JPH02248671A - Quantitative force feed method of fluid - Google Patents
Quantitative force feed method of fluidInfo
- Publication number
- JPH02248671A JPH02248671A JP6986489A JP6986489A JPH02248671A JP H02248671 A JPH02248671 A JP H02248671A JP 6986489 A JP6986489 A JP 6986489A JP 6986489 A JP6986489 A JP 6986489A JP H02248671 A JPH02248671 A JP H02248671A
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- viscosity
- piezoelectric
- voltage
- adjustment section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Reciprocating Pumps (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は流体を圧送するポンプを駆動回路の交流出力に
より駆動し流体を圧送する装置、特に圧電ポンプを駆動
回路の交流出力により駆動し流体を圧送する装置におい
て、圧電ポンプの圧電振動子への入力電圧、流体の温度
または粘度、流量をセンサにより検出し、これらセンサ
の出力で駆動回路の電圧調節部及び周波数調節部、希釈
液供給部並びに加温ヒータの２つ以上を制御することに
より圧電ポンプの吐出量を′＃４御して定量の流体を圧
送する方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device for pumping fluid by driving a pump that pumps fluid by an AC output of a drive circuit, and in particular, a device that drives a piezoelectric pump by an AC output of a drive circuit to pump a fluid. In a device that pumps liquid, the input voltage to the piezoelectric vibrator of the piezoelectric pump, the temperature or viscosity of the fluid, and the flow rate are detected by sensors, and the outputs of these sensors are used to control the voltage adjustment section, frequency adjustment section, and diluent supply section of the drive circuit. The present invention also relates to a method of pumping a fixed amount of fluid by controlling the discharge amount of a piezoelectric pump by controlling two or more heaters.
従来は流体の圧送を電動ポンプで行っており、特に高粘
性流体に適するものとしてはギヤポンプ。Conventionally, fluids are pumped using electric pumps, and gear pumps are especially suitable for high viscosity fluids.
ベーンポンプ、スクリューポンプ等の回転ポンプを用い
て流体を圧送するようにしていた。Rotary pumps such as vane pumps and screw pumps were used to pump fluid.
また、圧電ポンプによって流体を圧送する場合には圧電
ポンプを一定電圧により駆動し流体を圧送するようにし
ていた。Furthermore, when fluid is pumped by a piezoelectric pump, the piezoelectric pump is driven with a constant voltage to pump the fluid.
しかしながら上記回転ポンプを用いる方法にあっては、
高粘性流体に適しているが、大形で重量が大きくなり、
消費エネルギーが増大し効率が低下するばかりでなく、
流体を必然的に攪拌、混練しながら圧送することになる
ので、流体物性を変化させるという課題がある。However, in the method using the above rotary pump,
Suitable for high viscosity fluids, but large and heavy.
Not only does energy consumption increase and efficiency decrease,
Since the fluid is necessarily stirred and kneaded while being pumped, there is a problem of changing the physical properties of the fluid.
また、圧電ポンプを用いて流体を圧送する方法にあって
は、小形、軽量、低消費エネルギー化を図り、流体物性
を変えることなく、流体を圧送することができるが、圧
電ポンプを一定周波数により駆動しているため、流体の
粘度が増大すると、吐出量が減少したり、効率が低下す
るという課題があるばかりでなく、印刷インキ等は時間
と共に粘度が変化するため吐出量が変化するという課題
がある。In addition, in the method of pumping fluid using a piezoelectric pump, it is possible to make the fluid smaller, lighter, and consume less energy, and it is possible to pump the fluid without changing the physical properties of the fluid. Because it is driven, there is the problem that when the viscosity of the fluid increases, the discharge amount decreases and the efficiency decreases.In addition, the viscosity of printing ink changes over time, so the discharge amount changes. There is.
本発明は圧電ポンプの利点を生かし、圧電ポンプの入力
電圧、流体の粘度及び負荷変動によって吐出量が変化す
るという課題を解決し、吐出量の変化しない定量の流体
を圧送する方法を提供しようとするものである。The present invention takes advantage of the advantages of piezoelectric pumps, solves the problem that the discharge amount changes depending on the input voltage of the piezoelectric pump, fluid viscosity, and load fluctuation, and provides a method for pumping a fixed amount of fluid without changing the discharge amount. It is something to do.
