JPH02242580A - Plane-like heater - Google Patents
Plane-like heaterInfo
- Publication number
- JPH02242580A JPH02242580A JP6076989A JP6076989A JPH02242580A JP H02242580 A JPH02242580 A JP H02242580A JP 6076989 A JP6076989 A JP 6076989A JP 6076989 A JP6076989 A JP 6076989A JP H02242580 A JPH02242580 A JP H02242580A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- insulating layer
- planar heater
- glass
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims abstract description 45
- 238000010438 heat treatment Methods 0.000 claims abstract description 34
- 239000002184 metal Substances 0.000 claims description 27
- 229910052751 metal Inorganic materials 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 25
- 238000007751 thermal spraying Methods 0.000 claims description 19
- 239000013078 crystal Substances 0.000 claims description 15
- 239000002178 crystalline material Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
- 229910002060 Fe-Cr-Al alloy Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 229910001105 martensitic stainless steel Inorganic materials 0.000 claims 1
- 230000035939 shock Effects 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 6
- 239000011248 coating agent Substances 0.000 abstract description 4
- 238000000576 coating method Methods 0.000 abstract description 4
- 238000010030 laminating Methods 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 description 22
- 239000000203 mixture Substances 0.000 description 11
- 239000000843 powder Substances 0.000 description 11
- 238000002441 X-ray diffraction Methods 0.000 description 7
- 239000011810 insulating material Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010411 cooking Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910003310 Ni-Al Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Surface Heating Bodies (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、溶射により形成した発熱抵抗層を有する面状
ヒーターに関し、特に調理器用や遠赤外線放射用などの
ヒータに適したものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a planar heater having a heating resistance layer formed by thermal spraying, and is particularly suitable for heaters for cooking appliances, far-infrared radiation, and the like.
[従来の技術]
従来、面状ヒーターとしてはマイカ板に金属発熱帯を巻
き、それを絶縁性の材料で挟んだものや2枚の金属板の
間や管状の金属体の中に電熱線をコイル状またはパター
ンとして設置して、それをセラミック粉末で絶縁したも
の、さらにセラミック中に金属発熱抵抗体を埋設したも
の等が知られている。[Prior art] Conventionally, sheet heaters have been made by wrapping a metal heating element around a mica plate and sandwiching it between insulating materials, or by coiling a heating wire between two metal plates or inside a tubular metal body. Alternatively, there are known methods in which a pattern is installed and the pattern is insulated with ceramic powder, and a metal heating resistor is embedded in the ceramic.
例えば特開昭62−143386号公報には表面にホー
ロー層を設けた基板上に、ガラスフリットとマイカ粉と
を主成分とする多孔質層を設け、その上に網目状の金属
箔体からなるヒーターエ1ノメンl−を被覆した面ヒー
ターが開示されている。しかし、基板上にガラスフリッ
トを含む多孔質層を介してヒータニレメン1〜を被覆し
た場合、面状ヒータの多孔質層は気密性がよいものの、
熱伝導率が低く、耐衝撃性にも欠りるため急熱急冷によ
る熱衝撃に弱(てクラックが発生し易く、高温での絶縁
性能が低下してしまうという問題がある。For example, in JP-A No. 62-143386, a porous layer mainly composed of glass frit and mica powder is provided on a substrate with an enamel layer on the surface, and a mesh metal foil is formed on top of the porous layer. A surface heater coated with a heater element is disclosed. However, when the heater element 1~ is coated on the substrate via a porous layer containing glass frit, although the porous layer of the sheet heater has good airtightness,
Because it has low thermal conductivity and lacks impact resistance, it is susceptible to thermal shock caused by rapid heating and cooling, making it susceptible to cracks and resulting in a reduction in insulation performance at high temperatures.
[発明が解決しようとする課題1
また、最近では金属表面に絶縁体を溶射し、その上に発
熱抵抗体を溶射して、ヒーターにしたものも知られてい
る(特開昭62−85280号公報)。[Problem to be Solved by the Invention 1] Also, recently, a heater has been known in which an insulator is thermally sprayed on a metal surface and a heating resistor is thermally sprayed on top of the insulator (Japanese Unexamined Patent Publication No. 62-85280). Public bulletin).
しかし、金属表面に絶縁層を介して発熱抵抗体を溶射形
成した従来のヒーターでは、金属表面に溶射形成した絶
縁層が微小なりラックや空隙を内在するため、高温時に
絶縁性能が大幅に低下してしまう恐れがある。However, in conventional heaters in which a heating resistor is thermally sprayed on a metal surface through an insulating layer, the insulation layer formed on the metal surface is minute and contains racks and voids, resulting in a significant drop in insulation performance at high temperatures. There is a risk that it will happen.
