JPH02263452A - Tray stocker - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a trace stocker for accommodating a tray on which a large number of packaged semiconductor elements are mounted.

(Prior art) Conventionally, when handling packaged semiconductor devices in the semiconductor manufacturing process, since there are a wide variety of semiconductor device packages, specialized processing equipment is required for each type of package, such as in the inspection process. IC of
A handler was needed. In recent years, when processing such packaged semiconductor devices, a large number of semiconductor devices, such as QFP, SOP, etc., are mounted on a tray in, for example, grid-like positions, and a single processing device processes all the semiconductor devices on the tray. Element Measurement 1 For example, tray-type transportation is used for inspection. In other words, the one-track type IC handler has 3
The tray is placed on an inspection table driven by a dimensional movement stage, and each semiconductor element on the tray is sequentially brought into contact with an inspection terminal such as a probe needle to perform inspection.

In order to automate processing, such single-tray type semiconductor processing equipment is configured such that a large number of trays are stored in advance in a trace stocker, and the trays are automatically transported one by one from this trace stocker for processing. ing.

Such a trace stocker is designed to have excellent tray storage efficiency in order to save space.

(Problem to be solved by the invention) However, in conventional trace stockers, when the tray shape is changed, the structure of the trace stocker must be changed significantly to match the new tray shape. There was a problem that it was not easy to deal with. Additionally, there has been a demand for a trace stocker with even better tray storage efficiency.

The present invention has been made in view of such conventional circumstances, and
It is an object of the present invention to provide a trace stocker that can easily accommodate changes in the shape of trays and that has better tray storage efficiency than conventional ones.

[Structure of the invention]

(Means for Solving the Problems) The trace stocker of the present invention is a trace stocker that accommodates a large number of trays each carrying a plurality of semiconductor devices, and includes a pair of rope conveying means each disposed substantially perpendicularly with their conveying surfaces facing each other. and tray holders provided at a predetermined pitch along the moving direction of the transport surface of each of the rope transport means, and each tray holder between the rope transport means is substantially horizontal when the tray holders are transported. and rotating drive means for rotationally driving the rope conveyance means so as to face each other, and the tray is configured to be held and housed in each tray holding portion facing between the rope conveyance means. It is something to do.

Further, in the trace stocker of the present invention, the tray is detachably attached to the tray holding part so that when the tray is stored in the tray holding part, the tray is temporarily fixed to the tray holding part. 6 (Function) The trace stocker of the present invention, having the above structure, can easily cope with changes in the shape of the tray, and has improved tray storage efficiency compared to the conventional one. It becomes possible to do so.

Furthermore, in the trace stocker of the present invention, the tray holding portion is provided with a removable fitting mechanism so that the tray is fitted into the tray holding portion and temporarily fixed. It does not run on its own due to vibrations generated from the entire unit or external vibrations. Therefore, the fitting prevents the tray from shifting, so there is no risk of damaging the semiconductor elements in the tray, and it becomes possible to safely transport them to a desired position. Furthermore, the throughput of the above-mentioned conveyance can be improved.

(First Embodiment) Hereinafter, an embodiment in which the present invention is applied to a trace stocker used in a semiconductor inspection device will be described with reference to the drawings.

Inside a device housing (not shown), a pair of rotating bodies 1a and lb, which are endless rope transport mechanisms, are vertically disposed facing each other.

These rotating bodies 1 and 2 are rotatably attached at both ends to a device casing (not shown), and have connection shafts 3 and 4 arranged vertically facing each other, and near both ends of the connection shafts 3 and 4. Chain sprockets inserted so that they face each other and are in the same phase (e.g. R820, pitch 12.7mm)
5a, 5b, 6a, 6b, and a chain 7.8 which is passed between the upper and lower sprockets 5a and 5b, 6a and 6b.

Tray supports 9 and 10, which are angle members, are horizontally arranged on the chains 7 and 8 of the rotating bodies 1 and 2, respectively, at a predetermined pitch P1, for example, 25.4 mm, that is, every other chain member in the chain movement direction. Furthermore, the sprockets 5 and 6 of each rotary body 1.2 are arranged so that the protruding portions of these tray holders 9 and 10 face each other horizontally between each rotary body 1.2.
are synchronized in phase.

