JPH0227194A - Vacuum pump - Google Patents
Vacuum pumpInfo
- Publication number
- JPH0227194A JPH0227194A JP63177527A JP17752788A JPH0227194A JP H0227194 A JPH0227194 A JP H0227194A JP 63177527 A JP63177527 A JP 63177527A JP 17752788 A JP17752788 A JP 17752788A JP H0227194 A JPH0227194 A JP H0227194A
- Authority
- JP
- Japan
- Prior art keywords
- thread groove
- depth
- pumping speed
- exhaust
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、主に半導体製造部門等での使用に好適なネジ
溝を有した真空ポンプに関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a vacuum pump having a threaded groove suitable for use mainly in the semiconductor manufacturing sector.
（従来の技術）
従来、ネジ溝を有した真空ポンプは、特公昭４７−３３
４４８号公報等により古くから知られ、かつ、第６図に
示すように、ポンプハウジング（’Ｈ）に、円筒外面を
もつ回転内筒（Ｒ）と、内周面にら旋状のネジ溝（Ｍ）
を形成した静止外筒（Ｆ）とを内装し、回転内筒（Ｒ）
の高速回転により、ネジ溝（Ｍ）に沿って吸気口（Ｊ）
から排気口（Ｋ）に向けて真空引きを行うようにしてい
る。(Prior art) Conventionally, vacuum pumps with threaded grooves were
448, etc., and as shown in Figure 6, the pump housing ('H) has a rotating inner cylinder (R) with a cylindrical outer surface and a spiral threaded groove on the inner peripheral surface. (M)
A stationary outer cylinder (F) with a rotating inner cylinder (R)
Due to the high speed rotation of the inlet (J) along the thread groove (M)
Vacuum is drawn from there toward the exhaust port (K).
尚、図示のものは、ネジ溝（Ｍ）の前段に、円周上に複
数の羽根（Ｘ）をもつ動翼（Ｘ）と、同じく円周上に複
数の羽根（ｙ）をもっ静翼（Ｙ）とを交互に積層した軸
流形ポンプ要素（Ｔ）を併用し、該ポンプ要素（Ｔ）で
主として排気速度をかせぐようにしている。In addition, what is shown is a moving blade (X) having a plurality of blades (X) on the circumference and a stationary blade having a plurality of blades (y) on the circumference in the front stage of the thread groove (M). (Y) and axial flow type pump elements (T) are used in combination, and the pump element (T) is used to mainly increase the pumping speed.
（発明が解決しようとする課題）
ところで、この種真空ポンプにおけるネジ溝（Ｍ）の深
さは、目標真空度つまり吸気側と排気側との間で確保し
得る差圧と、その真空度を達成するまでの時間つまり排
気速度との二面がら最適化する必要がある。(Problem to be Solved by the Invention) By the way, the depth of the thread groove (M) in this type of vacuum pump depends on the target degree of vacuum, that is, the differential pressure that can be secured between the intake side and the exhaust side, and the degree of vacuum. It is necessary to optimize the time taken to achieve this, that is, the pumping speed.
しかし、上記のものでは、ネジ溝（Ｍ）は静市外筒（Ｆ
）の上下に沿って一定深さに形成されているため、上記
差圧と排気速度との二つの特性を共に良好ならしめるこ
とは困難である。However, in the above, the thread groove (M) is
) is formed at a constant depth along the upper and lower sides of the pump, so it is difficult to make both the above-mentioned pressure difference and pumping speed good.
すなわち、第５図に示すモデルで、７ミユレーシヨンを
行った結果、差圧を確保するにはネジ溝（Ｍ）の深さ（
Ｂ）は浅い方が好ましいが、排気速度を確保するには逆
に溝深さ（Ｂ）は深い方がよく、差圧又は排気速度の一
方を確保すると他方は犠牲にされることになる。尚、こ
のシミュレーションでは、回転内筒（Ｒ）側にネジ溝（
Ｍ）を設けたが静止外筒（Ｆ）側に設ける場合と基本的
な差異はない。In other words, as a result of performing 7 simulations on the model shown in Figure 5, the depth of the thread groove (M) (
B) is preferably shallower, but in order to ensure the pumping speed, it is better to have a deeper groove depth (B), and if either the differential pressure or the pumping speed is secured, the other will be sacrificed. In addition, in this simulation, there is a thread groove (
M) is provided, but there is no fundamental difference from the case where it is provided on the stationary outer cylinder (F) side.
