JPH02242599A - Radiant light take-out window unit of electron stored ring - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Summary] Synchrotron radiation is transferred from vacuum to atmospheric pressure or reduced pressure at the end of the beam line, which serves as an extraction path for synchrotron radiation generated by an electron storage ring. Regarding the synchrotron radiation extraction window unit of the electron storage ring, which is extracted into the atmosphere, it is possible to extract the synchrotron radiation from the vacuum into the atmospheric pressure or reduced pressure atmosphere with high transmittance, and it also prevents the possibility of vacuum leakage. The purpose is to provide a synchrotron radiation extraction window unit for an electron storage ring.It is a flat plate with an opening in the center that serves as a passage for synchrotron radiation. A metal gasket made of a soft viscous metal that has a larger opening and plastically deforms when pressed, a synchrotron radiation extraction window made of a thin metal plate that has a larger diameter than the metal gasket and transmits synchrotron radiation, and a metal gas care. 1□A press plate having a smaller opening in the center is superimposed in this order,
The holding plate is fixed to the mounting flange via a metal gasket, and in some cases, the outer edge of the radiation extraction window is fixed to the flange surface by a fixing member.

[Industrial application field]

In the present invention, an electron storage ring is installed at the end of a beam line that takes out synchrotron radiation (hereinafter referred to as synchrotron radiation) that is generated, and the synchrotron radiation is transferred from a vacuum to atmospheric pressure or This invention relates to a synchrotron radiation extraction window Uniso I- for an electron storage ring that is extracted into a reduced pressure atmosphere.

An electron storage ring emits synchrotron radiation in the tangential direction of an orbit by applying a strong magnetic field to electrons moving at a speed close to the speed of light and rapidly changing the direction of their movement.

This synchrotron radiation, which has a continuous spectrum from the infrared region to the X-ray region, is extremely strong, close to a point light source, and is characterized by its sharp directivity and excellent parallelism.

For this reason, super-1.0mm wiring requires submicron (1 μm or less) fine wiring. ．． Research is actively underway to utilize X-rays contained in synchrotron radiation (with a wavelength of 1 to 20 human skin) as a transfer light source for sI pattern printing.

FIG. 2 is a diagram showing a schematic configuration of an electron storage ring.

A linear accelerator 2 accelerates electrons to a speed close to the speed of light and injects the electrons into the electron storage ring 1.

Reference numeral 3 denotes a beam line, which constitutes a path for taking out the radiation light generated by the electron storage ring 1 to the outside of the electron storage ring 1.

4 is a vacuum duct in which metal hollow tubes are connected in a polygonal shape, and the interior of the hollow tubes connected in an annular manner has an ultra-high degree of vacuum (10-9~
IO-''Torr), and the inside of the hollow tube becomes a circulating path for electrons incident from the linear accelerator 2.

B is a bending electromagnet disposed outside the vacuum duct 1-4, which causes electrons to circulate within the vacuum ducts 1 to 4, and which applies a magnetic field to the vacuum duct 1-4 to cause the electrons to emit synchrotron radiation.
4.

Reference numeral 6 denotes a focusing electromagnet, which is disposed outside the vacuum duct 1-4 and forms a magnetic field within the vacuum duct 4 to adjust the focusing state of electrons.

Reference numeral 7 denotes a synchrotron radiation extraction window, which is disposed at the end of the beam line 3 and transmits the synchrotron radiation to be extracted into atmospheric pressure or a reduced pressure atmosphere.

Reference numeral 8 denotes a high-frequency acceleration section, which accelerates electrons whose speed has been reduced due to energy reduction due to radiation of synchrotron radiation or collision with residual gas in the vacuum duct 4 by applying energy to the electrons using a high-frequency electric field.

Next, a method for producing synchrotron radiation using the apparatus configured as described above and a method for extracting the synchrotron radiation from a vacuum into the atmosphere will be explained.

First, electrons accelerated to a speed close to the speed of light by a linear accelerator 2 are introduced into a vacuum duct 4 of an electron storage ring 1.

Electromagnet 5 deflects electrons moving linearly inside the vacuum duct I.
A magnetic field is applied to rapidly change the direction of electron movement toward the center of the electron storage ring 1.

Then, the electric current whose direction of motion has been changed emits synchrotron radiation in the tangential direction of its orbit.

