JPH02233184A - ultrasonic transducer - Google Patents
ultrasonic transducerInfo
- Publication number
- JPH02233184A JPH02233184A JP5254089A JP5254089A JPH02233184A JP H02233184 A JPH02233184 A JP H02233184A JP 5254089 A JP5254089 A JP 5254089A JP 5254089 A JP5254089 A JP 5254089A JP H02233184 A JPH02233184 A JP H02233184A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- tool
- stellite
- tip
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001347 Stellite Inorganic materials 0.000 claims abstract description 24
- AHICWQREWHDHHF-UHFFFAOYSA-N chromium;cobalt;iron;manganese;methane;molybdenum;nickel;silicon;tungsten Chemical compound C.[Si].[Cr].[Mn].[Fe].[Co].[Ni].[Mo].[W] AHICWQREWHDHHF-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000003754 machining Methods 0.000 claims description 10
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 8
- 230000003628 erosive effect Effects 0.000 abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 229910000831 Steel Inorganic materials 0.000 abstract description 3
- 239000010959 steel Substances 0.000 abstract description 3
- 239000007769 metal material Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract 1
- 238000005406 washing Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 7
- 239000007788 liquid Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 229910000851 Alloy steel Inorganic materials 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241000238631 Hexapoda Species 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004945 emulsification Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、超音波洗浄用の超音波振動板や、超音波加工
用の工具等の振動部材を先端部に備えた超音波振動子に
関するものである。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an ultrasonic vibrator equipped with a vibrating member at its tip, such as an ultrasonic diaphragm for ultrasonic cleaning or a tool for ultrasonic machining. It is something.
[従来技術コ
従来、例えば超音波加工機の中でも、ホモジナイザや遊
離砥粒を利用した加工や、プラスチックを溶着する超音
波ウエルダによる加工等では、合金鋼、チタン、ステン
レス等を用いて工具(ホーンともいう)を形成し、その
工具を超音波振動子の先端に取り付け、超音波振動子に
より工具を超音波振動させながら、加工作業を行ってい
る。[Prior art] In the past, for example, in ultrasonic processing machines, processing using homogenizers and free abrasive grains, processing using ultrasonic welders for welding plastic, etc., use tools (horns) using alloy steel, titanium, stainless steel, etc. The tool is attached to the tip of an ultrasonic vibrator, and the machining operation is performed while the tool is vibrated ultrasonically by the ultrasonic vibrator.
一方、超音波洗浄機では、超音波振動子を張り付けた超
音波振動板を洗浄槽内に取り付けて、洗浄液中で超音波
振動を行って洗浄するが、この超音波振動板は、前記工
具と同様に、合金鋼、ヂタン、ステンレス等を用いて形
成していた。On the other hand, in an ultrasonic cleaning machine, an ultrasonic diaphragm to which an ultrasonic vibrator is attached is installed in a cleaning tank, and cleaning is performed by ultrasonic vibration in a cleaning solution. Similarly, they were made of alloy steel, titanium, stainless steel, etc.
なお、超音波加工用の前記工具は上記したちの以外に、
超硬合金のチップを工具の先端にろう付けしたり、超音
波洗浄用の振動板の表面にメッキ処理を施すことにより
、耐腐食性や耐浸食性等の向上を図ったものか知られて
いる。In addition to the above-mentioned tools, the tools for ultrasonic machining include:
It is known that corrosion resistance and erosion resistance are improved by brazing a cemented carbide tip to the tip of the tool or by plating the surface of the diaphragm for ultrasonic cleaning. There is.
[発明が解決しようとする課題]
従来のホモジナイザや遊離砥粒を利用した加工では、工
具の先端面を液体に浸けて超音波振動させた際に、また
従来の超音波洗浄用の振動板では、洗浄液中で超音波振
動させた際に、発生するキャビテーションや、振動する
液体が工具の先端面や振動板面に強い衝撃を与えること
により、前記工具の先端面や振動板面にそれぞれエロー
ジョンが比較的早く発生し、工具や超音波振動板の寿命
が短いという問題があ号た。[Problems to be solved by the invention] In machining using conventional homogenizers and free abrasive grains, when the tip of the tool is immersed in liquid and subjected to ultrasonic vibration, and with the conventional diaphragm for ultrasonic cleaning, When ultrasonic vibration is applied in the cleaning liquid, cavitation occurs and the vibrating liquid gives a strong impact to the tip and diaphragm surfaces of the tool, resulting in erosion on the tip and diaphragm surfaces of the tool, respectively. This problem occurred relatively quickly and shortened the lifespan of tools and ultrasonic diaphragms.
