JPH02205603A - Manufacture of super fine particles and magnetic super fine particles and magnetic material - Google Patents
Manufacture of super fine particles and magnetic super fine particles and magnetic materialInfo
- Publication number
- JPH02205603A JPH02205603A JP1023598A JP2359889A JPH02205603A JP H02205603 A JPH02205603 A JP H02205603A JP 1023598 A JP1023598 A JP 1023598A JP 2359889 A JP2359889 A JP 2359889A JP H02205603 A JPH02205603 A JP H02205603A
- Authority
- JP
- Japan
- Prior art keywords
- fine particles
- magnetic
- silicon
- ultrafine particles
- super fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 239000000696 magnetic material Substances 0.000 title claims description 17
- 239000010419 fine particle Substances 0.000 title abstract description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000002994 raw material Substances 0.000 claims abstract description 17
- 229910052742 iron Inorganic materials 0.000 claims abstract description 16
- 238000009832 plasma treatment Methods 0.000 claims abstract description 16
- 239000000843 powder Substances 0.000 claims abstract description 16
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 15
- 239000010703 silicon Substances 0.000 claims abstract description 15
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 6
- 239000000956 alloy Substances 0.000 claims abstract description 6
- 239000011812 mixed powder Substances 0.000 claims abstract description 6
- 239000011882 ultra-fine particle Substances 0.000 claims description 31
- 230000005389 magnetism Effects 0.000 claims description 2
- 239000002245 particle Substances 0.000 abstract description 33
- 238000000034 method Methods 0.000 abstract description 8
- 229910052748 manganese Inorganic materials 0.000 abstract description 3
- 229910000676 Si alloy Inorganic materials 0.000 description 10
- XWHPIFXRKKHEKR-UHFFFAOYSA-N iron silicon Chemical compound [Si].[Fe] XWHPIFXRKKHEKR-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000005245 sintering Methods 0.000 description 7
- 238000005118 spray pyrolysis Methods 0.000 description 7
- 230000004907 flux Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000011572 manganese Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000006023 eutectic alloy Substances 0.000 description 2
- 239000003302 ferromagnetic material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Powder Metallurgy (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、鉄とケイ素を含む超微粒子の製造方法等に関
し、磁性材料、熱電材料、良熱伝導性材料、焼結材料等
の製造に利用することができる。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a method for producing ultrafine particles containing iron and silicon, and is applicable to the production of magnetic materials, thermoelectric materials, materials with good thermal conductivity, sintered materials, etc. can be used.
鉄−ケイ素合金は、磁性材料（焼結体、電磁シールド、
添加剤）、熱電材料、触媒等として各種の工業分野で用
いられている。従来、この合金微粒子は、高速ボールミ
ル回転法、噴霧熱分解法により製造されている。噴霧熱
分解法では、鉄とケイ素を含む原料粉末を溶融した後、
噴霧熱分解を行い、次に解砕を行って製造している。そ
して、この鉄−ケイ素合金微粒子を使用して、熱電素子
、磁性体等を製造する場合には、所要形状にプレス成形
した後、焼結し、更に所要の熱処理を施すことにより特
性の向上を図っている。Iron-silicon alloys are used as magnetic materials (sintered bodies, electromagnetic shields,
It is used in various industrial fields as additives), thermoelectric materials, catalysts, etc. Conventionally, this alloy fine particle has been produced by a high-speed ball mill rotation method or a spray pyrolysis method. In the spray pyrolysis method, after melting raw material powder containing iron and silicon,
It is manufactured by spray pyrolysis followed by crushing. When manufacturing thermoelectric elements, magnetic materials, etc. using these iron-silicon alloy fine particles, properties can be improved by press-forming them into the desired shape, sintering them, and then subjecting them to the necessary heat treatment. I'm trying.
