JPH02265286A - Fiber-reinforced piezoelectric ceramic - Google Patents
Fiber-reinforced piezoelectric ceramicInfo
- Publication number
- JPH02265286A JPH02265286A JP1087289A JP8728989A JPH02265286A JP H02265286 A JPH02265286 A JP H02265286A JP 1087289 A JP1087289 A JP 1087289A JP 8728989 A JP8728989 A JP 8728989A JP H02265286 A JPH02265286 A JP H02265286A
- Authority
- JP
- Japan
- Prior art keywords
- fibers
- fiber
- piezoelectric
- potassium titanate
- reinforced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 34
- 239000000835 fiber Substances 0.000 claims abstract description 29
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 15
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052863 mullite Inorganic materials 0.000 claims abstract description 14
- NJLLQSBAHIKGKF-UHFFFAOYSA-N dipotassium dioxido(oxo)titanium Chemical compound [K+].[K+].[O-][Ti]([O-])=O NJLLQSBAHIKGKF-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 abstract description 3
- 230000003014 reinforcing effect Effects 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 3
- 230000002542 deteriorative effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 238000002156 mixing Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000000654 additive Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000005995 Aluminium silicate Substances 0.000 description 1
- -1 BaTi0 series Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 235000012211 aluminium silicate Nutrition 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000011363 dried mixture Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical group O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000011226 reinforced ceramic Substances 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は、超音波モータ、リレーやプリンタの印字ヘッ
ドに利用される圧電アクチュエータなどに使用される繊
維強化圧電性セラミックスに関するものである。DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to fiber-reinforced piezoelectric ceramics used in ultrasonic motors, relays, piezoelectric actuators used in printer print heads, and the like.
「従来の技術」
一般にＢ ａＴ ｉｏ ３、Ｐ ｂ（Ｚ ｒＳＴ ｉ）
０３などの圧電性セラミックスは、圧電性を有すること
から、これらを用いることにより電気的な信号やエネル
ギーを機械的な信号やエネルギーに効率よく変換するこ
とが可能であり、またその逆変換ら可１指なので、機械
的振動や超音波の何する優れた性質をエレクト〔１ニク
スの分野に用いることができる。"Prior art" Generally B aT io 3, P b (Z rST i)
Piezoelectric ceramics such as 03 have piezoelectricity, so by using them, it is possible to efficiently convert electrical signals and energy into mechanical signals and energy, and it is also possible to convert them inversely. Since it is a single finger, the excellent properties of mechanical vibration and ultrasonic waves can be used in the field of electronics.
圧電性セラミックスを用いて作製した圧電振動子や圧電
体基板は広く周波数フィルタ、超音波機器、音響機器な
どのデバイスやシステムに用いられている。Piezoelectric vibrators and piezoelectric substrates made using piezoelectric ceramics are widely used in devices and systems such as frequency filters, ultrasonic equipment, and audio equipment.
［発明が解決しようとする課題」
しかしながら、このような従来の圧電性セラミックスに
あっては、構造材料と比較して強度が低い。[Problems to be Solved by the Invention] However, such conventional piezoelectric ceramics have lower strength than structural materials.
よってこの圧電性セラミックスを用いて構成されたちの
は、使用方法によっては破損してしまうことがある。Therefore, devices constructed using piezoelectric ceramics may be damaged depending on how they are used.
本発明は上記事情に鑑みてなされたしので、強度の高い
繊維強化圧電性セラミックスを提供することを目的とす
る。The present invention was made in view of the above circumstances, and an object of the present invention is to provide a fiber-reinforced piezoelectric ceramic with high strength.
［課題を解決するための手段ｊ
圧電性セラミックスに、ムライト相を含むアルミナ繊准
および／またはヂタン酸カリウム繊ＫＧを分散して強化
することを問題解決の手段とした４、「作用 」
圧電性セラミックスに、ムライト相を含むアルミナ♀哉
椎および／またはチタン酸カリウム繊（′仔を分散して
強化することにより、ｌいライト相を含むアルミナ繊維
、チタン酸カリウム繊維は共に機械的強１隻が圧電性セ
ラミックスに比較して高いので１１：、主材料としての
特性を１０なうことなしに機械的強度の高い圧電性セラ
ミックスを得ることができろ。[Means for solving the problem j A means for solving the problem was to strengthen piezoelectric ceramics by dispersing alumina fibers containing a mullite phase and/or potassium ditanate fibers KG4. ``Action'' Piezoelectricity By dispersing and reinforcing ceramics with alumina fibers containing a mullite phase and/or potassium titanate fibers, both alumina fibers containing a mullite phase and potassium titanate fibers have mechanical strength. Since 11: is higher than that of piezoelectric ceramics, piezoelectric ceramics with high mechanical strength can be obtained without changing the characteristics of the main material.
