JPH02287435A - liquid crystal display device - Google Patents

liquid crystal display device

Info

Publication number
JPH02287435A
JPH02287435A JP10963589A JP10963589A JPH02287435A JP H02287435 A JPH02287435 A JP H02287435A JP 10963589 A JP10963589 A JP 10963589A JP 10963589 A JP10963589 A JP 10963589A JP H02287435 A JPH02287435 A JP H02287435A
Authority
JP
Japan
Prior art keywords
liquid crystal
display device
crystal display
film
transparent substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10963589A
Other languages
Japanese (ja)
Inventor
Nobuyuki Shimotomoto
下斗本 信行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP10963589A priority Critical patent/JPH02287435A/en
Publication of JPH02287435A publication Critical patent/JPH02287435A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 [産業上の利用分野〕 本発明は液晶表示装置に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a liquid crystal display device.

[従来の技術] 従来の液晶表示装置を第2図を用いて説明する。[Conventional technology] A conventional liquid crystal display device will be explained using FIG. 2.

第2図は、従来の液晶表示装置の断面図である。FIG. 2 is a sectional view of a conventional liquid crystal display device.

従来の液晶表示装置は、下側の透明基板6上の電極8と
上側の透明基板1上の透明電極4を上下導通剤9を介し
て接続せしめていた。
In a conventional liquid crystal display device, an electrode 8 on a lower transparent substrate 6 and a transparent electrode 4 on an upper transparent substrate 1 are connected via a vertical conductive agent 9.

[発明が解決しようとする課M] しかし、前述の従来技術では、透明電極の抵抗値が高く
、特に大画面の表示装置の場合、電圧の遅延がおこり、
十分に画素電極に電圧をかけることができず、コントラ
スト比の低下や色再現性の低下をひきおこしていた。
[Problem M to be solved by the invention] However, in the above-mentioned conventional technology, the resistance value of the transparent electrode is high, and especially in the case of a large screen display device, a voltage delay occurs.
It was not possible to apply sufficient voltage to the pixel electrodes, causing a drop in contrast ratio and color reproducibility.

そこで本発明は、このような課題を解決するもので、そ
の目的とするところは、透明基板上に金属の補助配線を
行い、金属間で上下導通をさせることにより、コントラ
ストムラ・応答ムラ・色ムラなどの表示上のムラをなく
し、均一で高画質の液晶表示装置を得るところにある。
The present invention is intended to solve these problems.The purpose of the present invention is to provide auxiliary metal wiring on a transparent substrate and create vertical conduction between the metals, thereby reducing uneven contrast, uneven response, and color. The aim is to eliminate display irregularities such as unevenness and obtain a liquid crystal display device with uniform and high image quality.

[課題を解決するための手段] 本発明の液晶表示装置は、一対の基板上に液晶の電気光
学効果を制御するための手段を具備し、一対の基板を導
電材料にて導通せしめる液晶表示装置において、導通を
とる端子が金属材料であることを特徴とする。
[Means for Solving the Problems] The liquid crystal display device of the present invention is a liquid crystal display device that includes means for controlling the electro-optical effect of liquid crystal on a pair of substrates, and the pair of substrates are electrically connected through a conductive material. The terminal is characterized in that the terminal that establishes conduction is made of a metal material.

[実施例] 本発明の実施例を以下図面に基づいて説明する。[Example] Embodiments of the present invention will be described below based on the drawings.

第1図は本発明の液晶表示装置の断面図である。FIG. 1 is a sectional view of a liquid crystal display device of the present invention.

まず、透明基板6上に液晶の電気光学効果を制御する手
段として、ポリシリコン薄膜トランジスターを下記の(
1)〜(9)の工程により形成する。
First, as a means for controlling the electro-optic effect of liquid crystal on a transparent substrate 6, a polysilicon thin film transistor as shown below (
It is formed by steps 1) to (9).

(1)チャンネル部となるポリシリコン膜を減圧CVD
により形成し、バターニングする。
(1) Low pressure CVD for polysilicon film that will become the channel part
Form and butter.

(2)熱酸化法によりゲート酸化膜を形成する。(2) Form a gate oxide film by thermal oxidation.

(3)走査線及びゲート電極となるポリシリコン膜を減
圧CVDで形成し、バターニングする。
(3) A polysilicon film that will become the scanning line and gate electrode is formed by low pressure CVD and patterned.

(4)リンイオンを打ち込みソース、ドレイン領域を形
成する。
(4) Phosphorus ions are implanted to form source and drain regions.

(5)層間絶縁膜として3102膜をCVD法により形
成する。
(5) A 3102 film is formed as an interlayer insulating film by CVD.

(6)層間絶縁膜をバターニングしてコンタクトホール
を開口する。
(6) Patterning the interlayer insulating film to open contact holes.

(7)画素電極7となるITO膜をスパッタ法で形成し
、バターニングする。
(7) An ITO film that will become the pixel electrode 7 is formed by sputtering and patterned.

(8)データー線及び上下導通端子8となるA1膜をス
パッタ法で形成し、バターニングする。
(8) An A1 film that will become the data line and the upper and lower conductive terminals 8 is formed by sputtering and patterned.

(9)保護膜として5in2膜をマスクスパッタ法によ
り実装端子の部分を除いて基板全面に形成する。
(9) A 5in2 film is formed as a protective film over the entire surface of the substrate except for the mounting terminals by mask sputtering.