鉄−ケイ素合金を材料として、例えば磁性体を作製し、
強磁性体を得るには、その飽和磁束密度Ｂｇが高いこと
が要求される。しかし、上述した従来の噴霧熱分解法に
よれば、直径１００人前後の超微粒子が得にくいことに
加えて、粒径のばらつきが大きい、即ち粒径分布がシャ
ープではないため、微粒子の粉体特性が悪くなり、得ら
れる磁性体の飽和磁束密度Ｂｓが低いという問題点があ
った。For example, a magnetic material is produced using an iron-silicon alloy as a material,
In order to obtain a ferromagnetic material, it is required that its saturation magnetic flux density Bg be high. However, according to the conventional spray pyrolysis method described above, it is difficult to obtain ultrafine particles with a diameter of about 100 mm, and the particle size varies widely, that is, the particle size distribution is not sharp. There were problems in that the characteristics deteriorated and the obtained magnetic material had a low saturation magnetic flux density Bs.
また、従来の噴霧熱分解法により得られた鉄−ケイ素合
金微粒子を用いて熱電素子を作製した場合にも、上記と
同様に、微粒子の粉体特性が不良であることに基づいて
熱起電力が低いという問題点があった。In addition, when a thermoelectric element is fabricated using iron-silicon alloy fine particles obtained by the conventional spray pyrolysis method, thermoelectromotive force is generated based on the poor powder characteristics of the fine particles, similar to the above. There was a problem that the value was low.
更に、従来の噴霧熱分解による微粒子の製造法によれば
、工程自体が複雑で、実施が容易ではないという欠点も
あった。Furthermore, the conventional method for producing fine particles by spray pyrolysis has the disadvantage that the process itself is complicated and is not easy to implement.
一方、高速ボールミル回転法によれば、粒径が小さく、
且つ粒径分布のシャープな微粒子が得られないという問
題点がある。On the other hand, according to the high-speed ball mill rotation method, the particle size is small;
Another problem is that fine particles with a sharp particle size distribution cannot be obtained.
本発明は、鉄−ケイ素合金の超微粒子が得られ、且つそ
の粒径のばらつきを小さくすることができる超微粒子の
製造方法及びこの製造方法に係る磁性超微粒子と磁性材
料を提供することを目的とする。An object of the present invention is to provide a method for producing ultrafine particles that can obtain ultrafine particles of an iron-silicon alloy and to reduce variations in particle size, and to provide magnetic ultrafine particles and magnetic materials related to this manufacturing method. shall be.
本発明に係る超微粒子の製造方法は、鉄とケイ素を含む
混合粉末又は鉄とケイ素を含む合金粉末に対してプラズ
マ処理を施すことを特徴とする。The method for producing ultrafine particles according to the present invention is characterized in that a mixed powder containing iron and silicon or an alloy powder containing iron and silicon is subjected to plasma treatment.
鉄とケイ素より成る原料粉末Ｆ ｅｚ Ｓ Ｉ ｌ’−
Ｘの場合、Ｘ −０，２００−０，９９９の範囲とする
が、用途に応じてそのＸは、次のように設定する。即ち
、例えば熱電材料として使用する場合、好ましくはＸ＝
０．３０〜０．３５とし、また磁性材料として使用する
場合、好ましくはＸ＝０．８０〜０．９９とする。Raw material powder consisting of iron and silicon
In the case of X, the range is X -0,200-0,999, but depending on the purpose, X is set as follows. That is, for example, when used as a thermoelectric material, preferably X=
X=0.30 to 0.35, and when used as a magnetic material, preferably X=0.80 to 0.99.
また、使用する原料粉末中には、鉄とケイ素以外の成分
、例えばコバルトｃｏ、マンガンＭｎ等が含まれていて
もよい。Further, the raw material powder used may contain components other than iron and silicon, such as cobalt co and manganese Mn.
このプラズマ処理は、高周波高温プラズマ処理、所謂熱
プラズマ処理とするのがよい。This plasma treatment is preferably a high frequency high temperature plasma treatment, so-called thermal plasma treatment.