また、超音波ウエルダによる加工では、工具と被溶着物
との摩擦により、工具の寿命が短いという問題があった
。Furthermore, processing using an ultrasonic welder has a problem in that the life of the tool is short due to friction between the tool and the welded object.
本発明は、上述した問題点を解決するためになされたも
のであり、超音波振動子の先端に取り付けられる超音波
振動板や、工具等の振動部材に、超音波振動時にエロー
ジョン等が生じにくく、従来の超音波振動板や振動部材
に比べて寿命がはるかに長い、超音波振動子を提供する
ことを目的としている。The present invention has been made in order to solve the above-mentioned problems, and it is difficult for erosion etc. to occur during ultrasonic vibration in the ultrasonic diaphragm attached to the tip of an ultrasonic vibrator or a vibrating member such as a tool. The purpose of the present invention is to provide an ultrasonic vibrator that has a much longer lifespan than conventional ultrasonic diaphragms and vibrating members.
[課題を解決するための手段]
上記の目的を達成するために本発明の超音波振動子は、
超音波洗浄用の超音波振動板や、超音波加工用の工具等
の振動部材を先端部に備えた超音波振動子において、前
記超音波振動板や振動部材の超音波振動面にステライト
層を設けるか、又は前記超音波振動板や振動部材の全面
をステライトにより形成している。[Means for Solving the Problems] In order to achieve the above object, the ultrasonic transducer of the present invention has the following features:
In an ultrasonic vibrator equipped with a vibrating member such as an ultrasonic diaphragm for ultrasonic cleaning or a vibrating member such as a tool for ultrasonic machining at the tip, a stellite layer is formed on the ultrasonic vibration surface of the ultrasonic diaphragm or the vibrating member. Alternatively, the entire surface of the ultrasonic diaphragm or vibrating member is formed of stellite.
[作用]
上記の構成を有する本発明の超音波振動子によれば、超
音波振動子の先端の超音波振動仮や振動部材を液体中に
浸して超音波振動させたり、被溶着物を溶着するために
超音波振動させても、ステライトの持つ耐浸食性や耐摩
耗性により、寿命が大幅に延びる。[Function] According to the ultrasonic vibrator of the present invention having the above configuration, the ultrasonic vibrator or vibrating member at the tip of the ultrasonic vibrator can be immersed in a liquid to vibrate ultrasonically, and objects to be welded can be welded. Even when using ultrasonic vibrations to achieve this, Stellite's corrosion and abrasion resistance greatly extends its lifespan.
[実施例]
以下、本発明を具体化したー実施例を図面を参照して説
明する。[Example] Hereinafter, examples embodying the present invention will be described with reference to the drawings.
第2図は超音波加工用の工具の実施例を示し、図におい
て、工具lは、円柱状郎1aの先端面中央部より小径円
柱状部tbを先端方向に延設した構造からなっており、
合金鋼を用いて一体に形成されている。そして、工具l
(小径円柱状部lb)の先端而(超音波振動面)には、
厚さ2mmのステライト層2が設けられているが、この
ステライト層2は、ステライトと會金鋼との中間的性状
をもつ金属材3を前記先端而に溶接肉盛りすることによ
り介在させて、前記工具lの先端面に溶接肉盛りし形成
してある。ステライトは周知のように、コバルトにクロ
ム、タングステンなどを添加した合金で、耐摩耗性に優
れていることから、内燃機関のバルブや切削刃などの素
材として用いられている。本発明者は、このステライト
が超音波振動工具の先端の材料として極めて有効である
ことを見い出したので、上記のように超音波加工用工具
lに用いたものである。なお、工具lは通常、超音波振
動子4(第1図)の先端に取り付けられて使用される。Fig. 2 shows an embodiment of a tool for ultrasonic machining, and in the figure, the tool l has a structure in which a small-diameter cylindrical part tb extends toward the distal end from the center of the distal end surface of a cylindrical rod 1a. ,
It is integrally formed using alloy steel. And the tool
At the tip (ultrasonic vibration surface) of (small diameter cylindrical part lb),
A stellite layer 2 with a thickness of 2 mm is provided, and this stellite layer 2 is interposed by welding and overlaying a metal material 3 having intermediate properties between stellite and metal steel at the tip. It is formed by welding overlay on the tip surface of the tool 1. As is well known, Stellite is an alloy made of cobalt with the addition of chromium, tungsten, etc., and is used as a material for internal combustion engine valves and cutting blades due to its excellent wear resistance. The inventor of the present invention found that this stellite is extremely effective as a material for the tip of an ultrasonic vibrating tool, and therefore used it in the ultrasonic machining tool 1 as described above. Note that the tool 1 is normally attached to the tip of the ultrasonic transducer 4 (FIG. 1) and used.
