JPH0232007U - - Google Patents
Info
- Publication number
- JPH0232007U JPH0232007U JP10989288U JP10989288U JPH0232007U JP H0232007 U JPH0232007 U JP H0232007U JP 10989288 U JP10989288 U JP 10989288U JP 10989288 U JP10989288 U JP 10989288U JP H0232007 U JPH0232007 U JP H0232007U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- gold
- deposits
- electrode
- film thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims description 2
- 238000005275 alloying Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Description
第１図は、この考案の一実施例に係る水晶振動
子を示す拡大縦断面図である。第２図は、従来の
水晶振動子の一例を示す拡大縦断面図である。
２……水晶板、４……電極、６……金電極、８
……付着物、１０……拡散防止層。
FIG. 1 is an enlarged longitudinal sectional view showing a crystal resonator according to an embodiment of the invention. FIG. 2 is an enlarged vertical cross-sectional view showing an example of a conventional crystal resonator. 2... Quartz plate, 4... Electrode, 6... Gold electrode, 8
... Adhesive matter, 10 ... Diffusion prevention layer.
Claims (1)
この電極上に金電極をそれぞれ設けた構造の膜厚
計用水晶振動子において、少なくとも付着物を付
着させる面側の金電極上に、当該金電極と付着物
との合金化を防止する拡散防止層を設けたことを
特徴とする膜厚計用水晶振動子。 In a crystal oscillator for film thickness gage having a structure in which electrodes are provided on both main surfaces of a crystal plate and gold electrodes are provided on each electrode, at least the gold electrode on the side to which deposits are attached is A crystal resonator for a film thickness meter, characterized by being provided with a diffusion prevention layer that prevents alloying of gold electrodes and deposits.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10989288U JPH0232007U (en) | 1988-08-22 | 1988-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10989288U JPH0232007U (en) | 1988-08-22 | 1988-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0232007U true JPH0232007U (en) | 1990-02-28 |
Family
ID=31346555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10989288U Pending JPH0232007U (en) | 1988-08-22 | 1988-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0232007U (en) |
-
1988
- 1988-08-22 JP JP10989288U patent/JPH0232007U/ja active Pending
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