このプラズマ処理の条件を適当に制御して、得られる微
粒子の粒径を制御する。そして、このプラズマ処理によ
って制御可能な粒径は、約５０人〜約５０００人の広範
囲にわたる０粒径の制御は、ＲＦプラズマパワー、処理
量、冷却ガスの流量を制御することにより可能であり、
通常ＲＦプラズマパワーの増大、処理量の減少により粒
径は小さくなる。The particle size of the resulting fine particles is controlled by appropriately controlling the conditions of this plasma treatment. The particle size that can be controlled by this plasma treatment is 0 particle size, which can be controlled over a wide range of about 50 to about 5,000 people by controlling the RF plasma power, processing amount, and cooling gas flow rate.
Generally, increasing the RF plasma power and decreasing the throughput will reduce the particle size.
上記製造方法により製造された超微粒子は、磁性を有す
る超微粒子である。そして、この磁性超微粒子を含む原
料を焼結して磁性材料とすることができる。The ultrafine particles manufactured by the above manufacturing method are magnetic ultrafine particles. Then, the raw material containing the magnetic ultrafine particles can be sintered to form a magnetic material.
また、このプラズマ処理して得られた超微粒子中には、
半導体相の微粒子が含まれる。熱電材料として使用する
場合には、この半導体相微粒子の含有割合は高い程好ま
しく、全部が半導体相微粒子であってもよい、また、こ
の超微粒子には半導体相と金属相との混合相よりなる超
微粒子が含まれていてもよく、全部がこの混合相より成
る超微粒子とすることができる。In addition, in the ultrafine particles obtained by this plasma treatment,
Contains fine particles of semiconductor phase. When used as a thermoelectric material, it is preferable that the content of the semiconductor phase fine particles be as high as possible, and all of the semiconductor phase fine particles may be semiconductor phase fine particles.Also, the ultrafine particles may be composed of a mixed phase of a semiconductor phase and a metal phase. Ultrafine particles may be included, and the ultrafine particles can be made entirely of this mixed phase.
なお、上記製造方法により得られた超微粒子をそのまま
粉体として使用することもできるが、所定形状にプレス
成形した後、適当な温度（例えば６００〜１１５０°Ｃ
）で焼結し、更に所定温度（８００〜８５０°Ｃ）の熱
処理を施すことにより、得られる素子等の特性を向上さ
せることができる。The ultrafine particles obtained by the above manufacturing method can be used as they are as a powder, but after being press-molded into a predetermined shape,
) and further heat treatment at a predetermined temperature (800 to 850°C), the characteristics of the resulting device can be improved.
なお、焼結のための原料としては、プラズマ処理された
超微粒子のみを用いる場合、あるいは、類似組成の０．
５〜５μｍ程度の粒子径の原料との混合粉を用いる場合
がある。この際の超微粒子の配合割合は、特に制限なく
１０重量％以上、好ましくは２０重量％以上とする。In addition, when only plasma-treated ultrafine particles are used as the raw material for sintering, or when using 0.05 mm of particles with a similar composition.
A mixed powder with a raw material having a particle size of about 5 to 5 μm may be used. The blending ratio of the ultrafine particles at this time is not particularly limited and is 10% by weight or more, preferably 20% by weight or more.
本発明によれば、得られる鉄−ケイ素合金微粒子の粒径
を従来法によるものより小さくすることができ、且つ粒
径のばらつきを小さく、即ち粒径分布をシャープにする
ことができる。従って、粒径に関する特性が良好である
ため、この超微粒子を使用して製造した熱電素子、磁性
体等の各種特性が向上する。According to the present invention, the particle size of the obtained iron-silicon alloy fine particles can be made smaller than that obtained by conventional methods, and the variation in particle size can be reduced, that is, the particle size distribution can be made sharp. Therefore, since the properties related to particle size are good, various properties of thermoelectric elements, magnetic bodies, etc. manufactured using these ultrafine particles are improved.
