPH02204309A publication Critical patent/JPH02204309A/en
Pending legal-status Critical Current

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  • Inorganic Compounds Of Heavy Metals (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PURPOSE:To keep the amt. of mist of a soln. of starting material fed into a flame invariable and to improve the quality of a film by continuously measuring the level of the soln. in an ultrasonic atomizer and controlling the flow rate of a carrier gas in accordance with the measured level. CONSTITUTION:A soln. 1 of starting material for an oxide superconductor is poured into an ultrasonic atomizer 2 and atomized. The resulting mist 3 is continuously fed into a flame 6 with a carrier gas through a burner 5. The level of the soln. 1 in the atomizer 2 is continuously measured with a float 11, etc., and transduced into an electric signal. This signal is sent to a flow rate controller and the flow rate of the carrier gas is controlled. The mist 3 is brought into a chemical reaction and a produced precursor 8 of the oxide superconductor is stuck on a substrate 7 travelling in front of the flame 6.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は酸化物超電導体前駆物質膜の製造方法に関する
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for producing an oxide superconductor precursor film.

(従来の技術及びその課題〕 最近、周知のように液体窒素温度で使用できる酸化物超
電導体が見出され、この新超電導体の応用研究が内外で
活発になされている。
(Prior Art and its Problems) Recently, as is well known, an oxide superconductor that can be used at liquid nitrogen temperatures has been discovered, and research into the application of this new superconductor is being actively conducted at home and abroad.

ところで、このような酸化物超電導体は脆いため、線材
等に加工するのが難しく、粉末焼結法等の特殊な加工法
が研究されている。しかしながらこの粉末焼結法は製造
工程が長く、又長尺材の製造が困難なものであった。
However, since such oxide superconductors are brittle, it is difficult to process them into wire rods, etc., and special processing methods such as powder sintering are being researched. However, this powder sintering method requires a long manufacturing process, and it is difficult to manufacture long materials.

このようなことから、酸化物超電導体の原料物質を溶媒
に溶かし、この溶液を霧状化して火炎中に供給し、火炎
により化学反応せしめて酸化物超電導体の前駆物質とな
し、これを火炎前方に配置した基体上に膜状に付着させ
てなる噴霧加熱反応法が提案されている。
For this reason, the raw material for oxide superconductors is dissolved in a solvent, this solution is atomized and supplied into a flame, and the flame causes a chemical reaction to form a precursor for oxide superconductors. A spray heating reaction method has been proposed in which a film is deposited on a substrate placed in front of the substrate.

この方法は、工程が短く又反応速度が速いので生産性に
富み、更に基体を走行させこれに酸化物超電導体前駆物
質を連続的に付着させるようにすると長尺材が容易に製
造し得るという利点がある。
This method is highly productive because the process is short and the reaction rate is fast, and it is said that long materials can be easily produced by running the substrate and continuously depositing the oxide superconductor precursor on it. There are advantages.

しかしながらこの製造方法によると、特に長尺材を製造
する場合に、得られる酸化物超電導体前駆物質膜は特性
が経時的に低下するという問題があった。
However, according to this manufacturing method, there is a problem in that the properties of the obtained oxide superconductor precursor film deteriorate over time, especially when manufacturing a long material.

〔課題を解決するための手段及び作用]本発明はかかる
状況に鑑み鋭意研究を行い、噴霧加熱反応法により製造
される酸化物超電導体前駆物質膜の特性が経時的に低下
する原因が、超音波噴霧器内の原料溶液の減少に伴って
霧状原料溶液の火炎中への供給量が減少し、火炎中での
溶液の蒸発による火炎温度の低下が少なくなり、その結
果火炎温度が上昇し所定温度以上に加熱されて、酸化物
超電導体前駆物質が分解される為に起きることを突きと
め、かかる現象の改善について更に研究を重ねて本発明
を完成させるに到ったものである。
[Means and effects for solving the problem] In view of the above situation, the present invention has conducted intensive research and has determined that the cause of the deterioration of the properties of the oxide superconductor precursor film produced by the spray heating reaction method over time has been determined by the present invention. As the raw material solution in the sonic atomizer decreases, the amount of atomized raw material solution supplied into the flame decreases, and the drop in flame temperature due to evaporation of the solution in the flame decreases, resulting in an increase in flame temperature and a predetermined level. It was discovered that this phenomenon occurs because the oxide superconductor precursor material is decomposed when heated above the temperature, and the present invention was completed after further research into improving this phenomenon.

