JPH0233252U - - Google Patents

Info

Publication number
JPH0233252U
JPH0233252U JP11134288U JP11134288U JPH0233252U JP H0233252 U JPH0233252 U JP H0233252U JP 11134288 U JP11134288 U JP 11134288U JP 11134288 U JP11134288 U JP 11134288U JP H0233252 U JPH0233252 U JP H0233252U
Authority
JP
Japan
Prior art keywords
protrusion
closed container
operating
male thread
telescopic member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11134288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11134288U priority Critical patent/JPH0233252U/ja
Publication of JPH0233252U publication Critical patent/JPH0233252U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図はこの考案に係る操作装置を示す断面図
、第２図はこの考案に係る操作装置の作用を説明
するための断面図、第３図は従来型の操作機構が
取付けられたスパツタ装置を示す略線図、第４図
は第３図に示す操作機構の要部断面図である。 １……チヤンバ（密閉容器）、６……伸縮部材
、２……突起部、３……回転操作体、４……動作
機構。

Claims (1)

  1. 【実用新案登録請求の範囲】 他から遮蔽された密閉容器内でこの内部に設け
    た被作業物をその密閉容器外から操作する操作装
    置であつて、 前記密閉容器の一部に突出し、外周側に雄ネジ
    を有すると共に先端側にベローズ状の伸縮部材を
    取付けた突起部と、 この突起部の雄ネジに螺合し、回転動作によつ
    て伸縮部材を進退させる回転操作体と、 この回転操作の進退動作によつて所定の動作を
    行わせる突起部内に設けた動作機構と を備えたことを特徴とする操作装置。
JP11134288U 1988-08-25 1988-08-25 Pending JPH0233252U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11134288U JPH0233252U (ja) 1988-08-25 1988-08-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11134288U JPH0233252U (ja) 1988-08-25 1988-08-25

Publications (1)

Publication Number Publication Date
JPH0233252U true JPH0233252U (ja) 1990-03-01

Family

ID=31349301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11134288U Pending JPH0233252U (ja) 1988-08-25 1988-08-25

Country Status (1)

Country Link
JP (1) JPH0233252U (ja)

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