JPH0227517A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH0227517A JPH0227517A JP63177823A JP17782388A JPH0227517A JP H0227517 A JPH0227517 A JP H0227517A JP 63177823 A JP63177823 A JP 63177823A JP 17782388 A JP17782388 A JP 17782388A JP H0227517 A JPH0227517 A JP H0227517A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- films
- thin
- protective film
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Paints Or Removers (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、高密度磁気記録に適する強磁性金属薄膜を磁
気記録層とする磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium whose magnetic recording layer is a ferromagnetic metal thin film suitable for high-density magnetic recording.
従来の技術
最近の記録技術の進歩により単位面積当りはもとよシ単
位体積当シの記録密度が著しく向上し、磁気記録媒体は
、表面が極めて平滑で、高密度化に適した強磁性金属薄
膜を磁気記録層とする蒸着テープ等の実用化が強く望ま
れている。従って最近では摺動界面で起こる摩擦、摩耗
等に対する理解を深めるトライポロジーに関する研究の
重要性が認識され各方面で開発が進められている〔テレ
ビジ、7学会誌Vo1.40.46 (1986)47
2頁〕。Conventional technology Recent advances in recording technology have significantly improved recording density not only per unit area but also per unit volume, and magnetic recording media are made of ferromagnetic metals with extremely smooth surfaces and suitable for high density There is a strong desire to put into practical use a vapor-deposited tape or the like that uses a thin film as a magnetic recording layer. Therefore, the importance of research on tribology to deepen understanding of friction, wear, etc. that occurs at sliding interfaces has recently been recognized, and development is progressing in various fields [Television, 7 Journals Vol. 1.40.46 (1986) 47
2 pages].
第2図は従来の磁気記録媒体の拡大断面図である。第2
図に於て、1はポリエチレンテレフタレート、ポリイミ
ド等の高分子フィルムで必要に応じて、微粒子化した表
面を付与したもの等〔特開昭59−207422号公報
、特開昭59−121631号公号公報用いられる。2
はCo−Ni−0斜め蒸着膜、Co−Cr、Go−Or
−Nb等の垂直磁化膜等の磁気記録層で、3は保護層で
、4はバックコート層で、炭素粉末、炭化カルシウム粉
末等の粒子を含んだ樹脂層で主として走イを改善するた
めに保護層だけで不十分な場合にはよく設けられている
。FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. Second
In the figure, 1 is a polymer film made of polyethylene terephthalate, polyimide, etc., which is provided with a finely divided surface if necessary [JP-A-59-207422, JP-A-59-121631] Publication is used. 2
Co-Ni-0 obliquely deposited film, Co-Cr, Go-Or
- A magnetic recording layer such as a perpendicular magnetization film such as Nb, 3 is a protective layer, and 4 is a back coat layer, which is a resin layer containing particles such as carbon powder and calcium carbide powder, mainly to improve the run. It is often provided when a protective layer alone is insufficient.
従来保護層は特開昭54−113303号公報に開示さ
れている脂肪酸金属塩の蒸着膜による耐摩耗性の改善、
特開昭57−116771号公報に開示されているイミ
ド基を有する高分子のスパッタ膜、ダイアモンド状硬質
炭素膜を用いる例(日本応用磁気学会、第46回研究会
資料)等が知られている。又潤滑目的の層として、蒸着
法。Conventionally, the protective layer has been improved in wear resistance by a vapor-deposited film of a fatty acid metal salt disclosed in JP-A-54-113303;
Known examples include the sputtered film of a polymer having imide groups disclosed in JP-A-57-116771, and an example using a diamond-like hard carbon film (Japan Society of Applied Magnetics, 46th Research Meeting Materials). . Also, as a layer for lubricating purposes, vapor deposition method.
湿式塗布法等で脂肪酸、脂肪酸アミド等を被着するもの
(例えば特公昭58−30609号公報)は、数多く試
みられている。しかしながら上記した例では、使用環境
条件の拡大2合金系磁気ヘッドに対する実用性の要求の
高度化に対処しきれないことから、組み合わせによる改
善が検討されていて、脂肪酸金属塩の吸着層上にフルオ
ロカーボン系の潤滑層を設けたもの(特開昭61−12
0331号公報)、硬質カーボン層の上に含フツ素潤滑
油層を配したもの(特開昭61−126627号公報)
、5i−N−0系薄膜上に潤滑層を形成し麺もの(特開
昭61−131231号公報)等があげられる。Many attempts have been made to coat fatty acids, fatty acid amides, etc. by wet coating methods (for example, Japanese Patent Publication No. 30609/1983). However, in the above-mentioned example, it is impossible to cope with the expansion of usage environmental conditions and the increasing sophistication of practical requirements for two-alloy magnetic heads. Therefore, improvements by combination are being considered, and fluorocarbon system with a lubricating layer (Japanese Unexamined Patent Publication No. 1986-12)
No. 0331), and a fluorine-containing lubricating oil layer arranged on a hard carbon layer (Japanese Patent Application Laid-open No. 126627/1983).
