JPH02289351A - Recording head and recording device - Google Patents

Recording head and recording device

Info

Publication number
JPH02289351A
JPH02289351A JP9986189A JP9986189A JPH02289351A JP H02289351 A JPH02289351 A JP H02289351A JP 9986189 A JP9986189 A JP 9986189A JP 9986189 A JP9986189 A JP 9986189A JP H02289351 A JPH02289351 A JP H02289351A
Authority
JP
Japan
Prior art keywords
electrode
flow path
ink
recording
dielectric constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9986189A
Other languages
Japanese (ja)
Other versions
JP2854876B2 (en
Inventor
Takeshi Takemoto
武 竹本
Hiromichi Komai
博道 駒井
Masanori Horiie
正紀 堀家
Kakuji Murakami
格二 村上
Kiyofumi Nagai
希世文 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP9986189A priority Critical patent/JP2854876B2/en
Publication of JPH02289351A publication Critical patent/JPH02289351A/en
Application granted granted Critical
Publication of JP2854876B2 publication Critical patent/JP2854876B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 伎4立互 本発明は、インクジェットの記録ヘッドに関し。[Detailed description of the invention] Ki 4 standing The present invention relates to an inkjet recording head.

例えば、流体素子、ポンプ、バルブ等に適用されるもの
である。
For example, it is applied to fluid elements, pumps, valves, etc.

従」6支術− 第6図及び第7図は、従来の加圧オンデマンドマルチヘ
ッドの構成図で、第6図は断面図、第7図はその上面図
を示すものである。図中、21は上板、22は電歪振動
子、23はインク供給路、24はインク供給側流路、2
5はインク加圧液室、26は基板、27は流路、28は
ノズル、29は共通液室、30はインク供給孔である。
6 and 7 are configuration diagrams of a conventional pressurizing on-demand multi-head, with FIG. 6 showing a sectional view and FIG. 7 showing a top view thereof. In the figure, 21 is an upper plate, 22 is an electrostrictive vibrator, 23 is an ink supply path, 24 is an ink supply side flow path, 2
5 is an ink pressurizing liquid chamber, 26 is a substrate, 27 is a channel, 28 is a nozzle, 29 is a common liquid chamber, and 30 is an ink supply hole.

この加圧オンデマンドマルチヘッドは、#i電歪振動子
より液室を加圧してノズルよりインクを噴出するもので
ある。
This pressurized on-demand multi-head pressurizes the liquid chamber using the #i electrostrictive vibrator and ejects ink from the nozzle.

また、特開昭63−307959公号報は、静電力によ
り梁をたわませてノズルをふさぎ、いわゆるバルブを楕
成し、昇華性染料のガス流を出したりふさいだりして制
御を行っているものである。
Furthermore, Japanese Patent Application Laid-Open No. 63-307959 discloses a method in which a beam is bent by electrostatic force to block a nozzle, a so-called valve is formed into an oval shape, and the gas flow of sublimable dye is released or blocked to perform control. It is something that exists.

また、液室内に弾性可動部を設け、この弾性可動部に第
1電極を配し、液室の内壁に設けられた第211極との
間に電圧を印加して、弾性可動部を変形させてノズルよ
り液滴を噴出するものも提案されている。しかしながら
、従来の電歪振動子を使ったマルチヘッドではインクの
噴出力を得る爲にある程度の大きさの電歪振動子が必要
であり、この外商密度化には適さないものであった。ま
た。
Further, an elastic movable part is provided in the liquid chamber, a first electrode is disposed on the elastic movable part, and a voltage is applied between the first electrode and the 211th pole provided on the inner wall of the liquid chamber to deform the elastic movable part. A device that ejects droplets from a nozzle has also been proposed. However, conventional multi-heads using electrostrictive vibrators require electrostrictive vibrators of a certain size to obtain the ink jetting force, and are not suitable for increasing the density of foreign products. Also.

静電力をカンチレバーに作用させ、そのカンチレバーの
変位によって液室内のインクをノズルより噴出させるも
のは、駆動力がやや不足し、高電圧を必要としたり、カ
ンチレバーの面積を大きくしたり電極間ギャップを小さ
くしたりする必要があった。高電圧にすれば電源コスト
があがり、スイッチングする駆動回路もコスト高となる
。また。
A method that applies electrostatic force to a cantilever and ejects ink in a liquid chamber from a nozzle due to the displacement of the cantilever has somewhat insufficient driving force, requires high voltage, increases the area of the cantilever, and reduces the gap between electrodes. I needed to make it smaller. If the voltage is high, the cost of the power supply will increase, and the cost of the switching drive circuit will also increase. Also.

