JPH022199A - Dye circulator of dye laser - Google Patents

Abstract

PURPOSE:To keep dye at a specified temperature and flow rate by carrying out feed back of a signal of a dye temperature detector to a pure water temperature controller and a dye flow rate controller and by controlling a pure water temperature and a dye flow rate to attain to a specified dye temperature. CONSTITUTION:A dye temperature controller 20 inputs an operation output signal 201 to a pure water temperature controller 113 and a dye flow rate controller 123 as a control set amount. The pure water temperature controller 113 obtains a deviation against a pure water temperature signal 121 which is sent from a pure water temperature detector 12 with a control set value of the operation output signal 201 of the dye temperature controller, performs PID control operation, and controls a power regulator 14 for pure water heater by an operation output signal 131 to eliminate the deviation. The dye low rate controller 123 obtains a deviation with the control set amount of the operation output signal 201 against a dye flow rate signal 221 which is sent from a dye flow rate detector 22, performs PID control operation, and operates operation signals 231, 232 so that directions of opening and closing of a dye supply flow regulating valve 24 and a dye divided flow circulating flow regulating valve 25 are opposite each other to eliminate the deviation.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Field of Application) The present invention relates to a dye laser, and more particularly to a dye circulation device that circulates and supplies a dye to a laser emitting device.

(Prior Art) A dye laser excited by a wavelength-tuned pulsed laser is used as a method for precisely tuning the oscillation wavelength of a laser, narrowing the spectral band, achieving high output, and high repetition rates.

A dye laser oscillates by optical excitation of two dyes, and in order to increase energy conversion efficiency and cover the entire wavelength range, it is necessary to change the type of dye for each wavelength and mechanism described above. FIG. 2 shows a block diagram of a conventional dye circulation device for supplying various dyes to the laser tube of such a laser device. The dye circulation equipment consists of an industrial water section (1) and a fluorocarbon section (2).

It consists of four systems: a pure water section (3), a dye supply section (4), and a dye supply section (4). The industrial water section (1) has the function of supplying and cooling industrial water to the secondary cooler (5).

The fluorocarbon section (2) uses fluorocarbons as a refrigerant, is cooled by a refrigerator (6), and supplies the fluorocarbons to a secondary cooler (7).

The pure water section (3) uses pure water as a refrigerant using a pure water heater (8), a pure water reservoir (9), and a pure water circulation pump (10).

Pure water is supplied to the tertiary cooler (11). A pure water temperature detector (12) detects the temperature of pure water and sends a temperature signal (121) to a pure water temperature controller (13). The pure water heater power regulator (14) is adjusted by the operation output signal (131) of the controller, and the degree of heating of the pure water by the pure water heater (8) is adjusted to keep the pure water temperature at a predetermined level. Control to value.

The dye supply section (4) includes a dye heater (15), a dye reservoir (16), a dye circulation pump (17), and a filter (18).
supplies the dye (usually used dissolved in a solvent such as water) to the laser oscillation device. The dye temperature detector (19) detects the temperature of the dye and outputs a temperature signal (191).
) to the dye temperature controller (20). The dye heater power regulator (21) is adjusted by the operation output signal (201) of the controller, and the degree of heating of the dye by the dye heater (15) is adjusted to control the dye temperature to a predetermined value. . The controller sends an operation signal (231) to the dye supply flow control valve (24) and an operation signal (232) to the two-dye separation circulation flow control valve (25).
Two operation output signals are generated, and the flow rate of one dye to be supplied is controlled to a predetermined value by adjusting the flow rate supplied to the laser oscillator and the flow rate that is diverted and circulated without being supplied to the laser oscillator.

In such a dye circulation device, the temperature and flow rate conditions for the dye to be supplied are severe in order to achieve high output and high efficiency of the laser, and in particular, high temperature stability is required.

As mentioned above, in the conventional apparatus, the cooling system is installed in multiple stages due to the need to stabilize the dye supply temperature as much as possible. The control system for the dye supply temperature includes not only the dye temperature controller (20) in the dye supply section (4) but also the refrigerant of the tertiary cooler (11) that cools and heat exchanges one dye in the pure water section (3). After ensuring the temperature stability of the refrigerant itself by setting a pure water temperature controller (13) to control the temperature of the pure water itself at a constant temperature.

The purpose is to control the temperature of the dye, which is the material to be cooled.

(Problem to be solved by the present invention) In the conventional control system, the pure water temperature control system and the single dye temperature control system control the temperature of each medium independently of each other, so the responsiveness to various disturbances and load fluctuations is poor. There was room for improvement in this respect.

