JPH0241205B2 - - Google Patents
Info
- Publication number
- JPH0241205B2 JPH0241205B2 JP19963283A JP19963283A JPH0241205B2 JP H0241205 B2 JPH0241205 B2 JP H0241205B2 JP 19963283 A JP19963283 A JP 19963283A JP 19963283 A JP19963283 A JP 19963283A JP H0241205 B2 JPH0241205 B2 JP H0241205B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric vibrating
- vibrating element
- case
- spurious
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
この発明はスプリアス特性が優れた圧電振動部
品に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a piezoelectric vibrating component with excellent spurious characteristics.
圧電振動部品、たとえば、
拡がり振動モードやエネルギーとじこめ形厚み
振動モードを用いた発振子、FMデイスクリミネ
ータ用共振子、フフイルタあるいは、表面波を用
いたフイルタなどでは、スプリアスレスポンスの
抑圧対策が重要である。 Measures to suppress spurious responses are important for piezoelectric vibrating components, such as oscillators that use a spreading vibration mode or energy-containing thickness vibration mode, resonators for FM disc discriminators, filters that use surface waves, and filters that use surface waves. be.
従来は、圧電材料や電極材料を改良したり、電
極形状を工夫したり、不要振動吸収材を圧電基板
に付着させたりしていた。しかし、材料の開発に
は膨大な時間と費用がかかり、電極形状を変えた
り、不要振動吸収材料を用いても思つた程効果が
上がらず他の対策と併用せねばならなかつた。 Conventionally, piezoelectric materials and electrode materials have been improved, electrode shapes have been devised, and unnecessary vibration absorbing materials have been attached to piezoelectric substrates. However, developing the material took a huge amount of time and money, and even changing the shape of the electrode or using materials to absorb unnecessary vibrations did not have the desired effect, so other countermeasures had to be used in combination.
この発明の目的は、簡単にかつ効果的に不要振
動を抑圧することである。 An object of the present invention is to simply and effectively suppress unnecessary vibrations.
この発明の要旨は、圧電基板に電極を設けた圧
電振動素子と、圧電振動素子の外装材とを有する
圧電振動部品において、外装材の少なくとも一部
を圧電材料で形成し、圧電振動素子に生じたスプ
リアス機械振動がこの圧電材料で形成した外装材
部分に伝達されるようにしてこの外装材部分に電
気出力を生じさせ、圧電振動素子に生じたスプリ
アス電気信号成分に、前記外装材部分に生じた電
気出力を逆相で加えることにより、スプリアス電
気信号成分をキヤンセルしたことを特徴とする圧
電振動部品である。 The gist of the invention is to provide a piezoelectric vibrating component having a piezoelectric vibrating element in which electrodes are provided on a piezoelectric substrate and an exterior material for the piezoelectric vibrating element, in which at least a part of the exterior material is formed of a piezoelectric material, and The generated spurious mechanical vibrations are transmitted to the exterior material portion formed of the piezoelectric material to generate an electrical output in the exterior material portion, and the spurious electrical signal component generated in the piezoelectric vibrating element is combined with the spurious electrical signal component generated in the exterior material portion. This piezoelectric vibrating component is characterized in that spurious electrical signal components are canceled by applying electrical output in reverse phase.
以下にこの発明の実施例を図面を参照しながら
説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図は、この発明を矩形板の拡がり振動モー
ドに用いた二端子形共振子に適用した例を示す。
図において、１は、矩形状の圧電セラミツク基板
２と、その対向主平面上に設けられた全面電極
３，４とを有する圧電振動素子である。この圧電
振動素子１は、弾性端子板５，６とともにケース
７内に収容されている。８は封止用樹脂である。
そして、弾性端子板５に接触する電極膜９がケー
ス７の内表面に形成されているとともに、ケース
７の外表面に少なくとも一部がケース７をはさん
で電極膜９と対向する電極膜１０が形成されてい
る。電極膜９，１０間のケース７は圧電性材料を
含むか圧電性材料からなる。このような構成を有
すると、電極膜９，１０と、電極膜９，１０間の
圧電材料とで圧電振動素子１１が形成されること
になる。電極膜９と弾性端子板５とが電気的に導
通されており、電極膜１０と弾性端子板６とが電
気的に導通されている。弾性端子板５，６間に生
じる圧電振動素子１のスプリアス振動による発生
電荷と、圧電振動素子１のスプリアス振動がケー
ス７に伝えられて電極膜９，１０、したがつて弾
性端子板５５，６間に生じる発生電荷が第２図に
示すように逆位相になるよう分極軸その他の特性
が定められている。ケース７で用いる圧電材料
は、従来公知のもののなかから本発明の目的にか
なうものを用いればよい。 FIG. 1 shows an example in which the present invention is applied to a two-terminal resonator using a rectangular plate in a spreading vibration mode.