カンチレバーの面積を大きくとればそれだけ高密度化が
できなくなる。さらに、電極ギャップを小さくすると、
電極間の絶縁破壊が発生しやすくなるとともに、ギャッ
プ維持の爲の構成、加工が難しくなるなどの不具合が発
生する。また、インクそのものの比誘電率を大きく上げ
ることは、インクの特性上困難であることも明白である
。
The larger the area of the cantilever, the more difficult it becomes to achieve high density. Furthermore, if the electrode gap is made smaller,
In addition to being more likely to cause dielectric breakdown between the electrodes, problems occur such as making it difficult to configure and process the gap to maintain it. Furthermore, it is clear that it is difficult to greatly increase the dielectric constant of the ink itself due to the characteristics of the ink.

このように、従来の静電力による駆動力は非常に小さく
、所定の駆動力を得る爲にコスト、高密・変化、加工の
難しさなどを犠牲にして行っていた。
As described above, the conventional driving force based on electrostatic force is very small, and in order to obtain a predetermined driving force, costs, high density/change, difficulty of processing, etc. are sacrificed.

m−咋 本発明は、上述のごとき欠点を解決するためになされた
もので、高密度化を図り、駆動力を増大して十分な噴出
力をもつこと、また、熱により誘電率の急変する物質を
第1.第2電極間に封入し、第1.第2電極間には常時
直流バイアス電圧を印加し、個別電極の近傍を加熱する
ことにより、誘電率を急上昇させて直流バイアス電圧を
パルス的に使用可能とし、加熱パルスの低叶動電圧の使
用で大幅な価格低トを実現するようにしたインクシェツ
トの記録ヘッドを提供することを目的としてなされたも
のである。
The present invention was made in order to solve the above-mentioned drawbacks, and it is necessary to increase the density, increase the driving force, and have sufficient ejection force, and also to prevent sudden changes in dielectric constant due to heat. Matter first. sealed between the second electrodes, and the first. By constantly applying a DC bias voltage between the second electrodes and heating the vicinity of the individual electrodes, the dielectric constant is rapidly increased and the DC bias voltage can be used in pulses, allowing the use of low operating voltages for heating pulses. The purpose of this invention is to provide an ink sheet recording head that achieves a significant reduction in price.

週−一コ又 本発明は、上記目的を達成するために、(1)記録体と
、該記録体の流路を構成する流路構成体の一部又は全部
が振動部材である第1の′正極と5該流路外に該第1の
電極に対応して設けられた第2の電極とから成り、前記
第1の電極と前記第2の電極に電圧を印加して、前記振
動部材を変位させ、該流路の容積化により、該記録体に
移動二不ルギーを与えて記録媒体に付着させ記録するこ
と。
In order to achieve the above object, the present invention provides (1) a recording body and a first structure in which part or all of a flow path structure constituting a flow path of the recording body is a vibrating member. 'A positive electrode and a second electrode provided outside the flow path corresponding to the first electrode, and by applying a voltage to the first electrode and the second electrode, the vibrating member By displacing the recording medium and increasing the volume of the flow path, a moving force is applied to the recording medium so that the recording medium adheres to the recording medium and is recorded.

更には、(2)前記第1電極と、前記第2の電極の間に
比誘電率を持つ物質を充満させたこと、更には、(3)
第1.第2電極間に熱により比誘率変化の大きい材料を
封入し、前記第1.第2電極間の静電力によりインク吐
出すること、更には、(4)第1.第2電極間に熱によ
り比誘電率変化の大きい材料を封入すると共に、第1.
第2電極間の静電力と第1.第2電極と第3電極間の静
電力によりインク吐出することを特徴としたものである
。以下、本発明の実施例に基づいて説明する。
Furthermore, (2) a substance having a relative dielectric constant is filled between the first electrode and the second electrode, and (3)
1st. A material whose dielectric constant changes greatly due to heat is sealed between the second electrodes, and the first Ink is ejected by the electrostatic force between the second electrodes, and (4) the first. A material whose dielectric constant changes greatly due to heat is sealed between the second electrodes, and the first.
The electrostatic force between the second electrode and the first. It is characterized in that ink is ejected by electrostatic force between the second electrode and the third electrode. Hereinafter, the present invention will be explained based on examples.

