JPH02271969A - Aln-based sintered body - Google Patents

Abstract

PURPOSE:To reduce light transmittance and to increase beat conductivity by sintering a mixture of prescribed percentages of Y2O3, the oxide, carbide, boride, chloride or fluoride of Zr and AlN so that the resulting sintered body is uniformly colored dark brown. CONSTITUTION:A mixture consisting of 1-10wt.% Y2O3, 0.1-5wt.% one or more among the oxide, carbide, boride, chloride and fluoride of Zr and the balance AlN is sintered to form an AlN-based sintered body. The Y2O3 functions as an AlN sintering agent. The Zr compds. color the AlN-based sintered body uniformly dark brown.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to A
Regarding fLN sintered body.

[Prior Art] Alumina substrates are often used for mounting substrates for semiconductor devices, but recently, in order to improve the heat dissipation characteristics of mounting substrates, alumina substrates that have thermal conductivity 5 to 10 times higher than alumina and high insulation AuN substrates with low dielectric constant and high dielectric constant have been developed.

[Problems to be Solved by the Invention] However, in order to increase thermal conductivity, the conventional AuN substrate described above contains fewer impurities and has increased density, and as a result, it is white and has translucency. There is. Therefore, there are the following problems when using this as a mounting board.

(1) Appearance defects such as uneven color and uneven translucency occur frequently.
Manufacturing yield will decrease.

(2) When performing screen printing or the like during metallization, its translucency becomes an obstacle, making accurate positioning using an infrared sensor or the like difficult.

On the other hand, AJZN substrates that exhibit a gray or black-gray color that can be easily detected by infrared sensors, etc. are also known, but such AuN substrates do not have very high thermal conductivity and have poor heat dissipation characteristics. .

Therefore, an object of the present invention is to provide an AβN sintered body that can improve yield, positioning accuracy, and heat dissipation characteristics in terms of appearance.

[Means for Solving the Problems] In order to solve the above problems, the present invention provides Y2O31 to lO
It is made by firing a mixture consisting of 0.1 to 5% by weight of at least one of Zr nitride, carbide, boride, chloride, or fluoride, and the balance Al1N.

[Function] In the above means, Y203 functions as a sintering aid for AJ2N and contributes to improving thermal conductivity. Y2
If O3 is less than 1% by weight, a dense sintered body cannot be obtained, and if it exceeds 10% by weight, the thermal conductivity decreases,
Color unevenness occurs and costs are high. The amount of Y and 03 added is preferably 3 to 5% by weight. This is because if it is less than 3% by weight, the degree of improvement in thermal conductivity is small, and if it exceeds 5% by weight, the effect that is sufficient to compensate for the increase in cost cannot be obtained.

Nitride, carbide, boride, chloride, or fluoride of Zr colors the Al1N sintered body uniformly deep brown-black, reduces translucency, and furthermore improves thermal conductivity. If it is less than 5% by weight, the sintered body will not be colored, and if it exceeds 5% by weight, the thermal conductivity will decrease.

The amount of Zr nitride, carbide, boride, chloride or fluoride added is preferably 0.1 to 2% by weight.

The sintered body is fired at 1600 to 1900°C in an atmosphere of N2 gas or other inert gas.

[Example] The present invention will be explained in detail below.

Y2O3 and Zr nitride, carbide, boride, chloride, or fluoride were added to the raw material powder of AJ2N in the proportions shown in Tables 1 to 3, and the mixture was ground and mixed. These were formed into a disk shape with a diameter of 16 mm and a thickness of 8 mm, and fired at 1750° C. for 1 hour in an atmosphere of N2 gas to obtain a hard sintered body.

Each of the obtained sintered bodies had a uniform dark brown-black color, with the exception of the sample (white) containing no Zr nitride, carbide, boride, chloride, or fluoride, and had a sufficiently low light transmittance. was enshrined. Furthermore, although these were sliced to a thickness of 0.5 mo+, they were also sufficiently opaque and no transmission of visible light was observed.

Moreover, the thermal conductivity is Y2O with or without addition of Zr nitride, carbide, boride, chloride or fluoride.

When the thermal conductivity of the added 5% by weight is taken as 100%, the results are as shown in Tables 1 to 3.

In each table, ×, △, O1◎ represent the coloring effect, X is no effect, Δ is coloring but the effect is poor, O is effective,
◎ indicates a large effect.

At least IF of nitride, carbide, boride, chloride or fluoride of A 42 N 2031 to 10% by weight and Zr! By adding 0.1 to 5% by weight, appearance defects due to color unevenness, non-uniform translucency, etc. are reduced, yield is improved, and positioning accuracy by an infrared sensor during metallization is improved. It can be seen that the thermal conductivity is improved.

[Effects of the Invention] As described above, according to the present invention, the sintered body is colored uniformly dark brown and black, and the translucency is sufficiently reduced, so that it is possible to improve the yield in terms of appearance, and also to improve the appearance of infrared sensors, etc. positioning can be performed easily and with high precision.

Furthermore, since the thermal conductivity is improved compared to the conventional one, the heat dissipation characteristics can be further improved.

Applicant: Toshiba Ceramics Corporation

Claims (1)

[Claims] (1) Y_2O_31 to 10% by weight, 0.1 to 5% by weight of at least one of Zr nitride, carbide, boride, chloride, or fluoride, and the balance AlN. Characteristic AlN sintered body.