即ち、本発明方法は第１図示のように圧電ポンプ１の圧
電振動子２に駆動回路３の交流出力を印加して圧電ポン
プ１を駆動し流体を圧送する装置において、圧電ポンプ
１の圧電振動子２への入力電力、流体の粘度をそれぞれ
電力検出、粘度センサ４．５により検出し、前記駆動回
路３の電圧調節部６及び周波数調節部１０．流体の粘度
を低下させる希釈液供給部８の希釈液調節部８Ａに前記
センサ４，５の出力を入力して設定値と比較し、それら
の偏差がなくなるように電圧調節部６１周波数調節部１
０．希釈液供給部８の希釈液調節部８Ａを自動制御せし
めるようにしたものである。That is, the method of the present invention applies the AC output of the drive circuit 3 to the piezoelectric vibrator 2 of the piezoelectric pump 1 to drive the piezoelectric pump 1 and pump fluid, as shown in the first diagram. The input power to the child 2 and the viscosity of the fluid are detected by a power detection sensor 4.5 and a viscosity sensor 4.5, respectively, and the voltage adjustment section 6 and frequency adjustment section 10.5 of the drive circuit 3. The outputs of the sensors 4 and 5 are inputted to the diluent adjusting section 8A of the diluting liquid supplying section 8 that lowers the viscosity of the fluid and compared with the set value, and the voltage adjusting section 61 and the frequency adjusting section 1 are adjusted so that the deviation between them is eliminated.
0. The diluent adjustment section 8A of the diluent supply section 8 is automatically controlled.
このような方法を実施することにより圧電ポンプｌの圧
電振動子２への入力電力、流体の粘度をそれぞれ電力検
出、粘度、流体センサ４，５により検出し、駆動回路３
の電圧調節部６及び周波数調節部１０．希釈液供給部８
の希釈液調節部８Ａに、これらセンサ４．５の出力を適
宜入力して設定値と比較し、その偏差がなくなるように
電圧調節部６、周波数調節部１０．希釈液供給部８の希
釈液調節部８Ａを自動制御することになるので、圧電ポ
ンプ１により定量の流体を高効率、高精度で圧送するこ
とができることになる。By implementing such a method, the input power to the piezoelectric vibrator 2 of the piezoelectric pump l and the viscosity of the fluid are detected by the power detection, viscosity, and fluid sensors 4 and 5, respectively, and the drive circuit 3
Voltage adjustment section 6 and frequency adjustment section 10. Diluent supply section 8
The outputs of these sensors 4.5 are appropriately inputted to the diluent adjustment section 8A of the diluent adjustment section 8A, and compared with the set value, and the voltage adjustment section 6, frequency adjustment section 10. Since the diluent adjustment section 8A of the diluent supply section 8 is automatically controlled, a fixed amount of fluid can be pumped with high efficiency and precision using the piezoelectric pump 1.
以下図面により本発明の詳細な説明する。 The present invention will be explained in detail below with reference to the drawings.
である。It is.
図面は本発明方法を実施するための装置の一例を示す構
成説明図である。The drawing is a configuration explanatory diagram showing an example of an apparatus for carrying out the method of the present invention.
図面において２は圧電振動子で、例えばセラミックス系
または高分子系の２枚の圧電膜１１ 、１１を貼り合せ
、その貼り合せ面及び両外面にそれぞれ膜状電極１２ａ
、 １２ｂを形成し、これらの電極１２ａ、１２ｈに
それぞれリード線１３ａ 、 １３ｂを接続せしめ、全
体を絶縁層１４で被覆してなる積層型のものである。In the drawing, reference numeral 2 denotes a piezoelectric vibrator, in which two piezoelectric films 11 and 11 made of, for example, ceramics or polymers are bonded together, and film-like electrodes 12a are provided on the bonded surface and both outer surfaces, respectively.
, 12b are formed, lead wires 13a and 13b are connected to these electrodes 12a and 12h, respectively, and the entire structure is covered with an insulating layer 14.
圧電ポンプ１はこの圧電振動子２の外周部をケーシング
１５の内周に固定し、圧電振動子２の一面に対向するケ
ーシング部に吸込み口１６と吐出口１７を設け、この吸
込み口１６と吐出口１７にそれぞれ吸込み側、吐出側チ
エツク弁１８ 、１９を設けてなる。In the piezoelectric pump 1, the outer periphery of the piezoelectric vibrator 2 is fixed to the inner periphery of a casing 15, and a suction port 16 and a discharge port 17 are provided in the casing portion facing one surface of the piezoelectric vibrator 2. The outlet 17 is provided with check valves 18 and 19 on the suction side and discharge side, respectively.