一方、金属表面に溶射した皮膜に耐溶剤性等を持たぜる
ため、溶射皮膜」二に溶剤に溶解したラダシリコーンを
塗布し、硬化させることが知られており(特開昭60−
138064号公報)、また、円筒体表面に順に結合層
、絶縁層、発熱体層を設けたヒートロールにおいて、溶
射して形成した絶縁層の微小な隙間を電流が流れるのを
防止するため、絶縁層の微小な隙間に樹脂含浸する方法
も知られている(特開昭61−132974号公報)。On the other hand, in order to impart solvent resistance to a coating sprayed onto a metal surface, it is known that Rada silicone dissolved in a solvent is applied to the coating and cured (Japanese Patent Laid-Open No. 1983-1999-1).
138064), in a heat roll in which a bonding layer, an insulating layer, and a heating layer are sequentially provided on the surface of a cylindrical body, insulation is A method of impregnating minute gaps between layers with a resin is also known (Japanese Unexamined Patent Publication No. 132974/1983).
しかし、前記のように絶縁層をラダーシリコンで被覆す
る技術や絶縁層に樹脂を含浸する技術を、調理器用途等
に用いられる面状ヒーターに適用しようとしても、それ
ら樹脂は500°C以上で劣化して固くなってしまった
り、昇華したりする。However, even if we try to apply the above-mentioned technology of covering the insulating layer with ladder silicone or impregnating the insulating layer with resin to sheet heaters used in cookers, etc., these resins cannot be heated at temperatures above 500°C. It deteriorates and becomes hard, or it sublimates.
このため耐熱衝撃性や、高湿時の絶縁特性を劣化させて
しまうので、所望の効果を得ることが出来ない。As a result, the thermal shock resistance and the insulation properties at high humidity deteriorate, making it impossible to obtain the desired effect.
本発明者らは、 500〜600°C程度の中湿度領域
以上で使用される面状ヒータを実現すべく、絶縁層の熱
衝撃性や高温時の絶縁性を向上できないか鋭意研究した
結果、従来の面状ヒータにおける絶縁層は絶縁材の結晶
粒子のみを積層させているので、絶縁層に緻密性がなく
、熱衝撃性や高湿時の絶縁性を向−卜できないのではな
いかと推察した。In order to realize a planar heater that can be used above the medium humidity range of about 500 to 600°C, the inventors of the present invention conducted extensive research to see if it was possible to improve the thermal shock resistance of the insulating layer and the insulation properties at high temperatures. Since the insulating layer in conventional planar heaters is made by laminating only crystal grains of insulating material, it is assumed that the insulating layer is not dense and cannot achieve thermal shock resistance or insulation properties at high humidity. did.
そこで本発明は、金属基板1−に溶射により絶縁層と発
熱抵抗体層とを設けた面状ヒーターにおいて、絶縁層を
改良することにより、熱衝撃に強(、かつ高湿時の絶縁
性に優れたものにすることを目的とする。Therefore, the present invention provides a planar heater in which an insulating layer and a heat-generating resistor layer are provided on a metal substrate 1 by thermal spraying, and by improving the insulating layer, the insulating layer is resistant to thermal shock (and has good insulation properties at high humidity). Aim to be excellent.
[課題を解決するための手段1
上記目的を達成するために本発明は、金属基板上に溶射
により絶縁層を設けるとともに、絶縁層の上に抵抗体を
溶射して発熱抵抗層とした面状ヒーターであって、絶縁
層が硝子相を含有することを特徴とするものである。[Means for Solving the Problems 1] In order to achieve the above object, the present invention provides an insulating layer on a metal substrate by thermal spraying, and a heat-generating resistor layer formed by thermally spraying a resistor on the insulating layer. The heater is characterized in that the insulating layer contains a glass phase.
本発明において、硝子相を含有する層は、硝子相粒子と
結晶材よりなる粒子とがミクロ的に混在したもの、ある
いは硝子相と結晶質相との混相粒子と、結晶材よりなる
粒子とがミクロ的に混在したもの等が考えられる。本発
明においては、このような層構造をミクロ的に積層され
た層ということがある。In the present invention, a layer containing a vitreous phase is a microscopic mixture of vitreous phase particles and particles made of a crystalline material, or a mixture of particles of a vitreous phase and a crystalline phase and particles made of a crystalline material. It is possible that there is a microscopic mixture. In the present invention, such a layered structure is sometimes referred to as a microscopically laminated layer.
