JPH0226582Y2 - - Google Patents

Description

[Detailed description of the invention] (Technical field) This invention jets out compressed air supplied from a compressed air source from an air outlet formed on the lower surface, forming a thin film of air between the lower surface and the surface plate surface. The present invention relates to a surface plate surface moving table device that allows a movable table loaded with a predetermined object to be easily moved on the surface plate surface.

(Background Art) For example, when measuring the dimensions of an object to be measured or performing processing such as drilling holes on the object, the object to be measured or the object to be processed is placed on the surface plate of a working device. It is necessary to place it in place, move it to a predetermined position, and align it with high precision. In addition, the work position itself is placed on a predetermined surface plate surface, and the object to be measured and the workpiece are also placed on the same surface plate surface, and measurements and processing are performed while moving them relative to each other. There is also.

By the way, conventionally, when a predetermined object such as a measured object, a workpiece, or even a working device is placed on a surface plate and moved, it is usually done manually by an operator. It is. In other words, if the object is light, the worker lifts it and places it on a predetermined position on the surface of the surface plate, and if the object is heavy, the worker lifts the object using a hoist or the like. After placing it at the approximate position on the surface of the surface plate, it is aligned to a predetermined position using a plastic hammer or the like.

However, moving a heavy object placed on a surface plate by hitting it with a plastic hammer or the like is troublesome and takes a lot of time, and it also places a heavy burden on the worker. must be skilled at the work. Also,
There is also the problem that the surface plate surface is scratched due to such a heavy object sliding on the surface plate surface.

Therefore, the applicant of the present application first applied for the
In No. 10984, compressed air supplied from a compressed air source is ejected from an air outlet formed on the lower surface to form a thin film of air between the lower surface and the surface plate surface, thereby loading a predetermined object. We have proposed a surface plate surface moving table that can be easily moved on the surface plate surface. By using such a surface plate surface moving table, even heavy objects can be accurately and easily aligned to a predetermined position on the surface plate surface without requiring special skill. There is no need to add.

(Problem to be solved by the invention) However, when using such a surface plate surface moving table, it is good when the loaded object is heavy, but when it is relatively light, the object may become unstable when vibration is applied. There was a risk that the entire moving table would move from its predetermined position.

Furthermore, Japanese Patent Application Laid-open No. 59-227339 discloses that, although it is not the above-mentioned surface plate surface moving table device, it is used as a sliding and stationary device for pallets, etc. in various automatic machines, while making pallets, etc. float by blowing out compressed air. A device with a structure in which pallets, etc. are fixed to a base using vacuum suction (intake) has been proposed, but devices with this structure require two sources: a compressed air source and a vacuum suction source. A pressure source (device) is required, which has inherent problems such as an increase in the size of the device and an increase in cost.

(Means for Solving the Problems) In order to solve such problems, the surface plate surface moving table device according to the present invention has (a) a plurality of mutually independent air guide grooves on a flat lower surface, and A plurality of air guide grooves are provided with air outlets that communicate with each other, and compressed air is blown out from each air outlet through air passages formed inside to form a thin film of air between the lower surface and the surface plate surface. (b) connected to a predetermined compressed air source to supply compressed air to the air passage of the movable table; a first air passage supplying air; (c) a vacuum pump means driven by compressed air supplied from the compressed air source to generate negative pressure; and (d) connected to the vacuum pump means. (e) switching between the first air passage and the second air passage;
and first switching valve means for connecting either one of these to the air passage of the movable table.

(Function) In such a surface plate surface moving table device, when the first air passage is connected to the air passage of the moving table by the first switching valve means, compressed air from the compressed air source is transferred to the moving table. The air is supplied to the air passage and further ejected from the air outlet into the air guide groove to form a thin film of air between the lower surface of the moving table and the surface plate surface, allowing the moving table to move easily. Further, when the second air passage connected to the pressure reducing pump means driven by compressed air from the compressed air source is connected to the air passage of the movable table by the first switching valve means, the movable table The air in the air passages and in each air guide groove blocked by the surface plate is discharged, and the movable table is attracted to the surface plate due to the difference between the pressure in these spaces and the atmospheric pressure.

(Effect of the invention) In other words, according to the invention, by a simple operation of switching the first switching valve means, it becomes possible to easily position the object regardless of the weight of the object, and It becomes possible to fix the object to the surface of the surface plate, and it becomes possible to perform operations such as measurement and processing using the object efficiently and in a short time.

Furthermore, according to the present invention, since the movable table is fixed based on the pressure difference between the pressure in the air guide groove and the atmospheric pressure as described above, the movable table can be fixed to the surface plate surface regardless of the material of the surface plate. Another advantage is that it can be fixed at a desired position.

Furthermore, in the present invention, a compressed air source that supplies compressed air to the air passage of the movable table is used, and the compressed air guided from the source is used as a power source to drive the decompression pump means to generate negative pressure, Since this negative pressure is applied to the air passage of the moving table through the second air passage, there is no need to prepare a special negative pressure source, and only one compressed air source is required. Therefore, it became possible to effectively avoid an increase in the size of the device and the increase in cost.

(Examples) Hereinafter, in order to clarify the present invention more specifically, examples thereof will be described in detail based on the drawings.

In FIG. 1, 10 is a moving table;
It is placed on the surface plate surface 12 of a surface plate 11 made of steel, stone, ceramics, etc. of a measuring device (not shown), and the object to be measured 14 loaded on the top surface is moved to a predetermined position. This moving table 10
As shown in detail in FIGS. 2 and 3, it has a disk shape, and its upper surface 16 and lower surface 18 are flat surfaces parallel to each other. On the lower surface 18, a plurality of (four in this case) independent V-shaped grooves 20 as air guide grooves are formed concentrically around the center line of the movable table 10. A plurality of air jet ports 22 are opened and communicated with each other. Each air outlet 22 communicates with an air passage 24 that opens on the side surface of the moving table 10, and as described later, when compressed air is supplied into the air passage 24, the compressed air is transferred to the V-shaped groove 24. It seems like it's gushing out inside.

In addition, a mounting hole 2 is provided in the center of the movable table 10.
6 is formed, and the object to be measured 14 is fixed to the movable table 10 through this attachment hole 26. Note that the air passage 24 is formed parallel to the lower surface 18 and toward the center of the moving table 10, and its cross-sectional area is sufficiently larger than the cross-section of the air outlet 22. Further, two air jet ports 22 are formed in each bushing 30 that is press-fitted in such a manner that they respectively close two through holes 28 formed in the lower surface 18 .
Each V-shaped groove 20 is opened on a straight line passing through the center line of 0 and parallel to the center line of the air passage 24.

Furthermore, the air passage 24 of the movable table 10
As shown in FIG.
through the electromagnetic switching valve 32 which is the first switching valve means.
It is connected to the. Further, the electromagnetic switching valve 32 is connected to a compressor 38 as a compressed air source through an air passage 34 that is a first air passage and a regulator valve 36, and is connected to a compressor 38 as a compressed air source through an air passage 40 that is a second air passage. It is connected to a bench lily pump 42 as a negative pressure source. and,
By switching this electromagnetic switching valve 32 in accordance with the operation of an operating means (not shown), the air passage 24 in the moving table 10 is switched between the air passages 34 and 4.
0 selectively, or not to any of them.

The ventilator pump 42 is also connected to the compressor 38 via an air passage 44. On this air passage 44, there is a valve which can be switched between a state of allowing the supply of compressed air from the compressor 38 to the ventilator pump 42 and a state of blocking it in conjunction with the switching of the electromagnetic switching valve 32. An electromagnetic switching valve 46 is provided as a second switching valve means, and when the electromagnetic switching valve 32 is switched to connect the air passage 24 in the movable table 10 to the air passage 40, the compressed air from the compressor 38 is is supplied to the bench lily pump 42 to drive it. Note that 48 is a filter.

