JPH0237708B2 - - Google Patents

Info

Publication number
JPH0237708B2
JPH0237708B2 JP59273238A JP27323884A JPH0237708B2 JP H0237708 B2 JPH0237708 B2 JP H0237708B2 JP 59273238 A JP59273238 A JP 59273238A JP 27323884 A JP27323884 A JP 27323884A JP H0237708 B2 JPH0237708 B2 JP H0237708B2
Authority
JP
Japan
Prior art keywords
magnetic field
gas laser
tube
laser device
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59273238A
Other languages
Japanese (ja)
Other versions
JPS61152087A (en
Inventor
Shigeaki Kobayashi
Takeshi Kamya
Toshiharu Hayashi
Tatsumi Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP27323884A priority Critical patent/JPS61152087A/en
Publication of JPS61152087A publication Critical patent/JPS61152087A/en
Publication of JPH0237708B2 publication Critical patent/JPH0237708B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/032—Constructional details of gas laser discharge tubes for confinement of the discharge, e.g. by special features of the discharge constricting tube
    • H01S3/0326—Constructional details of gas laser discharge tubes for confinement of the discharge, e.g. by special features of the discharge constricting tube by an electromagnetic field

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明はガスレーザ装置に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to a gas laser device.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

従来のガス状レーザ媒質が封入されたレーザ管
を有するガスレーザ装置においては、管軸方向の
磁界を電磁石を用いて与えレーザ出力を増大させ
ている。 In a conventional gas laser device having a laser tube in which a gaseous laser medium is sealed, a magnetic field in the tube axis direction is applied using an electromagnet to increase the laser output.

管理方向の磁界は、放電プラズマ中の電子に、
その平均自由行程の間に管軸に平行ならせん運動
を与えその結果、管壁に向う電子とイオンの拡散
を押え電子密度が増加してレーザ出力を増大させ
る。 The magnetic field in the controlled direction causes the electrons in the discharge plasma to
During the mean free path, a spiral motion parallel to the tube axis is applied, which suppresses the diffusion of electrons and ions toward the tube wall, increases the electron density, and increases the laser output.

しかし、電磁石を用いているのでレーザ管全体
の構造は複雑で高価となり、重量も大幅に増す。
またこれに数百ワツトから数キロワツトの電力を
必要とし、実際のレーザエネルギー変換効率はこ
の分を差し引くと必ずしも多くなく電磁石の冷却
を要すると共にこの絶縁不良等の故障を考え合せ
ると改善効果は少ない。 However, since electromagnets are used, the structure of the entire laser tube is complicated and expensive, and the weight also increases significantly.
In addition, this requires several hundred watts to several kilowatts of power, and the actual laser energy conversion efficiency is not necessarily that high after deducting this amount, requiring cooling of the electromagnet and considering failures such as poor insulation, the improvement effect is small. .

〔発明の目的〕 この発明の目的は変換効率を改善し、レーザ出
力を増加するようにしたガスレーザ装置を提供す
るにある。[Object of the Invention] An object of the present invention is to provide a gas laser device that improves conversion efficiency and increases laser output.

〔発明の概要〕[Summary of the invention]

内部にガスレーザ媒質を封入したガスレーザ装
置において、電界ベクトルと管軸の作る面、すな
わちレーザ光の偏波面に対して直交する方向の磁
界を印加することにより、レーザ出力を増大する
ようにしたものである。 In a gas laser device with a gas laser medium sealed inside, the laser output is increased by applying a magnetic field in a direction perpendicular to the plane formed by the electric field vector and the tube axis, that is, the polarization plane of the laser light. be.