本発明の目的は、ネジ溝深さを工夫し、圧縮比及び排気
速度を共に良好ならしめ、主として半導体製造部門等で
要求される中真空域（０，１〜Ｑ、３Ｔｏｒｒ付近）か
ら高真空域（１０−″Ｔｏｒｒ以下）にわたる広い範囲
での使用に好適な真空ポンプを提供するにある。The purpose of the present invention is to improve both the compression ratio and pumping speed by devising the depth of the thread groove, and to achieve a high vacuum range from the medium vacuum range (near 0, 1 to Q, 3 Torr) mainly required in the semiconductor manufacturing sector. An object of the present invention is to provide a vacuum pump suitable for use in a wide range of areas (10-'' Torr or less).
（課題を解決するための手段）
そこで、本発明では、吸気口（２）と排気口（３）との
間に、回転内筒（５）と静止外筒（６）とを備え、一方
にネジ溝（４）を形成したネジ溝形ポンプ要素（７）を
配設した真空ポンプにおいて、前記ネジ溝（４）の深さ
を、吸気側で深く、又、排気側で浅い、指数Ｎ＝１．５
〜２゜５の範囲のＮ次曲線近似で形成することとした。(Means for Solving the Problem) Therefore, in the present invention, a rotating inner cylinder (5) and a stationary outer cylinder (6) are provided between the intake port (2) and the exhaust port (3), and one side is provided with a rotating inner cylinder (5) and a stationary outer cylinder (6). In a vacuum pump equipped with a threaded pump element (7) having a threaded groove (4), the depth of the threaded groove (4) is set to be deeper on the intake side and shallower on the exhaust side, index N= 1.5
It was decided to form it by approximating an N-dimensional curve in the range of ~2°5.
（作用）
吸気側の深いネジ溝（４）では主として排気速度をかせ
ぐことができ、又、排気側の浅いネジ溝（４）では主と
して圧縮比を確保でき、全体として、中真空域（０，１
〜０．３Ｔｏｒｒ付近）から高真空域（１０−’ Ｔｏ
ｒｒ以下）にわたる広い範囲の真空度に早く到達させる
ことができるのである。(Function) The deep thread groove (4) on the intake side can mainly increase the exhaust speed, and the shallow thread groove (4) on the exhaust side can mainly ensure the compression ratio, and as a whole, the medium vacuum region (0, 1
~0.3 Torr) to high vacuum region (10-'Torr)
It is possible to quickly reach a vacuum degree over a wide range (below rr).
（実施例）
第１図において、（１）は概略円筒を呈するポンプハウ
ジングであり、上部に設ける吸気口（２）と下部に設け
る排気口（３）との間に、外周部にら旋状のネジ溝（４
）を形成した回転内筒（５）と、該内筒（５）の外周面
に近接する内周面をもつ静止外筒（６）とを備えるネジ
溝形ポンプ要素（７）を配設し、前記回転内筒（５）を
モータ（８）の駆動軸（９）に結合し、かつ、前記排気
口（３）にロータリー式等の粗引ポンプ（１０）を接続
して、前記モータ（７）と粗引ポンプ（１０）との併用
運転で、吸気口フランジ（１１）に取付ける半導体ウエ
ノ１等のチャンノ（−（１２）内の真空引きを行うよう
にしたものである。(Example) In Fig. 1, (1) is a pump housing having a roughly cylindrical shape, and a spiral shape is formed on the outer periphery between an intake port (2) provided at the top and an exhaust port (3) provided at the bottom. thread groove (4
) and a stationary outer cylinder (6) having an inner circumferential surface close to the outer circumferential surface of the inner cylinder (5). , the rotating inner cylinder (5) is connected to the drive shaft (9) of the motor (8), and a roughing pump (10) such as a rotary type is connected to the exhaust port (3), so that the motor ( 7) and the roughing pump (10) are used to evacuate the inside of the channel (-(12)) such as semiconductor wafer 1 attached to the inlet flange (11).
尚、第１図中、（１３）は上下軸受（１４）（１５）に
供給する潤滑油の油溜め、（１６）はオイルピックアッ
プである。In FIG. 1, (13) is an oil reservoir for lubricating oil supplied to the upper and lower bearings (14) and (15), and (16) is an oil pickup.
