JPH02210302A - Focal distance variable mirror - Google Patents
Focal distance variable mirrorInfo
- Publication number
- JPH02210302A JPH02210302A JP3057189A JP3057189A JPH02210302A JP H02210302 A JPH02210302 A JP H02210302A JP 3057189 A JP3057189 A JP 3057189A JP 3057189 A JP3057189 A JP 3057189A JP H02210302 A JPH02210302 A JP H02210302A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pair
- transparent
- elastic
- variable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims abstract description 52
- 229910052751 metal Inorganic materials 0.000 claims abstract description 20
- 239000002184 metal Substances 0.000 claims abstract description 20
- 239000007788 liquid Substances 0.000 claims abstract description 16
- 239000010409 thin film Substances 0.000 claims abstract description 9
- 239000012528 membrane Substances 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 4
- 239000012780 transparent material Substances 0.000 claims description 4
- 229910000799 K alloy Inorganic materials 0.000 abstract description 2
- 229910000528 Na alloy Inorganic materials 0.000 abstract description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 abstract description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052753 mercury Inorganic materials 0.000 abstract description 2
- 239000011591 potassium Substances 0.000 abstract description 2
- 238000005336 cracking Methods 0.000 abstract 2
- 238000002788 crimping Methods 0.000 abstract 2
- 239000011521 glass Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
この発明は焦点距離を任意に変更できるようにした凹面
ミラーあるいは凸面ミラーに関する。The present invention relates to a concave mirror or a convex mirror whose focal length can be changed arbitrarily.
従来、投影器の光源のディフレクタとしての凹面鏡、レ
ーザーキャビティにおける全反射ミラー、光学的デイス
プレィ装置におけるミラー等各種あり、これらについて
は、焦点距離を可変とすることが望ましいが、そのよう
なものがなかっな。Conventionally, there are various types of concave mirrors used as deflectors for projector light sources, total reflection mirrors in laser cavities, mirrors in optical display devices, etc. It is desirable for these to have variable focal lengths, but there is no such device. Na.
【発明が解決しようとする課］
これに対して、例えば、アルミニウム箔のような固体金
属薄膜や蒸着膜を利用することも考えられるが、この場
合は、金属薄膜の伸縮性が小さく、且つ金属疲労を起こ
１て亀裂を生じ易く、又、蒸着膜の場合はＭＦｆｌ易い
ので、実用に供することができないという問題点があっ
た。
この発明は上記従来の問題点に鑑みてなされたものであ
って、伸縮性が大きく、金属疲労による亀裂や、剥離を
生じることなく、且つ精度良く焦点距離を変化させるこ
とができるようにした焦点距離可変ミラーを提供するこ
とを目的とする。
【課題を解決するための手段】
この発明は、伸縮性を有し、少なくとも一方が透明の一
対の膜、及び、この一対の膜の間に薄膜状に、且つ気密
状に挟持された、比較的低温で液状の光反射性の金属の
反射膜、からなる弾性反射部材と、前記弾性反射部材の
両側に、これを間に対向して形成された圧力可変の一対
の圧力室と、これら圧力室の圧力を制御する圧力変化発
生部と、を備えてなり、前記透明な膜側の圧力室は透明
な流体が充満され、且つ、この圧力室の前記弾性反射部
材と対向する壁面は透明材料から構成された焦点距離可
変ミラーにより上記目的を達成するものである。
又、前記一対の膜を共に透明とすることにより上記目的
を達成するものである。
更に又、この発明は、伸縮性を有し、一方が透明の一対
の膜、及び、この一対の膜の間に薄膜状に、且つ気密状
に挾持された、比較的低温で液状の光反射性の金属の反
射膜、からなる弾性反射部材と、前記弾性反射部材の一
方であって、前記透明な膜側に形成された圧力可変の圧
力室と、この圧力室の圧力を制御する圧力変化発生部と
、を備えてなり、前記圧力室は透明な液体が充満され、
且つ、この圧力室の前記弾性反射部材と対向する壁面は
透明材料から構成された焦点距離可変ミラーにより上記
目的を達成するものである。
又、この発明は、伸縮性を有し、一方が透明の一対の膜
、及び、この一対の膜の間に１ｉｉｌｌｌ状に、且つ気
密状に挟持された、比較的低温で液状の光反射性の金属
の反射膜、からなる弾性反射部材と、前記弾性反射部材
の一方であって、前記透明な膜の反対側に形成された圧
力可変の一対の圧力室と、これら圧力室の圧力を制御す
る圧力変化発生部と、を備えてなる焦点距離可変ミラー