また、本発明面状ヒーターにおいて、絶縁層は硝子相を
含有する層(硝子層)と実質的に結晶材のみよりなる層
(結晶層)とを積層した状態に作成してもよい。このよ
うに硝子層と結晶層とを積層する場合には硝子層と発熱
抵抗層との密着性が比較的良くないので、硝子層が内側
に、あるいは硝子層の両側に結晶層が位置するようにす
ることが好ましい。また、本発明においては、絶縁層を
構成する硝子層における硝子相の一部又は全部を熱処理
により結晶化させたものでもよい。−旦、硝子相を得た
後、これを高温の雰囲気で結晶化させてもその緻密性は
変わらないためであり、従来のように初めから全ての絶
縁層を結晶粒子で構成したものとはその緻密さが格段に
異なる絶縁層を構成することができる。Further, in the planar heater of the present invention, the insulating layer may be formed by laminating a layer containing a glass phase (glass layer) and a layer consisting essentially only of crystalline material (crystalline layer). When laminating a glass layer and a crystal layer in this way, the adhesion between the glass layer and the heating resistor layer is relatively poor. It is preferable to Further, in the present invention, a part or all of the glass phase in the glass layer constituting the insulating layer may be crystallized by heat treatment. - This is because the density remains unchanged even if the glass phase is crystallized in a high-temperature atmosphere after obtaining the glass phase. Insulating layers with significantly different densities can be constructed.
通常、本発明において絶縁層は、Si、Al、Mg、Z
r。Usually, in the present invention, the insulating layer is made of Si, Al, Mg, Z
r.
Mn、Tj、Crの酸化物の一種以上を含有する組成の
ものが用いられるが、特にSiの酸化物と、Al、Mg
、Zr、 Mn、 Ti、 Crの酸化物のうちの1種
以上とを複合して含有することが、溶射時にその一部が
硝子相になりやすい点で望ましい。また発熱抵抗層とし
ては、公知の発熱抵抗体が使用可能であるが、特に、F
e−Cr−Al合金を使用した場合には、抵抗体の温度
係数を正から負まで変化調整するのに都合がよい。ずな
わち、Fe−Cr−Al合金においては例えば、その組
成で抵抗率及び温度係数が、第1表に示すような関係に
なるため、組成を変えることにより任意の温度係数を選
ぶことが可能である。A composition containing one or more of the oxides of Mn, Tj, and Cr is used, but in particular, a composition containing one or more of the oxides of Mn, Tj, and Cr, and especially the oxides of Si, Al, and Mg.
, Zr, Mn, Ti, and Cr in combination with one or more of the following oxides, since some of them tend to become a glass phase during thermal spraying. Further, as the heating resistor layer, a known heating resistor can be used, but in particular, F
When e-Cr-Al alloy is used, it is convenient to adjust the temperature coefficient of the resistor from positive to negative. In other words, for Fe-Cr-Al alloys, for example, the resistivity and temperature coefficient have the relationship shown in Table 1 depending on the composition, so it is possible to select an arbitrary temperature coefficient by changing the composition. It is.
また、本発明においては、絶縁層と基板との間に結合層
を設けることにより、両層の結合をより強くすることが
できる。Further, in the present invention, by providing a bonding layer between the insulating layer and the substrate, the bonding between both layers can be further strengthened.
基板材料としては、高温での機械的性質、耐酸化性等か
らステンレス鋼を用いるのが良い。なかでもマルデンサ
イト系またはフェライト系ステンレス鋼は、絶縁層及び
発熱抵抗層の熱膨張率αに近いので好ましい基板材料で
ある。例えばこれらの熱膨張率は以下の関係になる。Stainless steel is preferably used as the substrate material due to its mechanical properties at high temperatures, oxidation resistance, etc. Among these, mardensite stainless steel or ferritic stainless steel is a preferable substrate material because it has a coefficient of thermal expansion α close to that of the insulating layer and the heating resistance layer. For example, these coefficients of thermal expansion have the following relationship.
抵抗層 Fe−Cr−Al a = 11〜13X
10−’// Ni−Cr 17
X 16−6絶縁層 MgO−3t02io〜]、2
XlO−’// Al□037.5x 10−6
基板 Alz03−3iO□ 5X 10−
6ステンレス lOx 10−6
さらに、本発明においては、前述したように絶縁層は、
硝子相を含有する層と結晶材よりなる層とを複数積層さ
せてもよく、また、絶縁層と基体との間に結合層を介し
ても良いが、隣り合う両層か少なくとも1つの同一金属
元素を含有する場合には、同じ酸化物等を両層の境界領
域で共有するため、より接合性が良(なるものと考えら
れる。Resistance layer Fe-Cr-Ala = 11~13X
10-' // Ni-Cr 17
X 16-6 insulating layer MgO-3t02io~], 2
XlO-'// Al□037.5x 10-6
Substrate Alz03-3iO□ 5X 10-
6 stainless steel lOx 10-6 Furthermore, in the present invention, as mentioned above, the insulating layer is
A plurality of layers containing a glass phase and a layer made of a crystalline material may be laminated, and a bonding layer may be interposed between the insulating layer and the substrate, but if both adjacent layers are made of at least one of the same metal, In the case of containing an element, the same oxide or the like is shared in the boundary region of both layers, so it is thought that the bonding property is better.
またヒータの表面に例えばZrO□−3i02系の塗料
や、 MgO□−3、i 02溶射膜などの遠赤外線発
生膜を設ければ、より一層放射効率のよいヒーターを実
現することか可能となる。Furthermore, if a far-infrared generating film such as ZrO□-3i02 paint or MgO□-3, i02 sprayed film is provided on the surface of the heater, it is possible to realize a heater with even better radiation efficiency. .