以上の構成において、前記ネジ溝（４）の深さを、下記
シミュレーション結果に基づ％）で、上部の吸気側で深
く、又、下部の排気側で浅〜）、指数Ｎ＝１．５〜２．
５の範囲のＮ次曲線、すなわち、二次曲線若しくはこれ
に近い曲線に沿わせるようにする。以下ンユミレーショ
ン結果ゐこ基づ℃）て説明する。In the above configuration, the depth of the thread groove (4) is %) based on the simulation results below, deep on the upper intake side and shallow on the lower exhaust side), index N = 1.5 ~2.
5, that is, a quadratic curve or a curve close to this. The following is an explanation based on the simulation results.
第２図は、ネジ溝（４）の深さ（Ｂ）を、回転内筒（５
）のボトムからの距離をＸとおいて、次式■で表示する
Ｘの指数関数で近似し、指数Ｎを変えたときのネジ溝（
４）の幾何学的形状から計算される最大排気速度（Ｌ
／ ｓ ）と最大差圧（Ｐ ａ）との関係をシミュレー
ションしたものである。Figure 2 shows the depth (B) of the thread groove (4) and the depth (B) of the thread groove (4).
) is the distance from the bottom of the screw groove (
4) The maximum pumping speed (L
/s) and the maximum differential pressure (P a).
Ｂ （Ｘ）＝ （Ｂ Ｉｎ−Ｂｏｕｔ ） （
Ｘ／ Ｌ）＋ Ｂｏｕｔ・・・・■
ここで、ＢＩｎ ；入口側の溝深さ
Ｂｏｕｔ：出口側の溝深さ
Ｌ ；回転内筒の全長
これによれば、Ｎ＝１．５〜２．５で変曲点があり、差
圧及び排気速度を共に高い値にするには、この範囲で溝
深さを形成するのが好ましいことがわかる。B (X) = (B In-Bout ) (
X/L)+Bout...■ Where, BIn: Groove depth on the inlet side Bout: Groove depth on the outlet side L: Total length of the rotating inner cylinder According to this, N=1.5 to 2. It can be seen that there is an inflection point at 5, and it is preferable to form the groove depth within this range in order to increase both the differential pressure and the pumping speed to high values.
実際の排気では、排気口（３）に粗引ボンプ（１０）が
接続され、このポンプ（１０）の能力（Ｓｃ）によって
排気流量が規制されることになるため、該ポンプ能力（
Ｓｃ）を考慮して検討を加えてみることとする。第３図
は、粗引ポンプ（１０）の能力（Ｓ ｃ）をＥｉ ＯＬ
／ｍ＝ １ 免／ ｓとした場合の圧力（Ｐ）対排気流
量（Ｑ）及び排気速度（Ｓ）の関係を表したシミュレー
ション結果である。In actual exhausting, the roughing pump (10) is connected to the exhaust port (3), and the exhaust flow rate is regulated by the capacity (Sc) of this pump (10).
Sc) will be taken into consideration. Figure 3 shows the capacity (S c) of the roughing pump (10) as Ei OL
This is a simulation result showing the relationship between pressure (P) versus exhaust flow rate (Q) and exhaust speed (S) when /m=1mm/s.
ここに、粗引ポンプ（１０）の能力（Ｓ ｃ）と圧力（
Ｐ）との積（Ｐ＠Ｓｃ）が、ネジ溝（４）の出口側に確
保し得る流量（−点鎖線ａ）となり、この直線（ａ）上
の任意の流量（ＱＯ）に対する圧力値（ＰＯ）から、ネ
ジ溝（４）の形状に基づいて出入口間に確保し得る差圧
（ΔＰ）分を減じた圧力値（Ｐｉ）が、ネジ溝（４）の
入口側圧力となるわけである。従って、この入口側圧力
（Ｐｉ）での上記流量（ＱＯ）が実際の排気流量（Ｑ）
となるのであり、又、排気流量（Ｑ）を圧力（Ｐ）で除
した値が排気速度（Ｓ）となるわけである。Here, the capacity (S c) and pressure (
The product (P@Sc) of P) is the flow rate (-dotted chain line a) that can be secured on the outlet side of the thread groove (4), and the pressure value (QO) for any flow rate (QO) on this straight line (a) is The pressure value (Pi) obtained by subtracting the differential pressure (ΔP) that can be secured between the entrance and exit based on the shape of the thread groove (4) from the pressure (PO) becomes the pressure on the inlet side of the thread groove (4). . Therefore, the above flow rate (QO) at this inlet side pressure (Pi) is the actual exhaust flow rate (Q)
The value obtained by dividing the exhaust flow rate (Q) by the pressure (P) is the exhaust speed (S).
