JPH02260219A - Metallic thin film type magnetic recording medium - Google Patents

Metallic thin film type magnetic recording medium

Info

Publication number
JPH02260219A
JPH02260219A JP8049789A JP8049789A JPH02260219A JP H02260219 A JPH02260219 A JP H02260219A JP 8049789 A JP8049789 A JP 8049789A JP 8049789 A JP8049789 A JP 8049789A JP H02260219 A JPH02260219 A JP H02260219A
Authority
JP
Japan
Prior art keywords
thin film
film magnetic
magnetic layer
metal thin
metallic thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8049789A
Other languages
Japanese (ja)
Inventor
Kenichi Yoda
余田 賢一
Tadashi Yasunaga
正 安永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP8049789A priority Critical patent/JPH02260219A/en
Publication of JPH02260219A publication Critical patent/JPH02260219A/en
Pending legal-status Critical Current

Links

Landscapes

  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To improve traveling durability and still durability by incorporating a lubricant into the narrow pores of a metallic thin-film magnetic layer which has the pore volume as large as 0.07 to 0.20ml per 1 gram metallic thin-film magnetic layer. CONSTITUTION:A lower layer film consisting of metals, such as Sn, Bi, Al, and Be, having the m. p. lower than the m. p. of the metal elements forming the metallic thin-film magnetic layer or the oxide, nitride, etc., thereof is formed by a vacuum film forming method on a nonmagnetic base before the formation of the metallic thin-film magnetic layer thereon and the metallic thin-film magnetic layer is formed on this layer. Since the pore volume in the metallic thin- film magnetic layer is as large as 0.07 to 0.2ml, the adequate lubricant is supplied to the metallic thin-film magnetic layer by holding the lubricant in the pores; in addition, the lubricant is supplied to the surface of the metallic thin- film magnetic layer over a long period of time. The traveling durability and the still characteristics are improved in this way.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、金属薄膜磁性層を有する磁気記録媒体に関し
、特にスチル耐久性に優れたビデオテープとして最適な
磁気記録媒体に間する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a magnetic recording medium having a metal thin film magnetic layer, and particularly to a magnetic recording medium suitable for use as a videotape with excellent still durability.

[従来技術及びその問題点] 従来、磁気記録媒体としては、非磁性支持体上に磁性粉
体、結合剤樹脂、添加剤等よりなる磁性塗布液を塗布、
乾燥せしめて磁性層を形成したいわゆる塗布型磁気記録
媒体が使用されてきた。
[Prior art and its problems] Conventionally, magnetic recording media have been produced by coating a magnetic coating liquid consisting of magnetic powder, binder resin, additives, etc. on a non-magnetic support.
So-called coated magnetic recording media in which a magnetic layer is formed by drying have been used.

他方、高密度磁気記録への要求は、年々加速度的に高ま
り短波長の記録波長領域でも、高出力が得られる。高エ
ネルギー型の磁気記録媒体が注目され、技術の主体がこ
の種の磁気記録媒体に移りつつある。
On the other hand, the demand for high-density magnetic recording is increasing year by year, and high output can be obtained even in the short recording wavelength region. High-energy magnetic recording media are attracting attention, and the focus of technology is shifting to this type of magnetic recording media.

そして、高エネルギー型の磁気記録媒体の開発動向とし
ては、■前記塗布型磁気記録媒体にあっては、磁性粉体
として磁気エネルギーの大きい金属磁性粉体を使用し、
かつ磁性層表面の平滑性を高めたいわゆるメタルテープ
を使用する方向、■磁性層中に結合剤樹脂を使用しない
金属薄膜を磁性層とする蒸着テープ等のいわゆる金属薄
膜型磁気記録媒体を使用する方向、に向かっている。
Development trends in high-energy magnetic recording media include: (1) In the coating-type magnetic recording media, metal magnetic powder with high magnetic energy is used as the magnetic powder;
and the use of so-called metal tapes with improved surface smoothness of the magnetic layer; ■ Use of so-called metal thin-film magnetic recording media such as vapor-deposited tapes whose magnetic layer is a metal thin film that does not use binder resin in the magnetic layer; heading in the direction.

本発明は、前記■のメタルテープは、従来の塗布型媒体
の製造装置やノウハウの多くを利用できるという利点は
あるが、記録波長が0.5μm以下、ヘッドギャップが
0.25μm以下の高記録密度領域では、もはや限界で
ある。
The metal tape of the present invention has the advantage of being able to utilize much of the manufacturing equipment and know-how of conventional coated media. In the density area, there is no limit.

