JPH0223501B2 - - Google Patents
Info
- Publication number
- JPH0223501B2 JPH0223501B2 JP59098765A JP9876584A JPH0223501B2 JP H0223501 B2 JPH0223501 B2 JP H0223501B2 JP 59098765 A JP59098765 A JP 59098765A JP 9876584 A JP9876584 A JP 9876584A JP H0223501 B2 JPH0223501 B2 JP H0223501B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- composite
- thermal stress
- coefficient
- ceramics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Pressure Welding/Diffusion-Bonding (AREA)
- Ceramic Products (AREA)
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、新規なセラミツクスと金属との複合
体に関し、特にセラミツクスが熱応力により破壊
するのを防止するのに最適な複合体に係る。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a novel ceramic-metal composite, and particularly to a composite optimal for preventing ceramics from breaking due to thermal stress.
セラミツクスと金属とを接合した場所、両者の
物理的性質、特に熱膨張率が大きく異なるため接
合過程又は熱的負荷を受ける使用条件下において
熱応力が発生し、セラミツクスの破壊や接合部の
剥離等が生じる。この傾向は特に被接合体が大き
い程顕著になる。従つて特に大型構造体のセラミ
ツクスと金属は極めて困難であつた。
At the location where ceramics and metal are bonded, the physical properties of the two, especially the coefficient of thermal expansion, are significantly different, so thermal stress is generated during the bonding process or under usage conditions that are subjected to thermal loads, resulting in destruction of the ceramic, peeling of the bonded part, etc. occurs. This tendency becomes particularly noticeable as the object to be joined becomes larger. Therefore, it has been extremely difficult to produce ceramics and metals, especially for large structures.
従来、セラミツクスの熱応力破壊を防止する方
法として、セラミツクスと金属とのほゞ中間の熱
膨張率を有するMo,W,コバール、フアーニ鋼
等の熱応力緩衝材を介して接合している。また金
属繊維と金属マトリツクスまたは無機質繊維と金
属マトリツクスとの複合体を熱応力緩衝材として
接合している例もある。例えば特開昭58−176182
号ではコバール等を又特願昭58−37598号(特開
昭59−162185号)ではC繊維とCuマトリツクス
との複合体を熱応力緩衝材として接合している。 Conventionally, as a method for preventing thermal stress fracture of ceramics, they are bonded via a thermal stress buffering material such as Mo, W, Kovar, or Furni steel, which has a coefficient of thermal expansion approximately intermediate between ceramics and metal. There are also examples in which composites of metal fibers and metal matrices or inorganic fibers and metal matrices are bonded as thermal stress buffering materials. For example, JP-A-58-176182
In Japanese Patent Application No. 58-37598 (Japanese Unexamined Patent Publication No. 59-162185), a composite of C fiber and Cu matrix is bonded as a thermal stress buffer material.
しかし、前記従来方向で接合されるセラミツク
スと金属との接合体の大きさには限界があり、高
い熱的負荷を受ける条件下ではセラミツクス又は
接合部に破壊が生じ、使用条件が限定されてい
る。 However, there is a limit to the size of the bonded body of ceramics and metal bonded in the conventional direction, and under conditions of high thermal load, the ceramic or the bonded part may break, limiting the conditions of use. .
本発明の目的は、従来の欠点を回避し、特にセ
ラミツクスの熱応力破壊を防止するのに最適なセ
ラミツクスと金属との複合体を提供するにある。
The object of the present invention is to provide a ceramic-metal composite which is most suitable for avoiding the conventional drawbacks and, in particular, for preventing thermal stress fracture of ceramics.