１１且上
第１図に示すように、鉄とケイ素より成る原料粉末Ｆ
ｅＸ Ｓ ＋ ＋−ｘ （Ｘ＝０．８０〜０．９９）
、１５０〜４日メツシュを使用してＲＦプラズマ炉１
にＡｒガスと共に供給し、高周波コイル２で温度５千〜
１万にの熱プラズマを発生させて原料粉末を気化させた
。そして、下方でＡ「ガスにより、気化した原料粉末を
急冷して固化させることにより、磁性超微粒子３を製造
した。11. As shown in Figure 1 above, raw material powder F consisting of iron and silicon
eX S + +-x (X=0.80~0.99)
, 150-4 days RF plasma furnace using mesh
is supplied with Ar gas to
The raw material powder was vaporized by generating thermal plasma of 10,000 degrees. Then, below, the vaporized raw material powder was rapidly cooled and solidified using gas A, thereby producing magnetic ultrafine particles 3.
得られた鉄−ケイ素合金超微粒子３は、均一組成であり
、また粒径が５０〜１００人の範囲内にあり、且つその
粒径分布がシャープであった。The obtained iron-silicon alloy ultrafine particles 3 had a uniform composition, a particle size within a range of 50 to 100 particles, and a sharp particle size distribution.
この熱プラズマ処理の際の具体的な諸条件、好ましい範
囲は次の通りである。Specific conditions and preferred ranges for this thermal plasma treatment are as follows.
ＲＦパワー −−−−一−−−４５（１０〜７０）ｋＷ
Ａｒ［量 −−−−４０（１０〜１００ ） ｔ！／
５ｉｎＨ２流量 −−−４（１〜１０ ） ｌ／１ｎ
原料供給量 −−−−−−−−−１０（１〜１００ ）
ｇ／ｍ１１１なお、Ａｒ 流量とは、原料と共に供給
するＡｒガスと他の２箇所から供給するＡｒガスを含め
た２ｉｔＮである。また、ＨよはＲＦプラズマ炉炉内内
供給し、アルゴンプラズマの温度制御作用とプラズマを
安定化させる作用を有する。RF power -------45 (10-70) kW
Ar [amount ----40 (10-100) t! /
5inH2 flow rate ---4 (1~10) l/1n
Raw material supply amount ---------10 (1 to 100)
g/m111 Note that the Ar flow rate is 2itN, which includes the Ar gas supplied together with the raw material and the Ar gas supplied from the other two locations. Further, H is supplied into the RF plasma furnace, and has the function of controlling the temperature of the argon plasma and stabilizing the plasma.
この鉄−ケイ素合金磁性超微粒子３を原料として使用し
、磁性体を作製した。A magnetic body was produced using the iron-silicon alloy magnetic ultrafine particles 3 as a raw material.
先ず、所定形状にプレス成形した後、このプレス成形体
を焼結した。この焼結は一真空中で１０００〜１１５０
°Ｃ５２４時間の条件で行った。First, after press-forming into a predetermined shape, this press-formed body was sintered. This sintering is performed in one vacuum at a temperature of 1000 to 1150
The test was carried out at 524°C for 24 hours.
次に、所要の熱処理（８００〜８５０°Ｃ）を施して本
実施例に係る磁性体を得た。Next, a required heat treatment (800 to 850°C) was performed to obtain a magnetic body according to this example.
本実施例の磁性体について、使用する原料粉末ＦｅＸ５
ｆ １−ｘの組成Ｘを変え、飽和磁束密度ＢＳを測定
した結果を第２図の曲線Ａに示す。また、従来の噴霧熱
分解法で製造したＦ ｅｏ、ｑ＋ｓ ｉ。、。。Regarding the magnetic material of this example, the raw material powder FeX5 used
Curve A in FIG. 2 shows the results of measuring the saturation magnetic flux density BS by changing the composition X of f 1-x. Also, F eo, q+s i produced by conventional spray pyrolysis method. ,. .
