JPH0230836U - - Google Patents
Info
- Publication number
- JPH0230836U JPH0230836U JP10837688U JP10837688U JPH0230836U JP H0230836 U JPH0230836 U JP H0230836U JP 10837688 U JP10837688 U JP 10837688U JP 10837688 U JP10837688 U JP 10837688U JP H0230836 U JPH0230836 U JP H0230836U
- Authority
- JP
- Japan
- Prior art keywords
- performance filter
- ultra
- clean
- clean unit
- ceiling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007664 blowing Methods 0.000 claims 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988108376U JPH0720499Y2 (ja) | 1988-08-18 | 1988-08-18 | クリ−ンル−ム構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988108376U JPH0720499Y2 (ja) | 1988-08-18 | 1988-08-18 | クリ−ンル−ム構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0230836U true JPH0230836U (fr) | 1990-02-27 |
| JPH0720499Y2 JPH0720499Y2 (ja) | 1995-05-15 |
Family
ID=31343644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988108376U Expired - Lifetime JPH0720499Y2 (ja) | 1988-08-18 | 1988-08-18 | クリ−ンル−ム構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0720499Y2 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004114378A1 (fr) * | 2003-06-19 | 2004-12-29 | Hokkaido Technology Licensing Office Co., Ltd. | Unite propre et systeme associe, unite fonctionnelle et systeme associe, procede de traitement de materiaux, procede de fabrication d'elements, methode de culture de lignees cellulaires et methode de culture de corps vegetaux |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62155455A (ja) * | 1985-12-27 | 1987-07-10 | Hitachi Plant Eng & Constr Co Ltd | クリ−ンル−ム |
-
1988
- 1988-08-18 JP JP1988108376U patent/JPH0720499Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62155455A (ja) * | 1985-12-27 | 1987-07-10 | Hitachi Plant Eng & Constr Co Ltd | クリ−ンル−ム |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004114378A1 (fr) * | 2003-06-19 | 2004-12-29 | Hokkaido Technology Licensing Office Co., Ltd. | Unite propre et systeme associe, unite fonctionnelle et systeme associe, procede de traitement de materiaux, procede de fabrication d'elements, methode de culture de lignees cellulaires et methode de culture de corps vegetaux |
| JPWO2004114378A1 (ja) * | 2003-06-19 | 2006-07-27 | 北海道ティー・エル・オー株式会社 | クリーンユニット、クリーンユニットシステム、機能ユニット、機能ユニットシステム、材料処理方法、素子製造方法、細胞系育成方法および植物体育成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0720499Y2 (ja) | 1995-05-15 |