なお、通常、電気用品には、絶縁抵抗IMΩ以上、絶縁
耐圧IKV以上の特性が要求されるので本発明において
も同程度の絶縁特性を持つことを一応の目安とする。ま
た本発明面状ヒータは、500〜600℃程度の中温度
域で使用するものが主な対象であるが、この温度域に必
ずしも限定するものではない。Note that electrical appliances are normally required to have properties of insulation resistance IMΩ or more and dielectric strength voltage IKV or more, so the present invention also aims to have similar insulation properties. Further, although the planar heater of the present invention is mainly intended for use in a medium temperature range of about 500 to 600°C, it is not necessarily limited to this temperature range.
[作用]
上記手段の本発明面状ヒーターでは、絶縁層を溶射形成
する時に硝子相形成成分が結晶相粒子相互の間隙を埋め
て、展延するため緻密性のある膜が形成されるものと推
測される。そして、この緻密性によりクラックが生じに
く(、かつ高温時の絶縁性が向上するものと考えられる
。[Function] In the planar heater of the present invention having the above means, when forming the insulating layer by thermal spraying, the glass phase forming component fills the gaps between the crystal phase particles and spreads, so that a dense film is formed. Guessed. It is thought that this denseness makes it difficult for cracks to occur (and improves insulation properties at high temperatures).
[実施例]
以下、本発明を実施例に基づいて、更に詳細に説明する
。[Examples] Hereinafter, the present invention will be described in more detail based on Examples.
(実施例1)
金属基板として100 X100 Xi mmのs u
S 410の板を用い、それにNi−Alをプラズマ
溶射して、結合層を形成した。次いで、第2表に示す各
種の材料配合の絶縁材料をそれぞれ溶射して、絶縁層を
形成した。なお、第2表において絶縁体原料粉の各酸化
物の配合比が100wt%に満たぬものは少量の不純物
を含む原料を用いたためである。また3種類の比較例は
、絶縁体原料粉として結晶材のみのもの、または硝子相
形成成分を少量しか含まないものを用いて絶縁層を溶射
形成したものである。(Example 1) 100 x 100 Xi mm s u as a metal substrate
A bonding layer was formed by plasma spraying Ni-Al onto a S410 plate. Next, insulating materials having various material compositions shown in Table 2 were thermally sprayed to form insulating layers. Note that in Table 2, the insulator raw material powders with a blending ratio of each oxide less than 100 wt% are due to the use of raw materials containing a small amount of impurities. Furthermore, in the three comparative examples, insulating layers were thermally sprayed using only a crystalline material or a material containing only a small amount of a glass phase-forming component as the insulating material powder.
絶縁材料を溶射する装置は、METCO−INC。The equipment for spraying insulating material is METCO-INC.
の7MGシステムを用い、ガンは同社の9MBを使用し
た。溶射条件は、Ar注入量4017分、水素注入量8
1/分、印加電圧65〜70V、電流500Aとし、絶
縁層の厚みは平均的に0.4 mmとなるように溶射ガ
ンの移動装置をコントロールした。I used the company's 7MG system and the company's 9MB gun. Thermal spraying conditions were: Ar injection amount: 4017 minutes, hydrogen injection amount: 8 minutes.
1/min, applied voltage of 65 to 70 V, and current of 500 A, and the moving device of the thermal spray gun was controlled so that the thickness of the insulating layer was 0.4 mm on average.
得られた絶縁層に硝子相が含まれるか否かを、X線によ
る解析で検出した。その解析で結晶付特有の鋭いピーク
の現われ方が低下し、幅広いビクがみられるようになっ
たものを硝子相を含むものとし、ベースの1−り及びピ
ーク値の程度から総合的に判断して硝子相の含有量を強
、中、弱の3段階で相対評価した。Whether or not the obtained insulating layer contained a glass phase was detected by X-ray analysis. In this analysis, if the appearance of sharp peaks characteristic of crystal formation has decreased and a wide range of peaks can be seen, it is considered to contain a vitreous phase. The content of the glass phase was evaluated relative to three levels: strong, medium, and weak.
