JPH02206151A - Semiconductor cooler of heat-pipe system - Google Patents

Semiconductor cooler of heat-pipe system

Info

Publication number
JPH02206151A
JPH02206151A JP1027024A JP2702489A JPH02206151A JP H02206151 A JPH02206151 A JP H02206151A JP 1027024 A JP1027024 A JP 1027024A JP 2702489 A JP2702489 A JP 2702489A JP H02206151 A JPH02206151 A JP H02206151A
Authority
JP
Japan
Prior art keywords
heat
heat pipe
electrically insulating
property
absorbing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1027024A
Other languages
Japanese (ja)
Other versions
JP2677854B2 (en
Inventor
Takashi Murase
孝志 村瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP1027024A priority Critical patent/JP2677854B2/en
Priority to PCT/JP1990/000146 priority patent/WO1990009037A1/en
Priority to EP90902690A priority patent/EP0417299B1/en
Priority to DE69031929T priority patent/DE69031929T2/en
Priority to KR1019900702191A priority patent/KR930005489B1/en
Publication of JPH02206151A publication Critical patent/JPH02206151A/en
Application granted granted Critical
Publication of JP2677854B2 publication Critical patent/JP2677854B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • F28D15/046Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To make an electrically insulating property high, to make a heat-dissipating property and a heat-absorbing property excellent by a method wherein many fins are inserted and attached to a heat pipe in order to use them as a heat-dissipating part, a heat pipe inserted and attached to a metal block at the lower part is used as a heat-absorbing part and an intermediate part is connected by using an electrically insulating cylinder. CONSTITUTION:The tip of a heat pipe 1 whose one end has been narrowered to be a semispherical shape or a conical shape is provided with a nozzle 6; many fins 2 are inserted and attached to the heat pipe where many stripe grooves at an angle inclined to one side in an axial direction at an inner face are installed; a heat-dissipating part is formed. A heat pipe 1' whose one end has been throttled to be the semispherical shape or the conical shape and has been sealed by a welding operation and which is provided with many crossed stripe grooves in an axial direction at an inner face is inserted and attached to a metal block 3; a heat-absorbing part is formed. An intermediate part between the heat-dissipating part and the heat-absorbing part is connected by using an electrically insulating cylinder 7 provided with a flange made of an ironnickel alloy; an electrically insulating liquid such as Freons or the like is filled as a working liquid of the heat pipe. Thereby, an electrically insulating property becomes excellent; a heat-absorbing property and a heat-dissipating property are enhanced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は改良されたヒートパイプ式半導体冷却器に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improved heat pipe type semiconductor cooler.

〔従来の技術とその課題] サイリスク等の半導体の冷却用としてヒートパイプを用
いた冷却吸熱部は本発明者等により特開昭60−579
56号としてすでに公知である。
[Prior art and its problems] A cooling endothermic section using a heat pipe for cooling semiconductors such as Cyrisk was disclosed in Japanese Patent Application Laid-Open No. 60-579 by the present inventors.
It is already known as No. 56.

この半導体用ヒートパイプ冷却吸熱部は第5図および第
6図に示すように銅などの熱伝導のよい金属からなるヒ
ートパイプ(1)に同じく熱伝導のよい銅またはアルミ
ニウムなどからなるフィン(2)が挿着されて放熱部を
形成し、ヒートパイプの下端が熱伝導のよい銅などから
なる金属ブロック(3)に挿着され、金属ブロックに取
付けられたサイリスク等の半導体(4)が発熱された熱
をヒートパイプに伝達しフィンにより自然またはファン
などにより強制冷却させて半導体の効率を高めるもので
ある。
As shown in FIGS. 5 and 6, this semiconductor heat pipe cooling endothermic part consists of a heat pipe (1) made of a metal with good thermal conductivity such as copper, and a fin (2) made of copper or aluminum with good thermal conductivity. ) is inserted to form a heat dissipation part, the lower end of the heat pipe is inserted to a metal block (3) made of copper etc. with good heat conduction, and a semiconductor (4) such as Cyrisk attached to the metal block generates heat. The generated heat is transferred to a heat pipe and cooled naturally by fins or forcibly by a fan, increasing the efficiency of the semiconductor.