発明者らは従来技術の欠点を防止するためセラ
ミツクスと金属体との中間の熱膨張係数を有する
複合体を介して接合することを検討した。すなわ
ち、本発明は熱応力緩和材を介してろう材によつ
て接合されているセラミツクスと金属との接合体
において、前記熱応力緩和材の熱膨張率が、金属
と接する側が該金属の熱膨張率に近似した値を持
ち、かつセラミツクスに接する側が該セラミツク
スの熱膨張率に近似した値を持つように接合間の
厚さ方向に連続的または段階的に変化しており、
前記熱応力緩和材は、無機質繊維と金属マトリツ
クスとの複合体からなることを特徴とするセラミ
ツクスと金属との複合体にある。
In order to avoid the drawbacks of the prior art, the inventors have considered joining ceramics and metal bodies through a composite body having an intermediate coefficient of thermal expansion. That is, the present invention provides a joined body of ceramics and metal that are joined by a brazing filler metal through a thermal stress relieving material, in which the coefficient of thermal expansion of the thermal stress relieving material is such that the side in contact with the metal has a thermal expansion coefficient of the metal. The coefficient of thermal expansion changes continuously or stepwise in the thickness direction between the joints so that the side in contact with the ceramic has a value that approximates the coefficient of thermal expansion of the ceramic,
The thermal stress relieving material is a ceramic-metal composite characterized by being made of a composite of inorganic fibers and a metal matrix.
即ち、セラミツクスと金属との接合において、
中間部材としては熱膨張係数がセラミツクスと金
属体の中間の値で、かつ弾性係数の小さい金属又
は複合材を使用して熱応力緩和作用をもたせる必
要がある。中間部材自身に熱応力緩和作用をもた
せるには無機質繊維と金属マトリツクスとの複合
体を2層以上重ねた構成体を用いるのが有効であ
ることを実験により確認した。 That is, in joining ceramics and metal,
As the intermediate member, it is necessary to use a metal or a composite material whose coefficient of thermal expansion is intermediate between that of ceramics and a metal body and whose modulus of elasticity is small, so as to provide a thermal stress relieving effect. It has been confirmed through experiments that it is effective to use a structure in which two or more layers of composites of inorganic fibers and metal matrix are stacked together in order to impart a thermal stress relaxation effect to the intermediate member itself.
一方、無機質繊維と金属との複合体の中で炭素
繊維とCuマトリツクスとの複合体が熱応力緩和
作用が大きく、この複合体で熱膨張係数の異なる
ものを2層以上重ねた複合体が最も熱応力緩和作
用が大きいことを実験により確認した。 On the other hand, among the composites of inorganic fibers and metals, the composite of carbon fiber and Cu matrix has the greatest thermal stress relaxation effect, and the composite made of two or more layers with different coefficients of thermal expansion is the most effective. It was confirmed through experiments that the thermal stress relaxation effect is large.
炭素繊維とCuとの複合体として、炭素繊維の
体積%が1層目は30〜40%、2層目は40〜50%、
3層目は50〜60%になるようにすれば望ましく、
この複合体の熱膨張係数は4〜12×10-6/℃の間
で変化する。また、弾性係数が5〜13×103Kg/
mm2となつて接合体の熱応力を複合体の変形し易さ
で緩和する結果、良好な接合体が得られることを
確認した。 As a composite of carbon fiber and Cu, the volume percentage of carbon fiber is 30 to 40% in the first layer, 40 to 50% in the second layer,
It is desirable that the third layer should be 50-60%.
The coefficient of thermal expansion of this composite varies between 4 and 12×10 -6 /°C. In addition, the elastic modulus is 5 to 13×10 3 Kg/
It was confirmed that as a result of reducing the thermal stress of the bonded body by using the deformability of the composite, a good bonded body could be obtained.
本発明の接合体は核融合装置の真空容器第1
壁、MHD発電用絶縁壁に好適である。 The zygote of the present invention is the first vacuum vessel of a nuclear fusion device.
Suitable for walls and insulating walls for MHD power generation.
比較例
先ずセラミツクスとして厚さ10mm、30mm角の
BeOを2重量%含むSiC焼結体を用い、金属とし
て厚さ5mm、30mm角のSuS304ステンレス鋼板を
接合する場合、前記2つの接合部材間にCu―C
繊維複合構成体を用いた。
Comparative example First, as ceramics, a 10 mm thick, 30 mm square
When joining SuS304 stainless steel plates with a thickness of 5 mm and a square of 30 mm using a SiC sintered body containing 2% by weight of BeO, Cu-C between the two joining members is
A fiber composite construct was used.