２０ 、２１はそれぞれ吸込み口１６と吐出口１７に連
結した吸込み、吐出流体配管である。20 and 21 are suction and discharge fluid piping connected to the suction port 16 and the discharge port 17, respectively.
この電圧検出圧電素子４は、例えば圧電膜２２０両面に
膜状電極２３ａ 、 ２３ｂを設け、この画電極２３ａ
、 ２３ｂにそれぞれリード線２４ａ 、 ２４ｂを
接続してなり、圧電振動子２のストローク変位、換言す
れば圧電振動子２の振動による圧力を電圧として検出す
るものである。This voltage detection piezoelectric element 4 includes, for example, film-like electrodes 23a and 23b provided on both sides of a piezoelectric film 220, and this picture electrode 23a.
, 23b are connected to lead wires 24a and 24b, respectively, and the stroke displacement of the piezoelectric vibrator 2, in other words, the pressure caused by the vibration of the piezoelectric vibrator 2 is detected as a voltage.
３は圧電ポンプ１の駆動回路で、これより出力する交流
電圧により圧電ポンプｌが駆動される。3 is a drive circuit for the piezoelectric pump 1, and the piezoelectric pump 1 is driven by an alternating current voltage output from this circuit.
４は圧電振動ｉ都消費される電力を検出する電力検出セ
ンサである。５は粘度センサで、流体の粘度を検出する
。６は駆動回路３の電圧調節部で、流体粘度センサ５と
電力検出センサ４の出力が入力されて流体の流量に応じ
た設定値との偏差がなくなるように調節される。７は粘
度制御器である。4 is a power detection sensor that detects the power consumed by piezoelectric vibration. A viscosity sensor 5 detects the viscosity of the fluid. Reference numeral 6 denotes a voltage adjustment section of the drive circuit 3, into which the outputs of the fluid viscosity sensor 5 and the power detection sensor 4 are input, and the voltage is adjusted so that there is no deviation from a set value according to the flow rate of the fluid. 7 is a viscosity controller.
７ａは粘度設定器である。7a is a viscosity setting device.
８Ａは希釈液（水あるいはその他の溶媒）を流体に供給
する希釈液供給部８の希釈液調節部で、粘度センサ５の
出力が入力されて流体の粘度が設定値になるよう希釈液
の供給量を調節するものである。ｌＯは駆動回路３の周
波数調節部で、粘度センサ５の出力により制御される。8A is a diluent adjusting section of the diluent supply section 8 that supplies a diluent (water or other solvent) to the fluid, and the output of the viscosity sensor 5 is input to supply the diluent so that the viscosity of the fluid reaches a set value. It adjusts the amount. lO is a frequency adjustment section of the drive circuit 3 and is controlled by the output of the viscosity sensor 5.
本実施例では、電力検出センサ４の出力を駆動回路３の
電圧調節部６に、粘度センサ５の出二ヒ廟波調節節部１
０に入力してそれぞれの設定値と比較し、それらの偏差
がなくなるように駆動回路３の電圧調節部６９周波数調
節部１０及び希釈液供給部８を自動制御するようにした
場合である。In this embodiment, the output of the power detection sensor 4 is sent to the voltage adjustment section 6 of the drive circuit 3, and the output of the viscosity sensor 5 is sent to the voltage adjustment section 1 of the viscosity sensor 5.
This is a case in which the voltage adjustment section 69, frequency adjustment section 10, and diluent supply section 8 of the drive circuit 3 are automatically controlled so that the voltage adjustment section 69, frequency adjustment section 10, and diluent supply section 8 of the drive circuit 3 are inputted to 0 and compared with the respective set values, and the deviations between them are eliminated.
本実施例において圧電ポンプｌの圧電振動子２への入力
電圧は、この圧電振動子２の振動による仕事量を電力検
出センサ４により検出されてこの検出電圧が電圧調節部
６に入力され、流体の粘度は粘度センサ５によって検出
されて電力検出センサ４の測定値を補正して吐出量を算
出し、また流体の粘度は周波数調節部ｌＯに入力され、
それぞれの設定器６，８．１０により設定された設定値
と比較され、それらの偏差がな（なるように電圧調節部
６及び周波数調節部１０が自動制御されて圧電ポンプ１
の吐出量が制御され、定量の流体を圧送できることにな
る。In this embodiment, the input voltage to the piezoelectric vibrator 2 of the piezoelectric pump 1 is determined by detecting the amount of work caused by the vibration of the piezoelectric vibrator 2 by the power detection sensor 4, and inputting this detected voltage to the voltage adjustment section 6. The viscosity of the fluid is detected by the viscosity sensor 5, and the discharge amount is calculated by correcting the measured value of the power detection sensor 4, and the viscosity of the fluid is input to the frequency adjustment section IO,
The piezoelectric pump 1 is compared with the set values set by the respective setters 6, 8.
The discharge amount is controlled, and a fixed amount of fluid can be pumped.
圧電ポンプ１の圧電振動子２への入力電圧が高くなると
、圧電ポンプ１の吐出量は増大し、低くなると減少し、
また、流体の温度が高くなると粘度が低くなって吐出量
は増大し、流体の温度が低くなると粘度が高くなって吐
出量は減少するから、流体粘度の変動を電圧調節部６に
入力して入力電圧を設定値に自動制御することにより吐
出量が一定になる。When the input voltage to the piezoelectric vibrator 2 of the piezoelectric pump 1 increases, the discharge amount of the piezoelectric pump 1 increases, and when it decreases, it decreases.
Also, as the temperature of the fluid increases, the viscosity decreases and the discharge amount increases, and as the temperature of the fluid decreases, the viscosity increases and the discharge amount decreases. By automatically controlling the input voltage to a set value, the discharge amount becomes constant.
なお、流体の粘度を一定に保持したいときは、流体粘度
センサ５の出力の変動に応じて希釈液供給部８を制御す
る。Note that when it is desired to keep the viscosity of the fluid constant, the diluent supply section 8 is controlled according to fluctuations in the output of the fluid viscosity sensor 5.
また、流体の粘度によって吐出効率が変化するため、流
量粘度の変動を周波数調節部１０に入力して粘度に応じ
た周波数を設定値に自動制御することにより吐出量効率
を最大に維持させることになる。Furthermore, since the discharge efficiency changes depending on the viscosity of the fluid, the discharge efficiency can be maintained at the maximum by inputting the fluctuation of the flow rate viscosity into the frequency adjustment section 10 and automatically controlling the frequency according to the viscosity to a set value. Become.
このように本実施例においては制御対象を電力検出、流
体の粘度センサ４．５により検出してそれらを設定値に
自動制御するようにしたので、圧電ポンプ１の吐出量の
定量化と効率を一層向上させることができる。In this way, in this embodiment, the control target is detected by the electric power detection and the fluid viscosity sensor 4.5, and these are automatically controlled to set values, so that the discharge amount of the piezoelectric pump 1 can be quantified and the efficiency can be This can be further improved.
上述の説明より明らかなように本発明によれば、圧電ポ
ンプ１とその駆動装置３及び電力検出、粘度センサ４．
５等を用いて構成できるから、小形。As is clear from the above description, according to the present invention, the piezoelectric pump 1, its driving device 3, electric power detection, viscosity sensor 4.
Since it can be configured using 5 etc., it is small.
軽量、低消費エネルギー化を図ることができることは勿
論、圧電ポンプ１の圧電振動子２への入力電力、流体の
粘度をそれぞれ電力検出、粘度センサ４，５により検出
し、駆動回路３の電圧調節部６及び周波数調節部１０．
希釈液供給部８の希釈液調節部８Ａの少なくとも２つ以
上に、これらセンサ４．５の出力を適宜入力して設定値
と比較し、その偏差がなくなるように電圧調節部６２周
波数調節部１０．希釈液供給部８の希釈液調節部８Ａの
少なくとも２つ以上を自動制御することになるので、圧
電ポンプ１により定量の流体を高効率、高精度で圧送す
ることができる。In addition to being lightweight and reducing energy consumption, the power input to the piezoelectric vibrator 2 of the piezoelectric pump 1 and the viscosity of the fluid are detected by the power and viscosity sensors 4 and 5, respectively, and the voltage of the drive circuit 3 is adjusted. section 6 and frequency adjustment section 10.
The outputs of these sensors 4.5 are appropriately inputted to at least two or more of the diluent adjusting parts 8A of the diluting liquid supplying part 8 and compared with the set value, and the voltage adjusting part 62 and the frequency adjusting part 10 are adjusted so that the deviation is eliminated. ．． Since at least two or more of the diluent adjusting parts 8A of the diluting liquid supply part 8 are automatically controlled, a fixed amount of fluid can be pumped with high efficiency and precision by the piezoelectric pump 1.
