JPH0227531U - - Google Patents
Info
- Publication number
- JPH0227531U JPH0227531U JP10671288U JP10671288U JPH0227531U JP H0227531 U JPH0227531 U JP H0227531U JP 10671288 U JP10671288 U JP 10671288U JP 10671288 U JP10671288 U JP 10671288U JP H0227531 U JPH0227531 U JP H0227531U
- Authority
- JP
- Japan
- Prior art keywords
- comb
- thin film
- pyroelectric
- shaped electrodes
- pyroelectric thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Description
第１図は本考案の焦電型センサに用いるくし形
電極の一例を示す図であり、第２図は第１図のＡ
―Ａ′断面図であり、第３図は出力感度と極板間
距離との関係を示すグラフであり、第４図は従来
の焦電型センサを示す概略部分断面図である。
１，１……くし形電極、２，２′……電極板、
３……基板、４……焦電体薄膜、Ａ……電極面積
、Ｃ……電気容量。
FIG. 1 is a diagram showing an example of a comb-shaped electrode used in the pyroelectric sensor of the present invention, and FIG. 2 is a diagram showing A of FIG.
-A' sectional view, FIG. 3 is a graph showing the relationship between output sensitivity and distance between electrode plates, and FIG. 4 is a schematic partial sectional view showing a conventional pyroelectric sensor. 1, 1... comb-shaped electrode, 2, 2'... electrode plate,
3... Substrate, 4... Pyroelectric thin film, A... Electrode area, C... Electric capacity.
Claims (1)
薄膜中に存在する一対のくし形電極とを有し、両
くし形電極の電極板が交互に配置されていること
を特徴とする焦電型センサ。 It has a pyroelectric thin film formed on a substrate and a pair of comb-shaped electrodes existing in the pyroelectric thin film, and the electrode plates of both comb-shaped electrodes are arranged alternately. Pyroelectric sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10671288U JPH0227531U (en) | 1988-08-12 | 1988-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10671288U JPH0227531U (en) | 1988-08-12 | 1988-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0227531U true JPH0227531U (en) | 1990-02-22 |
Family
ID=31340469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10671288U Pending JPH0227531U (en) | 1988-08-12 | 1988-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0227531U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007163202A (en) * | 2005-12-12 | 2007-06-28 | Shimadzu Corp | Pyroelectric sensor manufacturing method and pyroelectric sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5226271A (en) * | 1975-08-23 | 1977-02-26 | Horiba Ltd | Pyroelectricity detector |
| JPS62123324A (en) * | 1985-11-25 | 1987-06-04 | Nec Corp | Pyroelectric infrared detection element |
-
1988
- 1988-08-12 JP JP10671288U patent/JPH0227531U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5226271A (en) * | 1975-08-23 | 1977-02-26 | Horiba Ltd | Pyroelectricity detector |
| JPS62123324A (en) * | 1985-11-25 | 1987-06-04 | Nec Corp | Pyroelectric infrared detection element |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007163202A (en) * | 2005-12-12 | 2007-06-28 | Shimadzu Corp | Pyroelectric sensor manufacturing method and pyroelectric sensor |