実施例 1
前記複合構成体の2層構成体を中間部材とした
場合に1層目のC繊維の体積%が30〜40%で、2
層目が40〜50%となつている複合体を用いた。即
ち、SiC焼結体と複合構成体の間にCu−40%Mn
を、複合構成体とSuS304鋼板の間にもCu―40%
Mn箔を介在させて870℃、5〜10Kg/cm2の条件
で、Ar雰囲気中で加圧加熱し接合することによ
り熱応力が小さく良好な接合体が得られた。Example 1 When the two-layer structure of the composite structure is used as an intermediate member, the volume percentage of C fiber in the first layer is 30 to 40%, and 2
A composite with a layer thickness of 40 to 50% was used. That is, Cu-40%Mn is placed between the SiC sintered body and the composite structure.
Also, there is Cu-40% between the composite structure and the SuS304 steel plate.
A good bonded body with low thermal stress was obtained by pressurizing and heating in an Ar atmosphere at 870° C. and 5 to 10 kg/cm 2 with a Mn foil interposed.
実施例 2
同様にセラミツクスとして厚さ10mm、40mm角
で、BeOを2重量%含むSiC焼結体を用い金属と
して40mm角のSuS304ステンレス鋼板を用いた場
合にも前記2つの接合部材間に前記Cu―C繊維
複合構成体を用いて接合した。第1図のようにま
ず複合構成体5、とSiC焼結体7、を接合し次い
で複合構成体3、側にSuS304ステンレス鋼板1、
をろう材2、でろう付した。SiC焼結体は、熱伝
導率が0.6cal/cm・sec,℃、比抵抗が1013Ω・cm
でBeO,0.1〜3.5重量%を含むものである。Cu―
C繊維複合体の熱膨張係数はC繊維30〜40%部材
で10〜12×10-6/℃、40〜50%部材で6〜7×
10-6/℃、50〜60%部材で4〜6×10-6/℃の値
となる。前記のCu―C繊維複合構成体5、側と
SiC焼結体7との間にCu―40%Mn、50μm厚さの
箔6、を介在させ、870℃、5〜10Kg/cm2の条件
でAr雰囲気中で加圧加熱し接合した。次に
SuS304ステンレス鋼板1、と複合構成体3、側
の間に100μm厚さの銀ろう箔2、を介在させて
700〜710℃、5〜10Kg/cm2の条件でAr雰囲気中
で加熱し接合することにより熱応力が小さく良好
な接合体が得られた。こゝで第3図に示すように
接合体の接合時の冷却過程において複合構成体と
SiC焼結体の熱膨張率がほぼ同じになるので接合
体の熱応力を小さくすることができその結果、良
好な接合体が得られた。Example 2 Similarly, when a SiC sintered body with a thickness of 10 mm and a square of 40 mm and containing 2% by weight of BeO is used as the ceramic, and a 40 mm square SuS304 stainless steel plate is used as the metal, the Cu - Bonded using a C fiber composite structure. As shown in Fig. 1, first the composite structure 5 and the SiC sintered body 7 are joined, and then the composite structure 3 has a SuS304 stainless steel plate 1 on its side.
were brazed with brazing material 2. The SiC sintered body has a thermal conductivity of 0.6 cal/cm・sec, °C, and a specific resistance of 10 13 Ω・cm.
It contains 0.1 to 3.5% by weight of BeO. Cu―
The thermal expansion coefficient of the C fiber composite is 10-12×10 -6 /℃ for a 30-40% C fiber member, and 6-7× for a 40-50% member.
10 -6 /°C, and 50 to 60% members have a value of 4 to 6 × 10 -6 /°C. The Cu--C fiber composite structure 5, the side and
A Cu-40% Mn foil 6 with a thickness of 50 μm was interposed between the SiC sintered body 7 and the foil 6 was bonded by heating under pressure in an Ar atmosphere at 870° C. and a pressure of 5 to 10 kg/cm 2 . next
A 100 μm thick silver solder foil 2 is interposed between the SuS304 stainless steel plate 1 and the composite structure 3.
