JPH0237441U - - Google Patents

Info

Publication number
JPH0237441U
JPH0237441U JP11675488U JP11675488U JPH0237441U JP H0237441 U JPH0237441 U JP H0237441U JP 11675488 U JP11675488 U JP 11675488U JP 11675488 U JP11675488 U JP 11675488U JP H0237441 U JPH0237441 U JP H0237441U
Authority
JP
Japan
Prior art keywords
cooling holes
ring
cooling
waterway
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11675488U
Other languages
English (en)
Other versions
JPH0735293Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988116754U priority Critical patent/JPH0735293Y2/ja
Publication of JPH0237441U publication Critical patent/JPH0237441U/ja
Application granted granted Critical
Publication of JPH0735293Y2 publication Critical patent/JPH0735293Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

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  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例にかかるイオン源の一
部横断平面図。第２図は同じものの縦断面図。第
３図は冷却穴の流れを示す透視斜視図。第４図は
従来例の構造を示す平面図。第５図は他の例を表
わすための冷却水流れ透視斜視図。 １……イオン源チヤンバ、２……フタ、３……
上板、４……リング、５……栓、６……冷却パイ
プ、７……冷却穴、８……第１リング水路、９…
…第２リング水路、１０……排水口、１１……マ
グネツト、１２……切欠き、１３……取付けボル
ト穴、１４……切込み、１５……冷却パイプ、２
１……内突条、２２……外突条、２３……上端面
、２４……内面、２５……横穴、２６……フラン
ジ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 円筒形のイオン源チヤンバ１の壁を軸方向に貫
    くように穿設される複数本の冷却穴７，７，…と
    、全ての冷却穴７，７，…の一端に連通するよう
    設けられた環状の第１リング水路８と、全ての冷
    却穴７，７，…の他端に連通するよう設けられた
    環状の第２リング水路９とよりなり、冷却水が第
    １リング水路８、冷却穴７，７，…第２リング水
    路９の中を通るようにした事を特徴とするイオン
    源。
JP1988116754U 1988-09-05 1988-09-05 イオン源 Expired - Fee Related JPH0735293Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988116754U JPH0735293Y2 (ja) 1988-09-05 1988-09-05 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988116754U JPH0735293Y2 (ja) 1988-09-05 1988-09-05 イオン源

Publications (2)

Publication Number Publication Date
JPH0237441U true JPH0237441U (ja) 1990-03-12
JPH0735293Y2 JPH0735293Y2 (ja) 1995-08-09

Family

ID=31359580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988116754U Expired - Fee Related JPH0735293Y2 (ja) 1988-09-05 1988-09-05 イオン源

Country Status (1)

Country Link
JP (1) JPH0735293Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001160368A (ja) * 1999-12-01 2001-06-12 Sumitomo Eaton Noba Kk イオン源

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037700A (ja) * 1983-07-04 1985-02-27 セントル・ナシヨナル・ド・ラ・ルシエルシエ・サイエンテイフイク 陰イオン源

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037700A (ja) * 1983-07-04 1985-02-27 セントル・ナシヨナル・ド・ラ・ルシエルシエ・サイエンテイフイク 陰イオン源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001160368A (ja) * 1999-12-01 2001-06-12 Sumitomo Eaton Noba Kk イオン源

Also Published As

Publication number Publication date
JPH0735293Y2 (ja) 1995-08-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees