JPH0240441U - - Google Patents

Info

Publication number
JPH0240441U
JPH0240441U JP1988119218U JP11921888U JPH0240441U JP H0240441 U JPH0240441 U JP H0240441U JP 1988119218 U JP1988119218 U JP 1988119218U JP 11921888 U JP11921888 U JP 11921888U JP H0240441 U JPH0240441 U JP H0240441U
Authority
JP
Japan
Prior art keywords
mass flow
flow rate
flow controller
controller
systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988119218U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988119218U priority Critical patent/JPH0240441U/ja
Publication of JPH0240441U publication Critical patent/JPH0240441U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Flow Control (AREA)
JP1988119218U 1988-09-10 1988-09-10 Pending JPH0240441U (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988119218U JPH0240441U (2) 1988-09-10 1988-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988119218U JPH0240441U (2) 1988-09-10 1988-09-10

Publications (1)

Publication Number Publication Date
JPH0240441U true JPH0240441U (2) 1990-03-19

Family

ID=31364258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988119218U Pending JPH0240441U (2) 1988-09-10 1988-09-10

Country Status (1)

Country Link
JP (1) JPH0240441U (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140064868A (ko) * 2011-08-17 2014-05-28 에드워즈 리미티드 가스 스트림을 처리하기 위한 장치
JP2019529081A (ja) * 2016-09-02 2019-10-17 フルイディック・アナリティクス・リミテッド マイクロ流体デバイスのための流体流制御器の改良またはそれに関する改良
JP2024057291A (ja) * 2022-10-12 2024-04-24 株式会社島津製作所 流量切替機構及び質量分析装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140064868A (ko) * 2011-08-17 2014-05-28 에드워즈 리미티드 가스 스트림을 처리하기 위한 장치
JP2014529493A (ja) * 2011-08-17 2014-11-13 エドワーズ リミテッド ガス流処理装置
JP2019529081A (ja) * 2016-09-02 2019-10-17 フルイディック・アナリティクス・リミテッド マイクロ流体デバイスのための流体流制御器の改良またはそれに関する改良
JP2024057291A (ja) * 2022-10-12 2024-04-24 株式会社島津製作所 流量切替機構及び質量分析装置

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