また、上記したステライト層2の厚さ及び工具lの材質
は、例示であって限定するものではない。Further, the thickness of the stellite layer 2 and the material of the tool 1 described above are merely examples, and are not intended to be limiting.
ここで、上記実施例の工具1の効果を確認するために実
験した結果を、以下に説明する。Here, the results of an experiment to confirm the effects of the tool 1 of the above embodiment will be described below.
第1図は工具lの効果を試験するために用いた実験装置
の全体正面図である。図に示すように、この装置の超音
波振動系は、超音波振動子4と前記工具lとの間に、工
具1の振幅を増大させるための増幅用ポーン5が連結さ
れている。FIG. 1 is an overall front view of the experimental apparatus used to test the effectiveness of tool 1. As shown in the figure, in the ultrasonic vibration system of this device, an amplification pawn 5 for increasing the amplitude of the tool 1 is connected between an ultrasonic vibrator 4 and the tool 1.
このホーン5は、前記工具1とほぼ同一の形状をなし、
ほぼ中間位置にフランジ(図示せず)が張出しており、
このフランジを一対のフランジ支持体6により挟み、ボ
ルト止めして固定する。そして、そのフランジ支持体6
を実験用の水槽tiに装着している。前記超音波振動子
4は、出力ケーブル7により超音波発振器8と接続され
ており、その発振器8により超音波振動子4が駆動され
、その超音波振動子4で得られる振幅がホーン5により
増幅されて工具1の先端面(ステライト層2)が超音波
振動する。図中の符号9は電源用コンセント、10は電
源ケーブルである。This horn 5 has almost the same shape as the tool 1,
A flange (not shown) protrudes at approximately the middle position,
This flange is sandwiched between a pair of flange supports 6 and fixed with bolts. And the flange support 6
is attached to the experimental aquarium ti. The ultrasonic vibrator 4 is connected to an ultrasonic oscillator 8 by an output cable 7, the oscillator 8 drives the ultrasonic vibrator 4, and the amplitude obtained by the ultrasonic vibrator 4 is amplified by the horn 5. As a result, the tip surface (Stellite layer 2) of the tool 1 vibrates ultrasonically. In the figure, numeral 9 is a power outlet, and 10 is a power cable.
また、水槽1lには一定虫の水Aか注入されており、そ
の上端には、中央部に開口122Lを設けた蓋体12が
取り付けられている。Further, water A for certain insects is poured into the aquarium 1l, and a lid 12 having an opening 122L in the center is attached to the upper end thereof.
そして、本実験に際し、前記工具lを蓋体12の開口1
2aから水槽1l内に挿入し、前記ホーン5のフランジ
支持体6を蓋体l2の上面に当接させて、工具lの先端
部(ステライト層2)を水Aの中に完全に浸けた。In this experiment, the tool l was inserted into the opening 1 of the lid body 12.
2a into the water tank 1L, the flange support 6 of the horn 5 was brought into contact with the upper surface of the lid 12, and the tip (Stellite layer 2) of the tool 1 was completely immersed in the water A.
本実験は下記の条件に基づいて行った。This experiment was conducted under the following conditions.
超音波周波数: 20 kHz、工具lの先端部の振幅
:40μ肩、工具1の先端部の浸水深さ: 16xm、
超音波振動時間: lsec−ON, 3sec−OF
Fのサイクルで60時間テストを行った(実質15時間
連続振動)。Ultrasonic frequency: 20 kHz, amplitude at the tip of tool 1: 40μ shoulder, immersion depth at the tip of tool 1: 16xm,
Ultrasonic vibration time: lsec-ON, 3sec-OF
A test was conducted for 60 hours at cycle F (actually 15 hours of continuous vibration).
比較対象のために、前記工具1に代えて、ステライト層
2を具備しない従来の工具を、前記ポーン5の先端に取
り付けて同様の実験を行った。For comparison purposes, a similar experiment was conducted by attaching a conventional tool without the stellite layer 2 to the tip of the pawn 5 instead of the tool 1.