第1図は、本発明による記録ヘッドの一実施例を説明す
るための構成図で、第2図は第1図の長手方向の断面図
である。図中、1は側壁、2は天板、3は振動板、4は
個別電極、5は共通電極。
FIG. 1 is a configuration diagram for explaining one embodiment of a recording head according to the present invention, and FIG. 2 is a sectional view taken in the longitudinal direction of FIG. 1. In the figure, 1 is a side wall, 2 is a top plate, 3 is a diaphragm, 4 is an individual electrode, and 5 is a common electrode.

6は基板、7は流路、8は強誘゛市性液晶、9は大%開
放口、10は共通液室、12は電源、13は噴出口、1
4はギャップ、15は紙である。
6 is a substrate, 7 is a flow path, 8 is a forced liquid crystal, 9 is a large opening, 10 is a common liquid chamber, 12 is a power source, 13 is a spout, 1
4 is a gap and 15 is paper.

インクの流路7を構成する側壁1及び振動板3は、エツ
チングやフォトリソグラフィー等によりシリコンで作ら
れている。又、流路7の上部は天板2でふさがれている
。流路7の一端はインクの噴出口13となっており。他
方は天板で構成される共通液室10となっている。共通
液室10には、インクタンク(図示せず)よりインクが
供給される。振動板3の裏側(流路側でない而)には個
別電極4が配置され、各々絶縁性を保っている。又、個
別電極4に対向する位置に適宜なキャップ14を保って
、共通電極5が基板6上に配置され、′電源12と接続
されている。個別電極4と共通電極5とにはさまれたギ
ャップ14には1強誘電性液晶8が充満され、大気開放
口9により大気開放となっている。なお、大気開放口は
なるべく大きく。
The side wall 1 and the diaphragm 3 constituting the ink flow path 7 are made of silicon by etching, photolithography, or the like. Further, the upper part of the flow path 7 is closed by the top plate 2. One end of the flow path 7 serves as an ink jet port 13. The other side is a common liquid chamber 10 made up of a top plate. Ink is supplied to the common liquid chamber 10 from an ink tank (not shown). Individual electrodes 4 are arranged on the back side of the diaphragm 3 (not on the flow path side), and each maintains insulation. Further, a common electrode 5 is placed on the substrate 6 with an appropriate cap 14 placed opposite the individual electrodes 4, and is connected to a power source 12. A gap 14 between the individual electrodes 4 and the common electrode 5 is filled with a ferroelectric liquid crystal 8 and is opened to the atmosphere through an air opening 9. In addition, the air opening should be as large as possible.

又、1ケ所だけでなはく、多数おいているのが好ましい
。
Also, it is preferable to have multiple locations rather than just one location.

このような構成のインフジエラ1〜記録ヘソ1−におい
て、個別電極4と共通電極5との間に電圧が印加される
と静電力により振動板3がたわみ、流路7の容積が大き
くなりインクが共通液室より供給される。ここで、印加
電圧を切ると、たわんでいた振動板3が元に戻り、流路
7内のインクを加圧する。インクは加圧されたエネルギ
ーにより、噴出口13によりインク滴として飛び出し、
紙15に付着して記録される。ギャップ14内の強誘電
性液晶8は流動性がある爲、振動板3のタワミに追従す
る。しかしながら、この強誘電性液晶8は振動板3に発
生するl原動力にとっては負荷となる爲、なるべ(少な
くなるように構成することが望ましい。又、個別電極相
互の強誘電性液晶8の動きによる干渉をなくす爲、第3
図に示す仕切板11を付けて各電極を仕切るようにした
方が良いことはいうまでもない。本発明の実施例は、強
誘電性液晶を電極間に介在させたものであるが、これに
とられれず適宜選択した材料を介在させ得ることはもち
ろん有益である。
When a voltage is applied between the individual electrodes 4 and the common electrode 5 in the Infusiera 1 to the recording heel 1- having such a configuration, the diaphragm 3 is deflected by electrostatic force, the volume of the flow path 7 is increased, and the ink is Supplied from the common liquid chamber. Here, when the applied voltage is turned off, the sagging diaphragm 3 returns to its original state and pressurizes the ink within the flow path 7. Due to the pressurized energy, the ink is ejected as ink droplets through the ejection port 13.
It adheres to the paper 15 and is recorded. Since the ferroelectric liquid crystal 8 within the gap 14 has fluidity, it follows the deflection of the diaphragm 3. However, this ferroelectric liquid crystal 8 is a load to the motive force generated in the diaphragm 3, and it is desirable to reduce the load.Also, the movement of the ferroelectric liquid crystal 8 between the individual electrodes is desirable. Third, to eliminate interference caused by
Needless to say, it is better to attach a partition plate 11 shown in the figure to partition each electrode. In the embodiment of the present invention, a ferroelectric liquid crystal is interposed between the electrodes, but it is of course advantageous that a suitably selected material can be interposed instead of this.