〔発明の実施例〕[Embodiments of the invention]

以下この発明の第１の実施例を第１図と第２図
を参照して説明する。第１図に示すガスレーザ装
置はたとえばセラミツク材料などで作られアルゴ
ン、クリプトンその他のガス状レーザ媒質を気密
に封入した封止構造のレーザ管１を備えている。
このレーザ管１の軸方向両端には各々ブリユース
タ窓２が装着されている。 A first embodiment of the present invention will be described below with reference to FIGS. 1 and 2. The gas laser device shown in FIG. 1 includes a laser tube 1 made of, for example, a ceramic material and having a sealed structure in which a gaseous laser medium such as argon, krypton, or the like is hermetically sealed.
A Brewstar window 2 is installed at each end of the laser tube 1 in the axial direction.

また、レーザ管１の軸方向中央部分は他の部分
に比べて肉厚で内径寸法が小さな放電細管部３に
て構成されている。この放電細管部３の一端側に
は第１の大径管部４が設けられ、他端側には第２
の大径管部５が設けられている。 Further, the axially central portion of the laser tube 1 is constituted by a discharge thin tube portion 3 that is thicker and has a smaller inner diameter than other portions. A first large-diameter tube section 4 is provided at one end of the discharge thin tube section 3, and a second large-diameter tube section 4 is provided at the other end.
A large diameter tube portion 5 is provided.

第１の大径部管４には陰極６が設けられ、第２
の大径管部５に陽極７が設けられていて、これら
は図示しない放電用電源に接続されている。ま
た、上記放電細管部３の外周には放電細管部３の
軸中心に対して交差する方向から磁界を与えるよ
う一対もしくは第２図に示すような両端が対向す
るように折曲形成された一体形の永久磁石８が放
電細管部３を上記両端間もしくは上記一対の場合
であれば対向する異極間に位着せしめて配置され
ている。なお、この実施例では上記磁界はブリユ
ースタ窓２のブリユースタ角を作る面に垂直に与
えられるようになつている。 The first large-diameter tube 4 is provided with a cathode 6, and the second large-diameter tube 4 is provided with a cathode 6.
An anode 7 is provided in the large-diameter tube portion 5, and these are connected to a discharge power source (not shown). Further, on the outer periphery of the discharge capillary section 3, a pair or a single piece is formed by bending so that both ends thereof face each other as shown in FIG. A shaped permanent magnet 8 is disposed to position the discharge capillary portion 3 between the two ends or, in the case of the pair, between opposite poles. In this embodiment, the magnetic field is applied perpendicularly to the plane of the Brieuster window 2 that forms the Brieuster angle.

上記の構成において、永久磁石８によつて放電
細管部３に磁界が与えられると放電細管部３内に
おいて電界と磁界とによるサイクロトロン運動が
起こる。この結果、ガス状レーザ媒質の電子が、
中性ガス粒子と衝突しながら管壁方向へドリフト
し、管軸方向への電子移動度が減少する。したが
つて、管軸方向の電界すなわち管内の電子温度が
増大し、管内エネルギー損失は増すがレーザ出力
はこれ以上大幅に増大する。 In the above configuration, when a magnetic field is applied to the discharge capillary section 3 by the permanent magnet 8, a cyclotron motion occurs within the discharge capillary section 3 due to the electric field and the magnetic field. As a result, the electrons in the gaseous laser medium
The electrons drift toward the tube wall while colliding with neutral gas particles, and the electron mobility in the tube axis direction decreases. Therefore, the electric field in the tube axis direction, that is, the electron temperature inside the tube increases, and the energy loss inside the tube increases, but the laser output further increases significantly.

第３図、第４図、第５図は、これを実験で検証
した結果である。第３図は放電電流をパラメータ
とした印加磁界の磁束密度に対する放電維持電圧
の変化、第４図は同じく放電電流をパラメータと
したレーザ出力の変化、第５図は同じく変換効率
の変化を示したものである。 Figures 3, 4, and 5 show the results of experimental verification of this. Figure 3 shows the change in discharge sustaining voltage with respect to the magnetic flux density of the applied magnetic field with the discharge current as a parameter, Figure 4 shows the change in laser output with the discharge current as a parameter, and Figure 5 shows the change in conversion efficiency. It is something.

