JPH0222361U - - Google Patents
Info
- Publication number
- JPH0222361U JPH0222361U JP10036088U JP10036088U JPH0222361U JP H0222361 U JPH0222361 U JP H0222361U JP 10036088 U JP10036088 U JP 10036088U JP 10036088 U JP10036088 U JP 10036088U JP H0222361 U JPH0222361 U JP H0222361U
- Authority
- JP
- Japan
- Prior art keywords
- intake
- vacuum chamber
- forming apparatus
- film forming
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案による真空成膜装置の一実施例
の要部を示す構成図、第２図は第１図例で使用し
ている吸排気管を示す平面図、第３図は従来の真
空成膜装置の要部を示す構成図である。
６……真空槽、７，８……低コンダクタンスの
吸排気口、９……高コンダクタンスの吸排気口、
１９，２０……吸排気管、２１……吸排気管の吸
排気口。
Fig. 1 is a block diagram showing the main parts of an embodiment of the vacuum film forming apparatus according to the present invention, Fig. 2 is a plan view showing the intake and exhaust pipes used in the example shown in Fig. 1, and Fig. 3 is a diagram of the conventional vacuum film forming apparatus. FIG. 2 is a configuration diagram showing main parts of a film forming apparatus. 6... Vacuum chamber, 7, 8... Low conductance intake/exhaust port, 9... High conductance intake/exhaust port,
19, 20... Intake/exhaust pipe, 21... Intake/exhaust port of the intake/exhaust pipe.
Claims (1)
装置において、 上記真空槽に複数の吸排気口を設けたことを特
徴とする真空成膜装置。[Scope of Claim for Utility Model Registration] A vacuum film forming apparatus configured to form a film in a vacuum chamber, characterized in that the vacuum chamber is provided with a plurality of intake and exhaust ports.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10036088U JPH0222361U (en) | 1988-07-28 | 1988-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10036088U JPH0222361U (en) | 1988-07-28 | 1988-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0222361U true JPH0222361U (en) | 1990-02-14 |
Family
ID=31328366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10036088U Pending JPH0222361U (en) | 1988-07-28 | 1988-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0222361U (en) |
-
1988
- 1988-07-28 JP JP10036088U patent/JPH0222361U/ja active Pending