それに対し、前記■の金属薄膜型磁気記録媒体は、ハイ
バンド8mm規格において、前記メタルテープよりも6
dB以上の高出力を得ることができ、今後、更に高記録
密度化を進める上で極めて有利といえる。
On the other hand, the metal thin film type magnetic recording medium of item ① is 6 mm higher than the metal tape in the high band 8 mm standard.
It is possible to obtain a high output of dB or more, and it can be said to be extremely advantageous in promoting even higher recording densities in the future.

前記金属薄膜型磁気記録媒体としては、磁性層を真空蒸
着法で成膜するいわゆる蒸着テープが一般的であり、非
磁性支持体上に、CoN io系の金属薄膜磁性層を設
けたものであり、極めて良好な磁気特性が得られる。
The metal thin film type magnetic recording medium is generally a so-called evaporation tape in which a magnetic layer is formed by vacuum evaporation, in which a CoN io-based metal thin film magnetic layer is provided on a nonmagnetic support. , extremely good magnetic properties can be obtained.

前記金属薄膜磁性層ゆ媒体の問題点に、スチル耐久性が
良くないということがある。
A problem with the metal thin film magnetic layer media is that the still durability is not good.

この問題点を改善するために、例えば、SiOx、T 
i Ox、T i Nx等の無機化合物の保護層を金属
薄膜磁性層上に設ける方法が数多く提案されている。と
ころが、スチル耐久性の改良に充分な効果をもたらすた
めには、保護層をかなり厚くせねばならず、スペーシン
グロスによる出力の低下が避けられなかった。
In order to improve this problem, for example, SiOx, T
Many methods have been proposed for providing a protective layer of an inorganic compound such as iOx or TiNx on a metal thin film magnetic layer. However, in order to have a sufficient effect on still durability, the protective layer must be made considerably thicker, and a decrease in output due to spacing loss is unavoidable.

また、金属薄膜磁性層上に潤滑剤の層を設ける方法も提
案されている。この方法は、金属薄膜磁性層と磁気ヘッ
ド間の摩擦力を低下させるのには有効であり、特にフッ
素系の潤滑剤は優れている。
A method of providing a lubricant layer on the metal thin film magnetic layer has also been proposed. This method is effective in reducing the frictional force between the metal thin film magnetic layer and the magnetic head, and fluorine-based lubricants are particularly effective.

しかしながら、スチルモードで繰り返し再生を続けてい
るうちに、潤滑剤が金属薄膜磁性層上から取れてしまい
、特に低湿度下では効果が持続しないという問題があっ
た。
However, as reproduction is continued repeatedly in the still mode, the lubricant comes off from the thin metal film magnetic layer, resulting in a problem that the effect does not last, especially under low humidity.

更に、特開昭56−3428号公報に開示されているよ
うに、金属薄膜磁性層を構成している柱状粒子の間隙に
潤滑剤を含ませる技術もある。
Furthermore, as disclosed in Japanese Unexamined Patent Publication No. 56-3428, there is a technique in which a lubricant is contained in the gaps between columnar particles constituting a metal thin film magnetic layer.

しかしながら、この技術においても、効果の持続という
点では、いまだ不十分であった。
However, even with this technique, the effect was still insufficient.

[発明が解決しようとする問題点] 本発明は、前記の従来技術の問題点に鑑みなされたもの
であり、走行耐久性に優れかつスチル耐久性が良好な金
属薄膜型磁気記録媒体を提供することを目的としている
[Problems to be Solved by the Invention] The present invention has been made in view of the above-mentioned problems of the prior art, and provides a metal thin film magnetic recording medium that has excellent running durability and still durability. The purpose is to

[問題点を解決する手段] 前記本発明の目的は、非磁性支持体上に金属薄膜磁性層
を有する金属薄膜型磁気記録媒体において、該金属薄膜
磁性層中にある細孔容積が前記金属薄膜磁性F’!1グ
ラム当たり0.07乃至0.20mlでありかつ細孔内
に潤滑剤を含有していることを特徴とする金属薄膜型磁
気記録媒体によって達成される。
[Means for Solving the Problems] An object of the present invention is to provide a metal thin film magnetic recording medium having a metal thin film magnetic layer on a non-magnetic support, in which the pore volume in the metal thin film magnetic layer is smaller than the metal thin film magnetic layer. Magnetic F'! This is achieved by a metal thin film type magnetic recording medium characterized by having a lubricant content of 0.07 to 0.20 ml per gram and containing a lubricant in its pores.