この例では、ネジ溝（４）を決める指数（Ｎ）を２とし
た場合であるが、該指数（Ｎ）を０．５，１ １．
５ ２．５ ３と変化させて同様のシミュレー
ションを行った結果、該指数（Ｎ）の変化に対する圧力
（Ｐ）と排気速度（Ｓ）との関係が下の第１表に示すよ
うに得られた。In this example, the index (N) that determines the thread groove (4) is 2, but the index (N) is 0.5, 1.
5 2.5 A similar simulation was performed by changing the index (N) to 3, and the relationship between the pressure (P) and pumping speed (S) with respect to the change in the index (N) was obtained as shown in Table 1 below. Ta.
第 １ 表
第１表により、指数（Ｎ）の増加に伴い、低真空域（０
，３〜ＩＴｏ ｒ ｒ付近）での排気速度（Ｓ）は増加
するが、高真空域（１０−Ｔｏｒｒ以下）では逆に排気
速度が低下することとなる。又、０．ＩＴｏｒｒ付近の
中真空域では指数（Ｎ）が１．５〜２．５で排気速度（
Ｓ）は極大となる。排気速度（Ｓ）が大きい程、目標と
する真空域への到達時間が短縮できるため、使用する真
空域に合わせて指数（Ｎ）を選定するのが理想的である
ということができるが、コスト面及び汎用性の面より得
策でない。従って、半導体製造部門でのエツチングやＣ
ＶＤ等での使用域すなわち中真空域（０，１〜０．３Ｔ
ｏ ｒ ｒ付近）をカバーし、更に、高真空域（１０−
’Ｔｏｒｒ以下）でも比較的高い排気速度の得られる、
指数Ｎ１．５〜２．５程度を選択するのが好ましく、第
２図に示した結論と同じくネジ溝（４）は二次曲線を中
心とした曲線近似とするのが好ましいということになる
のである。Table 1 Table 1 shows that as the index (N) increases, the low vacuum region (0
, 3 to ITorr), the pumping speed (S) increases, but in a high vacuum region (10-Torr or less), the pumping speed decreases. Also, 0. In the medium vacuum region near ITorr, the exponent (N) is 1.5 to 2.5 and the pumping speed (
S) becomes maximum. The higher the pumping speed (S), the shorter the time it takes to reach the target vacuum region, so it can be said that it is ideal to select the index (N) according to the vacuum region to be used. This is not a good idea in terms of space and versatility. Therefore, etching and C
The range of use in VD, etc., that is, the medium vacuum range (0.1 to 0.3T
o r r area), and also covers high vacuum area (10-
A relatively high pumping speed can be obtained even at
It is preferable to select an index N of about 1.5 to 2.5, and as with the conclusion shown in Figure 2, it is preferable that the thread groove (4) be approximated by a curve centered on a quadratic curve. be.
以上の実施例は、ネジ溝形ポンプ要素（７）を単独に備
えるものに適用したが、第４図に示すように、複合形の
ものにも同様に適用できる。このものは、吸気口（２）
側に、動翼（２１）及び静翼（２２）を交互に多段積層
した軸流形ポンプ要素（２０）を配設し、動翼（２１）
を支持するロータ（２３）の下方側スカート部（５ｏ）
を回転内筒（５）として利用し、該内筒（５）にネジ溝
（４）を設けたものである。この場合にも、ネジ溝（４
）を、上部吸気側で深く、下部排気側で浅くなるよう二
次曲線若しくはこれに近い曲線で近似するのであり、こ
れにより、吸気側で主として排気速度をかせぐことがで
き、排気側で主として差圧を確保することができて、全
体として排気性能を向上することができるのである。Although the above embodiments were applied to those equipped with a single threaded groove type pump element (7), they can be similarly applied to a combined type as shown in FIG. This one is the intake port (2)
An axial pump element (20) in which rotor blades (21) and stator vanes (22) are alternately stacked in multiple stages is disposed on the side, and the rotor blades (21)
The lower skirt portion (5o) of the rotor (23) that supports
is used as a rotating inner cylinder (5), and a thread groove (4) is provided in the inner cylinder (5). In this case as well, the screw groove (4
) is approximated by a quadratic curve or a curve close to this so that it becomes deeper on the upper intake side and shallower on the lower exhaust side.This makes it possible to increase the exhaust speed mainly on the intake side, and to increase the difference mainly on the exhaust side. This makes it possible to secure the pressure and improve the exhaust performance as a whole.