, noodles with a lubricating layer formed on a 5i-N-0 thin film (Japanese Unexamined Patent Publication No. 131231/1983).
発明が解決しようとする課題
しかしながら、近年急激に需要が増大しているカメラ一
体型のビデオは小型軽量化が進み、使用条件範囲も広く
なり、磁気テープ全厚を薄型化し、長時間記録を維持し
ようとすると、くシ返し記録再生で画質が低下するとい
った課題があシ改善が望まれていた。Problems to be solved by the invention However, the demand for camera-integrated video cameras, which has been rapidly increasing in recent years, has become smaller and lighter, and the range of usage conditions has become wider. However, when attempting to do so, there was a problem in that the image quality deteriorated during repeated recording and playback, and improvements were desired.
本発明は上記した事情に鑑みなされたもので、画質の確
保を可能にする磁気記録媒体を提供するものである。The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a magnetic recording medium that can ensure image quality.
課題を解決するための手段
上記した課題を解決するため本発明の磁気記録媒体は、
非磁性薄膜と強磁性金属薄膜をくり返し積層した上に保
護膜を配したものにあって、非磁性薄膜と保護膜がヌー
プ硬度2500 (Ky/−〕以上の薄膜で構成される
ようにしたものである。Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention comprises:
A product in which a protective film is arranged on a repeatedly laminated layer of a nonmagnetic thin film and a ferromagnetic metal thin film, and the nonmagnetic thin film and the protective film are made of a thin film with a Knoop hardness of 2500 (Ky/-) or more. It is.
作 用
本発明の磁気記録媒体は、機器の小型化によシ、回転磁
気ヘッドとの高速摺動時の負荷が増しても、磁気記録層
が実効的に硬くなることで、磁気記録層の局部的々破壊
が防げることになりくシ返し記録再生を行っても画質を
確保できるようになる。Function The magnetic recording medium of the present invention effectively hardens the magnetic recording layer even when the load increases during high-speed sliding with a rotating magnetic head due to the miniaturization of equipment. Local destruction can be prevented, and image quality can be maintained even when repeating recording and reproducing is performed.
実施例
以下図面を参照しながら本発明の一実施例について詳し
く説明する。第1図は、本発明の磁気記録媒体の拡大断
面図である。第1図で5は6μmから10μmの範囲の
ポリエチレンテレフタレート。EXAMPLE Hereinafter, an example of the present invention will be described in detail with reference to the drawings. FIG. 1 is an enlarged sectional view of the magnetic recording medium of the present invention. In Figure 1, 5 is polyethylene terephthalate with a diameter ranging from 6 μm to 10 μm.
ポリエーテルケトン、ポリフェニレンサルファイド、ポ
リイミド等の高分子フィルムで、水溶性高分子のミミズ
状の下塗シ層や、TtO2,Cr2O3゜ポリエステル
球等の微粒子を配した塗布層をあらかじめ配したものを
用いてもよい。6,8は非磁性薄膜でBN!、 S i
N、 、ダイアモンド薄膜等でヌープ硬度2soo[:
Kg/−)以上の薄膜で、7,9は強磁性金属薄膜で、
Go 、Co−Fe 、Co−Ni 。A polymer film made of polyetherketone, polyphenylene sulfide, polyimide, etc., on which a worm-shaped undercoat layer of water-soluble polymer and a coating layer containing fine particles such as TtO2, Cr2O3° polyester spheres, etc. are arranged in advance. Good too. 6 and 8 are non-magnetic thin films and are BN! , S i
N, , Knoop hardness 2soo [:
Kg/-) or more, 7 and 9 are ferromagnetic metal thin films,
Go, Co-Fe, Co-Ni.
Co−0,Co−Ta、Co−Mo、Co−0r、Co
−Ni−0゜Co−Ni−Cr、Co−Cr−Nb等で
電子ビーム蒸着法。Co-0, Co-Ta, Co-Mo, Co-0r, Co
Electron beam evaporation method using -Ni-0°Co-Ni-Cr, Co-Cr-Nb, etc.
イオンブレーティング法、スパッタリング法等で形成し
、層数は2層から6層が好ましい。アと9は同じ材質で
もよいし、異なる材質でかつ磁化容易軸の方向の異なる
ものでもよい。10は保護膜であるが6,8と同じ群の
中から構成材料を選び、スペーシング損失の面から60
人から200人の範囲で構成するのが望ましい。11は
潤滑剤層で、脂肪酸、脂肪酸アミド、パーフルオロポリ
エーテル等から適宜選ぶことができる。12は走行性を
改善する目的で配されるいわゆるバックコート層で公知
の技術で0.3μ〜0.7μmの範囲で構成し、最大粗
さ3000Å以下とするのが望ましい。It is formed by an ion blasting method, a sputtering method, etc., and the number of layers is preferably 2 to 6 layers. A and 9 may be made of the same material, or may be made of different materials and have different directions of easy magnetization axes. 10 is a protective film, but the constituent material was selected from the same group as 6 and 8, and 60 was selected from the viewpoint of spacing loss.
It is desirable that the number range from 1 to 200 people. Reference numeral 11 denotes a lubricant layer, which can be appropriately selected from fatty acids, fatty acid amides, perfluoropolyethers, and the like. Reference numeral 12 denotes a so-called back coat layer provided for the purpose of improving runnability, and is formed using a known technique to have a thickness in the range of 0.3 μm to 0.7 μm, and preferably has a maximum roughness of 3000 Å or less.
以下、更に具体的な実施例について比較例との対比で説
明する。厚み7μmのポリエチレンナフタレートフィル
ム上に直径150人のCτ203微粒子を10ケ/(μ
m)2配し、反応性蒸着法(RE)。Hereinafter, more specific examples will be explained in comparison with comparative examples. Cτ203 fine particles with a diameter of 150 were placed 10 pieces/(μ
m) 2 layers, reactive vapor deposition (RE).
スパッタリング法(SP)?プラズマCvD法(・PC
VD)のいずれかで、BN、、SiNx、TiN、。Sputtering method (SP)? Plasma CvD method (PC
VD), BN, SiNx, TiN,.
BC!等やダイアモンド薄膜等から選んで、ヌープ硬度
を調整し、非磁性薄膜を配し、強磁性金属薄膜は、直径
1mの円筒キャンに沿わせて、最小入射角46度、酸素
分圧4X10”−5(Torr )で、Co−Ni (
Co :80wt%)を700人電子ビーム蒸着するこ
とで配した。保護膜は、非磁性薄膜と同じやり方で構成
し、潤滑剤層は真空蒸着法でパーフルオロアラキン酸を
46人配し、Ca CO3とカーボンを1:1でポリエ
ステル樹脂に対し30重量%含むバックコート層を0.
4μ配し8ミリ幅の磁気テープにした。夫々のテープを
8ミリビデオを改造し、シリンダ径を26態に小型化し
、キャリア周波数を7 MHzにして再生画質をS/N
メーターで測定し比較した。環境条件を変化させて、再
生画質が2dB低下するまでのくり返し再生回数と初期
の相対S/Nを表にまとめてテープ構成条件と対比させ
て示した。BC! etc., a diamond thin film, etc., adjusted the Knoop hardness, arranged a non-magnetic thin film, and placed the ferromagnetic metal thin film along a cylindrical can with a diameter of 1 m, with a minimum incident angle of 46 degrees and an oxygen partial pressure of 4 x 10"- 5 (Torr), Co-Ni (
Co: 80wt%) was deposited by 700 electron beam evaporation. The protective film was constructed in the same manner as the non-magnetic thin film, and the lubricant layer was made of 46 layers of perfluoroarachidic acid by vacuum evaporation, and a backing containing 30% by weight of CaCO3 and carbon in a ratio of 1:1 to the polyester resin. The coating layer is 0.
The magnetic tape was 8mm wide with a 4μ distribution. Each tape was modified to 8mm video, the cylinder diameter was reduced to 26 states, the carrier frequency was changed to 7 MHz, and the playback quality was increased to S/N.