第4図、及び第5図は1本発明の他の実施例を示すもの
で、第4図は正面図、第5図は側面図を示し、16はノ
ズルプレート、17はインク供給路である。この実施例
では、噴出口13が振動板3の変位方向に位置する爲に
噴射効率が良い。
4 and 5 show another embodiment of the present invention, in which FIG. 4 is a front view and FIG. 5 is a side view, 16 is a nozzle plate, and 17 is an ink supply path. . In this embodiment, since the jet nozzle 13 is located in the direction of displacement of the diaphragm 3, the jetting efficiency is good.

次に、第1図に基づいて説明した本発明の実施例を改良
した他の実施例について説明する。すなわち、第1図に
おいて、個別電極4と共通電極5の間の印加電圧パルス
12(第1図では直流となっているがこの場合はパルス
が適当)で振動板3を変位させるが、振動板3は側壁1
と一体的又は接着等により接合されており、振動板3は
周辺固定の条件に等しく十分な振動変位を得るには印加
電圧パルスの波高値を大きくする必要があり開動回路の
コスト・が高くなる。 第8図は、平行平板に働く静電
引力を説明する図である。2枚の電極間に働く静電引力
Paは次式となる。
Next, another embodiment of the present invention that is an improvement on the embodiment described with reference to FIG. 1 will be described. That is, in FIG. 1, the diaphragm 3 is displaced by a voltage pulse 12 (direct current is applied in FIG. 1, but a pulse is appropriate in this case) applied between the individual electrode 4 and the common electrode 5, but the diaphragm 3 is side wall 1
The diaphragm 3 is connected integrally with the diaphragm 3 or by adhesive, etc., and in order to obtain sufficient vibration displacement equal to the condition that the diaphragm 3 is fixed around the periphery, it is necessary to increase the peak value of the applied voltage pulse, which increases the cost of the open circuit. . FIG. 8 is a diagram illustrating electrostatic attraction acting on parallel flat plates. The electrostatic attractive force Pa acting between two electrodes is expressed by the following formula.

ここで■は印加電圧、dは電極間距離、εは誘電率であ
り、その誘電率εは次式で示される。
Here, ■ is the applied voltage, d is the distance between the electrodes, and ε is the dielectric constant, and the dielectric constant ε is expressed by the following formula.

* ε=ε、ε     (2) ここでε、は真空の誘電率、ε は比誘電率である。従
って電界強度E (=V/d)が一定の時は比誘電率の
大きい材料程静電引力は大きくなる。
* ε=ε, ε (2) Here, ε is the permittivity of vacuum, and ε is the relative permittivity. Therefore, when the electric field strength E (=V/d) is constant, the electrostatic attraction becomes larger as the material has a larger relative dielectric constant.

第9図は、比vI誘電率温度変化を示す図である。FIG. 9 is a diagram showing the temperature change in the relative vI dielectric constant.

この様な温度変化により比誘電率の急する物質としては
5例えばニトロベンゼン(比誘電率は34)にチタン酸
バリウム(比誘電率は16000)を混合してゼリー状
にしたものが用いられ、TII=25℃からT、= 1
20℃の温度変化により比誘電率変化は200〜500
程度が得られる。また各種の強誘電性液晶を用いると比
誘電率変化は数百から数千となる。
As a substance whose dielectric constant increases rapidly due to temperature changes, for example, a jelly-like mixture of nitrobenzene (dielectric constant 34) and barium titanate (dielectric constant 16,000) is used, and TII =25℃ to T, = 1
The relative dielectric constant changes by 200 to 500 due to a temperature change of 20°C.
degree is obtained. Furthermore, when various types of ferroelectric liquid crystals are used, the relative dielectric constant changes from several hundred to several thousand.