本発明方法はチョコレート液、樹脂、接着剤。The method of the present invention uses chocolate liquid, resin, and adhesive.
印刷用インク、ケチャソ°プ、マヨネーズ、食用油。Printing ink, ketya soap, mayonnaise, cooking oil.
ねりからし、小麦を水で溶かした液等の各種液体の定量
供給装置や流体の粘度を一定に保つ装置等に実施できる
。It can be applied to equipment for quantitatively supplying various types of liquids such as mustard paste and liquids made by dissolving wheat in water, and equipment for keeping the viscosity of fluids constant.
図面は本発明方法を実施するための装置の一例を示す構
成説明図である。The drawing is a configuration explanatory diagram showing an example of an apparatus for carrying out the method of the present invention.
Claims (1)
印加して圧電ポンプ１を駆動し流体を圧送する装置にお
いて、圧電ポンプ１の圧電振動子２の入力電力、流体の
粘度をそれぞれ電力検出、粘度センサ４、５により検出
し、前記駆動回路３の電圧調節部６及び周波数調節部１
０、流体の粘度を低下させる希釈液供給部８の希釈液調
節部８Ａの少なくとも２つ以上に、前記センサ４、５の
出力を適宜入力して設定値と比較し、それらの偏差がな
くなるように電圧調節部６、周波数調節部１０、希釈液
供給部８の希釈液調節部８Ａの少なくとも２つ以上を自
動制御せしめるようにした流体の定量圧送方法。In a device that drives the piezoelectric pump 1 and pumps fluid by applying the AC output of the drive circuit 3 to the piezoelectric vibrator 2 of the piezoelectric pump 1, the input power of the piezoelectric vibrator 2 of the piezoelectric pump 1 and the viscosity of the fluid are respectively expressed as electric power. Detection is performed by the viscosity sensors 4 and 5, and the voltage adjustment section 6 and frequency adjustment section 1 of the drive circuit 3
0. The outputs of the sensors 4 and 5 are appropriately inputted to at least two or more of the diluent adjusting parts 8A of the diluting liquid supply part 8 that lowers the viscosity of the fluid, and the outputs of the sensors 4 and 5 are compared with the set values, so that the deviation between them is eliminated. A method for quantitatively pumping a fluid, in which at least two or more of a voltage adjustment section 6, a frequency adjustment section 10, and a diluent adjustment section 8A of a diluent supply section 8 are automatically controlled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6986489A JPH02248671A (en) | 1989-03-20 | 1989-03-20 | Quantitative force feed method of fluid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6986489A JPH02248671A (en) | 1989-03-20 | 1989-03-20 | Quantitative force feed method of fluid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02248671A true JPH02248671A (en) | 1990-10-04 |
Family
ID=13415092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6986489A Pending JPH02248671A (en) | 1989-03-20 | 1989-03-20 | Quantitative force feed method of fluid |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02248671A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04237594A (en) * | 1991-01-23 | 1992-08-26 | Honda Motor Co Ltd | Electrode blank material and production thereof |
| JPH04103274U (en) * | 1991-01-23 | 1992-09-07 | 三菱化成株式会社 | piezoelectric pump |
| JP2004060632A (en) * | 2002-06-03 | 2004-02-26 | Seiko Epson Corp | pump |
| US7267043B2 (en) | 2004-12-30 | 2007-09-11 | Adaptivenergy, Llc | Actuators with diaphragm and methods of operating same |
| US7287965B2 (en) | 2004-04-02 | 2007-10-30 | Adaptiv Energy Llc | Piezoelectric devices and methods and circuits for driving same |
| US7290993B2 (en) | 2004-04-02 | 2007-11-06 | Adaptivenergy Llc | Piezoelectric devices and methods and circuits for driving same |
| US7312554B2 (en) * | 2004-04-02 | 2007-12-25 | Adaptivenergy, Llc | Piezoelectric devices and methods and circuits for driving same |
| JP2008064096A (en) * | 2006-09-04 | 2008-03-21 | Bran & Luebbe Gmbh | Pump device |
| US7409902B2 (en) | 2004-12-30 | 2008-08-12 | Adaptivenergy, Llc. | Actuators with connected diaphragms |
| JP2009133321A (en) * | 2002-06-03 | 2009-06-18 | Seiko Epson Corp | pump |
| JP2017121474A (en) * | 2015-12-15 | 2017-07-13 | シュタイナー・アーゲー・ウェギス | Method and device for forming milk foam |
| WO2025134809A1 (en) * | 2023-12-21 | 2025-06-26 | 株式会社村田製作所 | Fluid control device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62186077A (en) * | 1986-02-10 | 1987-08-14 | Misuzu Erii:Kk | Driving method for piezoelectric pump |
-
1989
- 1989-03-20 JP JP6986489A patent/JPH02248671A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62186077A (en) * | 1986-02-10 | 1987-08-14 | Misuzu Erii:Kk | Driving method for piezoelectric pump |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04103274U (en) * | 1991-01-23 | 1992-09-07 | 三菱化成株式会社 | piezoelectric pump |
| JPH04237594A (en) * | 1991-01-23 | 1992-08-26 | Honda Motor Co Ltd | Electrode blank material and production thereof |
| JP2009133321A (en) * | 2002-06-03 | 2009-06-18 | Seiko Epson Corp | pump |
| JP2004060632A (en) * | 2002-06-03 | 2004-02-26 | Seiko Epson Corp | pump |
| US7287965B2 (en) | 2004-04-02 | 2007-10-30 | Adaptiv Energy Llc | Piezoelectric devices and methods and circuits for driving same |
| US7290993B2 (en) | 2004-04-02 | 2007-11-06 | Adaptivenergy Llc | Piezoelectric devices and methods and circuits for driving same |
| US7312554B2 (en) * | 2004-04-02 | 2007-12-25 | Adaptivenergy, Llc | Piezoelectric devices and methods and circuits for driving same |
| US7317274B2 (en) | 2004-04-02 | 2008-01-08 | Adaptivenergy, Llc. | Piezoelectric devices and methods and circuits for driving same |
| US7969064B2 (en) | 2004-04-02 | 2011-06-28 | Par Technologies, Llc. | Piezoelectric devices and methods and circuits for driving same |
| US7267043B2 (en) | 2004-12-30 | 2007-09-11 | Adaptivenergy, Llc | Actuators with diaphragm and methods of operating same |
| US7409902B2 (en) | 2004-12-30 | 2008-08-12 | Adaptivenergy, Llc. | Actuators with connected diaphragms |
| JP2008064096A (en) * | 2006-09-04 | 2008-03-21 | Bran & Luebbe Gmbh | Pump device |
| US8360750B2 (en) | 2006-09-04 | 2013-01-29 | Bran+Luebbe Gmbh | Pump device |
| JP2017121474A (en) * | 2015-12-15 | 2017-07-13 | シュタイナー・アーゲー・ウェギス | Method and device for forming milk foam |
| WO2025134809A1 (en) * | 2023-12-21 | 2025-06-26 | 株式会社村田製作所 | Fluid control device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101583796B (en) | Multistage pump and method for forming the same | |
| GB2094514A (en) | Variable speed reciprocable pumping apparatus | |
| JPS6343594B2 (en) | ||
| US11639714B2 (en) | Pump device | |
| CN104696706A (en) | Micro fluid flow adjusting device based on air pressure drive | |
| JPS62186077A (en) | Driving method for piezoelectric pump | |
| CN105952713A (en) | Hydraulic cylinder testing system and method | |
| CN111734555A (en) | Intelligent adjustment delivery system and method for rocket engine | |
| US20090053074A1 (en) | Positive displacement pump and method of use thereof | |
| US4566858A (en) | Pulsation-free volumetric pump | |
| JP6137780B2 (en) | Fluid supply device | |
| US20180080442A1 (en) | Displacement pump and control system | |
| JPH02293040A (en) | Quantitatively force-feeding method for fluid | |
| CN109899328B (en) | Piezoelectric driving type hydraulic motor | |
| TWI405905B (en) | System and method for position control of a mechanical piston in a pump | |
| CN114483553B (en) | Compressor system with frequency modulation control and frequency modulation control method thereof | |
| KR20140127168A (en) | Delay-minimized detection of an auxiliary control variable | |
| CN212155072U (en) | Micro pump with stable and adjustable flow | |
| US11692541B2 (en) | Electric motor pump system and method | |
| SU1733700A1 (en) | Control device for controllable electric drive operated pump | |
| JPH02112678A (en) | Controller for piezoelectric pump | |
| CN116428237B (en) | A voltage stabilization system | |
| CN101356373A (en) | System and method for position control of a mechanical piston in a pump | |
| EP4423394B1 (en) | Apparatus for controlling positive and negative pressure or flow in a fluidic system | |
| US20240369082A1 (en) | Controlling a hydraulic power unit for material testing |