For example, when a change in pure water temperature occurs due to fluctuations in industrial water temperature, the pure water temperature control means acts to correct only the pure water temperature. If this disturbance affects the dye temperature, the two dye temperature control means will correct only one dye temperature.

The pure water temperature control means does not act to correct dye temperature. The conditions for the dye required by the laser oscillation device are the set temperature depending on the function and wavelength of the laser.

It is also different from the flow rate, and in a system configuration where a common dye supply section is installed for multiple laser oscillation devices (load side when viewed from the dye supply section (4)), this load side condition When the dye temperature is affected by fluctuations, only one dye temperature control means performs a control operation to correct this, but the pure water temperature control means does not act to control the dye temperature.

In other words, in the conventional control system, the dye flow rate control system and the dye temperature control system are mutually independent.For example, if the dye flow rate is changed due to the factor of the laser oscillation device, the supply flow rate and the divided circulation flow rate change, so the dye temperature control system changes. In some cases, changes occurred, similar to those caused by external disturbances. In this case, it is possible to improve responsiveness by correcting not only the dye temperature but also the pure water temperature, but as mentioned above, since they are mutually independent, it is necessary to correct only the dye temperature. Ta.

The present invention was made in view of such conventional problems, and by coordinating the pure water temperature control system, the dye temperature control system, and the dye flow rate control system, the upstream of the multistage cooling system of the dye circulation device is It is an object of the present invention to provide a control system that can highly accurately follow any disturbance factors on the downstream side.

[Means for Solving the Problem] A pure water section having a pure water temperature detecting means for detecting a pure water temperature after temperature control using the pure water temperature controlling means; a dye temperature control means for adjusting the temperature of the dye solution cooled by the purified water to a predetermined temperature; a dye temperature detection means for detecting the temperature of the temperature-controlled dye solution; and six dye containers. a dye supply section including a dye flow rate detection means for measuring the flow rate of the liquid; and a dye flow rate control means for controlling the dye flow rate based on the detection result of the dye flow rate detection means; A signal is fed back to the pure water temperature control means and the dye flow rate control means, and the pure water temperature and the dye flow rate are controlled to reach a predetermined dye temperature, thereby controlling the eight dyes at a predetermined flow rate and temperature according to the configuration. The pure water temperature is controlled based on the detected pure water temperature and dye temperature so that the deviation from the set target value is reduced. The dye temperature is controlled so that the deviation from the set target value is reduced based on the detected dye temperature. The dye flow rate is controlled so that the deviation between the detected dye flow rate and a target value set based on the dye temperature is reduced.

(Example) An example of the present invention will be described below based on FIG. 1. FIG. 1 shows one embodiment, and the names 2 and numbers of the r tl'ζ components are the same as in FIG. 2. Therefore, the differences from the conventional example will be described below.

First, the difference in configuration is the pure water temperature controller (113).
Conventionally, the pure water temperature was controlled only by the pure water temperature, but in the embodiment, the operation output signal (201) of the dye temperature controller (20) is input as the control signal. Similarly, the dye flow rate controller (23) conventionally only controlled the detected flow rate to a target value, but in the embodiment, the operation output signal (201) of the dye temperature controller (20) is also input. The flow rate is controlled. That is, the dye temperature controller (20) not only outputs its operation output signal (201) to the dye heater power regulator (21) but also to the pure water temperature controller (113) and the dye flow rate controller (123). By outputting the control target amount, a kind of cascade control system is constructed in which the two dye temperature control is the primary loop, and the pure water temperature control and the dye flow rate control are the secondary loop. In a normal cascade control system, only the secondary loop has an operating end.

In this example, the primary loop (dye heater power regulator (2)
1)) Power regulator for secondary roof pure water heater (14
) and dye supply flow control valve (24)/dye separation circulation flow control valve (
25)) both have operating ends.

As is clear from the above configuration, the control system in this embodiment performs the following operations.

The dye temperature controller (20) performs PID control calculation based on the deviation between the dye temperature signal (191) sent from the dye temperature detector (19) and the internally set dye temperature control target amount. The dye heater power regulator (21) is operated using the operation output signal (201) so as to eliminate the deviation.

Also, a pure water temperature controller (113) and a dye flow rate controller (1
23) inputs the operation output signal (201) as the control target amount.

The pure water temperature controller (113) calculates a deviation from the pure water temperature g (121) sent from the pure water temperature detector (12) using the 1 dye temperature controller operation output signal (201) as a control target amount. is determined, PID control calculation is performed, and the pure water heater power regulator (14) is operated using the operation output signal (131) so as to eliminate this deviation.