By heating and bonding in an Ar atmosphere at 700-710° C. and 5-10 Kg/cm 2 , a good bonded body with low thermal stress was obtained. As shown in Figure 3, the composite structure and
Since the thermal expansion coefficients of the SiC sintered bodies were almost the same, the thermal stress of the joined body could be reduced, and as a result, a good joined body was obtained.
実施例 3
第2図に示すように金属として30mm角銅板を用
い前述のCu―C繊維複合構成体を中間部材とし、
MoメタライズしたSi3N4焼結体14、と複合構
成体12の間にCu―40%Mn箔13、銅板8、と
複合構成体10の間にもCu―40%Mn箔9、を介
在させて870℃、5〜10Kg/cm2の条件でAr雰囲気
中で加圧加熱し接合することにより熱応力を小さ
くすることができ、良好な接合体が得られた。Example 3 As shown in Fig. 2, a 30 mm square copper plate was used as the metal, and the aforementioned Cu-C fiber composite structure was used as the intermediate member.
A Cu-40% Mn foil 13 is interposed between the Mo metalized Si 3 N 4 sintered body 14 and the composite structure 12, and a Cu-40% Mn foil 9 is also interposed between the copper plate 8 and the composite structure 10. By pressurizing and heating in an Ar atmosphere at 870° C. and 5 to 10 kg/cm 2 to bond, thermal stress could be reduced and a good bonded body was obtained.
本発明によればセラミツクスと金属との接合に
おいて、接合過程及び熱的負荷を受ける使用条件
下での熱応力を小さくすることができ、セラミツ
クスのき裂発生を防止できるので熱伝導性の良い
セラミツクスと金属との健全な接合体が容易に得
られる効果がある。
According to the present invention, when bonding ceramics and metal, it is possible to reduce thermal stress during the bonding process and under usage conditions under thermal load, and it is possible to prevent cracks from occurring in the ceramics, resulting in ceramics with good thermal conductivity. This has the effect that a healthy bonded body between the metal and the metal can be easily obtained.
第1図および第2図は本発明の複合体の断面
図、第3図は接合時の加熱冷却における複合体と
SiC焼結体の熱膨張変化を示す線図である。
1…SuS304ステンレス鋼板、2…銀ろう箔、
3…Cu―30〜40%C繊維複合体、4…Cu―40〜
50%C繊維複合体、5…Cu―50〜60%C繊維複
合体、6…Cu―40%Mn箔、7…SiC焼結体、8
…銅板、9…Cu―40%Mn箔、10…Cu―30〜
40%C繊維複合体、11…Cu―40〜50%C繊維
複合体、12…Cu―50〜60%C繊維複合体、1
3…Cu―40%Mn箔、14…Si3N4,Moメタライ
ズ焼結体。
Figures 1 and 2 are cross-sectional views of the composite of the present invention, and Figure 3 shows the composite during heating and cooling during bonding.
FIG. 3 is a diagram showing changes in thermal expansion of a SiC sintered body. 1...SuS304 stainless steel plate, 2...silver solder foil,
3...Cu-30~40% C fiber composite, 4...Cu-40~
50% C fiber composite, 5... Cu-50-60% C fiber composite, 6... Cu-40% Mn foil, 7... SiC sintered body, 8
...Copper plate, 9...Cu-40%Mn foil, 10...Cu-30~
40% C fiber composite, 11...Cu-40-50% C fiber composite, 12...Cu-50-60% C fiber composite, 1
3...Cu-40%Mn foil, 14... Si3N4 , Mo metallized sintered body.
Claims (1)
れているセラミツクスと金属との接合体におい
て、前記熱応力緩和材の熱膨張率が、金属と接す
る側が該金属の熱膨張率に近似した値を持ち、か
つセラミツクスに接する側が該セラミツクスの熱
膨脹率に近似した値を持つように接合間の厚さ方
向に連続的または段階的に変化しており、前記熱
応力緩和材は、無機質繊維と金属マトリツクスと
の複合体からなることを特徴とするセラミツクス
と金属との複合体。1. In a joined body of ceramics and metal that are joined by a brazing filler metal through a thermal stress relaxation material, the coefficient of thermal expansion of the thermal stress relaxation material is close to the coefficient of thermal expansion of the metal on the side in contact with the metal. The thermal stress relieving material changes continuously or stepwise in the thickness direction between the joints so that the side in contact with the ceramic has a coefficient of thermal expansion that approximates the coefficient of thermal expansion of the ceramic, and the thermal stress relaxation material is made of inorganic fibers and A composite of ceramics and metal characterized by being composed of a composite with a metal matrix.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9876584A JPS60246276A (en) | 1984-05-18 | 1984-05-18 | Composite body of ceramic and metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9876584A JPS60246276A (en) | 1984-05-18 | 1984-05-18 | Composite body of ceramic and metal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60246276A JPS60246276A (en) | 1985-12-05 |
| JPH0223501B2 true JPH0223501B2 (en) | 1990-05-24 |
Family
ID=14228492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9876584A Granted JPS60246276A (en) | 1984-05-18 | 1984-05-18 | Composite body of ceramic and metal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60246276A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS645983A (en) * | 1987-06-26 | 1989-01-10 | Mitsubishi Heavy Ind Ltd | Method for joining ceramic to metal |
| US5561321A (en) * | 1992-07-03 | 1996-10-01 | Noritake Co., Ltd. | Ceramic-metal composite structure and process of producing same |
| JP6285271B2 (en) * | 2014-04-24 | 2018-02-28 | 株式会社ノリタケカンパニーリミテド | Bonding material and its use |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5926984A (en) * | 1982-07-30 | 1984-02-13 | 川惣電材工業株式会社 | Metallizing melt adhesion of ceramics and metal |
| JPS5935075A (en) * | 1982-08-20 | 1984-02-25 | 東陶機器株式会社 | Method of bonding ceramic and metal |
| JPS60231472A (en) * | 1984-04-26 | 1985-11-18 | 住友電気工業株式会社 | Ceramic-metal bonded body and its bonding method |
-
1984
- 1984-05-18 JP JP9876584A patent/JPS60246276A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60246276A (en) | 1985-12-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0662344B2 (en) | Ceramic and metal joint | |
| JPH0777989B2 (en) | Method for manufacturing ceramic-metal bonded body | |
| JPH0223501B2 (en) | ||
| JPH0360793B2 (en) | ||
| JP3192911B2 (en) | Ceramic circuit board | |
| JPH08102570A (en) | Ceramics circuit board | |
| JPH09298260A (en) | Heat radiation plate | |
| JPH0930870A (en) | Ceramic-metal bonded body and accelerator duct | |
| JPH0339991B2 (en) | ||
| JPH0672779A (en) | Method for joining carbon member | |
| JPS6238319B2 (en) | ||
| JPH0786444A (en) | Method for manufacturing composite heat dissipation substrate for semiconductor | |
| JP4080588B2 (en) | Insulating operation rod and method of manufacturing the same | |
| JPH06329480A (en) | Joined body of ceramics and metal and its production | |
| JPH0460947B2 (en) | ||
| JPH0649623B2 (en) | Method of joining ceramics and metal | |
| JPH0317793B2 (en) | ||
| JP2651853B2 (en) | Electronic equipment | |
| JPS61117171A (en) | Thermal stress reliever | |
| JPS61136969A (en) | Method of bonding sialon and metal | |
| JPH01141881A (en) | Method for bonding porous ceramic to metal | |
| JPS63179733A (en) | Joining structure of ceramics and metal and manufacture thereof | |
| JPH01249669A (en) | Ceramic circuit board | |
| JP3445461B2 (en) | Solder joining method and ultrasonic sensor | |
| JPS6278167A (en) | Bonded body of ceramic tungsten or molybdenum |