用いたレーザ管は放電管細管部の径ｒが1.0mm
φ、有効放電長Ｌが36mmであり、磁界にはブリユ
ースタ窓２のブリユスタ角を作る面に垂直に与え
た。 The diameter r of the discharge tube thin tube part of the laser tube used was 1.0 mm.
φ, the effective discharge length L was 36 mm, and the magnetic field was applied perpendicularly to the plane of the Brieustre window 2 forming the Brieustre angle.

結果から明らかなように磁界の磁束密度約500
ガウス近傍に放電維持電圧変化のクリイテイカル
ポイントがありそれ以上の磁束密度に対しては、
その増加とともに放電維持電圧が急上昇し、それ
にともなつてレーザ出力も増大する。この時の電
子サイクロトロン半径rceは、 rce＝（2m／ｅ）1/2・E1/2／Ｂ ……(1) （ただしＥ；単位長当りの軸方向電界、ｅ；電荷
の絶対値、ｍ；電子の静止質量、） で表わされるので、上記(1)式よりMKS単位で表
わすと、rce＝3.37×10-6・E1/2／Ｂとなる。とこ
ろで磁界がない場合の小電流密度放電では一般に
単位長当りの軸方向電界E0はE0＝0.6／ｒ（Ｖ／
cm）であり、放電細管部の半径ｒが0.05cmのレー
ザ管では単位長さ当りの軸方向電界E0は12（Ｖ／
cm）となる。第３図の実験結果より磁界がない場
合放電維持電圧は、およそ76Vであるから陽極７
と、陰極６による電圧降下VDはVD＝V0−（E0×
Ｌ）で求められこの値はおよそ25Vである。 As is clear from the results, the magnetic flux density of the magnetic field is approximately 500
There is a critical point of discharge sustaining voltage change near Gauss, and for magnetic flux density higher than that,
As the voltage increases, the discharge sustaining voltage rises rapidly, and the laser output also increases accordingly. The electron cyclotron radius rce at this time is rce = (2m/e) 1/2・E 1/2 /B...(1) (where E: axial electric field per unit length, e: absolute value of charge, m: rest mass of electron, ) Therefore, when expressed in MKS units from the above equation (1), rce = 3.37×10 -6 ·E 1/2 /B. By the way, in a small current density discharge in the absence of a magnetic field, the axial electric field per unit length E 0 is generally E 0 = 0.6/r (V/
cm), and in a laser tube with a radius r of the discharge tube part of 0.05 cm, the axial electric field E0 per unit length is 12 (V/
cm). From the experimental results shown in Figure 3, the discharge sustaining voltage in the absence of a magnetic field is approximately 76V, so the anode 7
And the voltage drop V D due to the cathode 6 is V D = V 0 − (E 0 ×
This value is approximately 25V.

また、磁束密度500ガウスにおける放電維持電
圧VBは、およそ80Vであり、いずれの場合も電
極降下電圧VDは、一定であるので、磁界がある
場合の単位長さ当りの軸方向電界EBは、EB＝（VB
−VD）／Ｌで求められ、およそ15（Ｖ／cm）とな
る。 Further, the discharge sustaining voltage V B at a magnetic flux density of 500 Gauss is approximately 80 V, and the electrode drop voltage V D is constant in either case, so the axial electric field per unit length E B when a magnetic field is present. is E B = (V B
-V D )/L, which is approximately 15 (V/cm).

以上より磁束密度500ガウスでのサイクロトロ
ン半径rceは、放電細管部の半径ｒを〔cm〕、磁束
密度を〔Gauss〕単位で表わすと、 rce＝3.37・E1/2／Ｂ≒0.026〔cm〕となり、 これは放電細管半径のおよそ1/2すなわちrce
１／２ｒとなる。 From the above, the cyclotron radius rce at a magnetic flux density of 500 Gauss is expressed as: rce = 3.37・E 1/2 / B ≒ 0.026 [cm], where the radius r of the discharge tube section is expressed in [cm] and the magnetic flux density is expressed in [Gauss] units. This is approximately 1/2 of the radius of the discharge capillary, or rce
It becomes 1/2r.

