JPH0225152U - - Google Patents
Info
- Publication number
- JPH0225152U JPH0225152U JP10430788U JP10430788U JPH0225152U JP H0225152 U JPH0225152 U JP H0225152U JP 10430788 U JP10430788 U JP 10430788U JP 10430788 U JP10430788 U JP 10430788U JP H0225152 U JPH0225152 U JP H0225152U
- Authority
- JP
- Japan
- Prior art keywords
- light source
- light
- slit
- cartridge
- emitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005855 radiation Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
Landscapes
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Description
第１図はこの考案の一実施例の分解斜視図、第
２図はこの実施例の光源部の断面図、第３図は従
来の露光装置の構成を示す断面図、第４図はその
光源部の拡大断面図である。
１……露光装置、２……露光装置の外囲器、４
……光源部、５……フイルタ、６……補正レンズ
、４０……光源、４１……スリツト、４２……ガ
ラス板、４４……ロツクリング、４５……カート
リツジ、４５ａ……凹部、４５ｂ……透孔、４６
……挿入孔、４６ａ……ガイドレール、４８……
外囲器、４９……Ｏリング、５０……取付ねじ。
なお、各図中、同一符号はそれぞれ同一、または
相当部分を示す。
Fig. 1 is an exploded perspective view of an embodiment of this invention, Fig. 2 is a sectional view of the light source section of this embodiment, Fig. 3 is a sectional view showing the configuration of a conventional exposure apparatus, and Fig. 4 is its light source. FIG. 1...Exposure device, 2...Exposure device envelope, 4
. . . Light source section, 5 . . . Filter, 6 . . . Correction lens, 40 . Through hole, 46
...Insertion hole, 46a...Guide rail, 48...
Envelope, 49...O ring, 50...Mounting screw.
Note that in each figure, the same reference numerals indicate the same or corresponding parts.
Claims (1)
がり範囲を決定するスリツトとを有する光源部と
、この光源部から放射される光の光量分布を補正
するフイルタと、この放射光の放射角度を補正す
る補正板とを備えた露光装置において、上記スリ
ツトが位置決めして装着されるカートリツジと、
このカートリツジを上記光源部内に挿入して固定
する着脱手段とを備え、上記固定されたカートリ
ツジに装着されているスリツトが上記光源に対し
て所定の位置に保持されるように構成してなるこ
とを特徴とする露光装置。 A light source section that has a light source and a slit that determines the amount and spread range of light emitted from this light source, a filter that corrects the light amount distribution of light emitted from this light source section, and corrects the radiation angle of this emitted light. In an exposure apparatus equipped with a correction plate, a cartridge to which the slit is positioned and mounted;
and a detachable means for inserting and fixing the cartridge into the light source section, and configured such that the slit attached to the fixed cartridge is held at a predetermined position with respect to the light source. Characteristic exposure equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10430788U JPH0628770Y2 (en) | 1988-08-06 | 1988-08-06 | Exposure equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10430788U JPH0628770Y2 (en) | 1988-08-06 | 1988-08-06 | Exposure equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0225152U true JPH0225152U (en) | 1990-02-19 |
| JPH0628770Y2 JPH0628770Y2 (en) | 1994-08-03 |
Family
ID=31335908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10430788U Expired - Lifetime JPH0628770Y2 (en) | 1988-08-06 | 1988-08-06 | Exposure equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0628770Y2 (en) |
-
1988
- 1988-08-06 JP JP10430788U patent/JPH0628770Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0628770Y2 (en) | 1994-08-03 |
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