本発明の金属薄膜型磁気記録媒体は、その金属薄膜磁性
層中の細孔容積が0,07乃至0.2mlと従来の金属
薄膜磁性層のそれよりも大きいので、潤滑剤を細孔内に
保持することにより、金属薄膜磁性層に適度の量の潤滑
剤を供給するとと共に長時間に渡り金属薄膜磁性層表面
に潤滑剤が供給されるので、走行耐久性に優れ、スチル
特性も良好であるという特徴を有する。
In the metal thin film magnetic recording medium of the present invention, the pore volume in the metal thin film magnetic layer is 0.07 to 0.2 ml, which is larger than that of the conventional metal thin film magnetic layer. By holding the metal thin film magnetic layer, an appropriate amount of lubricant is supplied to the metal thin film magnetic layer, and the lubricant is also supplied to the surface of the metal thin film magnetic layer for a long period of time, resulting in excellent running durability and good still characteristics. It has the following characteristics.

本発明の金属薄膜磁性層の細孔容積は、金属薄膜磁性N
1グラム当たり0.07乃至0.20mlであり、望ま
しくは、0.09乃至0.20mlである。
The pore volume of the metal thin film magnetic layer of the present invention is the metal thin film magnetic N
The amount is 0.07 to 0.20 ml per gram, preferably 0.09 to 0.20 ml.

前記細孔容積が余り大きくなると、金属薄膜磁性層の機
械的な強度が低下し、非磁性支持体との密着も不良とな
る。
If the pore volume becomes too large, the mechanical strength of the metal thin film magnetic layer decreases and the adhesion to the nonmagnetic support becomes poor.

また余り小さくなると、潤滑剤の供給が長時間持続しな
くなり、スチル耐久性も長時間保持できなくなる。
Moreover, if it becomes too small, the supply of lubricant will not last for a long time, and the still durability will not be maintained for a long time.

本発明の金属薄膜型磁気記録媒体の前記金属薄膜磁性層
の細孔容積を金属薄膜磁性N1グラム当たり0.07乃
至0.20mlとするための方法としては、様々な方法
が考えられる。
Various methods can be considered for adjusting the pore volume of the metal thin film magnetic layer of the metal thin film magnetic recording medium of the present invention to 0.07 to 0.20 ml per gram of metal thin film magnetic N.

中でも、最も効果的な方法として、非磁性支持体上に金
属N!I磁性層を形成する前に前記金属薄膜磁性層を形
成する金属元素より融点の低い例えば、S n I B
 s p A l p B e等の金属もしくはその酸
化物、窒化物等の下層膜を真空蒸着法等の真空成膜法に
より形成し、その上に金属薄膜磁性層を形成する方法を
本発明者等は見い出した。
Among them, the most effective method is to deposit metal N! on a non-magnetic support. Before forming the I magnetic layer, a metal element having a lower melting point than the metal element forming the metal thin film magnetic layer, for example, S n I B
The present inventor has developed a method of forming a lower layer film of a metal such as spAlpBe or its oxide or nitride by a vacuum film forming method such as a vacuum evaporation method, and then forming a metal thin film magnetic layer thereon. etc. were found.

この方法によれば、前記下層膜の形成単位の大きさによ
ってその上に形成される本発明の金属薄膜磁性層の細孔
容積がコント、ロールできる。
According to this method, the pore volume of the metal thin film magnetic layer of the present invention formed thereon can be controlled by the size of the forming unit of the lower layer film.

前記下層膜としては、金属よりも反応性蒸着法等で得ら
れるその酸化物、窒化物、等の方が非磁性支持体との密
着性、耐腐食性の面で好ましい。
For the underlayer film, oxides, nitrides, etc. of metals obtained by reactive vapor deposition are more preferable than metals in terms of adhesion to the nonmagnetic support and corrosion resistance.

前記下地層の膜厚、冷却キャンの温度等の成膜条件を変
えることによって、その上に形成される金属薄膜磁性層
の細孔容積がコン)D−ルできることが分かった。
It has been found that by changing the film forming conditions such as the thickness of the underlayer and the temperature of the cooling can, the pore volume of the thin metal magnetic layer formed thereon can be controlled.

金属薄膜磁性層の細孔容積を金属薄膜磁性層1グラム当
たり0.07乃至0.20mlとするための他の方法と
しては、金属薄膜磁性層を一定強度以上のグロー放電に
曝す方法、例えば、100mm幅の金属薄膜型磁気記録
媒体であれば1000V、80mA以上のAr、02の
グローに10秒以上曝す等の方法がある。
Another method for adjusting the pore volume of the metal thin film magnetic layer to 0.07 to 0.20 ml per gram of the metal thin film magnetic layer is to expose the metal thin film magnetic layer to a glow discharge of a certain intensity or higher, for example, For a metal thin film magnetic recording medium with a width of 100 mm, there are methods such as exposing it to Ar and 02 glow of 1000 V and 80 mA or more for 10 seconds or more.