第10図は、本発明のさらに他の実施例を示すもので、
図中、31は発熱体、32は上板、33は流路、34は
ノズル、35は発熱体駆動パルス。
FIG. 10 shows still another embodiment of the present invention,
In the figure, 31 is a heating element, 32 is an upper plate, 33 is a flow path, 34 is a nozzle, and 35 is a heating element drive pulse.

36は電源、37は下板、38は誘電材料、39は第2
電極、40は第1電極、41はスペーサ、42は振動部
材である。
36 is a power supply, 37 is a lower plate, 38 is a dielectric material, 39 is a second
The electrodes include a first electrode 40, a spacer 41, and a vibrating member 42.

上板32と振動部材42によりノズル34(点線で示す
)に対応した流路33が形成される。振動部材42と下
板37間には温度変化により比誘電率の急変する誘電材
料38が封入され、2つの電極1,2が配置されている
。2つの電極間には静電圧が印加されており、前記(1
)式の静電引力が働くが(2)式での比誘電率が小さい
ため静電引力は小さく、振動部材42の流路部の壁はわ
ずかな変位あるいは変位しない。振動部材42には各流
路に対応して発熱体31が設けられている。
The upper plate 32 and the vibrating member 42 form a flow path 33 corresponding to the nozzle 34 (indicated by a dotted line). A dielectric material 38 whose relative permittivity changes rapidly due to temperature changes is sealed between the vibrating member 42 and the lower plate 37, and two electrodes 1 and 2 are arranged therein. An electrostatic voltage is applied between the two electrodes, and the above (1
) acts, but since the dielectric constant in equation (2) is small, the electrostatic attraction is small, and the wall of the flow path portion of the vibrating member 42 is slightly displaced or not displaced. The vibrating member 42 is provided with a heating element 31 corresponding to each flow path.

発熱体駆動パルスの印加により発熱体近傍の:JI電材
料は急速に加熱され、第9図に示すように比誘電率が急
激に上昇する。このため前記(1)式の静電引力は増加
し、流路33に対応した振動部材42は変位して流路容
積が拡大する。発熱体駆動パルス35を切ると振動部4
2の復帰により流路内の圧力を上昇させてノズル34よ
りインクを吐出する。
By applying the heating element driving pulse, the :JI electric material near the heating element is rapidly heated, and the dielectric constant increases rapidly as shown in FIG. Therefore, the electrostatic attractive force expressed by equation (1) increases, the vibrating member 42 corresponding to the flow path 33 is displaced, and the flow path volume is expanded. When the heating element drive pulse 35 is turned off, the vibration section 4
2 returns, the pressure inside the flow path is increased and ink is ejected from the nozzle 34.

第11図は、さらに他の実施例を示すものである。振動
部材の変位原理は第10図のものと同じである。第1.
第2電極間の電位差+v1と第3電極の電位−■、とに
より流路中のインクにはv1+ V xの電位差があり
、インクにはクーロン力が働いてノズル先端でメニスカ
スを形成している。
FIG. 11 shows yet another embodiment. The principle of displacement of the vibrating member is the same as that shown in FIG. 1st.
Due to the potential difference between the second electrode +v1 and the potential of the third electrode -■, there is a potential difference of v1+Vx in the ink in the flow path, and a Coulomb force acts on the ink to form a meniscus at the tip of the nozzle. .

発熱体への電圧パルス印加時の光路容積の増加により、
インクは一度ノズル内へ引き込まれるが、流路容積減少
時にはノズルより吐出する。この時電位差V t + 
V zによる静電力(クーロン力)によりインク滴速度
が加速されて高速かつ安定なインク吐出が実現できる。
Due to the increase in optical path volume when voltage pulses are applied to the heating element,
The ink is once drawn into the nozzle, but when the volume of the flow path decreases, it is ejected from the nozzle. At this time, the potential difference V t +
The ink droplet speed is accelerated by the electrostatic force (Coulomb force) caused by Vz, and high-speed and stable ink ejection can be realized.