第1〜4図はX線解析結果の一例を示すものであり、例
えば第1図及び第3図に示すように、X線強度と回折角
度の関係において、鋭いピーク値Aが観察されるものが
結晶相である。これに対し、第2図及び第4図に示すよ
うに鋭いピークが低下し、ベースBが高くなっているも
のが硝子相である。第1図はpc−sp原料粉末のX線
解析チャートであり、はとんど結晶である。第2図は前
記PC8P粉末を溶射して得られた絶縁層のX線解析チ
ャートであるが、結晶特有のピークが明らかに認められ
るので、結晶相が主体であり硝子相は少量存在している
程度であることがわかる。これに対し、第3図はPC−
M2S粉末の溶射前のX線解析であり、はとんど結晶で
あるが、第4図に示すようにP(1ニー M2S粉末を
溶射して得られた絶縁層は、そのX線解析チャートから
明らかなように結晶特有のピークは消え、ベースが上が
っていることから、ガラス相が主体であることがわかる
。Figures 1 to 4 show examples of X-ray analysis results. For example, as shown in Figures 1 and 3, a sharp peak value A is observed in the relationship between X-ray intensity and diffraction angle. is the crystalline phase. On the other hand, as shown in FIGS. 2 and 4, the glass phase has a lower sharp peak and a higher base B. FIG. 1 is an X-ray analysis chart of the PC-SP raw material powder, which is mostly crystalline. Figure 2 is an X-ray analysis chart of an insulating layer obtained by thermal spraying the PC8P powder, and a peak unique to crystals is clearly observed, indicating that the crystal phase is the main component and a small amount of glass phase is present. It can be seen that this is about the same level. In contrast, Fig. 3 shows the PC-
This is an X-ray analysis of the M2S powder before thermal spraying, and although it is mostly crystalline, as shown in Figure 4, the insulating layer obtained by thermal spraying the M2S powder is As is clear from the above, the peak characteristic of crystals disappears and the base rises, indicating that the glass phase is the main component.
なお、第4図の縦軸(X線強度)は、第3図の縦軸の5
倍に拡大表示したが、それでも結晶特有の鋭いピークは
認められない。The vertical axis (X-ray intensity) in Figure 4 is 5 on the vertical axis in Figure 3.
Although the image was enlarged twice, the sharp peaks characteristic of crystals were still not observed.
また各絶縁層の絶縁特性を30°C1湿度85%で測定
して、第1表に示した。なお、絶縁抵抗と絶縁耐圧の測
定は、絶縁層の内側に50X50mmの面積でNi−A
l合金を厚さ30〜150μm溶射して、その層と基板
の間の絶縁性能を測定して示した。The insulation properties of each insulation layer were measured at 30° C. and 85% humidity and are shown in Table 1. Note that the measurement of insulation resistance and dielectric strength voltage was performed using Ni-A with an area of 50 x 50 mm inside the insulation layer.
1 alloy was thermally sprayed to a thickness of 30 to 150 μm, and the insulation performance between the layer and the substrate was measured and shown.
第2表かられかるように、硝子相を含む本発明の実施例
は絶縁性能が大幅に改善されている。また上記絶縁層を
大気中、900°C11時間の条件で加熱を行った後、
X線解析をしたところ硝子相特有の鋭いピークが出現し
たが、いづれも絶縁特性はほぼ同一のレベルをイ呆った
。このことから、旦、硝子相が含有され緻密な絶縁層が
形成されてしまうと、その後に硝子層が結晶化されても
、緻密性は変えられることがないためと考えられる。As can be seen from Table 2, the examples of the present invention containing a glass phase have significantly improved insulation performance. Further, after heating the above insulating layer in the atmosphere at 900°C for 11 hours,
When X-ray analysis was performed, a sharp peak characteristic of the glass phase appeared, but the insulation properties were at almost the same level in both cases. From this, it is thought that once a dense insulating layer containing a glass phase is formed, the density remains unchanged even if the glass layer is crystallized thereafter.
第5図及び第6図は、本発明面状ヒータにおける緻密性
を説明するための金属組織写真である。FIGS. 5 and 6 are photographs of the metal structure for explaining the denseness of the sheet heater of the present invention.
第5図は本実施例のMgO5i02溶射膜の組織を示し
、灰色部分はほとんど硝子相であり、黒い部分は空孔で
あり、濃い灰色の点が集まったところは結晶であり、全
体に緻密性があることがわかる。第6図は比較例のAl
□03−MgGの溶射膜の組織を示し、濃い灰色の点が
多数ある部分が結晶であって、黒い部分が空孔であり、
緻密性がないことがわかる。Figure 5 shows the structure of the MgO5i02 sprayed film of this example, where the gray part is almost a vitreous phase, the black part is pores, and the areas where dark gray dots are gathered are crystals, and the whole is dense. It turns out that there is. Figure 6 shows Al of comparative example.
□03-The structure of the sprayed film of MgG is shown. The parts with many dark gray dots are crystals, and the black parts are pores.
It can be seen that there is no precision.