なお必要に応じて電流取出し用の端子(5)が取付けら
れる。サイリスタ等の半導体面は通常、電位を持ってい
るため、これらが金属ヒートパイプを介して放熱部に通
電されるため使用環境によっては取扱上非常に危険な状
況にあった。特に最近は電車などの車輌に搭載される場
合があり、安全上問題があった。そこでサイリスク等の
半導体(4)と金属ブロックとの間に比較的熱伝導性の
良い窒化アルミなどのセラミック製絶縁板(9)を設は
電気的に絶縁することが試みられている。しかし上記の
窒化アルミなどは熱性能、機械強度、信頬性などの点で
なお問題があった。
Note that a terminal (5) for taking out current is attached as necessary. Semiconductor surfaces of thyristors and the like usually have a potential, and as a result, electricity is passed through the metal heat pipe to the heat dissipation section, making handling extremely dangerous depending on the environment in which they are used. Particularly recently, they have been sometimes installed in vehicles such as trains, which has caused safety problems. Therefore, an attempt has been made to provide electrical insulation by installing an insulating plate (9) made of ceramic such as aluminum nitride, which has relatively good thermal conductivity, between the semiconductor (4) such as Cyrisk and the metal block. However, the above-mentioned aluminum nitride still has problems in terms of thermal performance, mechanical strength, reliability, etc.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

本発明は上記の問題について検討の結果、電気絶縁性に
優れ、かつ吸熱性および放熱性を向上せしめたヒートパ
イプ式半導体冷却器を開発したものである。
As a result of studies on the above-mentioned problems, the present invention has developed a heat pipe type semiconductor cooler that has excellent electrical insulation and improved heat absorption and heat dissipation properties.

〔課題を解決するための手段および作用〕本発明は内面
に軸方向の一方に傾斜した多数の条溝を有する1本また
は複数本のヒートパイプにフィンを多数挿着して放熱部
を形成し、その下方に内面に軸方向に多数の交錯した条
溝を有する1本または複数本のヒートパイプを金属ブロ
ックに挿着して吸熱部を形成し、該放熱部と吸熱部との
中間を電気絶縁性の筒で接続し、かつ作動液が電気絶縁
性のものであることを特徴とするヒートパイプ式半導体
冷却器である。
[Means and effects for solving the problem] The present invention forms a heat dissipation section by inserting a large number of fins into one or more heat pipes having a large number of grooves inclined in one direction in the axial direction on the inner surface. , one or more heat pipes having a large number of intersecting grooves in the axial direction on the inner surface are inserted into the metal block to form a heat absorbing part, and the intermediate between the heat dissipating part and the heat absorbing part is electrically connected. This is a heat pipe type semiconductor cooler that is connected by an insulating tube and has an electrically insulating working fluid.

すなわち本発明は、例えば第1図に示すようにヒートパ
イプ(1)の一端が半球状または円錐状に絞られたその
先端にノズル(6)を有し、かつその内面に第3図に示
すようなり字状、凹字状または波形状などの軸方向(1
)の一方に傾斜した角度(α)の多数の条溝(M)を設
けた1本または複数本のヒートパイプにフィン(2)を
多数挿着して放熱部を形成し、その下方に一端が半球状
または円錐状に絞られ溶接により封止され、かつ内面に
第4図に示すように軸方向に多数の交錯した7字状、凹
字状または波形状などの条溝(N)を有する1本または
複数本のヒートパイプ(1′)を金属ブロック(3)に
挿着して吸熱部を形成し、上記放熱部と吸熱部との中間
を鉄−ニッケル合金製などのフランジを有c?) する電気絶縁筒僻で接続し、かつヒートパイプの作動液
としてフロンなどの電気絶縁性のものを封入してヒート
パイプ式半導体冷却器としたものである。
That is, in the present invention, for example, as shown in FIG. 1, one end of a heat pipe (1) has a nozzle (6) at the tip thereof which is constricted into a hemispherical or conical shape, and the inner surface thereof has a nozzle (6) as shown in FIG. Axial direction (1
) A heat dissipation section is formed by inserting a number of fins (2) into one or more heat pipes provided with a large number of grooves (M) at an inclined angle (α) on one side of the heat pipe, and one end is placed below the heat pipe. is squeezed into a hemispherical or conical shape and sealed by welding, and the inner surface has many grooves (N) in the shape of a 7-shape, a concave shape, or a wavy shape intersecting in the axial direction as shown in Fig. 4. A heat absorption part is formed by inserting one or more heat pipes (1') having a metal block (3) into the metal block (3), and a flange made of iron-nickel alloy or the like is provided between the heat radiation part and the heat absorption part. c? ) The heat pipe type semiconductor cooler is made by connecting the heat pipes with an electrically insulating tube and sealing in an electrically insulating material such as fluorocarbon as the working fluid for the heat pipe.

しかして上記の放熱部のヒートパイプ(1)内面に設け
る条溝(M)の形状は、V字状、凹字状または波形状の
いずれのものでもよく、第3図のように軸方向の一方に
傾斜した角度(α)を有するもので、この角度(α)は
2〜10°の範囲が好ましい。上記の条溝により、ヒー
トパイプ内面の表面積が拡大しこの凝縮特性を促進する
と共に、作動液の還流を良好にして放熱特性を向上させ
る。
The shape of the groove (M) provided on the inner surface of the heat pipe (1) of the heat dissipation part may be V-shaped, concave-shaped, or wave-shaped, and as shown in FIG. It has an angle (α) inclined to one side, and this angle (α) is preferably in the range of 2 to 10°. The above-mentioned grooves expand the surface area of the inner surface of the heat pipe to promote condensation characteristics, and improve the reflux of the working fluid to improve heat dissipation characteristics.

また吸熱部のヒートパイプ(1′)内面に設ける条溝(
N)の形状は、V字状、凹字状、または波形状のいずれ
でもよいが、第4図のように軸方向に交錯した条溝を設
けるものである。その角度は軸方向に2〜45°の傾斜
したものがよい。この条溝により表面積が増大し作動液
の沸騰特性が促進され吸熱作用が向上する。
In addition, grooves (
The shape of N) may be V-shaped, concave, or wavy, but as shown in FIG. 4, grooves are provided that intersect in the axial direction. The angle is preferably 2 to 45 degrees inclined in the axial direction. These grooves increase the surface area, promote boiling characteristics of the working fluid, and improve endothermic action.

また放熱部と吸熱部の中間において例えばアルミナ、マ
グネシャ、ガラス、セラミックなどからなる電気絶縁筒
(7)で接続して吸熱部の半導体からの電気的なリーク
を上記の電気絶縁筒で遮断して放熱部まで電流が及ばな
いようにする。このためサイリスクの電位が放熱部に伝
わることなく熱だけが伝熱されるため感電などの危険が
防止できる。
In addition, an electrically insulating tube (7) made of, for example, alumina, magnesia, glass, or ceramic is connected between the heat dissipating section and the heat absorbing section to block electrical leakage from the semiconductor in the heat absorbing section. Make sure that the current does not reach the heat sink. Therefore, only the heat is transferred without the electric potential of the SIRISK being transferred to the heat radiating part, thereby preventing dangers such as electric shock.

また半導体を直接金属ブロックに取付けられるので熱的
な性能も向上する。
Thermal performance is also improved because the semiconductor can be attached directly to the metal block.

なお上記の電気絶縁筒とヒートパイプの接続には鉄−ニ
ッケル合金などの封着材料を介して接続した方が良好に
接続できる。
Note that the connection between the electrically insulating cylinder and the heat pipe described above can be better achieved by using a sealing material such as an iron-nickel alloy.

しかして上記の放熱部を構成するヒートパイプは、その
上端が半球状または円錐状に絞られ、その先端にノズル
(6)を有するものが好ましく、これはヒートパイプの
端部をこのように形成するとヒートバイブ内面に設けた
条溝が端部までおよんでいるためヒートパイプとしての
効率が高められるものである。またその先端のノズルは
作動液を注入するためのものである。さらに吸熱部のヒ
ートパイプの下方端が半球状または円錐状に絞られてい
るのは上記の放熱部の場合と同様にヒートバイブ内面に
設けた条溝が端部までおよんでいるため蒸発効率が向上
するものである。
Therefore, it is preferable that the heat pipe constituting the heat dissipation section has its upper end constricted into a hemispherical or conical shape and has a nozzle (6) at its tip. Then, since the grooves provided on the inner surface of the heat vibe extend to the ends, the efficiency of the heat pipe is increased. The nozzle at the tip is for injecting hydraulic fluid. Furthermore, the reason why the lower end of the heat pipe in the heat absorption part is constricted into a hemispherical or conical shape is because the grooves provided on the inner surface of the heat vibe extend to the end, as in the case of the heat radiation part described above, which improves evaporation efficiency. It will improve.

なお本発明のヒートパイプ式半導体冷却器はヒートパイ
プを縦位置でも横位置に配置しても良く特に横位置の場
合においてもヒートパイプ内面に条溝が設けであるので
これがウィックとして有効に作用して放熱特性を高める
ものである。また上記の放熱部、吸熱部に用いるヒート
パイプは、それぞれ同一の径のものでもよいが、例えば
吸熱部のヒートパイプ(1′)を放熱部のヒートパイプ
(1)より大径にして吸熱効果を向上させることもでき
る。
In addition, in the heat pipe type semiconductor cooler of the present invention, the heat pipe may be placed either vertically or horizontally, and even when the heat pipe is placed horizontally, the grooves are provided on the inner surface of the heat pipe, so that the grooves function effectively as a wick. This improves heat dissipation characteristics. The heat pipes used in the heat radiating section and the heat absorbing section may have the same diameter, but for example, the heat pipe (1') in the heat absorbing section may have a larger diameter than the heat pipe (1) in the heat radiating section to achieve a better heat absorption effect. It can also be improved.

さらにヒートパイプの材質としては、銅、アルミの他ス
テンレス鋼などが使用でき、金属ブロックおよびフィン
には銅、アルミなどの熱伝導の良いものを適用する。
Furthermore, the heat pipe can be made of copper, aluminum or stainless steel, and the metal blocks and fins are made of copper, aluminum, or other materials with good thermal conductivity.

このように本発明によれば金属ブロック(3)面にサイ
リスタ等の半導体(4)を直接取付けてもヒートパイプ
の中間において電気絶縁筒(7)により電気的に絶縁さ
れているためサイリスクの電位が放熱部に伝わることな
く熱だけが伝達されるため感電などの危険が防止tきる
。また半導体を直接金属ブロックに取付けられるので熱
的な性能も向上する。
As described above, according to the present invention, even if a semiconductor (4) such as a thyristor is directly attached to the surface of the metal block (3), the electric potential of the thyristor is reduced because it is electrically insulated by the electrically insulating tube (7) in the middle of the heat pipe. Because only the heat is transferred without being transferred to the heat radiating part, dangers such as electric shock can be prevented. Thermal performance is also improved because the semiconductor can be attached directly to the metal block.