This synchrotron radiation passes through a cylindrical beam line 3 whose interior is maintained at an ultra-high vacuum, passes through a synchrotron radiation extraction window 7 attached to the end of the beam line 3, and enters atmospheric pressure.
Alternatively, it is taken out into an atmosphere whose pressure is reduced to below atmospheric pressure.

Since it is essential that the emitted light extraction window 7 transmits the emitted light with high transmittance, it is desirable that the emitted light extraction window 7 be as thin as possible.

However, when the light extraction window 7 is in contact with an ultra-high degree of vacuum on one side and the atmosphere on the other side, a force of 1 atmosphere is applied to it.

For this reason, the radiation extraction window 7 is required to have mechanical strength capable of withstanding this force of 1 atmosphere.

Furthermore, the radiation extraction window 7 becomes hot due to direct exposure to strong radiation.

Therefore, it goes without saying that the radiation extraction window 7 is required to be made of a material that can withstand this high temperature.

[Conventional technology]

FIG. 3 is a sectional side view of a main part of a conventional synchrotron radiation extraction window unit for attaching a synchrotron radiation extraction window to a beam line.

In addition, the same part +4 is given the same symbol throughout all the figures.

The conventional radiation light extraction window unit 13 is composed of structural members as detailed below.

In the figure, 7 is a synchrotron radiation extraction window, which has a diameter of 20 to 50 mm.

It is a disc made of beryllium (Be) with a thickness of 50 to 200 μm, and is mounted by drilling a central part of the surface of the flange 10 facing the atmospheric pressure 5 or reduced pressure atmosphere. It is attached to the plate and transmits the synchrotron radiation, and also serves as a partition plate that partitions the vacuum side and the atmospheric pressure or reduced pressure atmosphere side.

Note that when a force of 1 atmosphere is applied to the radiation extraction window 7, the radiation extraction window 7 is in a curved state as shown by the dotted line.

9 is silver solder, and the synchrotron radiation extraction window 7 is attached to the flange 10.
In addition to being mechanically fixed to the bottom of the recess 10c provided in the center of the window 7, the radiation extraction window 7 and the attachment also play a role in making the gap between the flange 10 and the flange 10 airtight.

In addition, this silver solder 9 is iH (Ag) - copper (Cu) - zinc (
It is a Zn) based wax wood and is heated to several 100 degrees Celsius during brazing.

10 is mounted with a flange, and the synchrotron radiation extraction window 7 is mounted in the recess 1.
After fixing to 0c with silver solder 9, it is fixed with mounting screws 12.

Therefore, the emitted light passes through the opening 10h of the mounting flange 10, passes through the emitted light extraction window 7, and is extracted into atmospheric pressure or a reduced pressure atmosphere.

The airtightness between the flange 10 and the end surface of the beam line 3 is achieved by using a groove 3a provided by drilling the end surface of the beam line 3 in the circumferential direction, and a groove 3a facing the groove 3a of the flange 10. This is done by fitting the metal gasket 11 into a groove IQa provided at a position, and pressing the metal gasket 1-11 to plastically deform it.

The metal gasket 11 is made of a soft viscous metal such as gold (Au).

[Problem to be solved by the invention]

In the conventional synchrotron radiation extraction window unit, the radiation radiation extraction window 7 was heated to several hundred degrees Celsius when it was soldered to the bottom surface of the recess 10C of the flange 10 with silver solder 9.

Therefore, the mechanical strength of the synchrotron radiation extraction window 7 is reduced, and since the plate thickness of the synchrotron radiation extraction window 7 cannot be made thinner, the synchrotron radiation can be exposed to high transmittance at atmospheric pressure or in a reduced pressure atmosphere. There was a problem that it could not be taken out.

In view of the above-mentioned problems, the present invention makes it possible to extract synchrotron radiation from a vacuum into atmospheric pressure or a reduced pressure atmosphere with high transmittance, and
The object of the present invention is to provide a synchrotron radiation extraction window unit for an electron storage ring that is unlikely to cause vacuum leakage.

[Means to solve the problem]

As shown in Fig. 1, the above-mentioned problem is that the flat plate-like mounting with the opening 21.3 in the center that serves as a passage for the synchrotron radiation light is the flange 21, and the mounting is larger than the opening 21a of the flange 21. A metal gasket 1-22 made of a soft viscous metal that has an opening 22a and plastically deforms when pressed, and a radiation light extraction window 23 of a metal drawing board that has a diameter larger than the metal gasket 22 and transmits synchrotron radiation light. and a holding plate 24 having an opening 24a in the center that is smaller than the metal gasket 22 are superimposed in this order, and the holding plate 24 is fixed to the flange 21 via the metal gasket 22, and the emitted light extraction window is The attachment of the outer edge of the electron storage ring 23 is solved by the emitted light extraction window unit of the electron storage ring, which is characterized in that it is fixed to the surface of the flange 21 by a fixing member 26.

[For production]

The synchrotron radiation extraction window unit I of the present invention shown in FIG.
2. Metal thin plate (e.g. 20 μm thick beryllium plate)
Synchrotron radiation extraction window 23. and the pressing plates 24 are superimposed in this order.

Then, the presser plate 24 is attached while the presser plate 24 is still pressing the abutment portion between the metal gasket 22 and the synchrotron radiation extraction window 23 and the abutment portion between the metal gasket 22 and the synchrotron radiation extraction window 23. is fixed to the flange 21.

Therefore, in order to make the metal gasket 22 plastically deformed and airtight between the metal gasket 22 and the flange 21, and between the metal gasket 22 and the synchrotron radiation extraction window 23, the synchrotron radiation extraction window uni-no. 1- means that there is no vacuum leakage and the reliability is high.

Furthermore, the outer edge of the synchrotron radiation extraction window 23 is fixed to the surface of the flange 2 (for installation on the atmospheric pressure or reduced pressure atmosphere side, the flange 21 surface) with a fixing member 26 (for example, a silver source is It is fixed with used solder (fixed by screws, resistance welding, etc.).

Therefore, the outer edge of the radiation light extraction window 23 can be mechanically removed.
Since the attachment is fixed to the surface of the flange 21, the synchrotron radiation extraction window unit has resistance against atmospheric pressure that tends to push the radiation extraction window 23 into the beam line 3.

Furthermore, even when the outer edge of the synchrotron radiation extraction window 23 is soldered with the silver mirror 1, the influence of heat during brazing is limited to the outer edge, so that the outer edge is in contact with the metal gas squeegee 1-22. Area iJ of the radiation light extraction window 23 is not affected by heat.

Therefore, the mechanical strength of the synchrotron radiation extraction window 23 in the area does not decrease, so it is possible to reduce the thickness of the synchrotron radiation extraction window 23, and the synchrotron radiation extraction window Uniso 1- emits synchrotron radiation with high transmittance. It will pass through.

〔Example〕

An embodiment of the radiation extraction window unit of the present invention will be described below with reference to FIG.

FIG. 1 shows the state in which the radiation light extraction window unit 20 is fixed to the end of the beam line 3 via a metal gasket 1 with a mounting screw 12.

21 is a removable flange with a diameter of 120 mm and a thickness of 20 mm.
It is a circular plate made of stainless steel with a diameter of 20 mm, and an opening 21a with a diameter of 20 mm is formed in the center thereof, which serves as a passage for the emitted light.

22 is a metal gasket, which has the same function as an O-ring made of rubber, etc., which is widely used to ensure airtightness in ordinary vacuum equipment. (Au) with an inner diameter of 25 mm and an outer diameter of 3
0mm, thickness 0.5~1. It is molded into a ring shape of mm.

23 is a synchrotron radiation extraction window, 20 μm thick and 60 m in diameter.
It is a beryllium disk of m.

Reference numeral 24 denotes a holding plate, which is a circular plate made of stainless steel and having a diameter of 5Qmm and a thickness of 1Qmm, and has an opening 24a with a diameter of 20mm formed in the center thereof to serve as a passage for the emitted light.

Next, an example of a procedure for assembling a synchrotron radiation extraction window unit according to an embodiment of the present invention, which is composed of the above-mentioned members and the like, will be explained.

First, install with the surface of the flange 21 facing upward (groove 2
1b facing downward) and place it horizontally on a workbench (not shown).

Next, remove the center of the metal gasket 22 from the flange 2.
1, and place it on the take-out flange 21'', aligning the center of the opening 21a.

Thereafter, the center of the emitted light extraction window 23 is aligned with the center of the flange 21, and placed on the metal gas container 22-.

Further, the center of the retainer 24 is made to coincide with the center of the flange 21 in some parts, so that the emitted light extraction window 23 mainly overlaps with the center.