A worm wheel (for example, pitch circle diameter: 37.13 mm) 11 of a worm gear mechanism is inserted into one end of the upper connecting shaft 3, 4 of each rotary body 1, 2, and the worm wheel 11 is in mesh with the worm wheel 11. The worm 12 rotates the worm rotating shaft 12a at a predetermined reduction ratio, for example 1:
50.

A rotary motor 13 for driving the rotors 1 and 2 is disposed hanging between each of the rotors 1.2 with its rotation axis facing upward. Two pulleys (for example, pulley diameter 24 mm) 14.15 are coaxially attached to this motor rotation shaft, and pulleys (for example, pulley diameter 28 mm) 16.17 are attached to the lower end of each of the worm rotation shafts 12a, respectively. They are connected by drive transmission belts 18,19.

In such a trace stocker, the trays 31 are mounted on the top 9.degree. 10 of the tray holders that face each other horizontally between the rotors 1 and 2, and these trays 31 are raised and lowered by the drive of the rotors 1.2.

This tray elevation control is performed by controlling the rotary motor 13 based on a worm rotation signal from a rotation detection sensor, for example, an encoder 20, which is provided on the worm rotation shaft 12a and detects the amount of rotation of the worm rotation shaft 12a.

The number of trays accommodated in the trace stocker is 1 for each rotating body,
The number of tray supports 9 and 10 horizontally facing each other, that is, the vertical distance of each chain sprocket 5a and 5b, 6a and 6b, the tray mounting location, and the number of tray supports 9 and 10 horizontally facing each other. Determined by type, in this example.

The number of trays accommodated was set to 20.

In addition, at a position close to the edge of the tray on the back of the top tray 31a and a position close to the edge of the bottom tray hanging down from this position, there is a tray pop-out detection device for detecting tray protrusion toward the back of the trace stocker. A sensor (for example, a photomicrosensor) 21 is provided, and a top tray detection sensor 2 for detecting the presence or absence of the tray 31 is provided at the front side of the upper tray 31a and the lowermost tray 31b, respectively.
2 and a lowermost tray detection sensor 23 are provided. Each of these tray detection sensors 21, 22, and 23 detects the state of tray accommodation in the stocker. In addition, on the side of the tray holder, which is the origin of movement during lifting and lowering operations, there is a
An origin reference member 24 is provided, and the tray support is provided with an origin detection sensor (for example, a photo sensor) 2 disposed on the row side.
By detecting this origin reference member 24 with reference numeral 5, the origin of the lifting/lowering operation is detected.

The tray 31 accommodated in such a trace stocker is, for example, as shown in FIG.
Accommodation grooves 33 for accommodating semiconductor devices 32 in a grid pattern of 4 rows x 5 columns are formed on the surface of the tray main body 31 having a rectangular shape of 0.01 m.
There is a structure in which .

The operation of the trace stocker of this embodiment will be described below using the tray 31.

First, regarding the tray storage operation, the tray is transported by the tray transport mechanism 26 disposed on the lower surface between each rotating table 1°2 so that the tray 31b is positioned on the tray receivers 9 and 10 at the lowest stage. . At this time, whether or not the tray 31b is in the correct position is detected by the detection sensor.

In this way, the tray transport mechanism 26 allows the tray receiver 9.1 to
After conveying the tray 31 onto the tray tray 9.10 on the lowermost stage, the rotating bodies 1 and 2 are driven by the rotary motor 13, and
is raised by tray pitch P□. This tray tray 9,
As the tray 10 is raised, the tray is mounted on the tray receivers 9 and 10. Thereafter, similar operations are repeated to sequentially mount the trays 31 onto the tray receivers 9 and 10. When the tray receivers 9 and 10 rise until the 20th tray is accommodated, the first tray 31 rises to the top,
A top tray detection sensor 22 detects the first tray and indicates the storage capacity limit of the stocker. In this way, the operation of storing trays in the stocker is completed. The unloading operation from the trace stocker to the tray transport mechanism is performed by the reverse operation of the above-mentioned tray accommodation operation.