また、放熱部のヒートパイプ(1)と吸熱部のヒートパ
イプ(1′)の内面には特殊な条溝が設けられているの
で放熱性および吸熱性が一層向上するものである。
In addition, special grooves are provided on the inner surfaces of the heat pipe (1) in the heat dissipation part and the heat pipe (1') in the heat absorption part, so that the heat dissipation and heat absorption properties are further improved.

そしてヒートパイプの端部を半球状または円錐状に形成
しであるので条溝が端部まで及ぶことになり、端部が平
板のものよりを効面積が増してヒートパイプとしての性
能も増加するものである。
Since the end of the heat pipe is formed into a hemispherical or conical shape, the grooves extend to the end, which increases the effective area and improves the performance of the heat pipe compared to those with flat ends. It is something.

さらにヒートパイプに細孔部を有するノズル(6)が設
けであるので作動液の注入および封止などの作業性が向
上するなど多くの利点を有するものである。
Furthermore, since the heat pipe is provided with a nozzle (6) having a pore, it has many advantages, such as improved workability in injection and sealing of the working fluid.

〔実施例〕〔Example〕

以下に本発明の一実施例について説明する。 An embodiment of the present invention will be described below.

内面に山の高さ0.3mm、ピッチ0.9 tnaの7
字形状で軸方向に右5°に傾斜した第3図に示す条溝(
M)を形成した外径22.23 tmの銅製のパイプの
上端部をスピニング加工により半球状に形成し、その先
端をさらにスピニング加工により細孔部を有するノズル
(6)を設けて放熱部のヒートパイプ(1)とする。次
に同一径の銅製のパイプ内面に山の高さ0.3m++、
ピッチ0.98のV字形状で軸方向に左右双方に5″′
傾斜した第4図に示す条溝(N)を設け、この先端を同
様にスピニング加工により半球状に成形し、溶接により
封止し、吸熱部のヒートパイプ(1′)とする。このヒ
ートパイプ(1′)と放熱部のヒートパイプ(1)の中
間にFe−Ni合金製のフランジ(図示せず)を具備し
たアルミナ絶縁(+7) 筒桝組込み高周波加熱により、フランジとヒートパイプ
(1)、(1′)を連結して一体化した。次に第1図に
示すようにこの一体化したヒートパイプの一端120m
a+を穿孔された銅製の金属ブロック(3)に挿入して
軟ロウ材でロウ接した後ヒートパイプの上端のノズル(
6)から空気等の非凝縮性ガスを脱気後フレオン等の電
気絶縁性作動液(8)を一定量注入し、該ノズル(6)
を圧着治具によりかしめて該圧着上端部をTIG溶接に
より溶接の後多数の銅製のフィン(2)を適切なピッチ
間隔にヒートパイプの上方に挿着して放熱部とした。な
お絶縁筒付鋼管をヒートパイプ化した後、ブロックにロ
ウ接してもよい。この場合ノズルは下方(ブロック内)
に配置することができる。
The height of the mountain on the inner surface is 0.3 mm, the pitch is 0.9 tna 7
The groove shown in Fig. 3 has a shape of
The upper end of the copper pipe with an outer diameter of 22.23 tm was formed into a hemispherical shape by spinning, and a nozzle (6) with a small hole was provided at the tip by spinning to form a heat dissipation part. Let it be a heat pipe (1). Next, the height of the mountain is 0.3m++ on the inner surface of the copper pipe of the same diameter.
V-shaped with a pitch of 0.98 and 5″ on both the left and right sides in the axial direction
An inclined groove (N) as shown in FIG. 4 is provided, and the tip thereof is similarly formed into a hemispherical shape by spinning and sealed by welding to form a heat pipe (1') of the heat absorption section. Alumina insulation (+7) with an Fe-Ni alloy flange (not shown) is installed between this heat pipe (1') and the heat pipe (1) of the heat dissipation section. (1) and (1') were connected and integrated. Next, as shown in Figure 1, one end of this integrated heat pipe is 120 m long.
After inserting the a+ into the perforated copper metal block (3) and brazing it with soft solder, the nozzle at the upper end of the heat pipe (
After deaerating non-condensable gas such as air from 6), a certain amount of electrically insulating working fluid (8) such as Freon is injected into the nozzle (6).
After crimping with a crimping jig and welding the crimped upper end by TIG welding, a number of copper fins (2) were inserted at appropriate pitches above the heat pipe to form a heat radiating section. Note that after the steel pipe with an insulating tube is made into a heat pipe, it may be brazed to the block. In this case, the nozzle is downward (inside the block)
can be placed in