In such a device, when the air passage 24 in the moving table 10 is connected to the air passage 34 by switching the electromagnetic switching valve 32, compressed air is supplied from the compressor 38 into the air passage 24, and the compressed air is is ejected from each air ejection port 22 into each V-shaped groove 20, and uniformly ejected from these V-shaped grooves 20 over the entire area between the lower surface 18 of the movable table 10 and the surface plate surface 12. As a result, the lower surface 18 of the moving table 10 and the surface plate surface 1
A thin film of air is formed between the moving table 10 and the surface plate 12, allowing the moving table 10 to move easily on the surface plate surface 12. That is, at this time, the object to be measured 14 can be easily moved on the surface plate surface 12, and the object to be measured 14 can be easily aligned to a predetermined position. At this time, if the pressure of the compressed air ejected from each air outlet 22 is too high, the distance between the movable table 10 and the surface plate surface 12 becomes too large, making it easy for the movable table 10 to vibrate. Therefore, the pressure of the compressed air is reduced to an appropriate level by the regulator valve 36.

On the other hand, when the air passage 24 in the movable table 10 is connected to the air passage 40 by switching the electromagnetic switching valve 32, at the same time, by switching the electromagnetic switching valve 46, the compressed air from the compressor 38 is transferred to the bench lily pump. 42, and the driving of the bench lily pump 42 is started. As a result, the air in the air passage 24 and in turn the air in each V-shaped groove 20 is discharged through each air outlet 22, the pressure in those V-shaped grooves 20 is reduced, and the air in each V-shaped groove 20 is discharged. The movable table 10 is suctioned and fixed onto the surface plate surface 12 due to the pressure difference between the pressure and the atmospheric pressure. In other words, the suction force based on the pressure difference and the moving table 1
The movable table 10 is fixed on the surface plate surface 12 by the static frictional force against the surface plate surface 12 of The position of the object 14 does not change easily. Although the bench lily pump 42 varies depending on the weight of the movable table 10 and the object to be measured 14, the area of the lower surface 18 of the movable table 10, etc., normally, the pressure in the air passage 24 of the movable table 10 is increased to 200%. ~300mmHg
It is sufficient to have the ability to reduce the pressure to a certain extent.

As described above, according to the moving table device of the present embodiment, it is possible to easily align the object to be measured 14 by simply switching the electromagnetic switching valve 32, and the moving table 10 can be easily aligned. can be firmly fixed at a predetermined position on the surface plate surface 12, and the measurement work of the object to be measured 14 can be carried out in a short time and with high accuracy, regardless of the weight of the object to be measured 14. It will become. Moreover, in this embodiment, since the negative pressure source is the bench lily pump 42 which is driven by the compressed air supplied from the compressor 38 as the power source, there is an advantage that there is no need to prepare a special negative pressure source. be.

In the above embodiment, while the movable table 10 is suctioned and fixed to the surface plate surface 12, the electromagnetic switching valve 32 is maintained in a state connecting the air passage 24 of the movable table 10 to the air passage 40, and the air in the air passage 24 is However, an accumulator communicating with the air passage 24 of the movable table 10 is provided, and after the pressure inside the air passage 24 is reduced to a certain pressure or less, electromagnetic switching is performed. It is also possible to switch the valve 32 to the supply/discharge stop position and maintain the reduced pressure state using the accumulator. FIG. 4 shows an example of such an accumulator.

In FIG. 4, reference numeral 50 communicates with the air passage 24 and opens the movable table 16 at the top surface 16.
This is a through hole formed in the upper surface 16 side, and the portion on the side of the upper surface 16 is a large diameter portion 52, and the opening thereof is closed with a plug 54. A piston 56 is slidably fitted within the large diameter portion 52, thereby creating a space within the large diameter portion 52 into a decompression chamber 58 that communicates with the air passage 24, and an opening on the side surface of the movable table 10. It is divided into an atmospheric chamber 62 opened to the atmosphere by a through hole 60. Further, a compression spring 6 is provided between the piston 56 and the stepped portion of the large diameter portion 52.
4 is disposed, and the piston 56 is always urged toward the atmospheric chamber 62 by the compression spring 64.