In the figure, reference numeral 1 denotes a piezoelectric vibrating element having a rectangular piezoelectric ceramic substrate 2 and full-surface electrodes 3 and 4 provided on its opposing principal planes. This piezoelectric vibrating element 1 is housed in a case 7 together with elastic terminal plates 5 and 6. 8 is a sealing resin.
An electrode film 9 that contacts the elastic terminal plate 5 is formed on the inner surface of the case 7, and an electrode film 10 that faces the electrode film 9 at least partially on the outer surface of the case 7 with the case 7 sandwiched therebetween. is formed. The case 7 between the electrode films 9 and 10 contains or is made of a piezoelectric material. With such a configuration, the piezoelectric vibrating element 11 is formed by the electrode films 9 and 10 and the piezoelectric material between the electrode films 9 and 10. The electrode film 9 and the elastic terminal plate 5 are electrically connected, and the electrode film 10 and the elastic terminal plate 6 are electrically connected. Charges generated due to spurious vibrations of the piezoelectric vibrating element 1 occurring between the elastic terminal plates 5 and 6 and spurious vibrations of the piezoelectric vibrating element 1 are transmitted to the case 7 and the electrode films 9 and 10, and therefore the elastic terminal plates 55 and 6. The polarization axes and other characteristics are determined so that the charges generated between them are in opposite phase as shown in FIG. As the piezoelectric material used in the case 7, any conventionally known piezoelectric material that meets the purpose of the present invention may be used.
このような構成からなる第１図のものでは、メ
インレスポンスについては、その振動のノード点
で弾性端子板５，６に接触していることになるか
ら、弾性端子板を介してケース７に形成された圧
電振動素子１１に機械的変位が伝達されない。逆
にスプリアスレスポンスについては、その振動の
ノード点で弾性端子板５，６に接触していないこ
とになるから、弾性端子板を介してケース７に形
成された圧電振動素子１１に機械的変位が伝達さ
れる。この機械的変位によつて電極膜９，１０に
電荷が発生し、この電荷は弾性端子板５，６に加
えられることになる。ここで、圧電振動素子１に
発生したスプリアスレスポンス自体による発生電
荷と、圧電振動素子１１に発生した電荷とが逆極
性で加えられるようになつているので、結果的
に、圧電振動素子１に発生したスプリアスレスポ
ンス出力が抑圧されることになる。 In the case shown in FIG. 1 having such a configuration, the main response comes into contact with the elastic terminal plates 5 and 6 at the vibration node points, so the main response is formed on the case 7 via the elastic terminal plates. No mechanical displacement is transmitted to the piezoelectric vibrating element 11. Conversely, regarding the spurious response, since the node points of the vibration are not in contact with the elastic terminal plates 5 and 6, mechanical displacement is caused to the piezoelectric vibrating element 11 formed in the case 7 via the elastic terminal plates. communicated. This mechanical displacement generates an electric charge in the electrode films 9 and 10, and this electric charge is applied to the elastic terminal plates 5 and 6. Here, since the charge generated by the spurious response itself generated in the piezoelectric vibrating element 1 and the charge generated in the piezoelectric vibrating element 11 are added with opposite polarity, as a result, the charge generated in the piezoelectric vibrating element 1 is The resulting spurious response output will be suppressed.
第３図は、この発明をエネルギーとじこめ形厚
み振動モードを用いた二端子形共振子に適用した
例を示す。 FIG. 3 shows an example in which the present invention is applied to a two-terminal resonator using an energy confinement type thickness vibration mode.