微粒子（粒径０．５〜５μｍ）を用いて同様に作製した
磁性体についての飽和磁束密度Ｂｓを測定した結果を第
２図のＢに示す。B in FIG. 2 shows the results of measuring the saturation magnetic flux density Bs of a magnetic material similarly produced using fine particles (particle size 0.5 to 5 μm).
これらの測定結果より、本実施例に係る磁性体は、従来
例の磁性体と比べて、構成微粒子の粒径が小さく、且つ
狭い粒径分布を有するため、作製された磁性体の飽和磁
束密度Ｂｓが向上し、強磁性体が得られることがわかる
。From these measurement results, the magnetic material according to this example has a smaller particle size and a narrower particle size distribution than the conventional magnetic material, so the saturation magnetic flux density of the produced magnetic material is lower. It can be seen that Bs is improved and a ferromagnetic material can be obtained.
ｌｌ■１
本発明に係るプラズマ処理工程において、プラズマの処
理条件、特にＲＦパワーを変えることにより、生成され
る鉄−ケイ素合金超微粒子の相を半導体相のみではなく
、半導体相と金属相との混合相とすることができる。ll■1 In the plasma treatment process according to the present invention, by changing the plasma treatment conditions, especially the RF power, the phase of the generated iron-silicon alloy ultrafine particles is not only a semiconductor phase, but a mixture of a semiconductor phase and a metal phase. It can be a mixed phase.
金属相の鉄シリサイド合金Ｆｅ５ｉｚ（実際は、Ｆｅ
：Ｓｉ ： （Ｃｏ又はＭｎ ） ＝ （０，８
５０〜０．９９５） ： ２．０５ ： （０，００５
〜０．１５０ ） ｌの粉末を使用し、これを上記実施
例１と同様にＲＦＦプラズマ炉に供給し、下記に示す条
件範囲で熱プラズマ処理を施して超微粒子３を製造した
。得られたＦｅ Ｓｔよの共晶合金超微粒子３は、粒径
が５０〜５０００人の範囲内にあり、金属相（α、ε）
と半導体相（β）の比率は（０〜１）：（０，３〜１０
．０）であった。Metal phase iron silicide alloy Fe5iz (actually, Fe
:Si : (Co or Mn) = (0,8
50~0.995): 2.05: (0,005
~0.150) l of powder was used, supplied to the RFF plasma furnace in the same manner as in Example 1, and subjected to thermal plasma treatment under the conditions shown below to produce ultrafine particles 3. The obtained Fe-St eutectic alloy ultrafine particles 3 have a particle size in the range of 50 to 5000 particles, and have a metallic phase (α, ε).
and the semiconductor phase (β) is (0~1):(0,3~10
．． 0).
ＲＦパワー −・・−・−一−−−−−−−−−−−・
・・・・ １０〜１００ｋＷＡｒ流量 −−−−−−
−−−１０〜１００１ ／ｗｉｎＨ８流量 ”−’・
−’−−−−−−− １〜１０１！ ／ｗｉｎ原料
供給量 ・−・−・−・・・・・・・−１〜１００ ｇ
／ｗｉｎ本実施例においては、具体的な処理条件として
ＲＦパワー＝３５ｋＷ、Ａｒ流１＆−３０１／ｓｉｎ、
Ｈ、流量−２４！／ｓｉｎ、原料供給量＝ ５ ｇ／ｓ
ｉｎに設定して、粒径が２５０〜７００人の超微粒子３
を製造した。RF power −・・−・−１−−−−−−−−−−・
・・・・10～100kWAr flow rate --------
---10~1001 /winH8 flow rate "-'・
-'--------- 1~101! /win raw material supply amount ・−・−・−・・・・・・・−1～100 g
/win In this example, the specific processing conditions are RF power = 35 kW, Ar flow 1&-301/sin,
H, flow rate -24! /sin, raw material supply amount = 5 g/s
Ultrafine particles 3 with a particle size of 250 to 700
was manufactured.
このようにして得られたＦｅ５ｉｚの共晶合金微粒子〔
（α十ε）：β＝１ ： ３）を熱電材料として使用し
、プレス成形工程、焼結工程（真空中、１１００°Ｃ，
５時間）及び熱処理工程（８００°Ｃ２４時間）を行っ
てＮ型、Ｐ型の熱電素子を製造した。Fe5iz eutectic alloy fine particles thus obtained [
(α1ε):β=1:3) was used as a thermoelectric material, and the press molding process and sintering process (in vacuum, 1100°C,
5 hours) and a heat treatment process (800°C for 24 hours) to produce N-type and P-type thermoelectric elements.
第３図に、混合相の割合〔β／（α十ε）〕が３．０で
ある超微粒子を使用して作製した熱電素子について、使
用した微粒子の粒径に対する、温度６００Ｋ（３２７°
Ｃ）における熱起電力を測定した結果を示す。また、焼
結温度を変えて作製した場合の熱電素子の熱起電力を測
定した結果も併せて示す、同図において、曲線Ａは８５
０°Ｃで２４時間、曲線Ｂは９００℃で２４時間、曲線
Ｃは１１５０″Ｃで２４時間の条件でそれぞれ焼結した
場合の粒径に対する熱起電力特性を示す、また、従来法
で得られた粉体（粒径２〜３μｍ）を用い、１１５０℃
、２４時間の条件で焼結し、その後８００″Ｃで２００
時間の熱処理を施して得た熱電素子の熱起電力は、６０
０にで０．３２ （ｍ Ｖ ／ Ｋ ）であった。Figure 3 shows the temperature of 600K (327°
The results of measuring the thermoelectromotive force in C) are shown. Also shown are the results of measuring the thermoelectromotive force of thermoelectric elements produced by changing the sintering temperature. In the figure, curve A is 85.
Curve B shows the thermoelectromotive force characteristics with respect to particle size when sintered at 0°C for 24 hours, curve B at 900°C for 24 hours, and curve C at 1150°C for 24 hours. using powder (particle size 2 to 3 μm) at 1150°C.
, sintered for 24 hours, then sintered at 800″C for 200 hrs.
The thermoelectromotive force of the thermoelectric element obtained by heat treatment for hours is 60
It was 0.32 (mV/K) at 0.
これらの測定結果によれば、本実施例に係る熱電素子は
、従来例の熱電素子と比べて優れた熱起電力特性を持っ
ていることがわかる。また、微粒子の粒径と混合相の比
〔β／（α＋ε）〕を変えることにより、熱起電力を制
御することができる。According to these measurement results, it can be seen that the thermoelectric element according to this example has superior thermoelectromotive force characteristics compared to the conventional thermoelectric element. Furthermore, the thermoelectromotive force can be controlled by changing the particle size of the fine particles and the ratio of the mixed phase [β/(α+ε)].
更に、焼結温度を変えることにより、熱起電力を制御す
ることができる。Furthermore, the thermoelectromotive force can be controlled by changing the sintering temperature.
本発明によれば、１００人前後までの鉄−ケイ素合金超
微粒子を、狭い粒径分布で制御性よく製造することがで
きる。また、この超微粒子を用いて焼結体を製造する場
合には、焼結温度を低くできる。更に、磁性を有するこ
の超微粒子を用いて特性の良好な磁性材料が得られる。According to the present invention, up to about 100 ultrafine iron-silicon alloy particles can be produced with a narrow particle size distribution and with good controllability. Furthermore, when producing a sintered body using these ultrafine particles, the sintering temperature can be lowered. Furthermore, a magnetic material with good characteristics can be obtained by using these ultrafine particles having magnetism.