即ち本発明は、酸化物超電導体となし得る原料物質を所
定量溶媒に溶解し、この原料溶液を超音波噴霧器内に入
れて霧状化し、この霧状原料溶液をキャリアガスにのせ
てバーナを介して火炎中に連続供給して上記霧状原料溶
液を化学反応せしめ、生成した酸化物超電導体前駆物質
を火炎前方に配置した基体上に付着せしめる酸化物超電
導体前駆物質膜の製造方法において、上記原料溶液の液
位を連続的に検出し、これを電気信号に変換してキャリ
アガス流速制御器に伝達してキャリアガスの流速を上記
原料溶液の液位に連動させて制御することにより、前記
霧状原料溶液の火炎中への供給量を一定に保持するよう
にしたことを特徴とする酸化物超電導体前駆物質膜の製
造方法である。
That is, in the present invention, a predetermined amount of a raw material that can be made into an oxide superconductor is dissolved in a solvent, this raw material solution is put into an ultrasonic atomizer to atomize it, and this atomized raw material solution is placed on a carrier gas and a burner is turned on. In a method for producing an oxide superconductor precursor film, the atomized raw material solution is chemically reacted by being continuously supplied into a flame through a flame, and the produced oxide superconductor precursor is deposited on a substrate placed in front of the flame, By continuously detecting the liquid level of the raw material solution, converting it into an electric signal and transmitting it to a carrier gas flow rate controller, and controlling the flow rate of the carrier gas in conjunction with the liquid level of the raw material solution, This method of producing an oxide superconductor precursor film is characterized in that the amount of the atomized raw material solution supplied into the flame is kept constant.

本発明方法では例えば超音波噴霧器内の原料溶液の液位
を磁気的又は光学的等の方法により連続的に検出し、こ
れを電気信号に変えてこれをキャリアガスの流速を制御
するキャリアガス流速制御器(MFC)に伝達して、超
音波噴霧器内の原料溶液の低減に伴う霧状原料溶液の発
生量の減少を、キャリアガスの流速を増加させて補い、
火炎中への霧状原料溶液の供給量が常時一定になるよう
にしたので、以後火炎による加熱温度を所定温度に保持
してやることにより適正な組成からなる高品質な酸化物
超電導体前駆物質膜が形成できるものである。又本発明
方法において、原料溶液を補給したりした場合は、キャ
リアガス流速を低く制御すれば、火炎中への霧状原料溶
液の供給量は一定に保持できるものである。尚、本発明
方法はキャリアガスの増減が火炎温度にほとんど影響し
ないことをVf!認してなされたものである。
In the method of the present invention, for example, the liquid level of the raw material solution in an ultrasonic atomizer is continuously detected by a method such as magnetically or optically, and this is converted into an electric signal, which is used to control the flow rate of the carrier gas. The flow rate of the carrier gas is increased to compensate for the decrease in the amount of atomized raw material solution generated due to the reduction of the raw material solution in the ultrasonic atomizer by transmitting the information to the controller (MFC).
Since the amount of atomized raw material solution supplied into the flame is always constant, the heating temperature by the flame is maintained at a predetermined temperature from then on, thereby producing a high-quality oxide superconductor precursor film with an appropriate composition. It is something that can be formed. In addition, in the method of the present invention, when the raw material solution is replenished, the amount of atomized raw material solution supplied into the flame can be kept constant by controlling the flow rate of the carrier gas to be low. In addition, in the method of the present invention, the increase or decrease of carrier gas has almost no effect on the flame temperature, Vf! This was done with recognition.

本発明方法において、基体には原料物質と加熱接触して
実質的に有害とならない程度に非反応性であり、且つ耐
熱性に富む材料、例えばAg、Au、PL等の貴金属又
はMgO1ZrO,、BaAL(L 、BaZr0.等
のセラミックス、或いはAg等の金属、MgO等のセラ
ミックスを被覆したFe、Ni、Coやこれらの合金例
えばステンレススチール(SUS) 、Fe−Ni系、
Ni−Cu系、Ni−Cr−Fe系の合金、又はAj!
□03、ガラス、AlN5BN、S i C,C等の材
料が用いられる。
In the method of the present invention, the substrate is made of a material that is non-reactive to the extent that heating contact with the raw material does not substantially cause harm and is highly heat resistant, such as a noble metal such as Ag, Au, or PL, or a noble metal such as MgO, ZrO, or BaAL. (L, Fe, Ni, Co or alloys thereof coated with ceramics such as BaZr0., metals such as Ag, ceramics such as MgO, such as stainless steel (SUS), Fe-Ni system,
Ni-Cu alloy, Ni-Cr-Fe alloy, or Aj!
Materials such as □03, glass, AlN5BN, S i C, and C are used.

本発明方法において、酸化物超電導体となし得る原料物
質としては、酸化物超電導体の製造過程で生成する酸化
物等、例えばY−Ba−Cu−0系酸化物超電導体につ
いて示すと、Y□0.、Bao、CuO1BaCuO,
、YBaCuOs、YBazCulO,等の酸化物がY
:Ba:Coの原子比でt:Z:aになるように配合し
混合したものであれば任意の物質が用いられる。
In the method of the present invention, raw materials that can be used as oxide superconductors include oxides generated during the manufacturing process of oxide superconductors, such as Y-Ba-Cu-0-based oxide superconductors. 0. ,Bao,CuO1BaCuO,
, YBaCuOs, YBazCulO, etc.
Any substance can be used as long as it is blended and mixed so that the atomic ratio of :Ba:Co becomes t:Z:a.

又上記原料物質を溶液となし霧状化して火炎により加熱
して得られる酸化物超電導体前駆物質膜とは、これを酸
素含有雰囲気中で所定の加熱処理を施すことにより、O
tの補給並びに結晶構造の調整がなされて酸化物起電導
体となるものである。
In addition, the oxide superconductor precursor film obtained by atomizing the above-mentioned raw material into a solution and heating it with flame refers to the oxide superconductor precursor film that is obtained by subjecting it to a predetermined heat treatment in an oxygen-containing atmosphere.
By replenishing t and adjusting the crystal structure, it becomes an oxide electromotive conductor.

〔実施例〕〔Example〕

次に本発明方法を実施例により詳細に説明する。 Next, the method of the present invention will be explained in detail using examples.

実施例1 第1図は本発明方法の酸化物超電導体前駆物質膜の製造
方法の一実施例を示す要部説明図である。
Embodiment 1 FIG. 1 is an explanatory view of a main part showing an embodiment of the method of manufacturing an oxide superconductor precursor film according to the present invention.

図において1は原料溶液、2は上記原料溶液1を霧状化
するための超音波噴霧器、3は霧状原料溶液、4は上記
霧状原料溶液3を前駆物質に化学反応させる為の噴霧加
熱反応装置である。
In the figure, 1 is a raw material solution, 2 is an ultrasonic atomizer for atomizing the raw material solution 1, 3 is an atomized raw material solution, and 4 is spray heating for chemically reacting the atomized raw material solution 3 into a precursor substance. It is a reactor.

出発原料にY (CHsCOO)s’ 4Hid、Ba
(CHsCOO)t−HzOlCu (CHsCOO)
i・HよOを用い、各々の化合物をY:Ba:Cuが1
:2:3になるように秤量し、これを水にYBa、Cu
、の組成で0.04モル/l溶解しこれに全体の5容量
%に相当する酢酸を添加して原料溶液lとなし、次いで
この原料溶液1を超音波噴霧器2内に入れて霧状化し、
この霧状原料溶液3を流速0.601 /winのN8
ガス流にのせて噴霧加熱反応装置4内に設置したバーナ
5内に搬送し、これをバーナ5前方に形成される酸水素
火炎6により加熱して酸化物超電導体前駆物質に化学反
応させ、この前駆物質をアンコイラ17から供給され1
0閤/■inの速度で走行する図示していない加熱装置
により900℃に加熱された0、 2 tm″×5■”
のptテープ7上に付着させて厚さ100μの酸化物超
電導体前駆物質膜8を形成した。
Starting materials include Y (CHsCOO)s' 4Hid, Ba
(CHsCOO)t-HzOlCu (CHsCOO)
Using i・H and O, each compound is converted into Y:Ba:Cu=1
: Weigh it so that the ratio is 2:3, and add it to water with YBa and Cu.
, was dissolved at 0.04 mol/l, and acetic acid corresponding to 5% by volume of the total was added thereto to obtain a raw material solution 1. Next, this raw material solution 1 was placed in an ultrasonic atomizer 2 and atomized. ,
This atomized raw material solution 3 was passed through N8 at a flow rate of 0.601/win.
It is carried in a gas flow into a burner 5 installed in a spray heating reaction device 4, heated by an oxyhydrogen flame 6 formed in front of the burner 5, and chemically reacted into an oxide superconductor precursor. The precursor is supplied from the uncoiler 17.
0.2 tm"×5" heated to 900°C by a heating device (not shown) running at a speed of 0.
An oxide superconductor precursor film 8 having a thickness of 100 μm was formed by adhering it onto the PT tape 7 .

上記において、N8ガスの流速は下記の如く自動制御し
た。即ち、超音波噴霧器2内の原料溶液lに、浮玉9に
磁石の入った棒状部10を設けた磁気フロートllを浮
かせておき、このフロート11の棒状部10を超音波噴
霧器2上方に取付けた電気コイル12内に位置させてお
いて、上記フロート棒状部10の位置が上下すると上記
コイル12に流れる電流が変化する現象を利用して、上
記コイル電流を中央処理装置ff1(CPU)を介して
キャリアガス流速補正信号としてMFCに伝達してN、
ガスの流速を原料溶液1の液面レベルに連動させて自動
制御した。
In the above, the flow rate of N8 gas was automatically controlled as described below. That is, a magnetic float 11, which has a floating ball 9 and a rod-shaped part 10 containing a magnet, is floated on the raw material solution l in the ultrasonic sprayer 2, and the rod-shaped part 10 of this float 11 is attached above the ultrasonic sprayer 2. The current flowing through the coil 12 changes as the position of the float rod-shaped portion 10 rises and falls. and transmits it to the MFC as a carrier gas flow rate correction signal.
The gas flow rate was automatically controlled in conjunction with the liquid level of the raw material solution 1.

而してptテープ7上に付着した前記酸化物超電導体前
駆物質膜8を400°Cに加熱したO!気流雰囲気の加
熱反応炉13内に通して、上記前駆物質膜8を酸化物超
電導体膜に化学反応させて酸化物超電導導体14となし
た0次いで上記酸化物超電導導体14を溶融樹脂槽15
及び焼付炉16内に通して樹脂を被覆して防湿処理を施
したのち、コイラー27に巻取った。
Then, the oxide superconductor precursor film 8 deposited on the PT tape 7 was heated to 400°C with O! The precursor film 8 was passed through a heating reactor 13 in an airflow atmosphere to chemically react the oxide superconductor film to form an oxide superconductor 14.Then, the oxide superconductor 14 was transferred to a molten resin tank 15.
Then, it was passed through a baking furnace 16 and coated with a resin to perform moisture-proofing treatment, and then wound around a coiler 27.

このようにして連続5時間操業してY系酸化物超電導導
体を3m製造した。
In this way, the operation was continued for 5 hours to produce 3 m of Y-based oxide superconducting conductor.

比較例1 実施例1においてN2ガスの流量を一定にした他は実施
例1と同じ方法により酸化物超電導導体を製造した。
Comparative Example 1 An oxide superconducting conductor was manufactured by the same method as in Example 1 except that the flow rate of N2 gas was kept constant.

斯くの如くして得られた各々の酸化物超電導導体につい
て、長手方向に3ケ所サンプリングして臨界温度(T、
)及び臨界電流密度(Jc )を測定した。結果は第1
表に示した。
For each oxide superconducting conductor obtained in this way, three locations were sampled in the longitudinal direction to determine the critical temperature (T,
) and critical current density (Jc) were measured. The result is the first
Shown in the table.

第  1  表 本液体窒素(77K)中にて4端子法により測定。Table 1 Measured using the 4-probe method in liquid nitrogen (77K).

第1表より明らかなように本発明方法品は、全長に亘り
Tc、Jcが高い値を示した。
As is clear from Table 1, the products produced by the method of the present invention showed high values of Tc and Jc over the entire length.

これに対し比較方法品は、経時的にTc、Jcが低下し
た。これは、超音波噴霧器内の原料溶液が時間とともに
減少し、それにつれて霧状原料溶液の発生量が減じたに
も拘わらず、キャリアガスの流速を一定とした為に、上
記霧状原料溶液の火炎中への供給量が低下し、その結果
火炎温度が上昇し前駆物質膜が所定温度以上に加熱され
て分解したためである。
On the other hand, in the comparative method product, Tc and Jc decreased over time. This is because the flow rate of the carrier gas was kept constant, even though the raw material solution in the ultrasonic atomizer decreased over time and the amount of atomized raw material solution generated decreased accordingly. This is because the amount supplied into the flame decreased, and as a result, the flame temperature rose, and the precursor film was heated to a predetermined temperature or higher and decomposed.

尚、前記実施例1では、原料溶液の液面レベルを電気信
号に変換するのに磁気的方法を用いたが、他の方法例え
ば第2図に示したような光学的方法によってもよい、即
ちこの光学的方法は、超音波噴霧器2の上方に複数の受
、発光素子18.19を対向配置させておき、この受、
発光素子18゜19間に原料溶液1に浮かせたフロート
21の上部を位置させて、フロート21の上下移動によ
る受光量変化を電気信号としてCPUを介してMFCに
伝達してキャリアガス流速を制御するものである。
In Example 1, a magnetic method was used to convert the liquid level of the raw material solution into an electrical signal, but other methods such as an optical method as shown in FIG. 2 may also be used. In this optical method, a plurality of receivers and light emitting elements 18 and 19 are arranged facing each other above the ultrasonic atomizer 2, and the receiver,
The upper part of the float 21 suspended in the raw material solution 1 is positioned between the light emitting elements 18 and 19, and changes in the amount of light received due to the vertical movement of the float 21 are transmitted as electrical signals to the MFC via the CPU to control the carrier gas flow rate. It is something.