抜−一末 以上の説明から明らかなように、本発明によると、駆動
の発生部を流路内ではなく流路外に構成した爲、インク
の特性(例えば、比誘電率、絶縁性等)を考慮しなくて
も良い。すなわち、インクは画質第1優先でその諸特性
を決定でき、装置側の特性に左右されなくなった。これ
は画像品質上この上もない効果である。また、静電力を
向上させる爲に用いられる比誘電率の高いものとしては
。
As is clear from the above description, according to the present invention, the drive generation part is configured outside the flow path rather than inside the flow path, and the characteristics of the ink (e.g. relative permittivity, insulation, etc.) There is no need to consider. In other words, the various characteristics of ink can be determined with image quality as the first priority, and are no longer influenced by the characteristics of the device. This is an excellent effect in terms of image quality. Also, as a material with a high dielectric constant that is used to improve electrostatic force.

すなわちグリセリンが、42.’5.サンニレツクMD
(三洋化成工業(株)商品名)が77.5である。さら
に大きい匪動力を必要とする時、最も好都合のものは、
強誘電性物質といえる。このうちでも特に強誘電性液晶
は比誘電率4000〜6000を超えるものもあり、さ
らに流動体であることも本発明の実施には好条件といえ
る。この様な強誘電性液晶を電極間に介在させることに
より、その比誘電率に見合った高い迂区動力を得ること
ができる。
That is, glycerin is 42. '5. Saniletsk MD
(Sanyo Chemical Industries, Ltd. product name) is 77.5. When you need even more power, the most convenient option is
It can be said to be a ferroelectric substance. Among these, some ferroelectric liquid crystals have a dielectric constant exceeding 4,000 to 6,000, and the fact that they are fluids is also a favorable condition for implementing the present invention. By interposing such a ferroelectric liquid crystal between the electrodes, a high detour force commensurate with its dielectric constant can be obtained.

又、このような構成にすることにより、昧勅発生部は電
極パターンを作るだけで良く、例えば従来例のマルチヘ
ッドに必要な電歪振動子などが不必要であり、高質積比
が可能となった。さらに低電圧暉動が可能で低価格化が
可能となり、また高速、安定なインク吐出が可能となる
。
In addition, by adopting such a configuration, it is only necessary to create an electrode pattern for the vibration generating part, and for example, there is no need for an electrostrictive vibrator required for a conventional multi-head, and a high quality area ratio is possible. It became. Furthermore, low voltage agitation is possible, making it possible to reduce costs, and high-speed, stable ink ejection becomes possible.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明による記録ヘットの一実施例を説明す
るための構成図、第2図は、第1図の長手方向の断面図
、第3図は、電極間に仕切板を設けた場合の構成図、第
4図、及び第5図は、本発明の他の実施例を示す図、第
6図、及び第7図は、従来の加圧オンデマントマルチへ
y l’の構成図。 第8図は、平行平板間に働く静電引力を説明するための
図、第9図は、比誘電率の温度変化を示す図、第10図
及び第11図は、本発明のさらに他の実施例を示す図で
ある。 ■・・・側壁、2・・・天板、3・・・振動板、4・・
・個別m極、5・・・共通電極、6・・基板、7・・・
流路、8・・・強誘電性液晶、9・・・大気開放口、1
o・・・共通液室、11・・・仕切板、12・・電源、
13・・・噴出口、14・・・ギャップ、15・・・紙
。 第1図
FIG. 1 is a configuration diagram for explaining one embodiment of a recording head according to the present invention, FIG. 2 is a cross-sectional view taken in the longitudinal direction of FIG. 1, and FIG. FIGS. 4 and 5 are diagrams showing other embodiments of the present invention, and FIGS. 6 and 7 are diagrams showing the configuration of a conventional pressurized on-demand multiplier. . FIG. 8 is a diagram for explaining the electrostatic attraction acting between parallel plates, FIG. 9 is a diagram showing changes in relative dielectric constant with temperature, and FIGS. It is a figure showing an example. ■... Side wall, 2... Top plate, 3... Vibration plate, 4...
・Individual m pole, 5... Common electrode, 6... Substrate, 7...
Channel, 8... Ferroelectric liquid crystal, 9... Atmospheric opening, 1
o... Common liquid chamber, 11... Partition plate, 12... Power supply,
13... spout, 14... gap, 15... paper. Figure 1

Claims (1)