（発明の効果）
以上本発明では、吸気口（２）と排気口（３）との間に
、回転内筒（５）と静止外筒（６）とを備え、一方にネ
ジ溝（４）を形成したネジ溝形ポンプ要素（７）を配設
した真空ポンプにおいて、前記ネジ溝（４）の深さを、
吸気側で深く、又、排気側で浅い、指数Ｎ＝１．５〜２
゜５の範囲のＮ次曲線近似で形成することとしたから、
吸気側の深いネジ溝（４）では主として排気速度をかせ
ぐことができ、又、排気側の浅いネジ溝（４）では主と
して圧縮比を確保でき、全体として中真空域（０，１〜
０．３Ｔｏｒｒ付近）から高真空域（１０−’ Ｔｏｒ
ｒ以下）にわたる広い範囲の真空度に早く到達させるこ
とができ、特に半導体製造部門でのエツチングやＣＶＤ
等の使用に好適なものとなし得るに至ったのである。(Effects of the Invention) As described above, the present invention includes a rotating inner cylinder (5) and a stationary outer cylinder (6) between the intake port (2) and the exhaust port (3), and a threaded groove (4) on one side. In a vacuum pump equipped with a thread groove type pump element (7) having a thread groove, the depth of the thread groove (4) is
Deep on the intake side and shallow on the exhaust side, index N = 1.5 ~ 2
Since we decided to form it by approximating an N-dimensional curve in the range of ゜5,
The deep thread groove (4) on the intake side can mainly increase the exhaust speed, and the shallow thread groove (4) on the exhaust side can mainly ensure the compression ratio, and as a whole, the medium vacuum range (0, 1 ~
From around 0.3 Torr) to high vacuum region (10-' Torr
It is possible to quickly reach a wide range of vacuum degrees over
As a result, it has been possible to make it suitable for uses such as.
第１図は本発明真空ポンプの縦断面図、第２図はネジ溝
形状を変えた場合の最大排気速度と最大差圧との関係を
示す図、第３図は粗引ポンプ能力を考慮した場合の圧力
対排気速度及び排気流量の関係を示す図、第４図は他の
実施例を示す縦断面図、第５図はネジ溝深さを均一とし
た場合であって該ネジ溝深さを変えた場合の最大排気速
度と最大差圧との関係を示す図、第６図は従来ポンプの
縦断面図である。
（２）・・・・吸気口
（３）・・・・排気口
（４）・・・・ネジ溝
（５）・・・・回転内筒
（６）・・・・静止外筒
（７）・・・・ネジ溝形ポンプ要素Figure 1 is a longitudinal cross-sectional view of the vacuum pump of the present invention, Figure 2 is a diagram showing the relationship between maximum pumping speed and maximum differential pressure when the thread groove shape is changed, and Figure 3 is a diagram showing the relationship between the maximum pumping speed and the maximum differential pressure when the thread groove shape is changed. FIG. 4 is a longitudinal cross-sectional view showing another embodiment, and FIG. 5 is a diagram showing the relationship between pressure and exhaust speed and exhaust flow rate in the case where the thread groove depth is uniform. FIG. 6 is a longitudinal cross-sectional view of a conventional pump, which shows the relationship between maximum pumping speed and maximum differential pressure when the pump speed is changed. (2)...Intake port (3)...Exhaust port (4)...Thread groove (5)...Rotating inner cylinder (6)...Stationary outer cylinder (7) ...Threaded groove pump element
Claims (1)
５）と静止外筒（６）とを備え、一方にネジ溝（４）を
形成したネジ溝形ポンプ要素（７）を配設した真空ポン
プにおいて、前記ネジ溝（４）の深さを、吸気側で深く
、又、排気側で浅い指数Ｎ＝１．５〜２．５の範囲のＮ
次曲線近似で形成していることを特徴とする真空ポンプ
。1) A rotating inner cylinder (
5) and a stationary outer cylinder (6), in which a threaded pump element (7) is provided with a threaded groove (4) formed on one side, the depth of the threaded groove (4) being: N in the range of index N = 1.5 to 2.5, which is deep on the intake side and shallow on the exhaust side
A vacuum pump characterized by being formed by approximating the following curve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63177527A JPH0759955B2 (en) | 1988-07-15 | 1988-07-15 | Vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63177527A JPH0759955B2 (en) | 1988-07-15 | 1988-07-15 | Vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0227194A true JPH0227194A (en) | 1990-01-29 |