図において、２１は、矩形状の圧電セラミツク
基板２２と、その対向主平面上に設けられた部分
電極２３，２４と、部分電極２３，２４をそれぞ
れ外部引出リード２５，２６に導通させるための
引出電極２７，２８と、スプリアスレスポンス検
出用電極２９とを有する圧電振動素子である。一
方、３０は二分割形のケースで、部分電極２３，
２４とその近傍上方にスペースを設けるため凹部
３１，３２を有するとともに、部分電極２３，２
４とその近傍を除いた圧電振動素子２１表面部分
をはさみこんでなる。そして、スプリアスレスポ
ンス検出用電極２９に接触する電極膜３３がケー
ス３０内表面に形成されているとともに、ケース
３０の外表面に少なくとも一部がケース３０をは
さんで電極膜３３と対向する電極膜３４が形成さ
れている。電極膜３３，３４間の樹脂ケース３０
は圧電性材料を含むか圧電性材料からなる。この
ような構成を有すると、電極膜３３，３４と、電
極膜３３，３４間の圧電材料とで圧電振動子３５
が形成されることになる。電極膜３３と外部引出
リード２５とが電気的に導通されており、電極膜
３４と外部引出リード６とが電気的に導通されて
いる。外部引出リード２５，２６間に生じる圧電
振動素子２１のスプリアス振動による発生電荷
と、圧電振動素子２１のスプリアス振動がケース
３０に伝えられて電極膜３３，３４にしたがつて
外部引出リード２５，２６間に生じる発生電荷が
第２図に示すように逆位相になるよう分極軸その
他の特性が定められている。ケース３０で用いる
圧電材料は、従来公知のもののなかから本発明目
的にかなうものを用いればよい。 In the figure, reference numeral 21 denotes a rectangular piezoelectric ceramic substrate 22, partial electrodes 23 and 24 provided on the opposing main planes, and drawers for connecting the partial electrodes 23 and 24 to external lead leads 25 and 26, respectively. It is a piezoelectric vibrating element having electrodes 27 and 28 and a spurious response detection electrode 29. On the other hand, 30 is a two-part case, with partial electrodes 23,
24 and the recesses 31 and 32 to provide a space above the partial electrodes 23 and 24.
4 and the surface portion of the piezoelectric vibrating element 21 excluding the vicinity thereof are sandwiched. An electrode film 33 that contacts the spurious response detection electrode 29 is formed on the inner surface of the case 30, and at least a portion of the electrode film 33 faces the electrode film 33 on the outer surface of the case 30 with the case 30 sandwiched therebetween. 34 is formed. Resin case 30 between electrode films 33 and 34
contains or consists of a piezoelectric material. With such a configuration, the piezoelectric vibrator 35 is formed by the electrode films 33 and 34 and the piezoelectric material between the electrode films 33 and 34.
will be formed. The electrode film 33 and the external lead lead 25 are electrically connected to each other, and the electrode film 34 and the external lead lead 6 are electrically connected to each other. Charges generated due to spurious vibrations of the piezoelectric vibrating element 21 occurring between the external lead leads 25 and 26 and spurious vibrations of the piezoelectric vibrating element 21 are transmitted to the case 30 and are transmitted to the electrode films 33 and 34, thereby causing the external lead leads 25 and 26 The polarization axes and other characteristics are determined so that the charges generated between them are in opposite phase as shown in FIG. As the piezoelectric material used in the case 30, any conventionally known piezoelectric material that meets the purpose of the present invention may be used.
このような構台からなる第３，４図のもので
は、メインレスポンスはケース３０には伝わらな
いため、ケース３０に形成された圧電振動素子３
５に機械的変位が伝達されない。逆に、スプリア
スレスポンスについては圧電振動素子３５に機械
的変位が伝達される。この機械的変位によつて電
極膜３３，３４に電荷が発生し、この電荷は外部
リード端子２５，２６に加えられることになる。
ここで、圧電振動素子２１に発生したスプリアス
レスポンス自体による発生電荷と、圧電振動素子
３５に発生した電荷とが逆極性で加えられるよう
になつているので、結果的に、圧電振動素子２１
に発生したスプリアスレスポンス出力が抑圧され
ることになる。 In the case shown in FIGS. 3 and 4, which consists of such a gantry, the main response is not transmitted to the case 30, so the piezoelectric vibrating element 3 formed in the case 30
No mechanical displacement is transmitted to 5. Conversely, for spurious responses, mechanical displacement is transmitted to the piezoelectric vibrating element 35. This mechanical displacement generates charges in the electrode films 33 and 34, and this charge is applied to the external lead terminals 25 and 26.
Here, since the charge generated by the spurious response itself generated in the piezoelectric vibrating element 21 and the charge generated in the piezoelectric vibrating element 35 are applied with opposite polarity, as a result, the piezoelectric vibrating element 21
This will suppress the spurious response output that occurs.
上述各例において、ケースの外表面に設けた電
極膜はケース内に存在していてもよいし、ケース
の外表面に設けた電極上を絶縁材でコーテイング
してもよい。 In each of the above examples, the electrode film provided on the outer surface of the case may be present within the case, or the electrode provided on the outer surface of the case may be coated with an insulating material.