したがつて、放電細管部の半径ｒを有するレー
ザ管に対しては、 rce＝≦1/2ｒ ……(2) を満足する値の磁束密度Ｂを持つ磁界を与えれば
よいことがわかる。 Therefore, it can be seen that for a laser tube whose discharge capillary portion has a radius r, it is sufficient to apply a magnetic field having a magnetic flux density B that satisfies rce=≦1/2r (2).

本実験結果の一例を示すと、磁束密度800ガウ
スで一定電流に対しレーザ出力で３倍以上、変換
効率で２倍以上改善がなされた。 An example of the results of this experiment is that at a magnetic flux density of 800 Gauss, the laser output was improved by more than 3 times and the conversion efficiency was improved by more than 2 times for a constant current.

以上述べたように放電細管部の管軸に上記(1)
式、(2)式を満足する磁界を印加することにより軸
方向電界Ｅつまり放電維持電圧が上昇し、レーザ
出力およびレーザへのエネルギー変換効率が顕著
に増大するような放電状態を作り出すことができ
た。 As mentioned above, the above (1) is applied to the tube axis of the discharge thin tube section.
By applying a magnetic field that satisfies Equation (2), the axial electric field E, that is, the discharge sustaining voltage increases, and it is possible to create a discharge state in which the laser output and the efficiency of energy conversion into the laser increase significantly. Ta.

また、この効果は偏波面に対して方向性があ
る。上記第１の実施例では偏波面は紙面に直交す
る方向になつているため、磁界は偏波面に直交方
向に加わることになり、より効果的にレーザ出力
を増大させることができた。 Moreover, this effect has directionality with respect to the plane of polarization. In the first embodiment, since the plane of polarization is perpendicular to the plane of the paper, the magnetic field is applied in a direction perpendicular to the plane of polarization, making it possible to increase the laser output more effectively.

ところで、放電細管部３に磁界を与える上記永
久磁石は電磁石を用いた場合のように給電したり
発熱するなどのことがないから給電装置や冷却部
分が不要となる。 By the way, the permanent magnet that applies a magnetic field to the discharge capillary section 3 does not supply power or generate heat unlike when an electromagnet is used, so a power supply device or a cooling part is not required.

第６図はこの発明の第２の実施例を示しこの実
施例は永久磁石の形状が第１の実施例と異なる。
つまり放電細管部の管軸に対して一方より直交し
た磁界を印加し同様の効果を得るようにしたもの
である。 FIG. 6 shows a second embodiment of the present invention, which differs from the first embodiment in the shape of the permanent magnet.
In other words, a similar effect is obtained by applying a magnetic field perpendicular to the tube axis of the discharge capillary section from one side.

第７図、第８図はこの考案の第３の実施例を示
す。この実施例は放電細管部３の外周にフインを
多数形成した放熱体９を設けるような空冷形のガ
スレーザ装置において、この発熱体９のフインの
一部を永久磁石８で形成し第１、第２の実施例と
同様の効果を得るようにしたものである。この場
合、第１の実施例と同様に放電細管部をはさむよ
うに１対の永久磁石８を配置するか、また、第２
の実施例を同様に管軸に対して一方のみに配置し
てもよい。 FIGS. 7 and 8 show a third embodiment of this invention. This embodiment is an air-cooled gas laser device in which a heat sink 9 having a large number of fins is provided on the outer periphery of a narrow discharge tube section 3. This embodiment is designed to obtain the same effect as the second embodiment. In this case, a pair of permanent magnets 8 may be arranged to sandwich the discharge capillary portion as in the first embodiment, or a second
The embodiment may similarly be arranged only on one side with respect to the tube axis.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、この発明は内部にガス状レ
ーザ媒質が封入されたレーザ管の放電細管部の管
軸に交差する方向の磁界を与えるようにしたの
で、変換効率が改善され、レーザ出力を増大する
ことができた。 As described above, this invention applies a magnetic field in the direction crossing the tube axis of the discharge capillary portion of the laser tube in which a gaseous laser medium is sealed, improving the conversion efficiency and increasing the laser output. was able to increase.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、この発明の第１の実施例を示す縦断
面図、第２図は第１図−線に沿う断面図、第
３図乃至第５図はこの発明の実施結果を表わす
図、第６図はこの発明の第２の実施例を示す縦断
面図、第７図は、この発明の第３の実施例を示す
縦断面図、第８図は、第７図−線に沿う断面
図である。 FIG. 1 is a longitudinal sectional view showing a first embodiment of the invention, FIG. 2 is a sectional view taken along the line of FIG. FIG. 6 is a longitudinal sectional view showing a second embodiment of the invention, FIG. 7 is a longitudinal sectional view showing a third embodiment of the invention, and FIG. 8 is a sectional view taken along the line of FIG. 7. It is a diagram.

Claims (1)

【特許請求の範囲】 １ 内部にガス状レーザ媒質が封入されレーザ光
の偏波面を規定する光学系を備えたガスレーザ管
の放電細管部の外周に磁界発生装置を設けたガス
レーザ装置において、上記磁界発生装置は磁界を
上記偏波面に直交するように設けられたことを特
徴とするガスレーザ装置。 ２ 特許請求の範囲第１項記載のガスレーザ装置
において所望の磁界の磁束密度Ｂは、 rce＝（2m／ｅ）1/2・E1/2／Ｂとしたときrce≦1/
２ｒを満足する値以上であることを特徴とするガ
スレーザ装置。 ただしrce：電子サイクロトロン半径 ｒ：放電細管部の半径 Ｅ：単位長当りの軸方向電界 ｅ：電子の電荷の絶対値 ｍ：電子の静止質量 ３ 特許請求の範囲第１項記載のガスレーザ装置
において、磁界発生装置は永久磁石としたことを
特徴とするガスレーザ装置。[Scope of Claims] 1. A gas laser device in which a magnetic field generator is provided on the outer periphery of a discharge capillary portion of a gas laser tube, which is equipped with an optical system that defines the plane of polarization of a laser beam and in which a gaseous laser medium is sealed. A gas laser device characterized in that the generator is provided so that the magnetic field is perpendicular to the plane of polarization. 2. In the gas laser device according to claim 1, the magnetic flux density B of the desired magnetic field is rce=(2m/e) 1/2・E 1/2 /B, then rce≦1/
1. A gas laser device characterized by having a value that satisfies 2r or more. where rce: Electron cyclotron radius r: Radius of discharge capillary portion E: Axial electric field per unit length e: Absolute value of electron charge m: Rest mass of electrons 3 In the gas laser device according to claim 1, A gas laser device characterized in that the magnetic field generator is a permanent magnet.
JP27323884A 1984-12-26 1984-12-26 Gas laser equipment Granted JPS61152087A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27323884A JPS61152087A (en) 1984-12-26 1984-12-26 Gas laser equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27323884A JPS61152087A (en) 1984-12-26 1984-12-26 Gas laser equipment

Publications (2)

Publication Number Publication Date
JPS61152087A JPS61152087A (en) 1986-07-10
JPH0237708B2 true JPH0237708B2 (en) 1990-08-27

Family

ID=17525039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27323884A Granted JPS61152087A (en) 1984-12-26 1984-12-26 Gas laser equipment

Country Status (1)

Country Link
JP (1) JPS61152087A (en)

Also Published As

Publication number Publication date
JPS61152087A (en) 1986-07-10

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