JPH0240983A - gas laser oscillation device - Google Patents
gas laser oscillation deviceInfo
- Publication number
- JPH0240983A JPH0240983A JP63191739A JP19173988A JPH0240983A JP H0240983 A JPH0240983 A JP H0240983A JP 63191739 A JP63191739 A JP 63191739A JP 19173988 A JP19173988 A JP 19173988A JP H0240983 A JPH0240983 A JP H0240983A
- Authority
- JP
- Japan
- Prior art keywords
- discharge tube
- discharge
- oscillation device
- tube
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業−［−の利用分野〕
本発明は、放電管の軸方向と光軸方向が一致したガスレ
ーザ発振装置に係り、特に、放電管の異常発熱時におけ
る放電電極の劣化防止策を講じたガスレーザ発振装置に
関するものである。Detailed Description of the Invention [Field of Application in Industry] The present invention relates to a gas laser oscillation device in which the axial direction of a discharge tube and the optical axis direction coincide, and in particular, the present invention relates to a gas laser oscillation device in which the axial direction of a discharge tube and the optical axis direction coincide, and in particular, This invention relates to a gas laser oscillation device that takes measures to prevent deterioration.
従来、この種のガスレーザ発振装置としては例えば第２
図および第３図に示すように、ガラス等の誘電体よりな
る円筒状の放電管（１）の外周面管軸方向の両側２箇所
に所定間隔を設けて一対の金属電極（２）（３）を互い
に対向状に密着して配設すると共に、これら一対の金属
電極（２）（３）を高周波交流電源（４）に接続して、
両電極（２）（３）に例えば１３．５ｆｉＭ［ｌｚ 、
２ｋＶの高周波高電圧を印加する一方、両金属電極（２
）（３）間に挟まれた放電管（１）内の放電空間（５）
の両端に全反射鏡（６）と部分反射鏡（７）とを固定位
置に配設して、これら全反射鏡（６）および部分反射鏡
（７）により光共振器を構成してあり、また、前記放電
管（１）の両電極（２）（３）間の中央から送気管（８
）を連通状態で設けると共に、放電管（１）の両端側と
送気管（８）の他端間に一対の分岐管（９）（１０）を
両管（１）（８）と連通状態で配設して、放電管（１）
の中央から２方向に分岐する一対の循環通路を構成し、
更に、前記送気管（８）の途中部に送風機（１１）を設
けて、この送風機（１１）の両側方となる送気管（８）
中に、放電空間（５）中での放電および送風機（１１）
の駆動により昇温したレーザガスを冷却する熱交換７９
．（＋２）（１３）を配設してなる、いわゆる軸流型の
ガスレーザ発振装置が知られている。Conventionally, as this type of gas laser oscillation device, for example, a second
As shown in FIG. 3 and FIG. 3, a pair of metal electrodes (2) (3 ) are arranged in close contact with each other in a state facing each other, and the pair of metal electrodes (2) and (3) are connected to a high frequency AC power source (4),
For example, 13.5 fiM [lz,
While applying a high frequency high voltage of 2 kV, both metal electrodes (2
) (3) Discharge space (5) within the discharge tube (1) sandwiched between
A total reflection mirror (6) and a partial reflection mirror (7) are arranged at fixed positions at both ends of the mirror, and the total reflection mirror (6) and the partial reflection mirror (7) constitute an optical resonator. Also, from the center between the electrodes (2) and (3) of the discharge tube (1), the air pipe (8
) are provided in communication with each other, and a pair of branch pipes (9) and (10) are provided in communication with both pipes (1) and (8) between both ends of the discharge tube (1) and the other end of the air supply pipe (8). Arrange the discharge tube (1)
A pair of circulation passages branching in two directions from the center of the
Further, a blower (11) is provided in the middle of the air pipe (8), and the air pipe (8) is provided on both sides of the blower (11).
a discharge in the discharge space (5) and a blower (11);
Heat exchanger 79 cools the laser gas heated by the drive of
．． A so-called axial flow type gas laser oscillation device in which (+2)(13) is arranged is known.
なお、前記送風機（ＩＩ）としては、放電空間（５）に
おいて流速が約１００ｍ／ｓｅｅ程度のガス流を得るこ
とができる程度の送風能力を備えたものを使用する必要
がある。Note that the blower (II) needs to have a blowing capacity capable of producing a gas flow at a flow rate of about 100 m/see in the discharge space (5).
」を記構成の従来装置では、まず、一対の金属電極（２
）（３）に高周波電源（４）から高周波高電圧を印加し
て放電空間（５）にグロー状の放電を発生させると、こ
の放電空間（５）を通過するレーザガスは前記放電エネ
ルギーを得て励起されると共に、全反射鏡（６）および
部分反射鏡（７）により形成された光共振器の作用によ
り共振状態となり、これによって部分反射鏡（７）から
レーザビーム（８）が出力され、このレーザビーム（Ｂ
）をレーザ加Ｊ二等の用途に供することになる。In the conventional device configured as described above, first, a pair of metal electrodes (2
) When a high frequency high voltage is applied from the high frequency power supply (4) to (3) to generate a glow-like discharge in the discharge space (5), the laser gas passing through this discharge space (5) obtains the discharge energy. As it is excited, the optical resonator formed by the total reflection mirror (6) and the partial reflection mirror (7) enters a resonant state, whereby a laser beam (8) is output from the partial reflection mirror (7). This laser beam (B
) will be used for purposes such as laser processing.
ところで、上記のように金属電極（２）（３）間に高周
波高電圧トを印加してレーザビーム（Ｂ）を得る場合、
両金属電極（２）（３）間のインピーダンスによって放
電管（＋）内の放電献血が支配されることになり、この
インピーダンスが一定化するように、従来では例えば金
属電極（２）（３）を放電管（１）の外周面ヒに接着剤
（１４）等を用いて固着し、また、高周波電源（４）と
金属電極（２）（３）間のインピーダンス整合をとるた
めに両者間に共振回路（１５）を介装するようにしてい
た。By the way, when applying a high frequency and high voltage between the metal electrodes (2) and (3) as described above to obtain the laser beam (B),
The discharge blood donation in the discharge tube (+) is controlled by the impedance between the metal electrodes (2) and (3), and in order to keep this impedance constant, conventionally, for example, the metal electrodes (2) and (3) is fixed to the outer peripheral surface of the discharge tube (1) using an adhesive (14), etc., and in order to achieve impedance matching between the high frequency power source (4) and the metal electrodes (2) and (3), there is a A resonant circuit (15) was interposed.
しかしながら、ｌ−記従来構造のガスレーザ発振装置に
よると、放電管（１）の発熱等によって接着剤（Ｉ４）
の劣化による金属電極（２）（３）間のインピーダンス
の変化によって放電が不安定となり、レーザビームを効
率よく取出すことができないという問題点があった。However, according to the gas laser oscillator having the conventional structure described in I-1, the adhesive (I4) is damaged due to the heat generation of the discharge tube (1), etc.
There was a problem in that discharge became unstable due to changes in impedance between the metal electrodes (2) and (3) due to deterioration of the metal electrodes, and the laser beam could not be extracted efficiently.
本発明は、上記のような従来の問題点を解決するために
なされたもので、放電管の異常発熱による金属電極の劣
化を未然に防止して、装置の信頼性を長期に屍って確保
することを目的とするものである。The present invention was made in order to solve the above-mentioned conventional problems, and prevents deterioration of the metal electrode due to abnormal heat generation of the discharge tube, thereby ensuring long-term reliability of the device. The purpose is to
上記目的を達成するために本発明は、誘電体よりなる放
電管内を光軸方向にレーザガスを流し、前記放電管の外
周面に管径方向で互いに対向して設けられた金属電極間
に島周波電圧を印加してこの放電管内に放電を発生させ
、この放電をレーザ励起源として前記放電管の管軸方向
にレーザビームを発生するがスレーザ発振装置において
、前記放電管の外周にインピーダンス整合用共振回路素
子であるコイルを配設し、このコイルの材質を形状記憶
合金としたことを特徴とするものである。In order to achieve the above object, the present invention allows a laser gas to flow in the optical axis direction in a discharge tube made of a dielectric material, and generates island frequency waves between metal electrodes provided on the outer peripheral surface of the discharge tube facing each other in the tube diameter direction. A voltage is applied to generate a discharge inside the discharge tube, and this discharge is used as a laser excitation source to generate a laser beam in the tube axis direction of the discharge tube. The device is characterized in that a coil, which is a circuit element, is provided, and the material of the coil is a shape memory alloy.