次に、透明基板1上にCr膜をスパッタ法で形成し、バ
ターニングして遮光層2を形成し、R・G−Bカラーフ
ィルター層3を印刷法にて形成する。そして、該カラー
フィルター層上に共通電極4としてITO膜を基板全面
にスパッタ法で形成し、ITO膜上にスパッタ法、蒸着
法などでCr膜を形成した後、バターニングして金属補
助配線5をマトリックス状に形成する。
Next, a Cr film is formed on the transparent substrate 1 by sputtering, patterned to form a light shielding layer 2, and R/G-B color filter layer 3 is formed by a printing method. Then, an ITO film is formed on the entire surface of the substrate as a common electrode 4 on the color filter layer by sputtering, and a Cr film is formed on the ITO film by sputtering, vapor deposition, etc., and then buttered to form metal auxiliary wiring 5. are formed into a matrix.

ここで、ITO膜上の金属材料は、Crに限るものでは
なく、低抵抗の膜であればなんでもよく例えばA1、T
i、Mo、Niなどがある。また、2層以上の膜にして
もよく、例えばCr+Alなどがある。
Here, the metal material on the ITO film is not limited to Cr, but any film with low resistance may be used, for example, A1, T
There are i, Mo, Ni, etc. Further, the film may have two or more layers, such as Cr+Al.

さらに、本実施例では、遮光層と金属補助配線を別に形
成したが、金属補助配線を遮光層に用いてもよい。
Further, in this embodiment, the light-shielding layer and the metal auxiliary wiring are formed separately, but the metal auxiliary wiring may be used as the light-shielding layer.

次に、上記一対の基板それぞれに配向膜としてポリイミ
ドをロールコート法にて表示エリアのみに塗布し、焼成
した後、ラビング処理し、上下導通剤9及びスペーサー
を混入したシール剤10を介して接着せしめ、最後に、
液晶11を封入した後、紫外線硬化型樹脂を封入口に塗
布して封止し、液晶表示装置を得た。
Next, polyimide is applied as an alignment film to each of the pair of substrates only on the display area using a roll coating method, baked, rubbed, and bonded together using a sealing agent 10 mixed with an upper and lower conductive agent 9 and a spacer. Finally, finally,
After the liquid crystal 11 was sealed, an ultraviolet curable resin was applied to the sealing opening to seal it, thereby obtaining a liquid crystal display device.

[発明の効果] 本発明は、以上説明したように、透明基板上に金属の補
助配線を行い、金属間で上下導通をさせたことにより、
共通電極の低抵抗化と接触抵抗を下げることができた。
[Effects of the Invention] As explained above, the present invention provides metal auxiliary wiring on a transparent substrate and vertical conduction between metals, thereby achieving
We were able to lower the resistance of the common electrode and the contact resistance.

その結果コントラストムラ・応答ムラ・色ムラなどの表
示上のムラがなくなり、均一で高コントラスト比と良好
な色再現性を有する液晶表示装置を得ることができた。
As a result, display unevenness such as contrast unevenness, response unevenness, and color unevenness was eliminated, and a liquid crystal display device having a uniform high contrast ratio and good color reproducibility could be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明の液晶表示装置の断面図、第2図は、
従来の液晶表示装置の断面図である。 透明基板 遮光層 カラフィルタ−層 共通電極 金属補助配線 透明基板 画素電極 上下導通端子 上下導通剤 シール剤 液晶 以上
FIG. 1 is a sectional view of the liquid crystal display device of the present invention, and FIG.
1 is a cross-sectional view of a conventional liquid crystal display device. Transparent substrate Light-shielding layer Color filter layer Common electrode Metal auxiliary wiring Transparent substrate Pixel electrode Vertical conduction terminal Vertical conduction agent Sealing agent Liquid crystal or higher

Claims (1)

【特許請求の範囲】[Claims] 一対の基板上に液晶の電気光学効果を制御するための手
段を具備し、一対の基板を導電材料にて導通せしめる液
晶表示装置において、導通をとる端子が金属材料である
ことを特徴とする液晶表示装置。
A liquid crystal display device comprising a means for controlling the electro-optical effect of a liquid crystal on a pair of substrates, and in which the pair of substrates are electrically connected by a conductive material, wherein the terminal for establishing electrical conduction is made of a metal material. Display device.
JP10963589A 1989-04-28 1989-04-28 liquid crystal display device Pending JPH02287435A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10963589A JPH02287435A (en) 1989-04-28 1989-04-28 liquid crystal display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10963589A JPH02287435A (en) 1989-04-28 1989-04-28 liquid crystal display device

Publications (1)

Publication Number Publication Date
JPH02287435A true JPH02287435A (en) 1990-11-27

Family

ID=14515279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10963589A Pending JPH02287435A (en) 1989-04-28 1989-04-28 liquid crystal display device

Country Status (1)

Country Link
JP (1) JPH02287435A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6099993A (en) * 1997-07-14 2000-08-08 Lg Electronics Inc. Color filter panel of a liquid crystal display and method of manufacturing the same
KR100474029B1 (en) * 2001-04-20 2005-03-08 가부시끼가이샤 도시바 Display device and method of manufacturing the same
KR100778836B1 (en) * 2000-12-30 2007-11-22 엘지.필립스 엘시디 주식회사 LCD and its manufacturing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6099993A (en) * 1997-07-14 2000-08-08 Lg Electronics Inc. Color filter panel of a liquid crystal display and method of manufacturing the same
KR100778836B1 (en) * 2000-12-30 2007-11-22 엘지.필립스 엘시디 주식회사 LCD and its manufacturing method
KR100474029B1 (en) * 2001-04-20 2005-03-08 가부시끼가이샤 도시바 Display device and method of manufacturing the same

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