により上記目的を達成するものである。[Problem to be solved by the invention] On the other hand, for example, it is possible to use a solid metal thin film such as aluminum foil or a vapor deposited film, but in this case, the elasticity of the metal thin film is small and the metal There were problems in that it could not be put to practical use because it was prone to fatigue and cracks, and in the case of vapor-deposited films, it was susceptible to MFfl. This invention has been made in view of the above-mentioned conventional problems, and has been developed to provide a focal point that is highly elastic, does not cause cracks or peeling due to metal fatigue, and allows the focal length to be changed with high precision. The purpose is to provide a variable distance mirror. [Means for Solving the Problems] The present invention provides a pair of stretchable films, at least one of which is transparent, and a comparative film which is sandwiched between the pair of films in a thin film form and in an airtight manner. an elastic reflecting member made of a reflective film made of a metal that is light-reflective in a liquid state at an extremely low temperature; a pair of pressure chambers with variable pressures formed on both sides of the elastic reflecting member with the pressure chambers facing each other; a pressure change generator for controlling the pressure of the chamber, the pressure chamber on the side of the transparent membrane is filled with a transparent fluid, and the wall surface of the pressure chamber facing the elastic reflective member is made of a transparent material. The above object is achieved by a variable focal length mirror constructed of. Further, the above object is achieved by making both the pair of films transparent. Furthermore, the present invention includes a pair of stretchable films, one of which is transparent, and a relatively low-temperature liquid light-reflecting film sandwiched between the pair of films in the form of a thin film and airtight. an elastic reflective member consisting of a reflective film made of a transparent metal; a variable pressure chamber formed on the transparent film side of one of the elastic reflective members; and a pressure change that controls the pressure in the pressure chamber. a generating part, the pressure chamber is filled with a transparent liquid,
Further, the wall surface of the pressure chamber facing the elastic reflection member is provided with a variable focal length mirror made of a transparent material to achieve the above object. The present invention also provides a pair of stretchable films, one of which is transparent, and a relatively low-temperature liquid light-reflecting film sandwiched between the pair of films in an airtight manner. a pair of pressure chambers with variable pressure formed on one side of the elastic reflection member on the opposite side of the transparent film; and controlling the pressure in these pressure chambers. The above object is achieved by a variable focal length mirror comprising a pressure change generating section.
この発明においては、反射膜が、少なくとも一方が透明
とされた一対の伸縮性を有する膜の間に薄膜状且つ気密
状に挾持された比較的低温で液状の光反射性の金属から
構成され、この反射膜及び一対の膜からなる弾性反射部
材を、圧力可変の圧力室によって凸又は凹に変形させる
ことにより、任意の焦点距離を得ることができる０反射
膜は、液状金属からなるため、伸縮性があり、金属疲労
による亀裂が生じたり、剥離が生じたりすることがない
。In this invention, the reflective film is composed of a light-reflective metal that is liquid at a relatively low temperature and is sandwiched in a thin film-like and airtight manner between a pair of stretchable films, at least one of which is transparent; An arbitrary focal length can be obtained by deforming this reflective film and an elastic reflective member consisting of a pair of films into a convex or concave shape using a variable pressure chamber.Since the reflective film is made of liquid metal, it expands and contracts. It is durable and does not cause cracks or peeling due to metal fatigue.