以Ｆ、本発明について詳しく説明するう圧’＋ＩＸ性セ
ラミックスとしてはＢａＴｉ０系、Ｐｂ（Ｚ「、′Ｉ″
１）０３系、複合ペロブスカイト系などが知られている
が、これらの圧電性セラミックスの基地こ０＆ Ｈ状セ
ラミックスを分散させて補強する。本発明の繊維強化圧
電性セラミックスは、この分散させろセラミックスとし
てムライト相を含むアルミナ繊イイｔまたはチタン酸カ
リウムの繊維、あるいはその両方を用いろ。また、これ
らの繊維は、長さ１０〜２０μｍ１径の大きさ０．２〜
０．５μｍのらのを用いろ。Hereinafter, the present invention will be explained in detail as pressure '+IX ceramics such as BaTi0 series, Pb(Z",'I"
1) 03 series, composite perovskite series, etc. are known, and the base of these piezoelectric ceramics is reinforced by dispersing O&H-shaped ceramics. The fiber-reinforced piezoelectric ceramic of the present invention uses alumina fibers containing a mullite phase, potassium titanate fibers, or both as the dispersed ceramic. In addition, these fibers have a length of 10 to 20 μm and a diameter of 0.2 to 20 μm.
Use a 0.5 μm glass.
ムライト相を含むアルミナ繊１イｔは、３Ａ１２０３・
２ＳｉＯ，の組成からなり、３Ａ１２０３・２ＳｉＯ７
はＡ １２０３と５ｉＯｚの二成分系における唯一の安
定な化合物である。機械的性質も熱的性質ら他のセラミ
ックスより優れている点が多く、また成分的に天然原料
であろカオリン（ＡｌＯ２・２Ｓ１０２・２■］２０が
代表的組成式）を主体として、これに少（１のアルミナ
を配合してつくることができろことから製造が容易で安
価である。チタン酸カリウム繊維ら機械的強度が高＜Ｓ
ｉＣやＡｌ２Ｏ３の繊９イ１：と比較して安価である。One ton of alumina fiber containing mullite phase is 3A1203.
Consisting of the composition 2SiO, 3A1203・2SiO7
is the only stable compound in the binary system of A 1203 and 5iOz. It has many mechanical and thermal properties that are superior to other ceramics, and the main component is kaolin (a typical composition formula is AlO2.2S102.2)20, which is a natural raw material. (Since it can be made by blending alumina of 1), it is easy to manufacture and inexpensive. Potassium titanate fiber has high mechanical strength <S
It is cheaper than iC and Al2O3 fibers.
本発明の繊維強化圧電性セラミックスを製造するには、
まず、これらの原料を混合する。圧電性セラミックスを
分散状態にしてムライト相を含むアルミ繊維またはチタ
ン酸カリウム繊維あるいはその両方を機成的混合や攪拌
混合によって混合する。混合するための装置としては例
えばホールミル装置がある。次いでこの混合物を乾燥さ
Ｕ“るが、二の乾燥さｔ！−ろ方法としては加熱法、噴
霧乾燥法なとかある。次いでこの乾燥した混合物を成形
した後に焼結を行う。成形方法としては泥漿鋳込、固ｊ
［ヨ鋳込、押出し成形、湿式プレス、乾式プレス、う・
ぐ−プレスなどがある。また焼結は、真空中や種々の酸
素分圧の雰囲気を使用したり、窒素やアルゴンなどの雰
囲気中で行うが、成形および焼結を同時に行うことので
きるホットプレス法やさらにこの場合に、成形体内の均
一・化をはかるため等圧ホットプレス法、熱間静水圧加
圧法などを用いる。To produce the fiber-reinforced piezoelectric ceramics of the present invention,
First, these raw materials are mixed. Piezoelectric ceramics are dispersed and mixed with aluminum fibers containing a mullite phase, potassium titanate fibers, or both by mechanical mixing or stirring mixing. An example of a mixing device is a whole mill device. Next, this mixture is dried, and the second drying method includes a heating method and a spray drying method.Next, this dried mixture is molded and then sintered.The molding method includes Slime casting, hardening
[Yo casting, extrusion molding, wet press, dry press,
There are such things as Gu-Press. In addition, sintering is performed in a vacuum, in an atmosphere with various oxygen partial pressures, or in an atmosphere of nitrogen or argon. In order to achieve uniformity within the molded object, methods such as isostatic hot pressing and hot isostatic pressing are used.
［実施例 ＩＪ
圧電性セラミックスとしてＰ Ｍ Ｎ系のＰｂ（Ｍｇｌ
／３Ｎ ｂ２／３） Ｐ ｂＴ ｉｏ ３ Ｐ ｂ
Ｚ ｒｏ ３を用いて、ムライト相を含むアルミナの短
繊維を後に記載する第１表に示す重量パーセントとなる
ように秤量して、ボールミル装置にて湿式混合を行った
。次いで前記混合物を脱水して乾燥した後、ラバープレ
ス法によって成型して、常圧にて１２７０°Ｇにおいて
１２０分間で焼成を行った。[Example IJ PMN-based Pb (Mgl
/3N b2/3) P bT io 3 P b
Using Z ro 3, short alumina fibers containing a mullite phase were weighed to have the weight percentages shown in Table 1 below, and wet-mixed in a ball mill. Next, the mixture was dehydrated and dried, then molded by a rubber press method and fired at 1270°G for 120 minutes at normal pressure.
以−Ｌの工程により製造された各ｔａ ９（１：強化セ
ラミックスについて、ｈ試料の表面波結合係数（Ｋｒ）
、機成的品質係数（Ｑｍ）、ビッカース硬度（１■ｖ）
のｈ値を測定した。なお、測定は２５°Ｃにおいて行つ
ｌコ。その結果を第１表に示す。For each ta 9 (1: reinforced ceramics) manufactured by the process of -L, the surface wave coupling coefficient (Kr) of the h sample is
, mechanical quality factor (Qm), Vickers hardness (1■v)
The h value was measured. Note that the measurements were performed at 25°C. The results are shown in Table 1.
第１表
第１表から明らかなように、ムライト相を含むアルミナ
の短繊維を添加したものは、いずれも添加したもののビ
ッカース硬度の値が、添加量が０％のらのと比較して大
きくなっている。しかしながら径方向の電気−機械結合
係数（Ｋｒ）、機械的品質係数（Ｑｍ）は、いずれら添
加したものの方が添加量０％のものと比較４−ろと低下
しているが、使用上はさしつかえのない範囲である。さ
らに、添加量が３％よりも大きくなるとＫｒが極端に減
少することから、添加量は０．１〜３重量％が適切であ
ることが判明した。Table 1 As is clear from Table 1, the Vickers hardness values of the products to which short alumina fibers containing a mullite phase were added were greater than those of the products with the added amount of 0%. It has become. However, the radial electrical-mechanical coupling coefficient (Kr) and mechanical quality factor (Qm) are lower by 4-40% in the case of the additive with both additives compared to the 0% additive. This is within an acceptable range. Furthermore, since Kr decreases extremely when the amount added exceeds 3%, it has been found that an appropriate amount of addition is 0.1 to 3% by weight.
「実施例２」
圧電性セラミックスとしてｐ ｂ（Ｍ ｇｌ／３Ｎ ｂ
２／３）Ｐ ｂＴ １０３ Ｐ ｂＺ ｒｏ ３をら
ちいて、チタン酸カリウムの短繊維を後に記載する第２
表に示す重量パーセントとなるように秤量して、ボール
ミル装置にて湿式混合を行った。次いで前記混合物を脱
水して乾燥した後、ラバープレス法によって成形して９
００°Ｃにおいて６０分間で焼結を行った。“Example 2” As a piezoelectric ceramic, p b (M gl/3N b
2/3) By selecting P bT 103 P bZ ro 3, short fibers of potassium titanate are prepared in the second step described later.
The weight percentages shown in the table were weighed and wet mixing was performed using a ball mill. Next, the mixture was dehydrated and dried, and then molded by a rubber press method to form 9.
Sintering was carried out at 00°C for 60 minutes.