Measured with a meter and compared. The number of times of repeated playback until the playback image quality deteriorates by 2 dB and the initial relative S/N are summarized in a table and compared with the tape configuration conditions while changing the environmental conditions.
上表以外にも非磁性薄膜を1層目と2層目で異なる条件
としても検討を行った結果を含め、Go−Ni等の強磁
性金属薄膜のヌープ硬度は1000CKy/mf ’l
以下が多いことと、磁束量から必要な膜厚はSOO人か
ら3000人ぐらいの強磁性金属薄膜で、S/Nの低下
量を2dB以下になるパス回数が一り6℃〜+50C,
!5%RH〜so%RHでso回以上になるように構成
するには非磁性薄膜と保護膜のヌープ硬度は25001
: Kg/−)以上となるよう構成するのが望ましい。In addition to the above table, the Knoop hardness of a ferromagnetic metal thin film such as Go-Ni is 1000CKy/mf'l, including the results of studies conducted under different conditions for the first and second layers of a nonmagnetic thin film.
The required film thickness is ferromagnetic metal thin film of about 3,000 from SOO, and the number of passes to reduce the S/N reduction to 2 dB or less is 6℃ to +50℃.
! To configure so times or more at 5%RH to so%RH, the Knoop hardness of the nonmagnetic thin film and protective film is 25001.
: Kg/-) or more.
3層〜6層に強磁性金属薄膜を多層化する場合は220
0〔Kq/−〕程度でも目標を達成できるがその場合で
も26oOI:に9/−〕以上とすればより画質の劣化
を防げることになるのは勿論である。220 when multilayering 3 to 6 ferromagnetic metal thin films
Although the target can be achieved even with a value of about 0 [Kq/-], it goes without saying that deterioration in image quality can be further prevented by setting the value to 26oOI:9/-] or more.
発明の効果
以上のように本発明によれば、くり返し使用でも再生画
質の低下の小さい高密度磁気記録媒体かえられるといっ
たすぐれた効果がある。Effects of the Invention As described above, the present invention has the excellent effect of allowing high-density magnetic recording media to be replaced with little deterioration in reproduced image quality even after repeated use.
第1図は本発明の一実施例の磁気記録媒体の拡大断面図
、第2図は従来の磁気記録媒体の拡大断面図である。
5・・・・・・高分子フィルム、6.8・・・・・・非
磁性薄膜、7.9・・・・・・強磁性金属薄膜、10・
・・・・・保護膜。FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. 5...Polymer film, 6.8...Nonmagnetic thin film, 7.9...Ferromagnetic metal thin film, 10.
·····Protective film.
Claims (1)
護膜を配した磁気記録媒体にあって、非磁性薄膜と保護
膜がヌープ硬度2500〔Kg/mm^2〕以上の薄膜
であることを特徴とする磁気記録媒体。[Scope of Claim] A magnetic recording medium comprising a protective film arranged on a repeatedly laminated layer of a non-magnetic thin film and a ferromagnetic metal thin film, wherein the non-magnetic thin film and the protective film have a Knoop hardness of 2500 [Kg/mm^2] or more. A magnetic recording medium characterized by being a thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17782388A JP2596072B2 (en) | 1988-07-15 | 1988-07-15 | Magnetic recording media |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17782388A JP2596072B2 (en) | 1988-07-15 | 1988-07-15 | Magnetic recording media |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0227517A true JPH0227517A (en) | 1990-01-30 |
| JP2596072B2 JP2596072B2 (en) | 1997-04-02 |
Family
ID=16037727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17782388A Expired - Fee Related JP2596072B2 (en) | 1988-07-15 | 1988-07-15 | Magnetic recording media |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2596072B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6623836B1 (en) | 1992-11-19 | 2003-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium |
| US6805941B1 (en) | 1992-11-19 | 2004-10-19 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium |
-
1988
- 1988-07-15 JP JP17782388A patent/JP2596072B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6623836B1 (en) | 1992-11-19 | 2003-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium |
| US6805941B1 (en) | 1992-11-19 | 2004-10-19 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium |
| US7083873B2 (en) | 1992-11-19 | 2006-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium including a diamond-like carbon protective film with hydrogen and at least two additional elements |
| US7391592B2 (en) | 1992-11-19 | 2008-06-24 | Semiconductor Energy Laboratory Co., Ltd. | Magnetic recording medium including a diamond-like carbon protective film and at least two additional elements |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2596072B2 (en) | 1997-04-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |