JPH0228120U - - Google Patents
Info
- Publication number
- JPH0228120U JPH0228120U JP10802288U JP10802288U JPH0228120U JP H0228120 U JPH0228120 U JP H0228120U JP 10802288 U JP10802288 U JP 10802288U JP 10802288 U JP10802288 U JP 10802288U JP H0228120 U JPH0228120 U JP H0228120U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- copper
- silicon
- piezoelectric substrate
- weight percent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000010897 surface acoustic wave method Methods 0.000 claims 2
- 229910000881 Cu alloy Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 229910002058 ternary alloy Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図は本実施例による素子と従来素子との加速寿命
を示す特性図である。 １１……圧電性基板、１２……薄膜電極。
図は本実施例による素子と従来素子との加速寿命
を示す特性図である。 １１……圧電性基板、１２……薄膜電極。
Claims (1)
- 圧電性基板とこの圧電性基板上に形成された薄
膜電極とからなる弾性表面波素子において、前記
薄膜電極がシリコンを１〜３重量パーセントと銅
を４〜６重量パーセント含有するアルミニウム―
シリコン―銅の三元合金から構成されたことを特
徴とする弾性表面波素子。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10802288U JPH0228120U (ja) | 1988-08-16 | 1988-08-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10802288U JPH0228120U (ja) | 1988-08-16 | 1988-08-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0228120U true JPH0228120U (ja) | 1990-02-23 |
Family
ID=31342966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10802288U Pending JPH0228120U (ja) | 1988-08-16 | 1988-08-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0228120U (ja) |
-
1988
- 1988-08-16 JP JP10802288U patent/JPH0228120U/ja active Pending