| JPH0759955B2 JPH0759955B2 (en) | 1995-06-28 |
Family
ID=16032483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63177527A Expired - Fee Related JPH0759955B2 (en) | 1988-07-15 | 1988-07-15 | Vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0759955B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04219494A (en) * | 1990-12-19 | 1992-08-10 | Daikin Ind Ltd | Structure of magnetic bearing for high speed rotary vacuum pump |
| US5551524A (en) * | 1993-12-24 | 1996-09-03 | Kabushiki Kaisha Komatsu Seisakusho | Remote control apparatus of a construction machine |
| KR20000077405A (en) * | 1999-05-24 | 2000-12-26 | 다카키도시요시 | Screw groove type vacuum pump, complex vacuum pump and vacuum pump system |
| JP2002526721A (en) * | 1998-10-07 | 2002-08-20 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | Friction vacuum pump |
| JP2011501010A (en) * | 2007-10-11 | 2011-01-06 | オーリコン レイボルド バキューム ゲーエムベーハー | Multistage pump rotor for turbomolecular pump |
| EP3524821A4 (en) * | 2016-08-30 | 2020-07-22 | Edwards Japan Limited | VACUUM PUMP AND ROTATING CYLINDRICAL BODY INSTALLED IN A VACUUM PUMP |
| CN115875280A (en) * | 2021-09-29 | 2023-03-31 | 株式会社岛津制作所 | Vacuum pump |
| JP2023050066A (en) * | 2021-09-29 | 2023-04-10 | 株式会社島津製作所 | Vacuum pump |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5048512A (en) * | 1973-03-30 | 1975-04-30 | ||
| JPS58155297A (en) * | 1981-12-14 | 1983-09-14 | ユルトラ・ツエントリフユ−ゲ・ネ−デルランド・ナ−ムロ−ゼ・ヴエノ−トチヤツプ | High-vacuum molecular pump |
| JPS60182394A (en) * | 1984-02-29 | 1985-09-17 | Shimadzu Corp | turbo molecular pump |
-
1988
- 1988-07-15 JP JP63177527A patent/JPH0759955B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5048512A (en) * | 1973-03-30 | 1975-04-30 | ||
| JPS58155297A (en) * | 1981-12-14 | 1983-09-14 | ユルトラ・ツエントリフユ−ゲ・ネ−デルランド・ナ−ムロ−ゼ・ヴエノ−トチヤツプ | High-vacuum molecular pump |
| JPS60182394A (en) * | 1984-02-29 | 1985-09-17 | Shimadzu Corp | turbo molecular pump |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04219494A (en) * | 1990-12-19 | 1992-08-10 | Daikin Ind Ltd | Structure of magnetic bearing for high speed rotary vacuum pump |
| US5551524A (en) * | 1993-12-24 | 1996-09-03 | Kabushiki Kaisha Komatsu Seisakusho | Remote control apparatus of a construction machine |
| JP2002526721A (en) * | 1998-10-07 | 2002-08-20 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | Friction vacuum pump |
| KR20000077405A (en) * | 1999-05-24 | 2000-12-26 | 다카키도시요시 | Screw groove type vacuum pump, complex vacuum pump and vacuum pump system |
| JP2011501010A (en) * | 2007-10-11 | 2011-01-06 | オーリコン レイボルド バキューム ゲーエムベーハー | Multistage pump rotor for turbomolecular pump |
| EP3524821A4 (en) * | 2016-08-30 | 2020-07-22 | Edwards Japan Limited | VACUUM PUMP AND ROTATING CYLINDRICAL BODY INSTALLED IN A VACUUM PUMP |
| US11078925B2 (en) | 2016-08-30 | 2021-08-03 | Edwards Japan Limited | Vacuum pump and rotating cylindrical body included in vacuum pump |
| CN115875280A (en) * | 2021-09-29 | 2023-03-31 | 株式会社岛津制作所 | Vacuum pump |
| JP2023050066A (en) * | 2021-09-29 | 2023-04-10 | 株式会社島津製作所 | Vacuum pump |
| CN115875280B (en) * | 2021-09-29 | 2026-05-12 | 株式会社岛津制作所 | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0759955B2 (en) | 1995-06-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |