JPH0229366U - - Google Patents
Info
- Publication number
- JPH0229366U JPH0229366U JP10781988U JP10781988U JPH0229366U JP H0229366 U JPH0229366 U JP H0229366U JP 10781988 U JP10781988 U JP 10781988U JP 10781988 U JP10781988 U JP 10781988U JP H0229366 U JPH0229366 U JP H0229366U
- Authority
- JP
- Japan
- Prior art keywords
- blocks
- piezo stack
- mass flow
- flow controller
- fuses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Description
第１図は本考案の一実施例を示す回路図である
。第２図は従来技術を説明するための回路図であ
る。
１０……ピエゾスタツク、１１，１２，１３，
１４……ブロツク、５１，５２，５３，５４……
ヒユーズ。
FIG. 1 is a circuit diagram showing an embodiment of the present invention. FIG. 2 is a circuit diagram for explaining the prior art. 10... Piezo stack, 11, 12, 13,
14...Block, 51, 52, 53, 54...
Hughes.
Claims (1)
弁体を駆動するようにしたマスフローコントロー
ラにおいて、前記ピエゾスタツクを複数のブロツ
クに分割し、各ブロツクに対応してヒユーズを設
け、これらのヒユーズを介して前記各ブロツクに
電圧を印加するようにしたことを特徴とするマス
フローコントローラ。 In a mass flow controller that uses the strain force of a piezo stack to drive a valve body of a flow control section, the piezo stack is divided into a plurality of blocks, a fuse is provided corresponding to each block, and the flow is transmitted through these fuses. A mass flow controller characterized in that a voltage is applied to each of the blocks.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10781988U JPH0229366U (en) | 1988-08-15 | 1988-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10781988U JPH0229366U (en) | 1988-08-15 | 1988-08-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0229366U true JPH0229366U (en) | 1990-02-26 |
Family
ID=31342576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10781988U Pending JPH0229366U (en) | 1988-08-15 | 1988-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229366U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020089037A (en) * | 2018-11-22 | 2020-06-04 | 株式会社堀場エステック | Piezo actuator, fluid control valve and fluid control apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6396377A (en) * | 1986-10-14 | 1988-04-27 | Hitachi Metals Ltd | Piezo-electric valve driving circuit |
-
1988
- 1988-08-15 JP JP10781988U patent/JPH0229366U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6396377A (en) * | 1986-10-14 | 1988-04-27 | Hitachi Metals Ltd | Piezo-electric valve driving circuit |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020089037A (en) * | 2018-11-22 | 2020-06-04 | 株式会社堀場エステック | Piezo actuator, fluid control valve and fluid control apparatus |
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