なお、上述の実施例は、圧電振動子の代表的な
例について本発明を適用したものであり、表面波
デバイスなどにも本発明は適用できる。 Note that the above-described embodiments apply the present invention to typical examples of piezoelectric vibrators, and the present invention can also be applied to surface wave devices and the like.
そして外装ケースは上述例のようなあらかじめ
モールド成形されたもののみならず、デイツプ塗
装法、粉体塗装法などを用いて形成した外装構造
のものもとり得る。 The exterior case is not limited to one pre-molded as in the above example, but may also have an exterior structure formed using a dip coating method, a powder coating method, or the like.
さらに、外装材として半導体圧電材料を用いる
と外部材に電極を設けなくてもすむ。 Furthermore, if a semiconductor piezoelectric material is used as the exterior material, it is not necessary to provide an electrode on the exterior material.
以上の実施例からあきらかなように、この発明
によると、外装ケースに圧電性をもたせ、不要振
動による機械的変位でケースの圧電性部分に電気
出力を生じさせ、圧電振動素子自体に生じた不要
振動の電気出力に逆位相で重畳させて打消すこと
によりスプリアスレスポンスを抑圧する構成をと
るから、従来技術に比較して簡単かつ効果的に不
要振動がないもしくは抑圧された圧電振動部品を
提供できる。 As is clear from the above embodiments, according to the present invention, the exterior case is made piezoelectric, and electrical output is generated in the piezoelectric part of the case by mechanical displacement caused by unnecessary vibration, and unnecessary vibrations generated in the piezoelectric vibrating element itself are generated. Since the configuration suppresses spurious responses by superimposing and canceling the electrical output of vibration in the opposite phase, it is possible to provide piezoelectric vibrating components that are free or suppressed of unnecessary vibrations more easily and effectively than conventional technologies. .
第１図は本発明の第１の実施例の断面図、第２
図は同じく説明図、第３図は本発明の第２の実施
例の断面図、第４図は同じく圧電振動素子部分を
示す正面図。
１，１１，２１，３５は圧電振動素子、２，２
２は圧電基板、３，４，２３，２４，２７，２
８，２９は電極、７，３０はケース、９，１０，
３３，３４は電極膜。
FIG. 1 is a sectional view of the first embodiment of the present invention;
3 is a sectional view of a second embodiment of the present invention, and FIG. 4 is a front view showing a piezoelectric vibrating element portion. 1, 11, 21, 35 are piezoelectric vibration elements, 2, 2
2 is a piezoelectric substrate, 3, 4, 23, 24, 27, 2
8, 29 are electrodes, 7, 30 are cases, 9, 10,
33 and 34 are electrode films.
Claims (1)
電振動素子の外装材とを有する圧電振動部品にお
いて、外装材の少なくとも一部を圧電材料で形成
し、圧電振動素子に生じたスプリアス機械振動が
この圧電材料で形成した外装材部分に伝達される
ようにしてこの外装材部分に電気出力を生じさ
せ、圧電振動素子に生じたスプリアス電気信号成
分に、前記外装材部分に生じた電気出力を逆相で
加えることにより、スプリアス電気信号成分をキ
ヤンセルしたことを特徴とする圧電振動部品。1. In a piezoelectric vibrating component having a piezoelectric vibrating element in which electrodes are provided on a piezoelectric substrate and an exterior material for the piezoelectric vibrating element, at least a part of the exterior material is formed of a piezoelectric material, and spurious mechanical vibrations generated in the piezoelectric vibrating element are suppressed. Electrical output is generated in this exterior material portion so as to be transmitted to the exterior material portion formed of this piezoelectric material, and the electrical output generated in the exterior material portion is reversed to the spurious electric signal component generated in the piezoelectric vibrating element. A piezoelectric vibrating component characterized by canceling spurious electrical signal components by adding them in phase.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19963283A JPS6090418A (en) | 1983-10-24 | 1983-10-24 | Piezoelectric oscillation parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19963283A JPS6090418A (en) | 1983-10-24 | 1983-10-24 | Piezoelectric oscillation parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6090418A JPS6090418A (en) | 1985-05-21 |
| JPH0241205B2 true JPH0241205B2 (en) | 1990-09-17 |
Family
ID=16411075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19963283A Granted JPS6090418A (en) | 1983-10-24 | 1983-10-24 | Piezoelectric oscillation parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6090418A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0785530B2 (en) * | 1989-05-17 | 1995-09-13 | 松下電器産業株式会社 | ▲ Ro ▼ wave instrument |
-
1983
- 1983-10-24 JP JP19963283A patent/JPS6090418A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6090418A (en) | 1985-05-21 |
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