本発明は上記構成により、放電管が異常発熱を起こすと
、放電管の外周に配設された形状記憶合金からなるコイ
ルが熱変形してそのインダクタンスが変化することによ
りインピーダンス整合条件が崩れ、放電が停止１する。With the above configuration, when the discharge tube generates abnormal heat, the coil made of a shape memory alloy disposed around the discharge tube is thermally deformed and its inductance changes, causing the impedance matching condition to collapse and the discharge to occur. stops 1.
したがって、放電管は異常発熱を起こすと、僅少時間後
に放電が停止されるので、金属電極を放電管外周に固着
する接着剤の加熱による劣化を未然に防止することがで
きるものである。Therefore, when the discharge tube generates abnormal heat, the discharge is stopped after a short period of time, so that deterioration due to heating of the adhesive that fixes the metal electrode to the outer periphery of the discharge tube can be prevented.
以下、本発明の実施例を図面に基づき詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail based on the drawings.
なお、この実施例装置は、前述した従来例と基本構成が
共通しているので、構成並びに作用が共通する部分は共
通の符号を付すこととし、重複を避けるためにその説明
を省略するものとする。This embodiment device has the same basic configuration as the conventional example described above, so parts with the same configuration and function will be given the same reference numerals, and their explanation will be omitted to avoid duplication. do.
第１図において、この実施例に係るガスレーザ発振装置
においては、放電管（１）の外周で金属電極（２）（３
）と対向する部位に、形状記憶合金からなるコイル（１
６）を管軸方向に挿嵌すると共に、このコイル（ＩＧ）
の一端を金属電極（２）に、また、他端を高周波交流電
源（４）を介して金属電極（３）に導線（１７）（１８
）により接続しである。In FIG. 1, in the gas laser oscillation device according to this embodiment, metal electrodes (2) (3
), a coil made of a shape memory alloy (1
6) in the tube axis direction, and this coil (IG)
One end is connected to the metal electrode (2), and the other end is connected to the metal electrode (3) via the high frequency AC power source (4) (17) (18).
) is connected.
前記フィル（１Ｂ）は例えば放電管（，１）の定常発熱
状態では金属電極（２）（３）と高周波交流電源（４）
間のインピーダンス整合条件に適合するインダクタンス
となる収縮接部で形状記憶させてあり、放電管（１）が
異常発熱して金属電極（２）（３）が加熱されると、こ
の加熱により昇温して軸方向に伸長するように構成され
ている。For example, the fill (1B) is connected to the metal electrodes (2) and (3) and the high frequency AC power source (4) when the discharge tube (,1) is in a steady state of heat generation.
The shape of the discharge tube (1) is memorized by a contracted contact that becomes an inductance that meets the impedance matching conditions between the metal electrodes (2) and (3). and is configured to extend in the axial direction.
このようなコイル（１Ｂ）を備えたこの実施例のガスレ
ーザ発振装置においては、放電管（＋）が定常発熱して
いるときは、コイル（１６）のインダクタンスが前記イ
ンピーダンス整合条件に適合する値を保持しており、放
電管（＋＞は支障なく駆動する。In the gas laser oscillator of this embodiment equipped with such a coil (1B), when the discharge tube (+) is generating steady heat, the inductance of the coil (16) has a value that meets the impedance matching condition. The discharge tube (+>) operates without any problem.
また、放電管（１）が異常発熱したときはコイル（１６
）が加熱されて軸方向に伸長し、インダクタンス値が変
化してインピーダンス整合条件が崩れ、放電管（１）の
放電は金属電極（２）（３）が過熱状態となる以前に停
止されることになる。Also, when the discharge tube (1) generates abnormal heat, the coil (16)
) is heated and extends in the axial direction, the inductance value changes and the impedance matching condition is broken, and the discharge of the discharge tube (1) is stopped before the metal electrodes (2) and (3) become overheated. become.
