JPH0239453U - - Google Patents
Info
- Publication number
- JPH0239453U JPH0239453U JP11812688U JP11812688U JPH0239453U JP H0239453 U JPH0239453 U JP H0239453U JP 11812688 U JP11812688 U JP 11812688U JP 11812688 U JP11812688 U JP 11812688U JP H0239453 U JPH0239453 U JP H0239453U
- Authority
- JP
- Japan
- Prior art keywords
- abnormal current
- detection output
- current detection
- positive
- comparator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002159 abnormal effect Effects 0.000 claims 4
- 238000001514 detection method Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Description
第１図はこの考案の一実施例の構成を示す概略
図、第２図は第１図の要部の拡大図である。 １…正側比較器、２…負側比較器。
図、第２図は第１図の要部の拡大図である。 １…正側比較器、２…負側比較器。
Claims (1)
- ビーム電流を正の閾値と比較し前記ビーム電流
が前記正の閾値を超えた時に異常電流検出出力を
発生する正側比較器と、前記ビーム電流を負の閾
値と比較し前記ビーム電流が前記負の閾値を超え
た時に異常電流検出出力を発生する負側比較器と
、前記正側比較器の異常電流検出出力とビーム跳
ね上げ信号との論理積に応答して電流異常を報知
するとともに前記負側比較器の異常電流検出出力
に応答して電流異常を報知する報知手段とを備え
たイオン注入装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988118126U JPH0743936Y2 (ja) | 1988-09-07 | 1988-09-07 | イオン注入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988118126U JPH0743936Y2 (ja) | 1988-09-07 | 1988-09-07 | イオン注入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0239453U true JPH0239453U (ja) | 1990-03-16 |
| JPH0743936Y2 JPH0743936Y2 (ja) | 1995-10-09 |
Family
ID=31362208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988118126U Expired - Lifetime JPH0743936Y2 (ja) | 1988-09-07 | 1988-09-07 | イオン注入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0743936Y2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6020592A (en) * | 1998-08-03 | 2000-02-01 | Varian Semiconductor Equipment Associates, Inc. | Dose monitor for plasma doping system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62154596U (ja) * | 1986-03-25 | 1987-10-01 | ||
| JPS6399288U (ja) * | 1986-12-18 | 1988-06-27 |
-
1988
- 1988-09-07 JP JP1988118126U patent/JPH0743936Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62154596U (ja) * | 1986-03-25 | 1987-10-01 | ||
| JPS6399288U (ja) * | 1986-12-18 | 1988-06-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0743936Y2 (ja) | 1995-10-09 |