実験結果は、本発明の工具1では、60時間テスト後も
第3図に示すようにエロージョンが発生しなかったのに
対し、従来の工具では、第6図及び第7図に示すように
エロージョンの発生が非常に激しかった。なお、本発明
の工具lについては、更に実験を継続して500時間テ
スト(125時間連続振動)を行った。この結果ら、第
4図及び第5図に示すようにエロージョンが見られなか
った。なお、第3図〜第5図は本発明の工具lに関する
ステライト層2の先端面の写真で、第3図は60時間テ
スト後の倍率2倍の写真、第4図は500時間テスト後
の倍率2倍の写真、第5図は500時間テスト後の走査
型電子顕微鏡による倍率100倍の写真である。第6図
及び第7図は従来の工具に関する工具の先端面の写真で
、第6図は60時間テスト後の倍率2倍の写真、第7図
は60時間テスト後の走査型電子顕微鏡による倍率10
0倍の写真である。The experimental results showed that in the tool 1 of the present invention, no erosion occurred as shown in Fig. 3 even after a 60-hour test, whereas in the conventional tool, erosion did not occur as shown in Figs. 6 and 7. The occurrence was very severe. The tool 1 of the present invention was further tested for 500 hours (continuous vibration for 125 hours). As a result, no erosion was observed as shown in FIGS. 4 and 5. In addition, FIGS. 3 to 5 are photographs of the tip surface of the stellite layer 2 regarding the tool 1 of the present invention. FIG. 3 is a photograph at double magnification after a 60-hour test, and FIG. 4 is a photograph after a 500-hour test. A photograph with a magnification of 2x and FIG. 5 is a photograph with a magnification of 100x taken by a scanning electron microscope after a 500 hour test. Figures 6 and 7 are photographs of the tip surface of a conventional tool. Figure 6 is a photograph at double magnification after a 60-hour test, and Figure 7 is a magnification taken using a scanning electron microscope after a 60-hour test. 10
This is a 0x photo.
ところで、本発明は上記実施例に限定されるものではな
く、例えば、超音波洗浄用の超音波振動板についてら、
その表面にステライト層を設ければ、同様の効果が達成
されるほか、超音波の分散乳化作用に基づいた超音波ホ
モナイザや、液中の分散微粒子を凝集させろ超音波凝集
装置等の化学工業等への応用ら可能である。また、ステ
ライト層を工具や振動仮の表面に設ける代わりに、工具
や振動板の全面をステライトで形成してもよい。更に、
超音波ウエルダでプラスチックを溶着する際に、ホーン
と披溶着物(プラスチック)間で耐摩耗性を要する場合
などに、この発明の趣旨から逸脱しない顯囲で用途を任
意に変更して具体化することも可能である。By the way, the present invention is not limited to the above embodiments, and for example, regarding ultrasonic diaphragms for ultrasonic cleaning,
If a stellite layer is provided on the surface, similar effects can be achieved, as well as chemical industry applications such as ultrasonic homogenizers based on the dispersion and emulsification effect of ultrasonic waves, and ultrasonic agglomeration devices that aggregate dispersed fine particles in liquid. It is possible to apply it to Further, instead of providing the stellite layer on the surface of the tool or vibration plate, the entire surface of the tool or diaphragm may be formed of stellite. Furthermore,
When welding plastics with an ultrasonic welder, wear resistance is required between the horn and the welded material (plastic), and the application can be changed as desired without departing from the spirit of the invention. It is also possible.
[発明の効果]
以上詳述したことから明らかなように、本発明の超音波
振動子は、超音波加工用工具の先端面や超音波洗浄機の
振動板などにおいて、超音波振動時に生じるキャビテー
ションなどの影響によるエロージョン等の発生が非常に
少なくなり、超音波振動面の劣化が抑えられ、寿命を著
しく延ばすことができるという優れた効果を奏する。[Effects of the Invention] As is clear from the detailed description above, the ultrasonic vibrator of the present invention suppresses cavitation that occurs during ultrasonic vibration on the tip surface of an ultrasonic machining tool, the diaphragm of an ultrasonic cleaning machine, etc. The occurrence of erosion and the like due to such effects is greatly reduced, the deterioration of the ultrasonic vibration surface is suppressed, and the lifespan can be significantly extended, which is an excellent effect.