以下本発明の実施例を図面を参照して説明する。
この実施例の焦点距離可変ミラー１０は、第３図に示さ
れるような、伸縮性を有し、且つ透明の一対の１１ｇ１
ＯＡ、１０Ｂ、及び、この一対の膜１０Ａ、ＩＯＢの
間に薄膜状に、且つ気密状に挟持された、比較的低温で
液状の光反射性の金属の反射膜１２、からなる弾性反射
部材１４と、第１図及び第２図に示されるように、前記
弾性反射部材１４の両側に、これを間に対向して形成さ
れた圧力可変の一対の圧力室１６Ａ、１６Ｂと、これら
圧力室１６Ａ、１６Ｂの圧力を制御する圧力変化発生部
１８と、を備えて構成され、前記圧力室１６Ａ、１６Ｂ
は、各々が例えばアルゴンガス、シリコンオイル等の、
化学的に安定で、光を吸収しない気体又は液体で充満さ
れ、且つ、これら圧力室１６Ａ、１６Ｂの、前記弾性反
射部材１４と対向する壁面は平行平面ガラス２０Ａ、２
０Ｂから構成されている。
前記圧力変化発生部１８は、シリンダ部２２と、このシ
リンダ部２２内で軸方向摺動自在に配置された永久磁石
からなるピストン２４と、このピストン２４をシリンダ
部２２内で中立位置に付勢する一対のばね２６Ａ、２６
Ｂと、前記シリンダ部２２の外側にリング状に配置され
た電磁コイル２８と、前記ピストン２４の雨側めシリン
ダ部２２内空間２２Ａ、２２Ｂを、前記一対の圧力室１
６Ａ、１６Ｂに各々連通する一対の連結管３０Ａ、３０
Ｂと、を備えて構成されている。
ここで、前記反射膜１２を形成する、比較的低温度で液
状の金属は、例えば水銀、あるいは、ナトリウムとカリ
ウムの合金等を用いる。
次に上記実施例装置の作用につき説明する。
定常状態では、弾性反射部材１４が平面であるなめ、平
行平面ガラス２ＯＡを介して入射する平行光線３２Ａは
、第１図で実線で示されるように、反射膜により平行光
線として反射される。
弾性反射部材１４を、第１図において破線で示されるよ
うに、圧力室１６ＡＯ１１が凹、圧力室１６Ｂ側が凸と
なる凹面且つ凸面ミラーとする場合は、電磁コイル２８
を励磁させる直流電流の極性、及び電圧を制御して、ピ
ストン２４を図において上方に移動させ、これによって
、圧力室１６Ａ側の圧力を増大させ、且つ圧力室１６Ｂ
ｔ’ｌの圧力を低減させる。
このようにすると、両圧力室１６Ａ、１６Ｂの圧力差に
応じて、弾性反射部材１４が第１図で破線に示されるよ
うに弾性的に変形する。
従って反射膜１２は圧力室１６Ａ側に凹、圧力室１６Ｂ
側凸に変形して、各々凹面ミラー、凸面ミラーを形成す
る。又、実線で示される入射平行光線３２Ａは破線で示
される反射光′ａ３２Ｂとなる。
このときの反射膜１２の曲率は、ピストン２４のストロ
ーク制御により任意に変更することができる。又、これ
によって反射光線の焦点距離も任意に変更することがで
きる。
又、電磁コイル２８の励磁方向を逆転させれば、圧力室
１６Ａｆｌｌが凸、圧力室１６ＢＯ１！！ｌが凹となる
ように、反射膜１２を変形させることができる。
即ち、電磁コイル２８に入力される外部信号により、反
射膜１２の焦点距離を任意に変更することができる。
この反射膜１２は前述のように、比較的低温で液状とな
る金属を、一対の膜により薄膜状に保持することによっ
て構成されているので、伸縮性が大きく、金属疲労によ
る亀裂が生じなり、ス蒸着膜のようなｉｌＪ！を生じな
りすることがない。
又金属であるので、広い波長範囲の光線に対して良好な
全反射ミラーを構成することができる。
従って、例えば投影器の光源の背後に配置されるリフレ
クタとして用いることにより、光ビームの平行度を自動
調整することができる。
又、精度良い構造を採用すれば、レーザーキャビティを
構成するキャビティ長可変の全反射ミラーとして利用す
ることができる。
更に、光学的デイスプレィ装置の変調器として用い、外
部信号に同期した焦点距離変化を得ることができる。
なお上記実施例において、反射膜１２はその両面が利用
され得るようにしたものであるが、本発明はこれに限定
されるものでなく、一方の面のみ利用するようにしても
よい。
この場合、反射面として利用する測の膜１０Ａ又はＩＯ
Ｂのみを透明とすればよい。
又、圧力室を、弾性反射部材１４の一方にのみ設けるよ
うにしてもよい。
この場合は、圧力室と大気圧との差により、弾性反射部
材１４が変形することになる。
従って、例えば第４図に拡大して示されるように、一方
の圧力室１６Ａのみを用い、該圧力室１６Ａ側の平行平