The trace stocker having such a configuration has excellent storage efficiency because the vertical interval P2 between each tray is as narrow as 15.4 ma, and can greatly contribute to space saving.

Further, even if the dimensions of the tray 31 are changed, the change in the dimensions of the tray 31 can be easily accommodated by changing the shape of the tray receivers 9, 1o to match the new tray dimensions.

In addition, if the rotating bodies 1 and 2 are configured in advance so that they can approach and separate, the spacing between the rotating bodies 1 and 2 can be adjusted to match the tray dimensions.
By spacing them apart, trays of various sizes can be accommodated. As described above, according to the trace stocker of this embodiment, tray storage efficiency can be improved, space can be saved, and changes in tray shape can be easily accommodated.

As a semiconductor processing apparatus equipped with such a trace stocker, there is a one-tray type semiconductor inspection apparatus as shown in FIGS. 3 and 4.

FIG. 3 is a plan view showing this semiconductor inspection device.

FIG. 4 is a side view in the A direction of FIG. 3.

A high-temperature chamber 41 housing the inspection section is covered with a heat-insulating wall 42 made of a heat-resistant material, such as a stainless steel material, and the trace stocker 43 of the above-described embodiment is disposed outside the high-temperature chamber 41.

Each tray 31 housed in the trace stocker 43 is taken out one by one by the transport mechanism 26 in the trace stocker 43 and transferred to the tray preheating mechanism 45 in the high temperature chamber 41 through the loading port 44 provided in the heat insulating wall 42. and is transported.

After the tray 41 is heated to the inspection setting temperature, for example, 200° C. by the preheating mechanism 45, the tray transporting holder 4 of the tray transport mechanism 46 disposed above the preheating mechanism 45
7a, X stage 48, Y stage 49
．． 2nd stage (elevator @) The sample is transported onto the inspection table 51 driven by a three-dimensional movement mechanism such as an SO. Then, each terminal of the semiconductor element in the tray 31 is sequentially brought into contact with a probe needle (not shown) under a predetermined test procedure under a set test temperature to measure various electrical characteristics.

The tray 31 that has been inspected is transferred to the tray transport mechanism 46 again.
There, the tray is held by the tray unloading holder 47b of the tray transport mechanism 46 and transported to the unloading station 52, and then transported out of the heat insulating chamber 41.

Note that the tray 31 transported outside the heat insulation chamber 42 is
In the next processing step, for example, the semiconductor devices are transported to a sorter mechanism 53 on the side of the adiabatic chamber, where the semiconductor devices are sorted based on the inspection results.

By the way, the tray holding mechanism of the present invention can be applied to any semiconductor inspection apparatus having a tray transport system, other than the one-tray type semiconductor inspection apparatus as in the above-described embodiment.

(Second Embodiment) An embodiment in which the present invention is applied to a trace stocker will be described below with reference to the drawings.

The feature of the above embodiment is that the tray stored in the trace stocker is automatically locked to prevent it from falling, and when the time for carrying out approaches, the lock is automatically released and the tray is carried out.

In explaining the above-mentioned trace stocker, the same parts as the device and parts used in the first embodiment will be explained using the same reference numerals.

The main parts of the trace stocker have already been explained in detail in the first embodiment, so only the general structure will be explained.

As shown in FIG.
A rectangular tray 55 of 25+m x 210+m x 10m+ thickness is provided with accommodation grooves 33 on the top surface of the main body, for example, at each position in a grid of 4 rows x 5 columns, and a plurality of semiconductor devices 33 are placed in this accommodation groove 3. Temporarily, the multiple trays 55
They are pooled, stored, and then transported.

Here, the trace stocker 54 is provided with a transport path (not shown) that connects a transport position (not shown) with another transport position (not shown).
(not shown) are arranged and used.

The above-mentioned trace stocker 54 has a tray receiver 1 attached to the chain 8 of the rotating bodies 1 and 2 which are rotated in opposite directions, as in the first embodiment.
A plurality of 0's are regularly attached at equal intervals.

That is, a plurality of tray holders 1o are provided at intervals of a shade so as to support the bottom surfaces of both ends of the tray 55 transported from a predetermined position.