第１図は実施例で使用する高周波プラズマ炉の断面図、
第２図は実施例の磁性体について組成に対する飽和磁束
密度を測定したグラフ、第３図は実施例の熱電素子につ
いて粒径に対する熱起電力特性を測定したグラフである
。
■・・・ＲＦプラズマ炉、３・・・超微粒子。Figure 1 is a cross-sectional view of the high-frequency plasma furnace used in the example.
FIG. 2 is a graph showing the saturation magnetic flux density versus composition of the magnetic material of the example, and FIG. 3 is a graph showing the thermoelectromotive force characteristics versus particle size of the thermoelectric element of the example. ■...RF plasma furnace, 3...Ultrafine particles.
Claims (3)
合金粉末に対してプラズマ処理を施すことを特徴とする
超微粒子の製造方法。(1) A method for producing ultrafine particles, which comprises subjecting a mixed powder containing iron and silicon or an alloy powder containing iron and silicon to plasma treatment.
合金粉末に対してプラズマ処理を施すことにより製造さ
れた超微粒子が磁性を有する磁性超微粒子。(2) Magnetic ultrafine particles in which the ultrafine particles have magnetism and are produced by subjecting a mixed powder containing iron and silicon or an alloy powder containing iron and silicon to plasma treatment.
体より成る磁性材料。(3) A magnetic material made of a sintered body of a raw material containing magnetic ultrafine particles according to claim 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1023598A JPH02205603A (en) | 1989-01-31 | 1989-01-31 | Manufacture of super fine particles and magnetic super fine particles and magnetic material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1023598A JPH02205603A (en) | 1989-01-31 | 1989-01-31 | Manufacture of super fine particles and magnetic super fine particles and magnetic material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02205603A true JPH02205603A (en) | 1990-08-15 |
Family
ID=12115037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1023598A Pending JPH02205603A (en) | 1989-01-31 | 1989-01-31 | Manufacture of super fine particles and magnetic super fine particles and magnetic material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02205603A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008138284A (en) * | 2006-11-02 | 2008-06-19 | Nisshin Seifun Group Inc | Alloy fine particles and method for producing the same |
| JP2011179023A (en) * | 2010-02-26 | 2011-09-15 | Japan Atomic Energy Agency | Nanoparticle manufacturing device and nanoparticle manufacturing method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5340583A (en) * | 1976-09-17 | 1978-04-13 | Sapporo Breweries Ltd | Inspecting apparatus for bottle.s bottom |
| JPS6130607A (en) * | 1984-07-20 | 1986-02-12 | Daido Steel Co Ltd | Manufacturing method of ultrafine powder alloy |
| JPS63143937A (en) * | 1986-12-09 | 1988-06-16 | Babcock Hitachi Kk | Plasma reactor for superfine powder manufacture |
-
1989
- 1989-01-31 JP JP1023598A patent/JPH02205603A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5340583A (en) * | 1976-09-17 | 1978-04-13 | Sapporo Breweries Ltd | Inspecting apparatus for bottle.s bottom |
| JPS6130607A (en) * | 1984-07-20 | 1986-02-12 | Daido Steel Co Ltd | Manufacturing method of ultrafine powder alloy |
| JPS63143937A (en) * | 1986-12-09 | 1988-06-16 | Babcock Hitachi Kk | Plasma reactor for superfine powder manufacture |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008138284A (en) * | 2006-11-02 | 2008-06-19 | Nisshin Seifun Group Inc | Alloy fine particles and method for producing the same |
| US8491696B2 (en) | 2006-11-02 | 2013-07-23 | Nisshin Seifun Group, Inc. | Ultrafine alloy particles, and process for producing the same |
| TWI474882B (en) * | 2006-11-02 | 2015-03-01 | 日清製粉集團本社股份有限公司 | Alloy ultrafine particles and manufacturing method thereof |
| JP2011179023A (en) * | 2010-02-26 | 2011-09-15 | Japan Atomic Energy Agency | Nanoparticle manufacturing device and nanoparticle manufacturing method |
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