Then, the presser plate 24 presses the contact portion between the metal gasket 22 and the radiation light extraction window 23 and the contact portion between the metal gasket 22 and the radiation light extraction window 23, and the presser plate 24 presses the contact portion between the metal gasket 22 and the radiation light extraction window 23. For installation, the flange 21 is fixed with fixing screws 25.

Note that the fixing screws 25 are screwed into the tapped holes (21c, 24b).
) is installed in advance by providing holes (not shown) in the flange 21 and the holding plate 24, respectively, and in the radiation light extraction window 23 through which the fixing screws 25 are inserted.

After fixing the synchrotron radiation extraction window 23, etc., the outer edge of the synchrotron radiation extraction window 23 is coated with silver (1 g), copper (Cu), and zinc (
A ternary alloy-based silver source (Zn) is attached by brazing to the surface of the flange 21, and the synchrotron radiation extraction window unit of one embodiment of the present invention is completed.

Furthermore, beam line 3 of the synchrotron radiation extraction window unit
The terminal surface of the beam line 3 and the mounting point are provided on the rear surface of the flange 21 (the surface opposite to the surface on which the synchrotron radiation extraction window 23 etc. is fixed).
b) After fitting the metal gasket 11 to the beam line 3, the removal flange 21 is tightened with the mounting screw 12.

〔Effect of the invention〕

As is clear from the above description, the synchrotron radiation extraction window unit of the present invention is capable of transmitting synchrotron radiation with high transmittance because it employs a synchrotron radiation extraction window formed of a thin metal plate. .

Furthermore, the airtightness of the radiation light extraction window is ensured by a soft viscous metal gasket, resulting in highly reliable airtightness without vacuum leakage.

In addition, when metal gaskets are used to ensure airtightness, when gas is vented from the synchrotron radiation extraction window, it is possible to heat the synchrotron radiation extraction window to remove waste, so the beam line The degree of vacuum inside can be improved.

Furthermore, the inner part of the thin metal plate is in contact with a metal gasket to ensure airtightness, and the outer periphery is brazed with a silver source, so the areas where thermal fatigue will occur and mechanical strength will decrease are soldered. It is limited only to the outer periphery of the thin metal plate that is attached.

Therefore, thermal fatigue does not occur in the contact area with the metal gasket that ensures airtightness, and in the thin metal plate inside this contact area, making the synchrotron radiation extraction window Uniso 1 highly reliable.
~ can be provided.

[Brief explanation of drawings]

Fig. 1 is a side sectional view of the main part of a synchrotron radiation extraction window unit of an electron storage ring according to an embodiment of the present invention, Fig. 2 is a diagram showing a schematic configuration of the electron storage ring, and Fig. 3 is a conventional synchrotron radiation extraction window unit. It is a sectional side view of the main part of a window unit. In the figure, 1 is an electron storage ring, 2 is a linear accelerator, 3 is a beam line, and 4 is a vacuum duct 1 to . 5 is a bending electromagnet, 6 is a focusing electromagnet, 7 and 23 are synchrotron radiation extraction windows, 8 is a high frequency accelerator, 9 is a silver source, 10 and 21 are flanges, 11 and 22 are metal gaskets, I2 is a mounting screw , 24 indicates the first part, 25 indicates a fixing screw, and 26 indicates a fixing member.

Claims (1)

[Claims] An electron storage ring is attached to the end of a beam line (3) that serves as an extraction path for the synchrotron radiation generated, and the synchrotron radiation is extracted from a vacuum into atmospheric pressure or a reduced pressure atmosphere. In the synchrotron radiation extraction window unit of the electron storage ring, there is an opening (2
1a), and a metal gasket made of a soft viscous metal that deforms plastically when pressed, and has an opening (22a) larger than the opening (21a) of the mounting flange (21). (22), and a synchrotron radiation extraction window (2) made of a thin metal plate that has a larger diameter than the metal gasket (22) and transmits synchrotron radiation.
3) and a holding plate (24) having an opening (24a) smaller than the metal gasket (22) in the center in this order,
The holding plate (24) was fixed to the mounting flange (21) via a metal gasket (22), and the outer edge of the radiation extraction window (23) was fixed to the surface of the mounting flange (21) with a fixing member (26). A synchrotron radiation extraction window unit for an electron storage ring, characterized in that: