JPH0222285U - - Google Patents
Info
- Publication number
- JPH0222285U JPH0222285U JP9743288U JP9743288U JPH0222285U JP H0222285 U JPH0222285 U JP H0222285U JP 9743288 U JP9743288 U JP 9743288U JP 9743288 U JP9743288 U JP 9743288U JP H0222285 U JPH0222285 U JP H0222285U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- inert gas
- variable atmosphere
- atmosphere device
- evacuated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims description 3
- 238000000746 purification Methods 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Description
第１図は本考案の実施例を示す概略図、第２図
及び第３図はいずれも従来の超高真空装置の概略
図である。
１……試験チヤンバー、２……可変雰囲気装置
、３……真空予備室、５，８，９……蓋、１０…
…不活性ガス供給装置、１３……不純ガス精製装
置、１８，１９……不活性ガス導入管、２０……
作業用グローブ、２１……高真空排気装置、２２
……真空排気装置。
FIG. 1 is a schematic diagram showing an embodiment of the present invention, and FIGS. 2 and 3 are both schematic diagrams of a conventional ultra-high vacuum apparatus. 1... Test chamber, 2... Variable atmosphere device, 3... Vacuum preliminary chamber, 5, 8, 9... Lid, 10...
...Inert gas supply device, 13... Impure gas purification device, 18, 19... Inert gas introduction pipe, 20...
Work gloves, 21... High vacuum exhaust device, 22
...Vacuum exhaust equipment.
Claims (1)
じく真空排気できるようにした真空予備室との間
に、作業用グローブを取り付けた可変雰囲気装置
を組み込んで、該可変雰囲気装置と上記試験チヤ
ンバー及び真空予備室との間の試験片出入口にそ
れぞれ蓋を開閉自在に備え、且つ上記可変雰囲気
装置に、不活性ガスを導入できるようにすると共
に、導入された不活性ガス中の不純ガスを除去す
る不純ガス精製装置を接続し、更に、上記可変雰
囲気装置内の高純度不活性ガスを上記試験チヤン
バー内及び真空予備室内へ導入させる装置を備え
てなることを特徴とする超清浄真空装置。 A variable atmosphere device with work gloves attached is installed between the test chamber that can be evacuated and a vacuum preliminary chamber that can also be evacuated, and the variable atmosphere device and the test chamber and vacuum preliminary chamber are connected to each other. an impurity gas purification device that is provided with lids that can be freely opened and closed at the entrance and exit of the test piece between the two, and that allows inert gas to be introduced into the variable atmosphere device and removes impurity gas from the introduced inert gas; An ultra-clean vacuum apparatus, further comprising a device for introducing a high-purity inert gas in the variable atmosphere device into the test chamber and the vacuum preliminary chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9743288U JPH0222285U (en) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9743288U JPH0222285U (en) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0222285U true JPH0222285U (en) | 1990-02-14 |
Family
ID=31322900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9743288U Pending JPH0222285U (en) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0222285U (en) |
-
1988
- 1988-07-25 JP JP9743288U patent/JPH0222285U/ja active Pending