第1図は本発明の超音波振動子の効果を試験するために
用いた実験装置の全体正面図、第2図は本発明の超音波
振動子の先端に取り付けられる超音波加工用の工具の実
施例を示す正面図である。全3図〜第5図は本発明の工
具lに関するステライト層2の先端面の写真で、第3図
は60時間テスト後の倍率2倍の写真、第4図は500
時間テスト後の倍率2倍の写真、第5図は500時間テ
スト後の走査型電子顕微鏡による倍率100倍の写真で
ある。第6図及び第7図は従来の工具に関する工具の先
端面の写真で、第6図は60時間テスト後の倍率2倍の
写真、第7図は60時間テスト後の走査型電子顕微鏡に
よる倍率100倍の写真である。
l・・・超音波加工用工具、2・・・ステライト層、4
・・・超音波振動子、5・・・振幅増幅用ホーン、6・
フランジ支持体、8・・・超音波発振器。
第2図
鉛3図Fig. 1 is an overall front view of the experimental equipment used to test the effects of the ultrasonic transducer of the present invention, and Fig. 2 is an illustration of an ultrasonic machining tool attached to the tip of the ultrasonic transducer of the present invention. It is a front view showing an example. All of Figures 3 to 5 are photographs of the tip surface of the stellite layer 2 regarding the tool 1 of the present invention. Figure 3 is a photograph at double magnification after a 60-hour test, and Figure 4 is a photograph at 500
A photograph at 2x magnification after the time test, and FIG. 5 is a photograph at 100x magnification taken by a scanning electron microscope after the 500 hour test. Figures 6 and 7 are photographs of the tip surface of a conventional tool. Figure 6 is a photograph at double magnification after a 60-hour test, and Figure 7 is a magnification taken using a scanning electron microscope after a 60-hour test. This is a 100x photo. l...Ultrasonic processing tool, 2...Stellite layer, 4
... Ultrasonic transducer, 5... Horn for amplitude amplification, 6.
Flange support, 8... Ultrasonic oscillator. Figure 2 Lead Figure 3
Claims (1)
の振動部材を先端部に備えた超音波振動子において、前
記超音波振動板や振動部材の超音波振動面にステライト
層を設けるか、又は前記超音波振動板や振動部材の全面
をステライトにより形成することを特徴とする超音波振
動子。In an ultrasonic vibrator equipped with a vibrating member such as an ultrasonic diaphragm for ultrasonic cleaning or a vibrating member such as a tool for ultrasonic machining at the tip, a stellite layer is formed on the ultrasonic vibration surface of the ultrasonic diaphragm or the vibrating member. An ultrasonic vibrator characterized in that the ultrasonic diaphragm or the vibrating member is entirely formed of stellite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5254089A JPH02233184A (en) | 1989-03-03 | 1989-03-03 | ultrasonic transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5254089A JPH02233184A (en) | 1989-03-03 | 1989-03-03 | ultrasonic transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02233184A true JPH02233184A (en) | 1990-09-14 |
Family
ID=12917614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5254089A Pending JPH02233184A (en) | 1989-03-03 | 1989-03-03 | ultrasonic transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02233184A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011073767A3 (en) * | 2009-12-14 | 2011-11-17 | Elma Hans Schmidbauer Gmbh & Co. Kg | Device and use of functional elements having a diamond coating on intermediate layers on steel substrates as functional elements having a protective coating against cavitation erosion |
| CN102862098A (en) * | 2012-09-12 | 2013-01-09 | 浙江工业大学 | Soft abrasive particle flow processing method loaded with ultrasonic excitation and device thereof |
| JP2015000453A (en) * | 2013-06-17 | 2015-01-05 | 株式会社ジェイテクト | Vibration cutting device, and vibration cutting method |
-
1989
- 1989-03-03 JP JP5254089A patent/JPH02233184A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011073767A3 (en) * | 2009-12-14 | 2011-11-17 | Elma Hans Schmidbauer Gmbh & Co. Kg | Device and use of functional elements having a diamond coating on intermediate layers on steel substrates as functional elements having a protective coating against cavitation erosion |
| CN102862098A (en) * | 2012-09-12 | 2013-01-09 | 浙江工业大学 | Soft abrasive particle flow processing method loaded with ultrasonic excitation and device thereof |
| JP2015000453A (en) * | 2013-06-17 | 2015-01-05 | 株式会社ジェイテクト | Vibration cutting device, and vibration cutting method |
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