In such an accumulator 66, when the pressure in the air passage 24 decreases, the piston 56 is moved toward the decompression chamber 58 against the biasing force of the compression spring 64, and after the air discharge is stopped, the piston 56 is moved toward the lower surface 18 of the movable table 10. When air enters the V-shaped groove 20 from between the surface plate surface 12 and the pressure inside the air passage 24 increases, the piston 56 moves against the compression spring 6.
It is moved to the atmospheric chamber 62 side according to the urging force of No. 4, and the increase thereof is absorbed. In other words, even after the discharge of air in the air passage 24 is stopped by switching the electromagnetic switching valve 32, the accumulator 6
6 maintains the reduced pressure state in the air passage 24 for a certain period of time, during which the movable table 10 moves to the surface plate surface 1.
2 remains firmly fixed. Furthermore, by adopting such an accumulator,
It is possible to shorten the period during which noise is generated due to driving of negative pressure sources such as the bench lily pump 42.

Although several embodiments of the present invention have been described above, these are literal illustrations, and the present invention should not be interpreted as being limited thereto.

For example, in the above embodiment, the electromagnetic switching valve 32 as the switching valve means is a three-position valve, but the invention is not limited to this, and the two-position valves connected to the air passages 34 and 40, respectively, are It may also be controlled by

Further, in the embodiment described above, the bench lily pump 42 was employed as the negative pressure source, but the negative pressure source may be other pressure reducing pump means, and in short, it is driven by compressed air from the compressor 38. Any vacuum pump means can be used as long as it is suitable.

Furthermore, the shape of the moving table 10 and the air passage 2
4, the cross-sectional shape and arrangement position of the air guide groove, the arrangement position and number of air jet ports, etc. can be changed as appropriate depending on the situation.

Furthermore, in the embodiment, the moving table 1
0 is used to move the object to be measured 14, but the moving table can also be used to move other objects that need to be moved on the surface plate surface, such as a workpiece or a measuring device. It can be used similarly. Furthermore, the movable table does not necessarily have to be used alone, but it is possible to connect a plurality of movable tables so that they can move up and down by a predetermined amount independently, and to load a common object using the connected movable tables. It is also possible to do so.

Although not listed in detail, it goes without saying that the present invention can be implemented with various modifications and improvements without departing from the spirit thereof.

[Brief explanation of the drawing]

FIG. 1 is a system diagram showing an embodiment of the present invention, FIG. 2 is an enlarged front sectional view of the moving table of FIG. 1, and FIG. 3 is a bottom view of FIG. 2. FIG. 4 is a sectional view of a main part of a moving table according to another embodiment of the present invention. 10...Moving table, 12...Surface plate surface, 14
...Object to be measured, 18...Bottom surface, 20...V-shaped groove (air guide groove), 22...Air outlet, 24...Air passage (of the moving table) 32...Solenoid switching valve (first switching valve) valve means), 34... air passage (first air passage), 36... regulator valve, 38... compressor (compressed air source), 40... air passage (second air passage), 42... bench Lily pump (negative pressure source), 46...electromagnetic switching valve (second switching valve means), 66...accumulator.

Claims (1)

[Claims for Utility Model Registration] (1) An air passage formed inside that has a plurality of mutually independent air guide grooves on a flat lower surface, and is equipped with an air outlet that communicates with each of the plurality of air guide grooves. The compressed air ejected from each air outlet forms a thin film of air between the lower surface and the surface plate surface, so that a predetermined object can be loaded and moved lightly on the surface plate surface. a first air passageway connected to a predetermined compressed air source to supply compressed air to the air passageway of the moving table; and a first air passageway driven by compressed air supplied from the compressed air source. a second air passage connected to the vacuum pump means to apply a negative pressure to the air passage of the moving table; a second air passage connected to the first air passage and the second air passage; a first switching valve means for switching between two air passages and connecting one of them to the air passage of the movable table, and upon switching operation of the first switching valve means,
By connecting the first air passage to the air passage of the movable table, the movable table can be moved easily, while the second air passage is connected to the air passage of the movable table. A surface plate surface moving table device, characterized in that the movable table is attracted to the surface plate surface by a suction effect due to the negative pressure generated by the vacuum pump means. (2) a second air passage connecting the pressure reducing pump means and the compressed air source in conjunction with the connection of the second air passage to the air passage of the movable table by the switching operation of the first switching valve means; A surface plate surface moving table device according to claim 1, characterized in that a switching valve means is provided.