このようにして製造されたヒートパイプ式半導体冷却器
は第1図に示すようにヒートパイプ(1)に多数のフィ
ン(2)が挿着されて放熱部をなし、その下方に金属ブ
ロック(3)に挿着されたヒートパイプ(1′)が吸熱
部をなし、その中間を電気絶縁筒(7)で接続する構造
としたものである。
As shown in Fig. 1, the heat pipe type semiconductor cooler manufactured in this way has a heat pipe (1) with a large number of fins (2) inserted therein to form a heat dissipation section, and a metal block (3 ) is inserted into the heat pipe (1') to form a heat absorbing part, and an electrically insulating cylinder (7) is connected between the heat pipes (1').

サイリスクなどの半導体(4)の発熱は金属ブロック(
3)を介してヒートパイプ(1′)に伝達されヒートパ
イプ(1)の放熱部により放熱される。この際電気絶縁
性の筒(7)が設けられているので上方の放熱部には熱
だけが伝達され電気的に絶縁されているので感電の危険
はない。また作動液にはフロン等の電気絶縁性のものを
使用しているのでこの点においても安全性が確保されて
いる。そして放熱部のヒートパイプ(1)には、第3図
に示すような内面に7字状のスパイラル条溝が設けであ
るので放熱性が向上し、また放熱部のヒートパイプ(1
′)には第4図に示した左右にクロスしたスパイラル条
溝が設けられているので、吸熱性が向上するものである
The heat generated by semiconductors (4) such as Cyrisk is generated by metal blocks (
3) to the heat pipe (1'), and is radiated by the heat radiating section of the heat pipe (1). At this time, since the electrically insulating tube (7) is provided, only heat is transferred to the upper heat radiating section, and since it is electrically insulated, there is no risk of electric shock. Furthermore, since an electrically insulating material such as Freon is used as the working fluid, safety is ensured in this respect as well. The heat pipe (1) of the heat dissipation section is provided with a 7-shaped spiral groove on its inner surface as shown in Figure 3, which improves heat dissipation.
') is provided with spiral grooves that cross left and right as shown in FIG. 4, so that heat absorption is improved.

〔効果〕〔effect〕

以上に説明したように本発明によれば電気絶縁性が高く
、かつ放熱性、吸熱性の優れたヒートパイプ式半導体冷
却器が得られるもので工業上顕著な効果を奏するもので
ある。
As explained above, according to the present invention, a heat pipe type semiconductor cooler having high electrical insulation properties and excellent heat dissipation and heat absorption properties can be obtained, which has a significant industrial effect.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示すヒートパイプ式半導体
冷却器の正面図、第2図は第1図の平面図、第3図は第
1図に示すヒートパイプ(1)の内面を示す断面斜視図
、第4図は第1図に示すヒートパイプ(1′)の内面を
示す断面斜視図、第5図は従来のヒートパイプ式半導体
冷却器の正面図、第6図は第5図の平面図、第7@は従
来の他のヒートパイプ式半導体冷却器の正面図である。 1.1′・・・ヒートパイプ、  2・・・フィン、 
 3・・・金属ブロック、 4・・・半導体、 5・・
・端子、6・・・ノズル、 7・・・電気絶縁筒、 8
・・・作動液。
Fig. 1 is a front view of a heat pipe type semiconductor cooler showing an embodiment of the present invention, Fig. 2 is a plan view of Fig. 1, and Fig. 3 shows the inner surface of the heat pipe (1) shown in Fig. 1. 4 is a sectional perspective view showing the inner surface of the heat pipe (1') shown in FIG. 1, FIG. 5 is a front view of a conventional heat pipe type semiconductor cooler, and FIG. In the top view of the figure, No. 7 @ is a front view of another conventional heat pipe type semiconductor cooler. 1.1'...Heat pipe, 2...Fin,
3...Metal block, 4...Semiconductor, 5...
・Terminal, 6... Nozzle, 7... Electrical insulation tube, 8
... Hydraulic fluid.

Claims (1)

【特許請求の範囲】[Claims] 内面に軸方向の一方に傾斜した多数の条溝を有する1本
または複数本のヒートパイプにフィンを多数挿着して放
熱部を形成し、その下方に内面に軸方向に多数の交錯し
た条溝を有する1本または複数本のヒートパイプを金属
ブロックに挿着して吸熱部を形成し、該放熱部と吸熱部
との中間を電気絶縁性の筒で接続し、かつ作動液が電気
絶縁性のものであることを特徴とするヒートパイプ式半
導体冷却器。
A heat dissipation section is formed by inserting a large number of fins into one or more heat pipes having a large number of grooves inclined in one direction in the axial direction on the inner surface. One or more heat pipes having grooves are inserted into a metal block to form a heat absorption part, and the middle of the heat radiation part and the heat absorption part is connected with an electrically insulating tube, and the working fluid is electrically insulated. A heat pipe type semiconductor cooler characterized by the fact that it is a heat pipe type semiconductor cooler.
JP1027024A 1989-02-06 1989-02-06 Heat pipe type semiconductor cooler Expired - Fee Related JP2677854B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1027024A JP2677854B2 (en) 1989-02-06 1989-02-06 Heat pipe type semiconductor cooler
PCT/JP1990/000146 WO1990009037A1 (en) 1989-02-06 1990-02-06 Electrically insulated heat pipe-type semiconductor cooling device
EP90902690A EP0417299B1 (en) 1989-02-06 1990-02-06 Electrically insulated heat pipe-type semiconductor cooling device
DE69031929T DE69031929T2 (en) 1989-02-06 1990-02-06 SEMICONDUCTOR COOLING ARRANGEMENT OF THE ELECTRICALLY INSULATED HEAT TUBE TYPE
KR1019900702191A KR930005489B1 (en) 1989-02-06 1990-02-06 Electrically insulated heat pipe type semiconductor cooling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1027024A JP2677854B2 (en) 1989-02-06 1989-02-06 Heat pipe type semiconductor cooler

Publications (2)

Publication Number Publication Date
JPH02206151A true JPH02206151A (en) 1990-08-15
JP2677854B2 JP2677854B2 (en) 1997-11-17

Family

ID=12209512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1027024A Expired - Fee Related JP2677854B2 (en) 1989-02-06 1989-02-06 Heat pipe type semiconductor cooler

Country Status (1)

Country Link
JP (1) JP2677854B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0534466U (en) * 1991-09-20 1993-05-07 三菱電線工業株式会社 Heat pipe cooler
JPH0590169U (en) * 1992-05-07 1993-12-07 三菱電線工業株式会社 Heat pipe cooler
JP2012117786A (en) * 2010-12-03 2012-06-21 Toyota Motor Corp Heat pipe

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0534466U (en) * 1991-09-20 1993-05-07 三菱電線工業株式会社 Heat pipe cooler
JPH0590169U (en) * 1992-05-07 1993-12-07 三菱電線工業株式会社 Heat pipe cooler
JP2012117786A (en) * 2010-12-03 2012-06-21 Toyota Motor Corp Heat pipe

Also Published As

Publication number Publication date
JP2677854B2 (en) 1997-11-17

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