The dye flow rate controller (123) calculates the deviation between the dye flow rate signal (221) sent from the dye flow rate detector (22) and the operation output signal (201) which is the control target amount.
An operation signal (231) having an operation output characteristic that performs PID control calculation and opens and closes the dye supply flow control valve (24) and the dye separation circulation flow control valve (25) in opposite directions to eliminate this deviation. Operate with and (232).

The present embodiment in which the configuration 1 operates in this manner has the following effects.

The pure water temperature controller (13) not only performs corrective control operations when there is a fluctuation in the pure water temperature signal (121), but also controls the dye temperature signal (191) in one dye temperature circulation loop.
), the 2 dye temperature controller operation output signal (
201), and a corrective control action can be performed.

The dye flow rate controller (123) not only performs corrective control operations when there is a variation in the dye flow rate signal (221), but also controls the dye temperature signal (19) in one dye temperature circulation loop.
If there is a variation in 1), it appears as a change in the dye temperature controller operation output signal (201), and a corrective control operation can be performed.

The dye temperature controller (20) not only directly operates the dye heater power controller 1) in response to changes in dye temperature, but also controls the pure water temperature and dye supply flow rate 5, which affect dye temperature.
The dye diversion circulation flow rate can be manipulated.

The present invention can be modified in various ways in addition to the embodiments described above.

For example, a certain effect can be obtained by using only one of the pure water temperature control loop or the dye supply flow rate loop as the secondary loop, and leaving the other loop as an independent loop as before. The control calculation method for the dye temperature controller 7, pure water temperature controller 1, and the dye flow rate controller may be other than PID control. The sample PI control method is also suitable for processes with large time constants such as heat exchange. Further, calculation processing can be performed by software using a single DDC device instead of configuring each controller as in the present embodiment.

[Effects of the invention] When the pure water temperature fluctuates due to fluctuations in industrial water temperature as a disturbance, or when the dye co-supply flow rate fluctuates due to the conditions on the laser oscillation device side, the pure water temperature control loop and the dye supply flow rate change, respectively. Since the measurement signals of the secondary loops of the control loop change, each secondary loop can perform corrective control locally.

If these disturbances affect the dye temperature, the control operation of the power regulator for the dye heater in the primary loop and the control operation of the secondary loop can be performed simultaneously.

In addition, since the secondary loop performs follow-up control using the manipulated output of the primary loop as its control target quantity, a larger control deviation (control target quantity - measured quantity) can be obtained than when only the measurement signal of the secondary loop itself changes. Therefore, the correction control operation can be increased.

That is, the dye temperature can be controlled with good local stability during small disturbances and with good responsiveness during large disturbances.

[Brief explanation of the drawing]

FIG. 1 is a block diagram explaining one embodiment of the present invention, and FIG.
The figure is a block diagram illustrating a conventional technique. 1...Industrial water section 2...Freon section 3...Pure water section 4...Dye supply Part 5... - Secondary cooler 6... Refrigerator 7... Secondary cooler 8...・Pure water heater 9...Pure water reservoir 10...Pure water circulation pump 11...
...Tertiary cooler 12 ...Pure water temperature detector 13 ...
...Pure water temperature controller-1 Power grid saver for pure water heater Dye heater Dye reservoir Dye circulation pump filter Dye temperature detector Dye temperature controller Power regulator for dye heater Dye flow rate detector Dye flow rate controller - 1 Dye supply flow control valve Dye separation circulation flow control valve...Pure water temperature controller-2...Dye flow rate controller-2 Pure water temperature signal Pure water temperature controller operation output signal Dye temperature signal Dye temperature controller Operation output signal Dye flow rate signal Dye supply flow control valve operation signal

Claims (1)

[Claims] A pure water temperature control means that adjusts the temperature of pure water cooled by a refrigerant using industrial water to a predetermined temperature, and a pure water temperature control means that detects the temperature of pure water after temperature control by this pure water temperature control means. A pure water section having a water temperature detection means, a dye temperature control means that adjusts the temperature of the dye liquid cooled by the pure water whose temperature is controlled by the pure water temperature control means to a predetermined temperature, and a temperature control means. Dye temperature detection means for detecting the controlled temperature of the dye solution, dye flow rate detection means for measuring the flow rate of the dye solution, and dye flow rate control means for controlling the dye flow rate based on the detection result of the dye flow rate detection means. and a dye supply unit comprising a dye supply section, which feeds back the signal of the dye temperature detection means to the pure water temperature control means and the dye flow rate control means, and sets the signal in each of the pure water temperature control means and the dye flow rate control means. A dye circulation device for a dye laser that controls the pure water temperature and dye flow rate to reduce the deviation from the target value, and supplies the dye to the dye laser oscillation device.