(実施例2)
絶縁層の組成および構成を第3表に示すように変えた以
外は実施例1と同様の方法で金属基板上に結合層及び絶
縁層を溶射して形成した後、絶縁層の上にSOX 50
mmの範囲でFe−25Cr−8Alをガス溶射して厚
さ約(Llmmの発熱抵抗層を形成し、面状ヒータを作
成した。試料1.2は硝子相を含む絶縁層重の上に結晶
のみの絶縁層■を設け、試料3.4は絶縁層重のみとし
た。なお、試料1.2の絶縁層の厚さは0.2 mm、
試料3.4の厚さは0−4mmを目標値として溶射形成
した。各発熱抵抗層の膜剥離(浮き上り )は主として
溶射終了時におこるので、溶射直後の各発熱抵抗層の剥
離の状況を目視により観察して第3表に示した。また、
室温から550℃まで3分間で昇温し、放冷する工程を
1ooo回くりかえした後に、絶縁層の絶縁抵抗と絶縁
耐圧とを測定した。その結果も第3表に示す。(Example 2) A bonding layer and an insulating layer were formed on a metal substrate by thermal spraying in the same manner as in Example 1, except that the composition and structure of the insulating layer were changed as shown in Table 3, and then the insulating layer was SOX 50 on top of
A heating resistance layer with a thickness of approximately (Llmm) was formed by gas spraying Fe-25Cr-8Al in the range of Sample 3.4 had only an insulating layer.The thickness of the insulating layer of Sample 1.2 was 0.2 mm.
Sample 3.4 was formed by thermal spraying with a target thickness of 0-4 mm. Since film peeling (lifting) of each heating resistor layer mainly occurs at the end of thermal spraying, the peeling situation of each heating resistor layer immediately after thermal spraying was visually observed and shown in Table 3. Also,
After repeating the process of raising the temperature from room temperature to 550° C. in 3 minutes and cooling it 100 times, the insulation resistance and dielectric strength voltage of the insulating layer were measured. The results are also shown in Table 3.
第3表によれば、硝子相を含む絶縁層の上に結晶のみの
絶縁層を設けることにより、絶縁層と発熱抵抗層との付
着性能がよ(なるのが明らかである。この場合、硝子相
を含有する絶縁層、結晶のみよりなる絶縁層、及び発熱
抵抗層が少なくとも1つの金属元素を共通して含有して
いるので、その境界の接合性能を向上させることが出来
たものと考えられる。また各絶縁層の絶縁特性は、面状
ヒータにとって十分望ましいものであった。According to Table 3, it is clear that by providing an insulating layer containing only crystals on an insulating layer containing a glass phase, the adhesion performance between the insulating layer and the heating resistance layer is improved. It is thought that because the insulating layer containing a phase, the insulating layer consisting only of crystals, and the heat-generating resistance layer all contain at least one metal element, the bonding performance at the boundary between them could be improved. In addition, the insulation properties of each insulation layer were sufficiently desirable for a planar heater.
(実施例3)
実施例1と同様にして結合層を溶射した金属基板を使用
し、その金属基板上に第4表の試料5〜8に示す絶縁層
を実施例1と同様の条件で溶射することにより形成した
。試料5.6は、硝子相を含む絶縁層重、■間に結晶材
層をはさんだもので、各層の厚さはほぼ0.15mmを
目標値として溶射形成した。また試料7.8は、結晶材
層の上に硝子相を含む層を設けたもので、各層の厚さは
0.2 mmを目標とし溶射形成した。得られた試料5
〜8の絶縁層の絶縁抵抗と絶縁耐圧を測定して第4表に
示した。第4表より、各絶縁層の絶縁特性は良いもので
あり、面状ヒーターに適したものであることがわかる。(Example 3) Using a metal substrate on which a bonding layer was thermally sprayed in the same manner as in Example 1, the insulating layers shown in Samples 5 to 8 in Table 4 were thermally sprayed on the metal substrate under the same conditions as in Example 1. It was formed by Sample 5.6 had a crystalline material layer sandwiched between two insulating layers containing a glass phase, and was thermally sprayed with a target thickness of approximately 0.15 mm for each layer. Sample 7.8 had a layer containing a glass phase on top of the crystalline material layer, and was thermally sprayed to a thickness of 0.2 mm for each layer. Obtained sample 5
The insulation resistance and dielectric strength voltage of the insulating layers No. 8 to 8 were measured and shown in Table 4. From Table 4, it can be seen that the insulating properties of each insulating layer are good and are suitable for a planar heater.
また硝子相を含む絶縁層と発熱抵抗層の結合性を良好に
する場合には、第1層を硝子相を含む層とし、第2層を
結晶層としたり、硝子相を含む層と発熱抵抗層との間に
結晶のみの層をはさむようにしてもよい。In addition, in order to improve the bond between the insulating layer containing the glass phase and the heat generating resistor layer, the first layer may be a layer containing the glass phase and the second layer may be a crystal layer, or the layer containing the glass phase may be combined with the heat generating resistor layer. A layer containing only crystals may be sandwiched between the two layers.
(実施例4)
実施例1と同様の方法によりマルテンザイト系ステンレ
ス鋼S U S 403またはフェライト系のステンレ
ス鋼S U S 430よりなる基板に、第5表に示す
約0.4mm厚さの絶縁層を形成し、さらにその上に第
5表に示す約0.1mm厚さの発熱抵抗層を溶射により
形成して面状ヒーターを作成した。(Example 4) A substrate made of martenzite stainless steel SUS 403 or ferritic stainless steel SUS 430 was coated with an insulating film having a thickness of about 0.4 mm as shown in Table 5 by the same method as in Example 1. A heating resistor layer having a thickness of about 0.1 mm as shown in Table 5 was formed thereon by thermal spraying to prepare a planar heater.