以１−説明したように本発明によれば、放電管の外周に
インピーダンス整合用共振回路素子であるコイルを配設
し、このコイルを形状記憶合金により形成しているので
、放電管が異常発熱を起こすと、放電管の外周に配設さ
れた形状記憶合金からなるコイルが熱変形してそのイン
ダクタンスが変化することによりインピーダンス整合条
件が崩れて放電が停止する。したがって、放電管は異常
発熱を起こすと、僅少時間後に放電が停止されるので、
金属電極を放電管外周に固着する接着剤の加熱による劣
化を未然に防止することができるので、長期間に亙って
高い信頼性を備えたガスレーザ発振装置を提供でき、レ
ーザ加工に優れた効果を発揮するものとなった。As explained above, according to the present invention, a coil, which is a resonant circuit element for impedance matching, is arranged around the outer circumference of the discharge tube, and this coil is made of a shape memory alloy, so that the discharge tube does not generate abnormal heat. When this happens, a coil made of a shape memory alloy disposed around the outer periphery of the discharge tube is thermally deformed and its inductance changes, destroying the impedance matching condition and stopping the discharge. Therefore, if the discharge tube generates abnormal heat, the discharge will be stopped after a short period of time.
Since it is possible to prevent the adhesive that fixes the metal electrode to the outer periphery of the discharge tube from deteriorating due to heating, it is possible to provide a gas laser oscillation device that is highly reliable over a long period of time, and has excellent effects on laser processing. It has become a way to demonstrate.
第１図は本発明の一実施例を示す放電管の斜視図、第２
図は従来例の縦断正面図、第３図は従来例の放電管の縦
断側面図である。
（１）・・・放電管、（２）（３）・・・金属電極、（
１Ｂ）・・・コイル。FIG. 1 is a perspective view of a discharge tube showing one embodiment of the present invention, and FIG.
The figure is a longitudinal sectional front view of a conventional example, and FIG. 3 is a longitudinal sectional side view of a conventional discharge tube. (1)...discharge tube, (2)(3)...metal electrode, (
1B)...Coil.
Claims (1)
し、前記放電管の外周面に管径方向で互いに対向して設
けられた金属電極間に高周波電圧を印加してこの放電管
内に放電を発生させ、この放電をレーザ励起源として前
記放電管の管軸方向にレーザビームを発生するガスレー
ザ発振装置において、前記放電管の外周にインピーダン
ス整合用共振回路素子であるコイルを配設し、このコイ
ルの材質を形状記憶合金としたことを特徴とするガスレ
ーザ発振装置。A laser gas is caused to flow in the optical axis direction within a discharge tube made of a dielectric material, and a high-frequency voltage is applied between metal electrodes provided on the outer peripheral surface of the discharge tube facing each other in the tube diameter direction to generate a discharge within the discharge tube. In a gas laser oscillation device that uses this discharge as a laser excitation source to generate a laser beam in the tube axis direction of the discharge tube, a coil, which is an impedance matching resonant circuit element, is disposed around the outer circumference of the discharge tube, and the coil is A gas laser oscillation device characterized in that the material is a shape memory alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63191739A JPH0240983A (en) | 1988-07-30 | 1988-07-30 | gas laser oscillation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63191739A JPH0240983A (en) | 1988-07-30 | 1988-07-30 | gas laser oscillation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0240983A true JPH0240983A (en) | 1990-02-09 |
Family
ID=16279695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63191739A Pending JPH0240983A (en) | 1988-07-30 | 1988-07-30 | gas laser oscillation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240983A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CZ300556B6 (en) * | 2002-03-20 | 2009-06-17 | Ceské vysoké ucení technické v Praze Fakulta elektrotechnická | Arc discharge lamp with cold cathode |
-
1988
- 1988-07-30 JP JP63191739A patent/JPH0240983A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CZ300556B6 (en) * | 2002-03-20 | 2009-06-17 | Ceské vysoké ucení technické v Praze Fakulta elektrotechnická | Arc discharge lamp with cold cathode |
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