以上の工程により製造された各繊維強化圧電性セラミッ
クスについて、ビッカース硬度（Ｈｖ）の値を測定した
。なお、測定は２５°Ｃにおいて行った。The Vickers hardness (Hv) value of each fiber-reinforced piezoelectric ceramic manufactured by the above steps was measured. Note that the measurements were performed at 25°C.
その結果を第２表に示す。The results are shown in Table 2.
第２表
「発明の効果」
以ト説明したように、本発明の繊維強化圧電性セラミッ
クスは圧電性セラミックスにムライトを目を含むアルミ
ナ繊維および／またはチタン酸カリウム繊維を分散して
強化したしのであるので、この圧電性セラミックスは機
械的強度が高いものとなる。また、ムライト相を含むア
ルミナ繊１イｔ、チタン酸カリウムはいずれら安価であ
るので、低コストで繊維強化圧電性セラミックスを得ろ
ことができる。さらに、これらの繊維強化圧電性セラミ
ックスを圧電振動子や圧電体基板に使用することにより
、破損をおこしにくく、信頼性の高い周波数フィルタ、
超音波機器、音響機器などのデバイスやンステムを提供
することができろ。Table 2 "Effects of the Invention" As explained above, the fiber-reinforced piezoelectric ceramics of the present invention are made by reinforcing piezoelectric ceramics by dispersing alumina fibers containing mullite and/or potassium titanate fibers. Therefore, this piezoelectric ceramic has high mechanical strength. Furthermore, since one ton of alumina fiber containing a mullite phase and potassium titanate are both inexpensive, fiber-reinforced piezoelectric ceramics can be obtained at low cost. Furthermore, by using these fiber-reinforced piezoelectric ceramics for piezoelectric vibrators and piezoelectric substrates, we can create highly reliable frequency filters that are less prone to damage.
We can provide devices and systems such as ultrasound equipment and audio equipment.
Claims (2)
繊維および／またはチタン酸カリウム繊維を分散して強
化したことを特徴とする繊維強化圧電性セラミックス。(1) A fiber-reinforced piezoelectric ceramic characterized in that the piezoelectric ceramic is reinforced by dispersing alumina fibers and/or potassium titanate fibers containing a mullite phase.
項１の繊維強化圧電性セラミックス。(2) The fiber-reinforced piezoelectric ceramic according to claim 1, wherein the amount of the fiber added is 0.1 to 3% by weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1087289A JPH02265286A (en) | 1989-04-06 | 1989-04-06 | Fiber-reinforced piezoelectric ceramic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1087289A JPH02265286A (en) | 1989-04-06 | 1989-04-06 | Fiber-reinforced piezoelectric ceramic |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02265286A true JPH02265286A (en) | 1990-10-30 |
Family
ID=13910644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1087289A Pending JPH02265286A (en) | 1989-04-06 | 1989-04-06 | Fiber-reinforced piezoelectric ceramic |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02265286A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06316467A (en) * | 1992-08-21 | 1994-11-15 | Taiyo Chem Kk | Production of incombustible molding |
| US6362558B1 (en) * | 1999-12-24 | 2002-03-26 | Kansai Research Institute | Piezoelectric element, process for producing the same and ink jet recording head |
| CN101891495A (en) * | 2010-07-21 | 2010-11-24 | 昆山攀特电陶科技有限公司 | Method for toughing piezoelectric ceramics and toughened piezoelectric ceramics |
| CN108129139A (en) * | 2017-12-18 | 2018-06-08 | 常州市好利莱光电科技有限公司 | A kind of preparation method of high-strength alumina ceramic substrate |
-
1989
- 1989-04-06 JP JP1087289A patent/JPH02265286A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06316467A (en) * | 1992-08-21 | 1994-11-15 | Taiyo Chem Kk | Production of incombustible molding |
| US6362558B1 (en) * | 1999-12-24 | 2002-03-26 | Kansai Research Institute | Piezoelectric element, process for producing the same and ink jet recording head |
| CN101891495A (en) * | 2010-07-21 | 2010-11-24 | 昆山攀特电陶科技有限公司 | Method for toughing piezoelectric ceramics and toughened piezoelectric ceramics |
| CN108129139A (en) * | 2017-12-18 | 2018-06-08 | 常州市好利莱光电科技有限公司 | A kind of preparation method of high-strength alumina ceramic substrate |
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