JPH0227725U - - Google Patents
Info
- Publication number
- JPH0227725U JPH0227725U JP10556788U JP10556788U JPH0227725U JP H0227725 U JPH0227725 U JP H0227725U JP 10556788 U JP10556788 U JP 10556788U JP 10556788 U JP10556788 U JP 10556788U JP H0227725 U JPH0227725 U JP H0227725U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- cassette
- motherboard
- support surface
- inclined plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は、この考案の一実施例を示す断面図、
第２図はこの考案の一部切欠平面図、第３図は、
従来装置の断面図、第４図は、従来装置の全体を
示す側面図、第５図は、従来装置の部分斜視図で
ある。
図中、３はマザーボート、２ｂは斜平面、３は
カセツトボート、３ａは支持板、３ｂは支持面で
ある。なお、図中同一符号は同一又は、相当部分
を示す。
FIG. 1 is a sectional view showing an embodiment of this invention.
Figure 2 is a partially cutaway plan view of this invention, Figure 3 is:
FIG. 4 is a sectional view of the conventional device, FIG. 4 is a side view showing the entire conventional device, and FIG. 5 is a partial perspective view of the conventional device. In the figure, 3 is a mother boat, 2b is an oblique plane, 3 is a cassette boat, 3a is a support plate, and 3b is a support surface. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
平面を設け、このマザーボートの上部に位置する
カセツトボートの支持板にも斜面の支持面を設け
、上部マザーボートの斜平面に、上記カセツトボ
ートの支持面を載せるように構成した事を特徴と
するカセツト式のウエハボート。 Each rod of the motherboard consisting of two rods is provided with an inclined plane, and the support plate of the cassette boat located on the upper part of the motherboard is also provided with an inclined support surface, and the above-mentioned cassette is attached to the inclined plane of the upper mother boat. A cassette-type wafer boat characterized by being configured so that the support surface of the boat is placed on it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10556788U JPH0227725U (en) | 1988-08-09 | 1988-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10556788U JPH0227725U (en) | 1988-08-09 | 1988-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0227725U true JPH0227725U (en) | 1990-02-22 |
Family
ID=31338299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10556788U Pending JPH0227725U (en) | 1988-08-09 | 1988-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0227725U (en) |
-
1988
- 1988-08-09 JP JP10556788U patent/JPH0227725U/ja active Pending
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