本発明の金属薄膜型磁気記録媒体の金属薄膜磁性層の細
孔容積は、種々の方法で求めることができる。窒素ガス
吸着法により得られる吸着脱離等混線から求める方法が
最も一般的である。
The pore volume of the metal thin film magnetic layer of the metal thin film magnetic recording medium of the present invention can be determined by various methods. The most common method is to obtain it from the adsorption/desorption equidistant crosstalk obtained by the nitrogen gas adsorption method.

本発明の金属薄膜型磁気記録媒体の金属薄膜磁性層中に
含有される潤滑剤としては、従来より知られている数多
くの化合物が使用でき特に制限はない。
As the lubricant contained in the metal thin film magnetic layer of the metal thin film magnetic recording medium of the present invention, many conventionally known compounds can be used and there are no particular limitations.

例えば、オレイン酸、ミリスチン酸、ステアリン酸等の
炭素数12乃至18個の脂肪酸もしくはその金属塩、ま
たはそのエステル、これら脂肪酸のフッ素置換化合物等
がある。
Examples include fatty acids having 12 to 18 carbon atoms such as oleic acid, myristic acid, and stearic acid, metal salts thereof, or esters thereof, and fluorine-substituted compounds of these fatty acids.

前記潤滑剤の金属薄膜磁性層中の含有量としては、3乃
至30mg/m  、望ましくは5〜15mg/m  
である。含有量があまり多くなると、VTR内で走行さ
せているうちに、潤滑剤の吹きだまりができて、それが
出力低下、走行不安定を引き起こすので好ましくない。
The content of the lubricant in the metal thin film magnetic layer is 3 to 30 mg/m, preferably 5 to 15 mg/m.
It is. If the content is too high, a droplet of lubricant will form during running in a VTR, which will cause a decrease in output and unstable running, which is not preferable.

また余り少ないと、磁気ヘッドと金属薄膜磁性層の間に
焼き付きが生じて、スチル耐久性が低下する。
On the other hand, if it is too small, burn-in occurs between the magnetic head and the metal thin film magnetic layer, reducing still durability.

潤滑剤を金属薄膜磁性層に含有させる方法には、潤滑剤
の溶液を金属薄膜磁性層上に塗布乾燥する方法、潤滑剤
を真空蒸着法により金属薄膜磁性層上に付着した後、パ
フ処理する等の種々の方法があり、本発明において特に
制限はるい。
Methods for incorporating a lubricant into a metal thin film magnetic layer include a method in which a lubricant solution is applied and dried on the metal thin film magnetic layer, and a method in which the lubricant is deposited on the metal thin film magnetic layer by a vacuum evaporation method, followed by a puff treatment. There are various methods such as, and there are no particular limitations in the present invention.

本発明の前記金属薄膜磁性層は、コバル) (CO)を
主成分として含み、Coの含有量としては50乃至10
0重量%である。
The metal thin film magnetic layer of the present invention contains cobal (CO) as a main component, and the Co content is 50 to 10
It is 0% by weight.

例えば、純Co、CoNi、CoCr、CoFe、Co
FeNi、CoNiCr、CoPr、CoNiPr、C
oPt、CoSm、CoTi、CoNlTi、CoCu
、CoNiCu等がある。
For example, pure Co, CoNi, CoCr, CoFe, Co
FeNi, CoNiCr, CoPr, CoNiPr, C
oPt, CoSm, CoTi, CoNlTi, CoCu
, CoNiCu, etc.

前記金属薄膜磁性層中に上記の金属元素に加えて、0、
N、C等の軽元素を含有させて金属薄膜磁性層の特性を
改良することもできる。特に、酸素を含ませることで、
前記金属薄膜磁性層を強靭にし、かつ静磁気特性特に抗
磁力磁力を高めることができる。
In addition to the above metal elements in the metal thin film magnetic layer, 0,
It is also possible to improve the properties of the metal thin film magnetic layer by incorporating light elements such as N and C. In particular, by including oxygen,
The metal thin film magnetic layer can be made tougher and the magnetostatic properties, especially the coercive magnetic force, can be improved.

本発明の前記金属薄膜磁性層の膜厚は、o、。The thickness of the metal thin film magnetic layer of the present invention is o.

2乃至2μmであり、望ましくは0.05乃至0゜5μ
mである。この範囲より膜厚が薄いと十分な再生出力が
得られない。また、この範囲より厚くなると磁気記録媒
体のカーリングが大きくなったり、金属薄膜磁性層にひ
び割れが発生したりするので問題である。
2 to 2 μm, preferably 0.05 to 0.5 μm
It is m. If the film thickness is thinner than this range, sufficient reproduction output cannot be obtained. Further, if the thickness exceeds this range, curling of the magnetic recording medium becomes large and cracks occur in the metal thin film magnetic layer, which is a problem.

本発明の金属薄膜型磁気記録媒体に使用される非磁性支
持体としては、ポリエチレンテレフタレート、ポリイミ
ド、ポリアミド、ポリ塩化ビニル、三酢酸セルロース、
ポリカーボネート、ポリエチレンナフタレート等のプラ
スチック材料等がある。
Examples of the nonmagnetic support used in the metal thin film magnetic recording medium of the present invention include polyethylene terephthalate, polyimide, polyamide, polyvinyl chloride, cellulose triacetate,
Examples include plastic materials such as polycarbonate and polyethylene naphthalate.

本発明において、前記金属薄膜磁性層は、非磁性支持体
上に直接形成しても良いし、また前記非磁性支持体上に
設けられた下地層を介して形成してもよい。
In the present invention, the metal thin film magnetic layer may be formed directly on the nonmagnetic support, or may be formed via an underlayer provided on the nonmagnetic support.

前記下地層は、金属薄膜型磁気記録媒体の走行耐久性を
さらに改良したり、ヘッド目詰まり等の問題を軽減し、
また磁性層の表面の形状をコントロールするのに効果的
である。
The underlayer further improves the running durability of the metal thin film magnetic recording medium, reduces problems such as head clogging,
It is also effective in controlling the surface shape of the magnetic layer.

前記下地層としては、無機、有機複合の形の層で前記非
磁性支持体上に形成される。
The underlayer is an inorganic/organic composite layer formed on the nonmagnetic support.

例えば、Al103 、S i02 、MgO,T i
02、ZnO,Fe203 、CdO,NiO等の金属
酸化物、CacO3,BacO3、CocO3等の炭酸
塩、Au、Ag、Fe、Ni、Co等の金属の直径0.
005乃至0.1μmの微粒子をポリエチレンテレフタ
レート、ポリブチレンテレフタレート、等のポリエステ
ルとジクロール酢酸、オルソクロルフェノール、四塩化
エタン混合液等の有機溶剤との混合液を前記非磁性支持
体上に塗布することにより形成される。
For example, Al103, S i02 , MgO, T i
02, metal oxides such as ZnO, Fe203, CdO, NiO, carbonates such as CacO3, BacO3, CocO3, metals such as Au, Ag, Fe, Ni, Co, etc.
Applying fine particles of 0.005 to 0.1 μm onto the non-magnetic support with a mixture of a polyester such as polyethylene terephthalate or polybutylene terephthalate and an organic solvent such as dichloroacetic acid, orthochlorophenol, or tetrachlorethane mixture. formed by.

そして、前記下地層の上に前記金属薄膜磁性層を形成す
ることにより、磁性層表面に微小突起なmm  であり
、その存在により金属薄膜型磁気記録媒体の走行耐久性
が更に改良できる。
By forming the metal thin film magnetic layer on the underlayer, there are minute protrusions on the surface of the magnetic layer, and their presence can further improve the running durability of the metal thin film magnetic recording medium.

さらに、本発明の金属薄膜型磁気記録媒体においては、
金属薄膜磁性層を設けた面とは反対の面に走行性を改良
する目的で、バック層を設けることもできる。このバッ
ク層としては、CaCO3゜カーボン微粒子等を結合剤
樹脂と共に混合分散した塗布液を塗布乾燥した塗膜が用
いられる。
Furthermore, in the metal thin film magnetic recording medium of the present invention,
A back layer may be provided on the surface opposite to the surface on which the metal thin film magnetic layer is provided for the purpose of improving running properties. As this back layer, a coating film obtained by coating and drying a coating liquid in which CaCO3° carbon fine particles and the like are mixed and dispersed together with a binder resin is used.

[発明の効果] 金属薄膜磁性層中の細孔容積を前記金属薄膜磁性層1グ
ラム当たり0.07乃至0.20mlと比較的大きくし
かつ潤滑剤を含有させることにより、走行耐久性に優れ
、かつスチル耐久性も良好な金属薄膜型磁気記録媒体を
得ることができる。
[Effects of the Invention] By making the pore volume in the metal thin film magnetic layer relatively large at 0.07 to 0.20 ml per gram of the metal thin film magnetic layer and containing a lubricant, excellent running durability is achieved. Moreover, a metal thin film type magnetic recording medium having good still durability can be obtained.

以上述べた本発明の金属薄膜型磁気記録媒体の新規な効
果を、以下の実施例及び比較例によってさらに具体的に
説明する。
The novel effects of the metal thin film magnetic recording medium of the present invention described above will be explained in more detail with reference to the following Examples and Comparative Examples.

[実施例−1コ 第1図にその要部の概略図を示した真空蒸着装置により
、金属薄膜型磁気記録媒体の試料を作成した。
[Example 1] A sample of a metal thin film type magnetic recording medium was prepared using a vacuum evaporation apparatus whose main parts are schematically shown in FIG.

第1蒸着室1内の送り出しロール2より厚さ10μm5
幅100mmのポリエチレンテレフタレートの非磁性支
持体3を引き出し、搬送速度20m/分で搬送ロール4
を経て第1冷却キヤン5に沿わせ、搬送ロール6.7に
よって、第2蒸着室8に搬送した。
Thickness 10μm5 from the delivery roll 2 in the first vapor deposition chamber 1
A non-magnetic support 3 made of polyethylene terephthalate with a width of 100 mm is pulled out, and the transport roll 4 is pulled out at a transport speed of 20 m/min.
The film was then conveyed along the first cooling can 5 to the second vapor deposition chamber 8 by conveyor rolls 6.7.

前記第1冷却キャン内部に、冷温媒を通して冷却キャン
の表面の温度を50℃とした。
The temperature of the surface of the cooling can was set to 50° C. by passing a cold/hot medium into the first cooling can.

真空ポンプに接続している排気口9及び10より前記第
1蒸着室1及び前記第2蒸着室8の真空度がlXl0 
 Torrに達するまで排気を行った。
The degree of vacuum in the first vapor deposition chamber 1 and the second vapor deposition chamber 8 is 1Xl0 from the exhaust ports 9 and 10 connected to the vacuum pump.
Evacuation was performed until Torr was reached.

しかる後、前記第1蒸着室1内に設けられた原料ルツボ
11内に3Nの純度の5n12を入れて抵抗加熱法で加
熱し、一方、遮蔽板13と前記第1冷却キヤン5の間に
設けられたガス導入口14より50ml/分の速度で酸
素ガスを導入し、前記遮蔽板140開口部からSnの蒸
気流15を前記第1冷却キヤン5の上の前記非磁性支持
体とに入射角90乃至50度(冷却ドラムの上に立てた
法線に対する角度)で蒸着して、下層膜として厚さ30
Aの5nOxの1膜を成膜した。
Thereafter, 5N12 with a purity of 3N was placed in the raw material crucible 11 provided in the first vapor deposition chamber 1 and heated by a resistance heating method. Oxygen gas is introduced from the gas inlet 14 at a rate of 50 ml/min, and the Sn vapor flow 15 is caused to enter the non-magnetic support on the first cooling can 5 at an incident angle from the opening of the shielding plate 140. Vapor deposition is carried out at an angle of 90 to 50 degrees (angle to the normal line on the cooling drum), and the thickness of the lower layer is 30 degrees.
One film of 5nOx of A was formed.

前記第2蒸着室8内の搬送ロール16を経て表面の温度
が5℃の第2冷却キヤン17上に、前記非磁性支持体3
を沿わせ、原料ルツボ18内のCo80Ni20合金1
9を電子ビーム加熱法により加熱蒸発せしめ磁性蒸気流
22を発生させると共に前記第2冷却キヤン17と防着
板20との間に設置されたガス導入口21より酸素ガス
を800mlZ分の速度で導入して、前記第2冷却キヤ
ン17上の前記非磁性支持体3上に、前記蒸気流22を
入射角90乃至35度を蒸着せしめ200OAの厚さの
金属薄膜磁性層を形成した。
The non-magnetic support 3 is passed through the transport roll 16 in the second vapor deposition chamber 8 and onto the second cooling can 17 whose surface temperature is 5°C.
Co80Ni20 alloy 1 in raw material crucible 18
9 is heated and evaporated by an electron beam heating method to generate a magnetic vapor flow 22, and at the same time, oxygen gas is introduced at a rate of 800 mlZ from a gas inlet 21 installed between the second cooling can 17 and the adhesion prevention plate 20. Then, the vapor flow 22 was deposited on the non-magnetic support 3 on the second cooling can 17 at an incident angle of 90 to 35 degrees to form a metal thin film magnetic layer having a thickness of 200 OA.

以上のようにして、下層膜及び金属薄膜磁性層を設けた
前記非磁性支持体3を巻き取りロール23に巻き取った
・ 次に、前記非磁性支持体3の金属薄膜磁性層が形成され
た面とは反対の面に、ポリウレタンとニトロセルロース
よりなる結合剤樹脂中に、カーボンブラックとアルミナ
を分散した組成物であるバックコート層を0.5μmの
厚さに塗布、乾燥して形成した。
As described above, the non-magnetic support 3 provided with the lower layer film and the metal thin film magnetic layer was wound up on the take-up roll 23.Next, the metal thin film magnetic layer of the non-magnetic support 3 was formed. On the opposite side, a back coat layer, which was a composition in which carbon black and alumina were dispersed in a binder resin made of polyurethane and nitrocellulose, was applied to a thickness of 0.5 μm and dried.

次いで、前記金属薄膜磁性層の表面に、オレイン酸とパ
ーフルオロカルボン酸との重量比でl;1の混合物を2
0mg/m2となるように溶液にして塗布して、金属薄
膜型磁気記録媒体の原反ロールを得た。
Next, a mixture of oleic acid and perfluorocarboxylic acid in a weight ratio of 1:1 was applied to the surface of the metal thin film magnetic layer.
A solution was applied at a concentration of 0 mg/m2 to obtain a roll of metal thin film type magnetic recording medium.

その原反ロールを、8mmの幅に裁断して8mmビデオ
用の金属薄膜型磁気記録媒体の試料を得た。
The original fabric roll was cut into a width of 8 mm to obtain a sample of a metal thin film type magnetic recording medium for an 8 mm video.

得られた金属薄膜型磁気記録媒体の試料の細孔容積を窒
素ガス吸着法によって求めた。
The pore volume of the sample of the obtained metal thin film magnetic recording medium was determined by a nitrogen gas adsorption method.

すなわち、測定機として米国カンタ−クロム社製のオー
トソーブ1 (Autosorb−1)を使用した。
That is, Autosorb-1 manufactured by Quanterchrome Co., Ltd. in the United States was used as a measuring device.

前記8mm幅の金属薄膜型磁気記録媒体の試料を約4m
ガラス棒に巻き取って、測定試料とし、キャリヤーガス
には、ヘリウムガスを使用し、窒素とヘリウムの混合ガ
スとして窒素ガス分圧(相対圧力)をOから1まで徐々
に上げてゆき吸着等混線を先ず求め、次いで窒素ガス分
圧(相対圧力)を1からOまで徐々に下げてゆき脱離曲
線を求めた。
A sample of the 8 mm wide metal thin film magnetic recording medium was placed about 4 m long.
The measurement sample is wound around a glass rod. Helium gas is used as the carrier gas, and the partial pressure (relative pressure) of the nitrogen gas is gradually increased from 0 to 1 as a mixture of nitrogen and helium. was first determined, and then the nitrogen gas partial pressure (relative pressure) was gradually lowered from 1 to 0 to determine the desorption curve.

全細孔容積は、細孔が液体窒素により充填されていると
仮定し、相対圧力1における窒素吸着量から求めた。
The total pore volume was determined from the amount of nitrogen adsorbed at a relative pressure of 1, assuming that the pores were filled with liquid nitrogen.

一方、金属薄膜磁性層の重量は、0.5Nの塩酸に2時
間漫せきにより金属薄膜磁性層を溶解除去して、溶解除
去前後の重量の差から求めた。
On the other hand, the weight of the metal thin film magnetic layer was determined by dissolving and removing the metal thin film magnetic layer by soaking it in 0.5N hydrochloric acid for 2 hours, and from the difference in weight before and after dissolution and removal.

一方、富士写真フィルム(株)8ミリビデオ用テープレ
コーダーFUJIX−8M6−AFを改造して、23℃
5%RH下におけるスチル特性を測定した。測定開始時
の出力値から3dB出力が低下した時間をもって、スチ
ル寿命とした。
On the other hand, an 8mm video tape recorder FUJIX-8M6-AF manufactured by Fuji Photo Film Co., Ltd. was modified to
Still characteristics under 5% RH were measured. The time at which the output decreased by 3 dB from the output value at the start of measurement was defined as the still life.

[実施例−2コ 前記第1蒸着室1内の前記冷却キャン5の表面温度を0
℃とした以外実施例−1と同一の条件で金属薄膜型磁気
記録媒体の試料を作成した。
[Example 2] The surface temperature of the cooling can 5 in the first vapor deposition chamber 1 is set to 0.
A sample of a metal thin film type magnetic recording medium was prepared under the same conditions as in Example 1 except that the temperature was changed to .degree.

[実施例−3] 前記第1蒸着室1内の前記冷却キャン5の表面温度を一
50℃とした以外実施例−1と同一の条件で金属薄膜型
磁気記録媒体の試料を作成した。
[Example 3] A sample of a metal thin film magnetic recording medium was prepared under the same conditions as in Example 1 except that the surface temperature of the cooling can 5 in the first vapor deposition chamber 1 was set to -50°C.

[比較例−11 前記第1蒸着室1内の前記冷却キャン5の表面温度を1
00℃とした以外実施例−1と同一の条件で金属薄膜型
磁気記録媒体の試料を作成した。
[Comparative Example-11 The surface temperature of the cooling can 5 in the first vapor deposition chamber 1 was set to 1
A sample of a metal thin film magnetic recording medium was prepared under the same conditions as in Example 1 except that the temperature was 00°C.

[比較例−2] 下層膜を形成しなかった以外は、実施例−1と同一の条
件で金属薄膜型磁気記録媒体の試料を作成した。
[Comparative Example-2] A sample of a metal thin film magnetic recording medium was prepared under the same conditions as in Example-1 except that no lower layer film was formed.

以上のようにして、得られた金属薄膜型磁気記録媒体の
試料の細孔容積及びスチル寿命の測定結果を第1表に示
す。
Table 1 shows the measurement results of the pore volume and still life of the sample of the metal thin film magnetic recording medium obtained as described above.

第1表 15、22 ・・・ 防着板 ・・・ 蒸気流Table 1 15, 22 ・・・ Anti-adhesion plate ...Steam flow

Claims (1)

【特許請求の範囲】[Claims] 非磁性支持体上に金属薄膜磁性層を有する金属薄膜型磁
気記録媒体において、該金属薄膜磁性層中の細孔容積が
前記金属薄膜磁性層1グラム当たり0.07乃至0.2
0mlでありかつ細孔内に潤滑剤を含有していることを
特徴とする金属薄膜型磁気記録媒体。
In a metal thin film magnetic recording medium having a metal thin film magnetic layer on a nonmagnetic support, the pore volume in the metal thin film magnetic layer is 0.07 to 0.2 per gram of the metal thin film magnetic layer.
1. A metal thin film type magnetic recording medium characterized in that the pores are 0 ml and contain a lubricant in its pores.
JP8049789A 1989-03-31 1989-03-31 Metallic thin film type magnetic recording medium Pending JPH02260219A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8049789A JPH02260219A (en) 1989-03-31 1989-03-31 Metallic thin film type magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8049789A JPH02260219A (en) 1989-03-31 1989-03-31 Metallic thin film type magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH02260219A true JPH02260219A (en) 1990-10-23

Family

ID=13719945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8049789A Pending JPH02260219A (en) 1989-03-31 1989-03-31 Metallic thin film type magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH02260219A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6222229A (en) * 1985-07-22 1987-01-30 Matsushita Electric Ind Co Ltd Magnetic recording medium

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6222229A (en) * 1985-07-22 1987-01-30 Matsushita Electric Ind Co Ltd Magnetic recording medium

Similar Documents

Publication Publication Date Title
US4702938A (en) Process for producing magnetic recording material
KR0133353B1 (en) Magnetic recording medium and manufacturing method thereof
US4801500A (en) Magnetic recording medium
KR940009728B1 (en) Magnetic recording media
JPH06150289A (en) Magnetic recording medium and its manufacture
JP2554277B2 (en) Magnetic recording media
JPH02260219A (en) Metallic thin film type magnetic recording medium
JPS6111936A (en) Manufacture of magnetic recording medium
JPS59201224A (en) Magnetic recording medium
JPH0685216B2 (en) Method of manufacturing magnetic recording medium
JPH01319119A (en) Magnetic recording medium
JP2605803B2 (en) Magnetic recording media
JPS62102414A (en) Magnetic recording medium
JPH01319120A (en) Magnetic recording medium
JP2003123241A (en) Magnetic recording medium and method of manufacturing the same
JP2794662B2 (en) Method for manufacturing perpendicular magnetic recording medium
JPH09153219A (en) Manufacturing method of magnetic recording medium
JPS62219223A (en) Metal thin film magnetic recording media
JPS61227222A (en) Magnetic recording medium
JPH0461413B2 (en)
JPH0237525A (en) Production of magnetic recording medium
JPH0341897B2 (en)
JPH061550B2 (en) Method of manufacturing magnetic recording medium
JPH05159267A (en) Magnetic recording medium and production of the medium
JPH09153220A (en) Method of manufacturing magnetic recording medium and magnetic recording medium manufactured thereby