第5表中Al2O35I02は、Al20377%、5
L0222%のもの、Al□03−310□粉とCl7
203粉の比は7:3、Nj−Cr組成はbal Ni
−20Cr、 Fe−Cr−Al組成はbalFe−2
5Cr−8Al 、Fe−Cr−AlとNi−Crの比
は1:1である。In Table 5, Al2O35I02 represents Al20377%, 5
L0222%, Al□03-310□ powder and Cl7
The ratio of 203 powder is 7:3, the Nj-Cr composition is bal Ni
-20Cr, Fe-Cr-Al composition is balFe-2
5Cr-8Al, the ratio of Fe-Cr-Al and Ni-Cr is 1:1.
第5表に示す各面状ヒーターを室温から500℃まで3
分間で昇温し、放冷する工程を1000回くりかえした
が、いずれも加熱状態に変化はみられず熱衝撃性を十分
に有していた。Each sheet heater shown in Table 5 can be used from room temperature to 500℃.
The process of raising the temperature for minutes and allowing it to cool was repeated 1000 times, but no change was observed in the heating state in any case, and the sample had sufficient thermal shock resistance.
これは基板材料であるマルテンザイト系またはフェライ
ト系のステンレス鋼の熱膨張係数が1.Ox to−6
付近であり、絶縁層を形成するMgO−3jO□合金の
熱膨張係数が0.8〜I−2Xl0−6であり、両者の
熱膨張係数が近いことにもよると考えられる。This is because the thermal expansion coefficient of martenzite or ferritic stainless steel, which is the substrate material, is 1. Ox to-6
This is probably due to the fact that the MgO-3jO□ alloy forming the insulating layer has a thermal expansion coefficient of 0.8 to I-2Xl0-6, and the thermal expansion coefficients of both are close to each other.
そのため試料9〜14の面状ヒーターは、1000℃で
も使用可能になる。Therefore, the planar heaters of Samples 9 to 14 can be used even at 1000°C.
また発熱抵抗層にFe−0r−Al系合金を使用し、絶
縁層にAl203−3iO:+等を使用しているので、
両省に同一金属元素が含まれており、接合に有利である
ことも考えられる。In addition, Fe-0r-Al alloy is used for the heating resistance layer, and Al203-3iO:+ is used for the insulating layer, so
Both types contain the same metal element, which may be advantageous for bonding.
(実施例5)
実施例2の試料1と2で得られた面状ヒータの基板の反
対面側に市販の遠赤外線発生塗料([株]日板研究所製
CRC600)を30μm厚さに塗布した。このように
作成した面状ヒーターを500°Cに加熱し、分光放射
率測定装置を用い、波長3μmμmトート射効率を測定
したところ0.8以上の値が得られた。なお、塗布しな
いものでは0.3であった。(Example 5) A commercially available far-infrared emitting paint (CRC600 manufactured by Nippan Research Institute Co., Ltd.) was applied to a thickness of 30 μm on the opposite side of the substrate of the planar heater obtained in Samples 1 and 2 of Example 2. did. When the planar heater thus prepared was heated to 500°C and the radiation efficiency at a wavelength of 3 μm μm was measured using a spectral emissivity measuring device, a value of 0.8 or more was obtained. In addition, it was 0.3 in the case where no coating was applied.
[発明の効果]
本発明の面状ヒーターは、その絶縁層が緻密性を有する
硝子相を含むので絶縁特性が向上し、しかも発熱抵抗層
や基板との結合性も向上して剥離しにくく、急熱急冷に
よる熱衝撃性にも強い。また基板材料や絶縁材料、発熱
抵抗材料を選択することにより熱膨張係数を近い関係に
したり、同一金属元素を互いに含むようにすることによ
り結合性をより優れたものにし、急熱急冷による熱衝撃
性をさらに向上させることができる。[Effects of the Invention] In the sheet heater of the present invention, the insulating layer includes a dense glass phase, so the insulating properties are improved, and the bondability with the heating resistance layer and the substrate is also improved, making it difficult to peel off. It is also resistant to thermal shock caused by rapid heating and cooling. In addition, by selecting the substrate material, insulating material, and heat generating resistor material, we can make the thermal expansion coefficients close to each other, and by making them contain the same metal element, we can improve the bonding property, and the thermal shock caused by rapid heating and cooling can be improved. performance can be further improved.
以上により即熱性、組立性に優れた面状ヒータ、例えば
調理機用ヒーター、遠赤外線放射ヒーター、加熱炉用ヒ
ーター、保温ヒーター、熱定着および熱転写用加熱ヒー
ターとして優れたものを得ることができる。As a result of the above, it is possible to obtain a planar heater that is excellent in instant heating properties and easy to assemble, such as a heater for a cooking machine, a far-infrared radiation heater, a heater for a heating furnace, a heat retention heater, and a heating heater for thermal fixing and thermal transfer.
第1〜4図はそれぞれ溶射前の原料粉末及びそれを用い
て作成した絶縁層のX線解析結果を示す図、第5.6図
はそれぞれ本実施例と比較例の絶縁層の金属組織写真で
ある。Figures 1 to 4 are diagrams showing the X-ray analysis results of the raw material powder before thermal spraying and the insulating layer created using it, respectively, and Figures 5.6 are photographs of the metallographic structure of the insulating layer of the present example and comparative example, respectively. It is.
Claims (10)
、絶縁層の上に抵抗体を溶射して発熱抵抗層とした面状
ヒーターにおいて、絶縁層が硝子相を含有することを特
徴とする面状ヒーター。(1) A planar heater in which an insulating layer is provided on a metal substrate by thermal spraying and a resistor is thermally sprayed on the insulating layer to form a heating resistance layer, in which the insulating layer contains a glass phase. shaped heater.
、絶縁層の上に抵抗体を溶射して発熱抵抗層とした面状
ヒーターにおいて、絶縁層は、硝子層を含有する層と結
晶材よりなる層とがミクロ的に積層されていることを特
徴とする面状ヒーター。(2) In a planar heater in which an insulating layer is provided on a metal substrate by thermal spraying and a resistor is thermally sprayed on the insulating layer to form a heating resistance layer, the insulating layer is made of a layer containing a glass layer and a crystal material. A planar heater characterized by microscopically laminated layers.
、絶縁層の上に抵抗体を溶射して発熱抵抗層とした面状
ヒーターにおいて、絶縁層は、硝子相を含有する層と結
晶材のみよりなる層とが積層されていることを特徴とす
る面状ヒーター。(3) In a planar heater in which an insulating layer is provided on a metal substrate by thermal spraying and a resistor is thermally sprayed on the insulating layer to form a heating resistance layer, the insulating layer consists of only a layer containing a glass phase and a crystalline material. A planar heater characterized by being laminated with two layers.
Mn、Ti、Crの酸化物の1種以上とを含有すること
を特徴とする請求項1、2又は3に記載の面状ヒーター
。(4) The insulating layer is made of Si oxide, Al, Mg, Zr,
4. The planar heater according to claim 1, further comprising at least one of Mn, Ti, and Cr oxides.
層とが複数積層され、隣合う両層は少なくとも1つの同
一金属元素を含有することを特徴とする請求項1乃至4
に記載の面状ヒーター。(5) The insulating layer is characterized in that a plurality of layers containing a glass phase and a layer made of a crystalline material are laminated, and both adjacent layers contain at least one same metal element.
The planar heater described in .
、絶縁層の上に抵抗体を溶射して発熱抵抗層とした面状
ヒーターにおいて、絶縁層を構成する硝子相の一部又は
全部が熱処理されて結晶化していることを特徴とする請
求項1乃至5に記載の面状ヒーター。(6) In a planar heater in which an insulating layer is provided on a metal substrate by thermal spraying and a resistor is thermally sprayed on the insulating layer to form a heating resistance layer, part or all of the glass phase constituting the insulating layer is heat-treated. 6. The planar heater according to claim 1, wherein the sheet heater is crystallized.
1乃至6に記載の面状ヒータ。(7) The planar heater according to any one of claims 1 to 6, further comprising a bonding layer provided between the metal substrate and the insulating layer.
とを特徴とする請求項1乃至7に記載の面状ヒーター。(8) The planar heater according to any one of claims 1 to 7, wherein the heating resistance layer is made of a Fe-Cr-Al alloy.
テンレス鋼よりなり、絶縁層の熱膨張係数が0.8〜1
.2×10^−^6であることを特徴とする請求項1乃
至8に記載の面状ヒーター。(9) The metal substrate is made of martensitic or ferritic stainless steel, and the thermal expansion coefficient of the insulating layer is 0.8 to 1.
.. 9. The planar heater according to claim 1, wherein the area is 2×10^-^6.
を特徴とする請求項1乃至9に記載の面状ヒーター。(10) The planar heater according to any one of claims 1 to 9, characterized in that a far-infrared ray generating film is provided on the surface of the heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6076989A JPH02242580A (en) | 1989-03-15 | 1989-03-15 | Plane-like heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6076989A JPH02242580A (en) | 1989-03-15 | 1989-03-15 | Plane-like heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02242580A true JPH02242580A (en) | 1990-09-26 |
Family
ID=13151820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6076989A Pending JPH02242580A (en) | 1989-03-15 | 1989-03-15 | Plane-like heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02242580A (en) |
-
1989
- 1989-03-15 JP JP6076989A patent/JPH02242580A/en active Pending
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