〔効果] 以上述べたように本発明方法によれば、全長に亘り高品
質の酸化物超電導体前駆物質膜が得られ、この前駆物質
膜は、酸素含有雰囲気中で所定の加熱処理を施すことに
より、Tc、Je等の超電導特性に優れた酸化物超電導
導体となし得るもので、工業上顕著な効果を奏する。
[Effects] As described above, according to the method of the present invention, a high-quality oxide superconductor precursor film can be obtained over the entire length, and this precursor film can be subjected to a prescribed heat treatment in an oxygen-containing atmosphere. Therefore, it can be made into an oxide superconducting conductor having excellent superconducting properties such as Tc and Je, and has a remarkable industrial effect.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明方法の一実施例を示す要部説明図、第2
図は本発明方法の他の実施例を示す超音波噴霧器近傍の
部分説明図である。 l・・・原料溶液、 2・・・超音波噴霧器、 3・・
・霧状原料溶液、 4・・・噴霧加熱反応装置、 5・
・・バーナ、 6・・・酸水素火炎、 7・・・基体、
 8・・・酸化物超電導体前駆物質膜、  11.21
・・・フロート、  12・・・電気コイル、  14
・・・酸化物超電導導体。
Fig. 1 is an explanatory diagram of the main parts showing one embodiment of the method of the present invention;
The figure is a partial explanatory diagram of the vicinity of an ultrasonic atomizer showing another embodiment of the method of the present invention. l... Raw material solution, 2... Ultrasonic atomizer, 3...
- Atomized raw material solution, 4... Spray heating reaction device, 5.
... Burner, 6... Oxyhydrogen flame, 7... Substrate,
8... Oxide superconductor precursor film, 11.21
...Float, 12...Electric coil, 14
...Oxide superconductor.

Claims (1)

【特許請求の範囲】[Claims] 酸化物超電導体となし得る原料物質を所定量溶媒に溶解
し、この原料溶液を超音波噴霧器内に入れて霧状化し、
この霧状原料溶液をキャリアガスにのせてバーナを介し
て火炎中に連続供給して上記霧状原料溶液を化学反応せ
しめ、生成した酸化物超電導体前駆物質を火炎前方に配
置した基体上に付着せしめる酸化物超電導体前駆物質膜
の製造方法において、上記原料溶液の液位を連続的に検
出し、これを電気信号に変換してキャリアガス流速制御
器に伝達してキャリアガスの流速を上記原料溶液の液位
に連動させて制御することにより、前記霧状原料溶液の
火炎中への供給量を一定に保持するようにしたことを特
徴とする酸化物超電導体前駆物質膜の製造方法。
A predetermined amount of a raw material that can be made into an oxide superconductor is dissolved in a solvent, and this raw material solution is placed in an ultrasonic atomizer to atomize it,
This atomized raw material solution is placed on a carrier gas and continuously fed into a flame via a burner to cause a chemical reaction in the atomized raw material solution, and the generated oxide superconductor precursor is deposited on a substrate placed in front of the flame. In the method for producing an oxide superconductor precursor film, the liquid level of the raw material solution is continuously detected, and this is converted into an electrical signal and transmitted to a carrier gas flow rate controller to control the flow rate of the carrier gas. A method for producing an oxide superconductor precursor film, characterized in that the amount of the atomized raw material solution supplied into the flame is maintained constant by controlling it in conjunction with the liquid level of the solution.
JP1024701A 1989-02-02 1989-02-02 Production of film of precursor of oxide superconductor Pending JPH02204309A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1024701A JPH02204309A (en) 1989-02-02 1989-02-02 Production of film of precursor of oxide superconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1024701A JPH02204309A (en) 1989-02-02 1989-02-02 Production of film of precursor of oxide superconductor

Publications (1)

Publication Number Publication Date
JPH02204309A true JPH02204309A (en) 1990-08-14

Family

ID=12145482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1024701A Pending JPH02204309A (en) 1989-02-02 1989-02-02 Production of film of precursor of oxide superconductor

Country Status (1)

Country Link
JP (1) JPH02204309A (en)

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