JPH0222668Y2 - - Google Patents

Info

Publication number
JPH0222668Y2
JPH0222668Y2 JP11892585U JP11892585U JPH0222668Y2 JP H0222668 Y2 JPH0222668 Y2 JP H0222668Y2 JP 11892585 U JP11892585 U JP 11892585U JP 11892585 U JP11892585 U JP 11892585U JP H0222668 Y2 JPH0222668 Y2 JP H0222668Y2
Authority
JP
Japan
Prior art keywords
compartment
diaphragm
pressure
differential pressure
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11892585U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6228143U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11892585U priority Critical patent/JPH0222668Y2/ja
Publication of JPS6228143U publication Critical patent/JPS6228143U/ja
Application granted granted Critical
Publication of JPH0222668Y2 publication Critical patent/JPH0222668Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP11892585U 1985-08-02 1985-08-02 Expired JPH0222668Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11892585U JPH0222668Y2 (fr) 1985-08-02 1985-08-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11892585U JPH0222668Y2 (fr) 1985-08-02 1985-08-02

Publications (2)

Publication Number Publication Date
JPS6228143U JPS6228143U (fr) 1987-02-20
JPH0222668Y2 true JPH0222668Y2 (fr) 1990-06-19

Family

ID=31005830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11892585U Expired JPH0222668Y2 (fr) 1985-08-02 1985-08-02

Country Status (1)

Country Link
JP (1) JPH0222668Y2 (fr)

Also Published As

Publication number Publication date
JPS6228143U (fr) 1987-02-20

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