【特許請求の範囲】 1、記録体と、該記録体の流路を構成する流路構成体の
一部又は全部が振動部材である第1の電極と、該流路外
に該第1の電極に対応して設けられた第2の電極とから
成り、前記第1の電極と前記第2の電極に電圧を印加し
て、前記振動部材を変位させ、該流路の容積化により、
該記録体に移動エネルギーを与えて記録媒体に付着させ
記録することを特徴とする記録ヘッド。 2、前記第1電極と、前記第2の電極の間に比誘電率を
持つ物質を充満させたことを特徴とする請求項1記載の
記録ヘッド。
[Claims] 1. A recording body, a first electrode in which part or all of a flow path structure constituting a flow path of the recording body is a vibrating member, and a first electrode outside the flow path. and a second electrode provided corresponding to the electrode, and by applying a voltage to the first electrode and the second electrode to displace the vibrating member and increase the volume of the flow path,
A recording head characterized by applying moving energy to the recording medium to cause the recording medium to adhere to the recording medium and perform recording. 2. The recording head according to claim 1, wherein a material having a relative dielectric constant is filled between the first electrode and the second electrode.
JP9986189A 1989-02-17 1989-04-18 Recording head and recording device Expired - Lifetime JP2854876B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9986189A JP2854876B2 (en) 1989-02-17 1989-04-18 Recording head and recording device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP1-38866 1989-02-17
JP3886689 1989-02-17
JP9986189A JP2854876B2 (en) 1989-02-17 1989-04-18 Recording head and recording device

Publications (2)

Publication Number Publication Date
JPH02289351A true JPH02289351A (en) 1990-11-29
JP2854876B2 JP2854876B2 (en) 1999-02-10

Family

ID=26378158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9986189A Expired - Lifetime JP2854876B2 (en) 1989-02-17 1989-04-18 Recording head and recording device

Country Status (1)

Country Link
JP (1) JP2854876B2 (en)

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US6168263B1 (en) 1990-09-21 2001-01-02 Seiko Epson Corporation Ink jet recording apparatus
US6164759A (en) * 1990-09-21 2000-12-26 Seiko Epson Corporation Method for producing an electrostatic actuator and an inkjet head using it
EP0479441B1 (en) * 1990-09-21 1998-02-25 Seiko Epson Corporation Ink-jet recording apparatus and method for producing the head thereof
US5534900A (en) * 1990-09-21 1996-07-09 Seiko Epson Corporation Ink-jet recording apparatus
US5912684A (en) * 1990-09-21 1999-06-15 Seiko Epson Corporation Inkjet recording apparatus
US6113218A (en) * 1990-09-21 2000-09-05 Seiko Epson Corporation Ink-jet recording apparatus and method for producing the head thereof
US6117698A (en) * 1990-09-21 2000-09-12 Seiko Epson Corporation Method for producing the head of an ink-jet recording apparatus
SG79907A1 (en) * 1993-06-16 2001-04-17 Seiko Epson Corp Inkjet recording appratus having electrostatic actuating means and method of controlling it
EP0629503B1 (en) * 1993-06-16 1998-09-02 Seiko Epson Corporation Inkjet recording apparatus having electrostatic actuating means and method of controlling it
US5563634A (en) * 1993-07-14 1996-10-08 Seiko Epson Corporation Ink jet head drive apparatus and drive method, and a printer using these
EP1075949A2 (en) 1999-08-09 2001-02-14 Seiko Epson Corporation Driving method and driving device for an inkjet head
US6481833B1 (en) 1999-08-09 2002-11-19 Seiko Epson Corporation Inkjet printer
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WO2003097364A1 (en) 2002-05-20 2003-11-27 Ricoh Company, Ltd. Electrostatic actuator and liquid droplet ejecting head having stable operation characteristics against environmental changes
US7033002B2 (en) 2002-05-20 2006-04-25 Ricoh Company, Ltd. Electrostatic actuator and liquid droplet ejecting head having stable operation characteristics against environmental changes
US7105131B2 (en) 2002-09-05 2006-09-12 Xerox Corporation Systems and methods for microelectromechanical system based fluid ejection
US7810909B2 (en) 2005-11-25 2010-10-12 Ricoh Company, Ltd. Liquid drop jet apparatus and image forming apparatus capable of improving image quality and reducing cost

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