面ガラス２ＯＡを介して入射光及び反射光が出入りする
ようにすればよい。
圧力室１６Ａと反対側の面は膜１０Ｂが大気に露出して
いるので、膜１０Ｂを透明とした場合は、圧力室内の流
体に邪魔されることなく、光線を効率良く入射、反射さ
せることができる。
なお、上記実施例において、圧力変化発生部１８は電磁
コイル２８への励磁信号に基づいてピストン２４を駆動
させ、このピストン２４のストロークに応じて反射膜１
２の曲率を変化させるものであるが、本発明はこれに限
定されるものでなく、圧力室１６Ａ及び／又は１６Ｂの
圧力変化は、例えば流体ポンプ、圧縮ガス源、等を単独
又は適宜組合せたものであってもよい。
要すれば、弾性反射部材１４の一方又は両方に設けられ
た圧力室の圧力を、外部信号に応じて変化させることが
できるものであればよい。
更に、前記平行平面ガラスは透明であれば合成樹脂性で
あってもよい、又、弾性反射部材１４に対向する壁面の
全体又は一部を透明としてもよい。Embodiments of the present invention will be described below with reference to the drawings. The variable focal length mirror 10 of this embodiment has a pair of stretchable and transparent mirrors 11g1 as shown in FIG.
An elastic reflection member 14 consisting of the OA, 10B, and a metal reflection film 12 that is light-reflective and liquid at a relatively low temperature, which is thinly and airtightly sandwiched between the pair of films 10A and IOB. As shown in FIGS. 1 and 2, a pair of pressure chambers 16A and 16B with variable pressures are formed on both sides of the elastic reflection member 14 so as to face each other, and these pressure chambers 16A. , 16B;
For example, argon gas, silicone oil, etc.
These pressure chambers 16A, 16B are filled with a gas or liquid that is chemically stable and does not absorb light, and the wall surfaces facing the elastic reflecting member 14 are made of parallel plane glass 20A, 2.
It consists of 0B. The pressure change generating section 18 includes a cylinder section 22, a piston 24 made of a permanent magnet disposed slidably in the axial direction within the cylinder section 22, and a piston 24 that urges the piston 24 to a neutral position within the cylinder section 22. A pair of springs 26A, 26
B, an electromagnetic coil 28 arranged in a ring shape on the outside of the cylinder part 22, and the inner spaces 22A and 22B of the rain-side cylinder part 22 of the piston 24 are connected to the pair of pressure chambers 1.
A pair of connecting pipes 30A, 30 communicating with 6A, 16B, respectively
B. Here, the metal that forms the reflective film 12 and is liquid at a relatively low temperature is, for example, mercury or an alloy of sodium and potassium. Next, the operation of the apparatus of the above embodiment will be explained. In a steady state, since the elastic reflecting member 14 is a flat surface, parallel light rays 32A that enter through the parallel plane glass 2OA are reflected by the reflective film as parallel light rays, as shown by solid lines in FIG. When the elastic reflection member 14 is a concave and convex mirror in which the pressure chamber 16AO11 is concave and the pressure chamber 16B side is convex, as shown by the broken line in FIG. 1, the electromagnetic coil 28
By controlling the polarity and voltage of the DC current that excites the piston 24, the piston 24 is moved upward in the figure, thereby increasing the pressure on the pressure chamber 16A side and increasing the pressure on the pressure chamber 16B side.
Reduce the pressure at t'l. In this way, the elastic reflection member 14 is elastically deformed as shown by the broken line in FIG. 1 in accordance with the pressure difference between the pressure chambers 16A and 16B. Therefore, the reflective film 12 is concave toward the pressure chamber 16A, and the reflection film 12 is concave toward the pressure chamber 16B.
They are deformed into convex sides to form a concave mirror and a convex mirror, respectively. Further, the incident parallel light ray 32A shown by a solid line becomes reflected light 'a32B shown by a broken line. The curvature of the reflective film 12 at this time can be arbitrarily changed by controlling the stroke of the piston 24. Furthermore, the focal length of the reflected light beam can also be changed arbitrarily. Moreover, if the excitation direction of the electromagnetic coil 28 is reversed, the pressure chamber 16Aflll becomes convex, and the pressure chamber 16BO1! ! The reflective film 12 can be deformed so that l is concave. That is, the focal length of the reflective film 12 can be changed arbitrarily by an external signal input to the electromagnetic coil 28. As mentioned above, this reflective film 12 is constructed by holding a metal that becomes liquid at a relatively low temperature in a thin film form with a pair of films, so it has high elasticity and does not cause cracks due to metal fatigue. ilJ like a vapor deposited film! It will never occur. Furthermore, since it is made of metal, it can constitute a good total reflection mirror for light rays in a wide wavelength range. Therefore, by using it as a reflector placed behind the light source of a projector, for example, the parallelism of the light beam can be automatically adjusted. Furthermore, if a highly accurate structure is adopted, it can be used as a total reflection mirror with a variable cavity length constituting a laser cavity. Furthermore, it can be used as a modulator for an optical display device to obtain a change in focal length in synchronization with an external signal. In the above embodiment, both sides of the reflective film 12 can be used, but the present invention is not limited to this, and only one side may be used. In this case, the measurement film 10A or IO used as a reflective surface
Only B needs to be made transparent. Further, the pressure chamber may be provided only on one side of the elastic reflection member 14. In this case, the elastic reflection member 14 will be deformed due to the difference between the pressure chamber and the atmospheric pressure. Therefore, for example, as shown in an enlarged view in FIG. 4, only one pressure chamber 16A may be used, and incident light and reflected light may enter and exit through the parallel plane glass 2OA on the pressure chamber 16A side. . Since the membrane 10B is exposed to the atmosphere on the side opposite to the pressure chamber 16A, if the membrane 10B is transparent, it is possible to efficiently inject and reflect light rays without being hindered by the fluid in the pressure chamber. can. In the above embodiment, the pressure change generating section 18 drives the piston 24 based on the excitation signal to the electromagnetic coil 28, and the reflective film 1 is driven in accordance with the stroke of the piston 24.
However, the present invention is not limited to this, and the pressure in the pressure chambers 16A and/or 16B can be changed by using, for example, a fluid pump, a compressed gas source, etc. alone or in an appropriate combination. It may be something. If necessary, any material that can change the pressure in the pressure chamber provided in one or both of the elastic reflection members 14 in accordance with an external signal may be used. Furthermore, the parallel plane glass may be made of synthetic resin as long as it is transparent, or the entire or part of the wall surface facing the elastic reflective member 14 may be transparent.
本発明は上記のように構成したので、金属疲労による亀
裂を生じたり、蒸着膜のように剥離を生じたりすること
なく、反射面を弾性的に変化させて、任意の焦点距離を
容易に得ることができるという優れた効果を有する。Since the present invention is configured as described above, the reflective surface can be elastically changed to easily obtain an arbitrary focal length without causing cracks due to metal fatigue or peeling unlike vapor deposited films. It has the excellent effect of being able to
第１図は本発明に係る焦点距離可変ミラーの実施例を示
す断面図、第２図は同平面図、第３図は同実施例におけ
る弾性反射部材を示す拡大断面図、第４図は本発明の第
２実施例の要部を示す断面図である。
１０・・・焦点距離可変ミラー、
１０Ａ、ＩＯＢ・・・膜、 １２・・・反射膜、１４・
・・弾性反射部材、 １６Ａ、１６Ｂ・・・圧力室、１
８・・・圧力変化発生部、
２０Ａ、２０Ｂ・・・平行平面ガラス。FIG. 1 is a sectional view showing an embodiment of a variable focal length mirror according to the present invention, FIG. 2 is a plan view of the same, FIG. 3 is an enlarged sectional view showing an elastic reflection member in the same embodiment, and FIG. FIG. 7 is a sectional view showing the main parts of a second embodiment of the invention. 10... variable focal length mirror, 10A, IOB... film, 12... reflective film, 14.
...Elastic reflecting member, 16A, 16B...Pressure chamber, 1
8...Pressure change generating part, 20A, 20B...Parallel plane glass.
Claims (5)
、及び、この一対の膜の間に薄膜状に、且つ気密状に挾
持された、比較的低温で液状の光反射性の金属の反射膜
、からなる弾性反射部材と、前記弾性反射部材の両側に
、これを間に対向して形成された圧力可変の一対の圧力
室と、これら圧力室の圧力を制御する圧力変化発生部と
、を備えてなり、前記透明な膜側の圧力室は透明な流体
が充満され、且つ、この圧力室の前記弾性反射部材と対
向する壁面は透明材料から構成された焦点距離可変ミラ
ー。(1) A pair of stretchable films, at least one of which is transparent, and a light-reflecting metal that is liquid at a relatively low temperature and is sandwiched between the pair of films in the form of a thin film and airtight. a pair of pressure chambers with variable pressure formed oppositely on both sides of the elastic reflection member, and a pressure change generator for controlling the pressure in these pressure chambers. A variable focal length mirror comprising: a pressure chamber on the side of the transparent film filled with a transparent fluid; and a wall surface of the pressure chamber facing the elastic reflection member made of a transparent material.
点距離可変ミラー。(2) The variable focal length mirror according to claim 1, wherein the pair of films are both transparent.
の一対の膜の間に薄膜状に、且つ気密状に挟持された、
比較的低温で液状の光反射性の金属の反射膜、からなる
弾性反射部材と、前記弾性反射部材の一方であつて、前
記透明な膜側に形成された圧力可変の圧力室と、これら
圧力室の圧力を制御する圧力変化発生部と、を備えてな
り、前記圧力室は透明な液体が充満され、且つ、この圧
力室の前記弾性反射部材と対向する壁面は透明材料から
構成された焦点距離可変ミラー。(3) a pair of elastic membranes, one of which is transparent, and a thin film sandwiched between the pair of membranes in an airtight manner;
an elastic reflecting member made of a metal reflecting film that is light-reflective in a liquid state at a relatively low temperature; a variable-pressure pressure chamber formed on one side of the transparent film of the elastic reflecting member; a pressure change generator for controlling the pressure of the chamber, the pressure chamber is filled with a transparent liquid, and the wall surface of the pressure chamber facing the elastic reflection member has a focal point made of a transparent material. Variable distance mirror.
点距離可変ミラー。(4) The variable focal length mirror according to claim 3, wherein the pair of films are both transparent.
の一対の膜の間に薄膜状に、且つ気密状に挾持された、
比較的低温で液状の光反射性の金属の反射膜、からなる
弾性反射部材と、前記弾性反射部材の一方であつて、前
記透明な膜の反対側に形成された圧力可変の一対の圧力
室と、この圧力室の圧力を制御する圧力変化発生部と、
を備えてなる焦点距離可変ミラー。(5) a pair of elastic membranes, one of which is transparent, and a thin film sandwiched between the pair of membranes in an airtight manner;
an elastic reflection member made of a light-reflecting metal reflection film that is liquid at a relatively low temperature; and a pair of variable pressure chambers formed on one side of the elastic reflection member and opposite to the transparent film. and a pressure change generator that controls the pressure in the pressure chamber.
A variable focal length mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3057189A JPH02210302A (en) | 1989-02-09 | 1989-02-09 | Focal distance variable mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3057189A JPH02210302A (en) | 1989-02-09 | 1989-02-09 | Focal distance variable mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02210302A true JPH02210302A (en) | 1990-08-21 |
Family
ID=12307530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3057189A Pending JPH02210302A (en) | 1989-02-09 | 1989-02-09 | Focal distance variable mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02210302A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996029629A3 (en) * | 1995-03-01 | 1997-04-17 | Harvard College | Microcontact printing on surfaces and derivative articles |
| US5900160A (en) * | 1993-10-04 | 1999-05-04 | President And Fellows Of Harvard College | Methods of etching articles via microcontact printing |
| US6180239B1 (en) | 1993-10-04 | 2001-01-30 | President And Fellows Of Harvard College | Microcontact printing on surfaces and derivative articles |
| US6776094B1 (en) | 1993-10-04 | 2004-08-17 | President & Fellows Of Harvard College | Kit For Microcontact Printing |
| US7067306B2 (en) | 1993-10-04 | 2006-06-27 | President & Fellows Of Harvard College | Device containing cytophilic islands that adhere cells separated by cytophobic regions |
| JP2020521993A (en) * | 2017-04-18 | 2020-07-27 | マジック リープ， インコーポレイテッドＭａｇｉｃ Ｌｅａｐ，Ｉｎｃ． | Waveguide with reflective layer formed by reflective flowable material |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58208705A (en) * | 1982-05-31 | 1983-12-05 | Akiyoshi Kajiyama | Optical body having curved reflecting surface |
-
1989
- 1989-02-09 JP JP3057189A patent/JPH02210302A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58208705A (en) * | 1982-05-31 | 1983-12-05 | Akiyoshi Kajiyama | Optical body having curved reflecting surface |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5900160A (en) * | 1993-10-04 | 1999-05-04 | President And Fellows Of Harvard College | Methods of etching articles via microcontact printing |
| US6180239B1 (en) | 1993-10-04 | 2001-01-30 | President And Fellows Of Harvard College | Microcontact printing on surfaces and derivative articles |
| US6776094B1 (en) | 1993-10-04 | 2004-08-17 | President & Fellows Of Harvard College | Kit For Microcontact Printing |
| US7067306B2 (en) | 1993-10-04 | 2006-06-27 | President & Fellows Of Harvard College | Device containing cytophilic islands that adhere cells separated by cytophobic regions |
| US7875197B2 (en) | 1993-10-04 | 2011-01-25 | President And Fellows Of Harvard College | Methods of etching articles via microcontact printing |
| US7993905B2 (en) | 1993-10-04 | 2011-08-09 | President And Fellows Of Harvard College | Device containing cytophilic islands that adhere cells separated by cytophobic regions |
| WO1996029629A3 (en) * | 1995-03-01 | 1997-04-17 | Harvard College | Microcontact printing on surfaces and derivative articles |
| JP2020521993A (en) * | 2017-04-18 | 2020-07-27 | マジック リープ， インコーポレイテッドＭａｇｉｃ Ｌｅａｐ，Ｉｎｃ． | Waveguide with reflective layer formed by reflective flowable material |
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