A mounting table 56 of a loading mechanism (not shown) for loading and unloading the tray 55 to and from the tray tray holder 10 is disposed at the bottom of the pair of rotating bodies 1 and 2 provided with the tray tray holder 10. .

This mounting table 56 places the tray 55 on the trace stocker 54.
In other words, the direction in which the tray 55 is stored, that is, the both ends 55 of the tray 55
The drive is controlled so that the trays a and 55b are loaded in the direction of storage along the tray receiver 10.

Furthermore, the top surface of the mounting table 56 has a hole (not shown) through which the bottom surface of the tray 55 is temporarily fixed (for example, by vacuum suction).
is drilled.

A vacuum mechanism (not shown) is connected to this hole.
is provided and is formed to suction and fix the bottom surface of the tray 55.

Further, as shown in FIG. 6, when the tray 55 is stored in the trace stocker 54, a fitting mechanism is provided to automatically temporarily fix the tray 55 and prevent it from falling.

That is, on the side surface 10a in the distal direction of the tray receiver 10, a fixing pin for temporarily fixing the tray 55, for example, a diameter 4
A fixing pin 58 in the shape of a stainless steel rod measuring 1 m x 1 m long is fixed, for example, caulked, to both side surfaces 55a and 55b of the tray 55 in a direction perpendicular to the side surfaces.

The fixing pin 58 is fixed to the tray holder 10, but as shown in FIG. 6(b), the fixing pin 58 is attached to a one-rotation member, for example, a collar 58a of 4 m in diameter x 6 mm in width. The side surface 1 of the tray receiver 10 is interposed with a stud 58b made of a stainless steel rod with a length of 10 nm.
A method fixed to 0a may also be used. In this case, since the collar 58a is rotated, there is an advantage that the generation of dust is extremely reduced.

On the other hand, the tray 55 accommodated in the tray holder 10 has a blocking portion 61 that collides with a fixing pin 58 provided on the tray holder 10 and is then temporarily fixed to the trace stocker 54.
is provided.

As shown in FIG. 6(c), the blocking portion 61 has a guide groove 62 that guides the tray 55 in a certain direction by the fixing pin 58 on the way the tray 55 reaches the tip 57 of the tray receiver 10. Notched along the direction of movement.

The cut guide groove 62 is cut out at the lower side end of the tray 55 to the extent that it comes into contact with the circumferential upper part 63 of the fixing pin 58 .

A wall surface on which the fixing pin 58 is abutted, that is, an abutment portion 61 is formed in the notched inner part of the guide groove 62 .

The upper part of this stopper 61 has a circular groove 6 into which the semicircular upper local part of the fixing pin 58 that has hit the stopper 61 is fitted.
4 are provided.

Here, the groove portion 64 of the circular space that fits with the semicircular portion, that is, the groove portion 64 into which the fixed pin 58 is fitted, is fitted when the fixing pin 58 rises from below, and when the fixing pin 58 falls, it is fitted into the groove portion 64 of the circular space.
8 is released.

Next, the operation of the trace stocker 54 will be explained.

When storing the tray 55 in the trace stocker 54, first, place the tray 55 on the loading mechanism (not shown).
6 on top of the other conveying means (not shown).

For example, it is mounted using a handling arm (not shown) or the like.

This placed tray 55 is suctioned and fixed by a vacuum mechanism (not shown) built into the mounting table 56.

Before moving the suction-fixed mounting table 56 to the lower side of the trace stocker 54 as shown in FIG. 7(a).

The tray receiver 10 of the trace stocker 54 is set at a predetermined height, that is, the height at which the tray receiver 10 is stored, and the vertical movement of the tray receiver 10 is stopped.

After the tray receiver 10 is stopped at a predetermined position, the mounting table 56 is installed at the center of the rotating bodies 1 and 2 provided on the left and right sides. At this time, as shown in FIG. 7(b), the fixing pin 58
The movement is automatically stopped when the tray is in contact with the abutting portion 61 of the tray. Next, the tray receiver 10 is driven in a direction to raise the tray 55, as shown in FIG. 7(c).
The tray is passed from the top surface of the mounting table 56 to the tray tray 10.

The tray 55 is fitted into the fixing pin 58 of the tray receiver 10, and the tray 55 is fitted and temporarily fixed while rising.

When the primary tray receiver 10 reaches a predetermined position, another tray 55 is fitted into the other tray receiver 10 and temporarily fixed in the same manner. This is repeated to adjust the conveyance period in the trace stocker 54, and when the desired period is reached, the tray receiver 10 is automatically lowered and the tray 55 is conveyed out. At this time,
The tray receiver 10 is lowered by an unloading signal from the CPU (not shown).

Next, the operation of carrying out the tray 55 from the trace stocker 54 will be explained.

First, the mounting table 56 is placed at the center below the tray 55 stored therein. And as shown in Figure 8(a),
Lower the tray receiver 10, and then lower the tray receiver 10.
The bottom surface of the tray 55 stored in the tray 55 is placed on the top surface of the mounting table 56.

This placed tray 55 is temporarily fixed by a vacuum built in the placing table 56.

Then, the tray 55 temporarily fixed to the mounting table 56 by vacuum is transported to the target transport position by driving the mounting table 56.

In the above embodiment, the tray 55 is stored in the trace stocker 54 and at the same time is temporarily fixed to the trace stocker 54 to be integrated.

Then, when the time comes for the tray 55 to be carried out, the temporary fixation is released and the tray 55 becomes ready to be carried out.

That is, when the tray receiver 10 of the trace stocker 54 is carried into the trace stocker 54, the tray 55 is temporarily fixed. When the tray receiver 10 is lowered, the tray 55 is temporarily fixed. Since it can be released and carried out, safety and reliability can be improved.

〔Effect of the invention〕

As explained above, according to the trace stocker of the present invention, it is possible to easily adapt to changes in the shape of the tray, and moreover, the tray storage efficiency is improved compared to the conventional one.

[Brief explanation of drawings]

FIG. 1 is a plan view and a front view showing a trace stocker according to an embodiment of the present invention, FIG. 2 is a plan view showing the structure of a tray, and FIG. 3 is a plan view showing the structure of a semiconductor inspection device to which the embodiment is applied. , FIG. 4 is a side view in the A direction of FIG. 3, FIG. 5 is an explanatory diagram of a trace stocker for explaining another embodiment in which the present invention is applied to a trace stocker, and FIG. 6 is a side view of the tray shown in FIG. FIG. 7 is an operation explanatory diagram for explaining a holding section and a tray attachment/detachment section. FIG. 7 is an operation explanatory diagram for explaining the operation of storing the tray in the trace stocker of FIG. 5, and FIG. 8 is an operation explanatory diagram for explaining the operation of taking out the tray from the trace stocker of FIG. 5. . 1.2... Rotating body, 3, 4... Connection shaft, 5.
6... Chain sprocket, 7.8... Chain, 9.10... Tray holder, 11... Worm wheel, 12... Worm 13... Rotating motor, 14, 15, 16.17・
...Pulley 18.19...Drive transmission belt, 2o.
... Encoder, 21... Tray pop-out detection sensor, 26... Tray transport mechanism, 31.55... Tray 32... Semiconductor element, 43, 54... Trace stocker, 56... Mounting table , 57...Tip part,
58...Fixing pin, 59...Groove, 6o...
Tip part, 61...Block part, 62...Guide groove,
64...Groove. Figure 1 Patent applicant Tokyo Electron Ltd. Figure (b) Figure (C)

Claims (1)

[Scope of Claim] A trace stocker that accommodates a large number of trays each carrying a plurality of semiconductor devices, comprising: a pair of rope conveying means arranged substantially vertically with their conveying surfaces facing each other; and conveyance of each of the rope conveying means. The ropes are transported so that the tray holders provided at a predetermined pitch along the direction of movement of the surface and the tray holders on the side between the endless rope transport means are almost horizontally opposed to each other when the tray holders are transported. A trace stocker comprising a rotation drive means for rotationally driving the means, and configured so that the tray is held and housed in each tray holding portion facing between the rope conveyance means. 2. The trace stocker according to claim 1, wherein the tray is removably fitted to the tray holding part so that the tray is temporarily fixed to the tray holding part when the tray is stored in the tray holding part. A trace stocker characterized by having a coupling mechanism.